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    • 7. 发明申请
    • ABSOLUTE DISTANCE LASER INTERFEROMETER
    • 绝对距离激光干扰仪
    • US20150019160A1
    • 2015-01-15
    • US14284756
    • 2014-05-22
    • attocube Systems AG
    • Klaus ThurnerKhaled KarraiPierre-Francois Braun
    • G01B9/02G01B11/00
    • G01B9/02G01B9/02002G01B9/02003G01B9/02004G01B9/02007G01B11/00G01B2290/25
    • A device for absolute distance measurement includes a first tunable light source for emitting a first wavelength light of a first tunable frequency modulated by a first modulating frequency and a second light source for emitting a second wavelength light of a second frequency modulated by a second modulating frequency. An optical coupler couples the first wavelength light and the second wavelength light into an interferometer cavity. An interferometer detector provides an interference measurement signal based on a detected interference pattern. A demodulator unit generates a first demodulation signal based on the interference measurement signal by demodulation with the first modulating frequency and a second demodulation signal based on the interference measurement signal by demodulation with the second modulating frequency. A computation unit computes an absolute distance by evaluating the first demodulation signal acquired during a sweep of the first tunable frequency and the second demodulation signal.
    • 用于绝对距离测量的装置包括用于发射由第一调制频率调制的第一可调谐频率的第一波长光和第二光源的第一可调谐光源,用于发射由第二调制频率调制的第二频率的第二波长光 。 光耦合器将第一波长光和第二波长光耦合到干涉仪腔中。 干涉仪检测器基于检测到的干涉图案提供干扰测量信号。 解调器单元通过利用第一调制频率的解调产生基于干扰测量信号的第一解调信号,并且以第二调制频率通过解调产生基于干扰测量信号的第二解调信号。 计算单元通过评估在第一可调谐频率和第二解调信号的扫描期间获取的第一解调信号来计算绝对距离。
    • 8. 发明授权
    • Cavity opto-mechanical sensor array
    • 腔体光电传感器阵列
    • US08848197B2
    • 2014-09-30
    • US13945075
    • 2013-07-18
    • Marcel W. PruessnerTodd H. StievaterWilliam S. Rabinovich
    • Marcel W. PruessnerTodd H. StievaterWilliam S. Rabinovich
    • G01B9/02G01N21/17G01G3/16G01N29/036
    • G01N21/75G01B9/02004G01B9/02051G01B2290/25G01G3/165G01N21/17G01N29/036G01N2021/757G01N2291/0256
    • A mass sensor system including multiple Fabry-Perot microcavities connected in parallel by multiple waveguides. Each of the mass sensors includes a microbridge having a fundamental resonance frequency, and a movable reflective mirror etched into the microbridge; a fixed reflective mirror etched in a substrate, the fixed reflective mirror being fixed to the substrate in a region spaced apart from the movable reflective mirror; and an optical waveguide etched in the substrate that connects the movable mirror and the fixed mirror forming the Fabry-Perot microcavity interferometer. The system includes a tunable continuous-wave laser operative to optically interrogate the Fabry-Perot microcavity of each of the plurality of mass sensors, and a receiver operative to receive sensor signals from each of the plurality of mass sensors, the sensor signals comprising reflective signals and transmitted signals. A continuous-wave laser may generate optical forces that modify the motion, dynamics, or mechanical Q-factor of the microbridge.
    • 一种质量传感器系统,包括由多个波导并联连接的多个法布里 - 珀罗微腔。 每个质量传感器包括具有基本共振频率的微桥和蚀刻到微桥中的可移动反射镜; 在基板中蚀刻的固定反射镜,所述固定反射镜在与所述可移动反射镜间隔开的区域中固定到所述基板; 以及在连接可移动镜和形成法布里 - 珀罗微腔干涉仪的固定镜的基板中蚀刻的光波导。 该系统包括可调谐的连续波激光器,其可操作以光学询问多个质量传感器中的每一个的法布里 - 珀罗微腔,以及接收器,用于接收来自多个质量传感器中的每一个的传感器信号,传感器信号包括反射信号 并发送信号。 连续波激光器可以产生改变微桥的运动,动力学或机械Q因子的光学力。