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1. 发明授权

US09829307B2 Silicon based pressure and acceleration optical interferometric sensors with housing assembly 有权
公开(公告)号：US09829307B2
公开(公告)日：2017-11-28
申请号：US14664187
申请日：2015-03-20
申请人： Kulite Semiconductor Products, Inc.
发明人： Martin A. Sanzari
IPC分类号： G01B9/02 , G01L9/00 , G01P15/093
CPC分类号： G01B9/0207 , G01B2290/25 , G01L9/00 , G01L9/0044 , G01L9/0045 , G01L9/0047 , G01L9/0048 , G01L9/0079 , G01L19/04 , G01P15/093
摘要： A optical sensor assembly is disclosed that includes a sensor diaphragm configured to deflect responsive to an applied stimulus. The sensor assembly includes a first Extrinsic Fabry-Perot Interferometer (EFPI) having a first optical cavity in communication with at least a portion of the sensor diaphragm, the first EFPI is configured to interact with light to produce a combined measurement light signal and a first common-mode light signal, the measurement light signal corresponding to the applied stimulus. The sensor assembly also includes a second EFPI having a second optical cavity, the second EFPI is configured to interact with light to produce a second common mode light signal for error correction. The sensor assembly may further include a sensing optical fiber in communication with the first EFPI; a reference optical fiber in communication with the second EFPI; and a glass header configured to support the sensing optical fiber and the reference optical fiber.

2. 发明申请

US20160327414A1 SYSTEMS AND METHODS FOR OPTICAL MEASUREMENTS USING MULTIPLE BEAM INTERFEROMETRIC SENSORS 有权
标题翻译：用多光束干涉仪传感器进行光学测量的系统和方法
公开(公告)号：US20160327414A1
公开(公告)日：2016-11-10
申请号：US14705585
申请日：2015-05-06
申请人： KULITE SEMICONDUCTOR PRODUCTS, INC.
发明人： Martin A. Sanzari
IPC分类号： G01D5/353
CPC分类号： G01D5/35312 , G01D5/266 , G01L9/0079
摘要： The disclosed technology may include systems, methods, and apparatus for optical measurements. A method is provided that includes receiving, by first and second Extrinsic Fabry-Perot Interferometer (EFPI) sensors, respective portions of interrogation light. The first EFPI sensor is responsive to a measurement stimulus and both the first EFPI sensor and the second EFPI sensor are responsive to a common mode stimulus. The method includes detecting a measurement signal and a first common-mode signal responsive to receiving altered interrogation light from the first EFPI sensor, the measurement signal corresponding to the measurement stimulus. The method includes detecting a second common mode signal responsive to receiving altered light from the second EFPI sensor. The method includes producing a measurement output signal, the measurement output signal representing a difference between the second common mode signal and a combination of the measurement signal and the first common-mode signal, and outputting the measurement output signal.
摘要翻译：所公开的技术可以包括用于光学测量的系统，方法和装置。提供了一种方法，其包括通过第一和第二外部法布里 - 珀罗干涉仪（EFPI）传感器接收询问光的相应部分。第一个EFPI传感器响应测量激励，第一个EFPI传感器和第二个EFPI传感器都对共模激励作出响应。该方法包括：响应于接收来自第一EFPI传感器的改变的询问光，检测测量信号和第一共模信号，测量信号对应于测量激励。该方法包括响应于接收来自第二EFPI传感器的改变的光检测第二共模信号。所述方法包括产生测量输出信号，所述测量输出信号表示所述第二共模信号与所述测量信号与所述第一共模信号的组合之间的差，并输出所述测量输出信号。

3. 发明授权

US09945740B2 Two wavelength optical interferometric pressure switch and pressure transducers 有权
公开(公告)号：US09945740B2
公开(公告)日：2018-04-17
申请号：US15153803
申请日：2016-05-13
申请人： KULITE SEMICONDUCTOR PRODUCTS, INC.
发明人： Martin A. Sanzari
IPC分类号： G01L1/24 , G01D5/353
CPC分类号： G01L1/24 , G01D5/35312
摘要： Certain implementations of the disclosed technology may include Fabry-Perot Interferometer (FPI)-based sensors systems and methods for measuring a desired stimulus. In accordance with an example implementation of the disclosed technology, a method is provided for receiving, by a Fabry-Perot Interferometer (FPI) sensor, first interrogation light having a first wavelength and second interrogation light having a second wavelength. The FPI sensor is configured to alter the received first interrogation light and the second interrogation light responsive to a measurement stimulus. The method includes detecting, by a first optical detector, a measurement signal responsive to receiving the altered first interrogation light and the altered second interrogation light from the FPI sensor, the measurement signal corresponding to the measurement stimulus. The method includes producing a measurement output signal, the measurement output signal representing an intensity of the measurement signal. The method further includes outputting the measurement output signal.

4. 发明申请

US20160334275A1 TWO WAVELENGTH OPTICAL INTERFEROMETRIC PRESSURE SWITCH AND PRESSURE TRANSDUCERS 有权
标题翻译：两个波长光学干涉式压力开关和压力传感器
公开(公告)号：US20160334275A1
公开(公告)日：2016-11-17
申请号：US15153803
申请日：2016-05-13
申请人： KULITE SEMICONDUCTOR PRODUCTS, INC.
发明人： Martin A. Sanzari
IPC分类号： G01J3/26
CPC分类号： G01L1/24 , G01D5/35312
摘要： Certain implementations of the disclosed technology may include Fabry-Perot Interferometer (FPI)-based sensors systems and methods for measuring a desired stimulus. In accordance with an example implementation of the disclosed technology, a method is provided for receiving, by a Fabry-Perot Interferometer (FPI) sensor, first interrogation light having a first wavelength and second interrogation light having a second wavelength. The FPI sensor is configured to alter the received first interrogation light and the second interrogation light responsive to a measurement stimulus. The method includes detecting, by a first optical detector, a measurement signal responsive to receiving the altered first interrogation light and the altered second interrogation light from the FPI sensor, the measurement signal corresponding to the measurement stimulus. The method includes producing a measurement output signal, the measurement output signal representing an intensity of the measurement signal. The method further includes outputting the measurement output signal.
摘要翻译：所公开技术的某些实施方式可以包括基于法布里 - 珀罗干涉仪（FPI）的传感器系统和用于测量所需刺激的方法。根据所公开的技术的示例性实施例，提供了一种通过法布里 - 珀罗干涉仪（FPI）传感器接收具有第一波长的第一询问光和具有第二波长的第二询问光的方法。 FPI传感器被配置成响应于测量刺激改变接收到的第一询问光和第二询问光。该方法包括通过第一光学检测器检测响应于接收到来自FPI传感器的改变的第一询问光和改变的第二询问光的测量信号，该测量信号对应于测量激励。该方法包括产生测量输出信号，测量输出信号表示测量信号的强度。该方法还包括输出测量输出信号。

5. 发明申请

US20160202135A1 THERMALLY STABLE HIGH TEMPERATURE PRESSURE AND ACCELERATION OPTICAL INTERFEROMETRIC SENSORS 有权
标题翻译：热稳定的高温压力和加速光学干涉式传感器
公开(公告)号：US20160202135A1
公开(公告)日：2016-07-14
申请号：US14989901
申请日：2016-01-07
申请人： Kulite Semiconductor Products, Inc.
发明人： Martin A. Sanzari
IPC分类号： G01L7/08
CPC分类号： G01L19/04 , G01L9/0079 , G01P15/093
摘要： Certain example implementations of the disclosed technology include an optical-interferometer sensor assembly for measuring pressure or acceleration. The sensor assembly includes a diaphragm configured to deflect responsive to an applied stimulus, a diaphragm support structure in communication with the diaphragm, a sensing optical interferometer having a first optical cavity in communication with at least a portion of the diaphragm and the diaphragm support structure, and a reference optical interferometer having a second optical cavity in communication with the diaphragm support structure. The sensor assembly can include a sensing optical fiber in communication with the sensing optical interferometer and a reference optical fiber in communication with the reference optical interferometer. The sensor assembly can include a housing in communication with the diaphragm and the diaphragm support structure, and configured to reduce a thermal expansion mismatch in the sensor assembly.
摘要翻译：所公开技术的某些示例性实现包括用于测量压力或加速度的光学干涉仪传感器组件。所述传感器组件包括被配置为响应于所施加的刺激而偏转的光阑，与所述光阑连通的光阑支撑结构;感测光学干涉仪，具有与所述光阑和所述光阑支撑结构的至少一部分连通的第一光学腔，以及具有与隔膜支撑结构连通的第二光学腔的参考光学干涉仪。传感器组件可以包括与感测光学干涉仪通信的感测光纤和与参考光学干涉仪通信的参考光纤。传感器组件可以包括与隔膜和隔膜支撑结构连通并且构造成减小传感器组件中的热膨胀失配的壳体。

6. 发明授权

US09952067B2 Systems and methods for optical measurements using multiple beam interferometric sensors 有权
公开(公告)号：US09952067B2
公开(公告)日：2018-04-24
申请号：US14705585
申请日：2015-05-06
申请人： KULITE SEMICONDUCTOR PRODUCTS, INC.
发明人： Martin A. Sanzari
IPC分类号： G01D5/353 , G01D5/26 , G01L9/00
CPC分类号： G01D5/35312 , G01D5/266 , G01L9/0079
摘要： The disclosed technology may include systems, methods, and apparatus for optical measurements. A method is provided that includes receiving, by first and second Extrinsic Fabry-Perot Interferometer (EFPI) sensors, respective portions of interrogation light. The first EFPI sensor is responsive to a measurement stimulus and both the first EFPI sensor and the second EFPI sensor are responsive to a common mode stimulus. The method includes detecting a measurement signal and a first common-mode signal responsive to receiving altered interrogation light from the first EFPI sensor, the measurement signal corresponding to the measurement stimulus. The method includes detecting a second common mode signal responsive to receiving altered light from the second EFPI sensor. The method includes producing a measurement output signal, the measurement output signal representing a difference between the second common mode signal and a combination of the measurement signal and the first common-mode signal, and outputting the measurement output signal.

7. 发明授权

US09810594B2 Thermally stable high temperature pressure and acceleration optical interferometric sensors 有权
公开(公告)号：US09810594B2
公开(公告)日：2017-11-07
申请号：US14989901
申请日：2016-01-07
申请人： Kulite Semiconductor Products, Inc.
发明人： Martin A. Sanzari
IPC分类号： G01B9/02 , G01L9/00 , G01L19/04 , G01P15/093
CPC分类号： G01L19/04 , G01L9/0079 , G01P15/093
摘要： Certain example implementations of the disclosed technology include an optical-interferometer sensor assembly for measuring pressure or acceleration. The sensor assembly includes a diaphragm configured to deflect responsive to an applied stimulus, a diaphragm support structure in communication with the diaphragm, a sensing optical interferometer having a first optical cavity in communication with at least a portion of the diaphragm and the diaphragm support structure, and a reference optical interferometer having a second optical cavity in communication with the diaphragm support structure. The sensor assembly can include a sensing optical fiber in communication with the sensing optical interferometer and a reference optical fiber in communication with the reference optical interferometer. The sensor assembly can include a housing in communication with the diaphragm and the diaphragm support structure, and configured to reduce a thermal expansion mismatch in the sensor assembly.

8. 发明申请

US20160273904A1 SILLICON BASED PRESSURE AND ACCELERATION OPTICAL INTERFEROMETRIC SENSORS WITH HOUSING ASSEMBLY 有权
标题翻译：基于SILICON的压力和加速光学干涉仪传感器与壳体组件
公开(公告)号：US20160273904A1
公开(公告)日：2016-09-22
申请号：US14664187
申请日：2015-03-20
申请人： Kulite Semiconductor Products, Inc.
发明人： Martin A. Sanzari
IPC分类号： G01B9/02
CPC分类号： G01B9/0207 , G01B2290/25 , G01L9/00 , G01L9/0044 , G01L9/0045 , G01L9/0047 , G01L9/0048 , G01L9/0079 , G01L19/04 , G01P15/093
摘要： A optical sensor assembly is disclosed that includes a sensor diaphragm configured to deflect responsive to an applied stimulus. The sensor assembly includes a first Extrinsic Fabry-Perot Interferometer (EFPI) having a first optical cavity in communication with at least a portion of the sensor diaphragm, the first EFPI is configured to interact with light to produce a combined measurement light signal and a first common-mode light signal, the measurement light signal corresponding to the applied stimulus. The sensor assembly also includes a second EFPI having a second optical cavity, the second EFPI is configured to interact with light to produce a second common mode light signal for error correction. The sensor assembly may further include a sensing optical fiber in communication with the first EFPI; a reference optical fiber in communication with the second EFPI; and a glass header configured to support the sensing optical fiber and the reference optical fiber.
摘要翻译：公开了一种光学传感器组件，其包括被配置为响应于所施加的刺激而偏转的传感器隔膜。传感器组件包括具有与传感器膜片的至少一部分连通的第一光学腔的第一外部法布里 - 珀罗干涉仪（EFPI），第一EFPI被配置为与光相互作用以产生组合的测量光信号和第一共模光信号，测量光信号对应于施加的刺激。传感器组件还包括具有第二光腔的第二EFPI，第二EFPI被配置为与光相互作用以产生用于纠错的第二共模光信号。传感器组件还可以包括与第一EFPI通信的感测光纤; 与第二EFPI通信的参考光纤; 以及玻璃接头，其被配置为支撑感测光纤和参考光纤。

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