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81. 发明授权

US06461738B2 Polyimide-based insulating film composition, insulating film and insulating film-forming method 有权
标题翻译：聚酰亚胺基绝缘膜组合物，绝缘膜和绝缘膜形成方法
公开(公告)号：US06461738B2
公开(公告)日：2002-10-08
申请号：US09791179
申请日：2001-02-23
申请人： Seiji Ishikawa , Musubu Ichikawa
发明人： Seiji Ishikawa , Musubu Ichikawa
IPC分类号： B32B904
CPC分类号： C09D183/10 , C08G77/455 , C09D179/08 , Y10T428/31663 , Y10T428/31721
摘要： A polyimide-based insulating film composition comprising (a) 100 parts by weight of an organic solvent-soluble polyimidosiloxane obtained from a tetracarboxylic acid component and a diamine component comprising 45 to 90 mole percent of a diaminopolysiloxane represented by the following general formula (1): H2N—R1—[Si(R2)2—O—]n1—Si(R2)2—R1—NH2 (1) 0.5 to 40 mole percent of a polar group-containing aromatic diamine and 0 to 50 mole percent of an aromatic diamine with plural benzene rings, (b) 2 to 40 parts by weight of a polyvalent isocyanate and (c) an organic solvent. The composition has satisfactory storage stability and printing properties, while its cured films exhibit solvent resistance, with both heat resistance and flex resistance.
摘要翻译： 1.一种聚酰亚胺系绝缘膜组合物，其含有（a）100重量份由四羧酸成分得到的有机溶剂可溶性聚酰亚胺硅烷和由以下通式（1）表示的45〜90摩尔％的二氨基聚硅氧烷的二胺成分，：含有极性基团的芳族二胺为0.5〜40摩尔％，多个苯环为0〜50摩尔％的芳香族二胺，（b）2〜40重量份多价异氰酸酯和（c）有机溶剂。该组合物具有令人满意的储存稳定性和印刷性能，而其固化膜具有耐溶剂性，具有耐热性和耐挠曲性。

82. 发明授权

US06339653B1 Inspection data analyzing system 失效
标题翻译：检验数据分析系统
公开(公告)号：US06339653B1
公开(公告)日：2002-01-15
申请号：US09523380
申请日：2000-03-10
申请人： Seiji Ishikawa , Masao Sakata , Jun Nakazato , Sadao Shimoyashiro , Hiroto Nagatomo , Yuzo Taniguchi , Osamu Satou , Tsutomu Okabe , Yuzaburo Sakamoto , Kimio Muramatsu , Kazuhiko Matsuoka , Taizo Hashimoto , Yuichi Ohyama , Yutaka Ebara , Isao Miyazaki , Shuichi Hanashima
发明人： Seiji Ishikawa , Masao Sakata , Jun Nakazato , Sadao Shimoyashiro , Hiroto Nagatomo , Yuzo Taniguchi , Osamu Satou , Tsutomu Okabe , Yuzaburo Sakamoto , Kimio Muramatsu , Kazuhiko Matsuoka , Taizo Hashimoto , Yuichi Ohyama , Yutaka Ebara , Isao Miyazaki , Shuichi Hanashima
IPC分类号： G06K900
CPC分类号： G01N21/88 , G01N21/956 , H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.
摘要翻译：本发明分别提供用于探测器和自动粒子检测机的数据分析台。并且，在数据分析站中，以产品为基础描述芯片的配置的坐标与描述缺陷的位置的坐标相同。此外，该站提供确定每个缺陷属于哪个芯片的功能。这些数据分析站通过通信线连接。本发明能够基于芯片分析数据，从而能够掌握每个芯片上的缺陷引起的芯片与芯片的产品特性之间的关系。

83. 发明授权

US6117510A Adhesive-applied tape 失效
标题翻译：粘合剂胶带
公开(公告)号：US6117510A
公开(公告)日：2000-09-12
申请号：US901659
申请日：1997-07-28
申请人： Seiji Ishikawa , Hiroshi Yasuno
发明人： Seiji Ishikawa , Hiroshi Yasuno
IPC分类号： C09J7/02
CPC分类号： C09J7/0242 , C09J7/0282 , C09J2463/00 , C09J2477/006 , C09J2483/00 , Y10T428/1471 , Y10T428/1476 , Y10T428/2852 , Y10T428/287 , Y10T428/2896
摘要： An adhesive-applied tape prepared by coating a support film with a solution obtained by dissolving in an organic solvent a mixture of an epoxy resin and an amorphous polyimidosiloxane produced from an aromatic tetracarboxylic dianhydride or its derivative and a diamine comprising an aromatic diamine which comprises an aromatic diamine having a functional group which can react with an epoxy group and a diaminopolysiloxane, and then drying it at a temperature at which the epoxy resin is not cured to provide a tack-free adhesive layer with no surface tackiness. The tape is both flexible and heat resistant, and does not require high-temperature, high-pressure contact bonding conditions upon contact bonding.
摘要翻译：通过将由芳族四羧酸二酐或其衍生物制备的环氧树脂和无定形聚酰亚胺硅氧烷的混合物溶解在有机溶剂中而获得的溶液涂布支撑膜而制备的粘合剂涂敷带，所述芳族四羧酸二酐或其衍生物和包含芳族二胺的二胺包含具有可与环氧基反应的官能团的芳族二胺和二氨基聚硅氧烷，然后在环氧树脂未固化的温度下干燥以提供无表面粘性的无粘性粘合剂层。胶带既柔软又耐热，并且在接触粘合时不需要高温，高压接触粘合条件。

84. 发明授权

US5657232A Onboard positioning system 失效
标题翻译：车载定位系统
公开(公告)号：US5657232A
公开(公告)日：1997-08-12
申请号：US465901
申请日：1995-06-06
申请人： Seiji Ishikawa , Yuichi Murakami , Tomio Yasuda , Toshimitsu Oka
发明人： Seiji Ishikawa , Yuichi Murakami , Tomio Yasuda , Toshimitsu Oka
IPC分类号： G01S5/14 , G01S11/10 , G01S19/20 , G06G7/78
CPC分类号： G01S11/10 , G01S19/47 , G01S19/52
摘要： A relative speed of a vehicle with respect to a satellite is detected from a deviation of a tuning frequency caused by the Doppler effect, and a vehicle speed is determined from the relative speed. A piezoelectric oscillation gyro detects an angular speed of rotation of the vehicle, which is integrated to determine an azimuth. A travel is detected in terms of the vehicle speed and the azimuth, and the detected travel and information from available GPS satellites are substituted into a navigation equation to solve it for a solution. Alternatively, altitude information detected by an altitude sensor and the angular speed of rotation of the vehicle as detected by the piezoelectric oscillation gyro may be is inputted. The angular speed of rotation is integrated to determine the azimuth. Information from two GPS satellites and information representing azimuth .phi. and altitude .DELTA.z are substituted into the navigation equation to solve it for a solution. Kalman filter is employed. Even when available GPS satellites is two or one, the determination of the position of the vehicle is enabled. The need for a vehicle speed sensor is eliminated, and the accuracy of positioning is enhanced.
摘要翻译：根据由多普勒效应引起的调谐频率的偏差来检测车辆相对于卫星的相对速度，并且根据相对速度确定车速。压电振荡陀螺仪检测车辆的角速度，其被积分以确定方位角。根据车速和方位角检测行驶，将检测到的行驶和来自可用GPS卫星的信息代入导航方程式，以求解其解。或者，可以输入由高精度传感器检测的高度信息和由压电振荡陀螺仪检测到的车辆的旋转角速度。旋转的角速度被积分以确定方位角。来自两个GPS卫星的信息和代表方位角度和高度DELTA z的信息被代入导航方程式以求解它。卡尔曼滤波器被采用。即使可用的GPS卫星是两个或一个，确定车辆的位置是有效的。消除了对车速传感器的需要，并提高了定位精度。

85. 发明授权

US5653624A Polishing apparatus with swinging structures 失效
标题翻译：具有摆动结构的抛光装置
公开(公告)号：US5653624A
公开(公告)日：1997-08-05
申请号：US527422
申请日：1995-09-13
申请人： Seiji Ishikawa , Norio Kimura , Katsuyuki Aoki
发明人： Seiji Ishikawa , Norio Kimura , Katsuyuki Aoki
IPC分类号： B24B37/10 , B24B5/00 , B24B29/00
CPC分类号： B24B37/105
摘要： A compact polishing apparatus requires less operating space than a conventional polishing apparatus generally used for polishing semiconductor wafers. The present apparatus has a swing shaft to provide a swing motion to a pressing device including a top ring member. There are three ranges of swing motion, i.e. a polishing range which is a small motion range used for polishing a wafer within the confined area of a turntable, a receiving range which is a medium motion range used for loading/unloading of a wafer in an area beyond the turntable, and a standby range which is a large motion range used for moving the top ring member to a standby or rinsing position in an area beyond the turntable. Because of the swing-based arrangement of the components in the present apparatus, isolation of critical components is easily achieved, thus resulting in low maintenance costs and long service life of the present apparatus. These advantages offer significant cost savings in the management of polishing operations.
摘要翻译：紧凑的抛光装置比通常用于抛光半导体晶片的常规抛光装置需要较少的操作空间。本装置具有摆动轴，以向包括顶环构件的按压装置提供摆动运动。有三个摆动运动范围，即抛光范围，该抛光范围是用于在转台的受限区域内抛光晶片的小运动范围，作为用于将晶片加载/卸载的介质运动范围的接收范围以及用于将顶环构件移动到转台之外的区域中的待机或冲洗位置的大的运动范围的待机范围。由于本装置中的部件的基于摆动的布置，容易实现关键部件的隔离，因此导致本装置的维护成本低和使用寿命长。这些优点为抛光操作的管理提供了显着的成本节约。

86. 发明授权

US5643056A Revolving drum polishing apparatus 失效
标题翻译：滚筒抛光装置
公开(公告)号：US5643056A
公开(公告)日：1997-07-01
申请号：US550117
申请日：1995-10-30
申请人： Masayoshi Hirose , Seiji Ishikawa , Norio Kimura , Yoshimi Sasaki , Kouki Yamada , Fujio Aoyama , Noburu Shimizu , Katsuya Okumura
发明人： Masayoshi Hirose , Seiji Ishikawa , Norio Kimura , Yoshimi Sasaki , Kouki Yamada , Fujio Aoyama , Noburu Shimizu , Katsuya Okumura
IPC分类号： B24B7/22 , B24B29/02 , B24B37/07 , B24B37/10 , H01L21/304 , B24B1/00
CPC分类号： B24B7/228 , B24B29/02 , B24B37/04
摘要： A drum-type polishing apparatus for producing a flat mirror polish on an object such as a semiconductor wafer, is capable of three degrees of freedom of movement of a drum member with respect to the wafer. The relative movements can be made, successively or simultaneously, at right angles to an axis of the drum, parallel to the surface of the wafer, as well as at any desired angular orientations. Combined with a follower device to provide automatic compensation for unevenness in pressing pressure applied to the wafer during polishing, the polishing apparatus offers outstanding uniformity in polishing quality and high productivity, even for large diameter wafers, with a comparatively modest investment in both facility space and equipment cost.
摘要翻译：用于在诸如半导体晶片的物体上制造平面镜抛光的滚筒式抛光装置能够使鼓构件相对于晶片具有三个自由度的移动。相对运动可以连续或同时地与滚筒的轴线成直角，平行于晶片的表面以及任何期望的角度取向。结合跟随装置，为抛光期间对晶片施加的压力压力的不均匀性提供自动补偿，抛光装置即使对于大直径晶片也具有优异的抛光质量均匀性和高生产率，在设备空间和设备成本

87. 发明授权

US5616063A Polishing apparatus 失效
标题翻译：抛光设备
公开(公告)号：US5616063A
公开(公告)日：1997-04-01
申请号：US309193
申请日：1994-09-20
申请人： Katsuya Okumura , Riichirou Aoki , Hiromi Yajima , Masako Kodera , Shirou Mishima , Atsushi Shigeta , Masayoshi Hirose , Norio Kimura , Seiji Ishikawa
发明人： Katsuya Okumura , Riichirou Aoki , Hiromi Yajima , Masako Kodera , Shirou Mishima , Atsushi Shigeta , Masayoshi Hirose , Norio Kimura , Seiji Ishikawa
IPC分类号： H01L21/302 , B08B1/04 , B24B27/00 , B24B37/04 , B24B37/34 , B24B51/00 , B24B55/12 , H01L21/00 , H01L21/677 , B24B49/00
CPC分类号： H01L21/67167 , B08B1/04 , B08B13/00 , B24B27/0023 , B24B37/04 , B24B37/345 , B24B51/00 , B24B55/12 , H01L21/67028 , H01L21/67046 , H01L21/67057 , H01L21/67161 , H01L21/67219 , H01L21/67745
摘要： A polishing apparatus is a cluster type of apparatus having a plurality of units which perform various operations. The polishing apparatus includes a universal transfer robot having at least one arm for transferring a workpiece, a plurality of units disposed around the universal transfer robot and including a loading unit for receiving the workpiece to be polished, at least one polishing unit for polishing the workpiece, at least one washing unit for washing the workpiece which has been polished and an unloading unit for receiving the cleaned workpiece. Discrete mechanisms respectively transfer a clean workpiece and a dirty workpiece amongst the units.
摘要翻译：抛光装置是具有执行各种操作的多个单元的集群类型的装置。抛光装置包括具有用于传送工件的至少一个臂的通用传送机器人，设置在通用传送机器人周围的多个单元，并且包括用于接收被抛光工件的装载单元，用于抛光工件的至少一个抛光单元至少一个用于清洗已经被抛光的工件的洗涤单元和用于接收清洁的工件的卸载单元。离散机构分别在单元之间传送清洁的工件和脏工件。

88. 发明授权

US5476414A Polishing apparatus 失效
标题翻译：抛光设备
公开(公告)号：US5476414A
公开(公告)日：1995-12-19
申请号：US124550
申请日：1993-09-22
申请人： Masayoshi Hirose , Manabu Tsujimura , Seiji Ishikawa , Norio Kimura , You Ishii
发明人： Masayoshi Hirose , Manabu Tsujimura , Seiji Ishikawa , Norio Kimura , You Ishii
IPC分类号： B24B37/10 , B24B37/30 , H01L21/304 , B24B7/22
CPC分类号： H01L21/02024 , B24B37/107 , B24B37/30
摘要： A workpiece such as a semiconductor wafer is supported on a top ring and polished by an abrasive cloth on a turntable while the top ring is being pressed against the turntable and the turntable and the top ring are being rotated. The top ring is coupled to a top ring drive shaft, coupled to a pressure cylinder for pressing the top ring, and to a motor for rotating the top ring. A spherical bearing is interposed between the top ring and the top ring drive shaft for allowing the top ring to align with the upper surface of the moving turntable. A torque transmitting mechanism is operatively coupled between the top ring and the top ring drive shaft for rotating the top ring in synchronization with the top ring drive shaft.
摘要翻译：诸如半导体晶片的工件被支撑在顶环上并且通过研磨布在转盘上抛光，同时顶环被压靠在转台上，并且转台和顶环正在旋转。顶环联接到顶环驱动轴，联接到用于按压顶环的压力缸，以及用于旋转顶环的电动机。在顶环和顶环驱动轴之间插入有球面轴承，用于允许顶环与活动转台的上表面对准。扭矩传递机构可操作地联接在顶环和顶环驱动轴之间，用于与顶环驱动轴同步地旋转顶环。

89. 发明授权

US5351169A Lighting device 失效
标题翻译：照明设备
公开(公告)号：US5351169A
公开(公告)日：1994-09-27
申请号：US051618
申请日：1993-04-23
申请人： Seiji Ishikawa , Hajime Murakami
发明人： Seiji Ishikawa , Hajime Murakami
IPC分类号： G02B21/06 , G02B21/08 , G02B21/12 , G02B21/36
CPC分类号： G02B21/084 , G02B21/082 , G02B21/125
摘要： A lighting device capable of lighting a surface of an observed section of a specimen sample so as to permit an object of observation of the surface to be satisfied even when the surface has relatively fine unevenness. Any one of light field illumination mainly using vertically projected light, dark field illumination mainly using laterally projected light and a combination thereof is selectively carried out with respect to the surface of the specimen sample as desired, to thereby selectively provide a lighted two-dimensional image of the surface and its lighted three-dimensional image as desired.
摘要翻译：即使表面具有相对较细的凹凸，也能够照射被检体的观察部的表面，使得能够使表面的观察对象得到满足的照明装置。主要使用垂直投影光，主要使用横向投影光的暗场照明及其组合的任何一个相对于样品的表面根据需要选择性地进行，从而选择性地提供点亮的二维图像的表面及其点亮的三维图像。

90. 发明授权

US4589593A Device for controlling temperature of switch knob 失效
标题翻译：用于控制开关旋钮温度的装置
公开(公告)号：US4589593A
公开(公告)日：1986-05-20
申请号：US735064
申请日：1985-05-17
申请人： Seiji Ishikawa , Masanori Hirose
发明人： Seiji Ishikawa , Masanori Hirose
IPC分类号： B60R16/02 , G05B11/00 , H01H9/18 , H01H13/02 , H01H37/08 , G05D23/00
CPC分类号： H01H37/08 , B60R16/02 , H01H9/18 , Y10S116/17
摘要： Comparison is made between an output from a temperature detecting element for detecting temperature of a control knob of a switch for controlling temperature, with a reference signal generated in association with a preset temperature of the control knob, and at least means for cooling or/and heating the control knob is driven on the basis of result of the comparison, whereby the control knob is held at preset temperature, so that the temperature of the control knob can be held at the preset temperature by a relatively simple control device.
摘要翻译：比较用于检测用于控制温度的开关的控制旋钮的温度的温度检测元件的输出与与控制旋钮的预设温度相关联地产生的参考信号，以及至少用于冷却或/和基于比较结果驱动控制旋钮的加热，由此控制旋钮保持在预设温度，使得控制旋钮的温度可以通过相对简单的控制装置保持在预设温度。

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