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    • 81. 发明申请
    • MAGNETIC MEMORY AND METHOD OF FABRICATING THE SAME
    • 磁记忆及其制造方法
    • US20130249028A1
    • 2013-09-26
    • US13623306
    • 2012-09-20
    • Chikayoshi KAMATAMinoru AmanoTadaomi DaibouJunichi Ito
    • Chikayoshi KAMATAMinoru AmanoTadaomi DaibouJunichi Ito
    • H01L43/12H01L27/22
    • H01L43/10H01F10/1933H01F10/30H01F10/3286H01F41/302H01L27/228H01L43/08H01L43/12
    • A method of fabricating a magnetic memory according to an embodiment includes: forming a separation layer on a first substrate; sequentially forming a first ferromagnetic layer, a first nonmagnetic layer, and a second ferromagnetic layer on the separation layer, at least one of the first and the second ferromagnetic layers having a single crystal structure; forming a first conductive bonding layer on the second ferromagnetic layer; forming a second conductive bonding layer on a second substrate, on which a transistor and a wiring are formed, the second conductive bonding layer electrically connecting to the transistor; arranging the first and second substrate so that the first conductive bonding layer and the second conductive bonding layer are opposed to each other, and bonding the first and the second conductive bonding layers to each other; and separating the first substrate from the first ferromagnetic layer by using the separation layer.
    • 根据实施例的制造磁存储器的方法包括:在第一基板上形成分离层; 在分离层上顺序地形成第一铁磁层,第一非磁性层和第二铁磁层,第一和第二铁磁层中的至少一个具有单晶结构; 在所述第二铁磁层上形成第一导电接合层; 在其上形成有晶体管和布线的第二基板上形成第二导电接合层,所述第二导电接合层电连接到所述晶体管; 布置第一和第二基板,使得第一导电接合层和第二导电接合层彼此相对,并且将第一和第二导电接合层彼此接合; 以及通过使用所述分离层将所述第一基板与所述第一铁磁层分离。
    • 87. 发明授权
    • Tunnel magnetoresistance effect device, and a portable personal device
    • 隧道磁阻效应器,以及便携式个人设备
    • US07692902B2
    • 2010-04-06
    • US12031472
    • 2008-02-14
    • Minoru AmanoYoshiaki Saito
    • Minoru AmanoYoshiaki Saito
    • G11B5/39G11B5/33
    • H01L43/08B82Y10/00B82Y25/00G01R33/093G01R33/098G11B5/3906G11B5/3909G11C11/15H01F10/3254H01F10/3268H01F10/3272H01L27/228
    • A TMR device comprising an antiferromagnetic layer made of an antiferromagnetic material containing Mn, a magnetization fixed layer made of a ferromagnetic material, a tunnel barrier layer made of a dielectric material, and a magnetization free layer made of a ferromagnetic material. An insulator material layer is inserted in the magnetization fixed layer at a distance from the antiferromagnetic material layer and the tunnel barrier layer. One material can be expressed by NX, where X is a first element selected from the group consisting of oxygen, nitrogen and carbon; and N is a second element, provided that the bonding energy between the first and the second elements is higher than the bonding energy between manganese and the first element. A second material can be expressed by MX, where M is an element selected from the group consisting of titanium, tantalum, vanadium, aluminum, europium, and scandium; and X is an element selected from the group consisting of oxygen, nitrogen and carbon. The tunnel magnetoresistance effect device suppresses the diffusion of Mn from the Mn based alloy constituting the antiferromagnetic material layer even after heat treatment is performed.
    • 一种TMR装置,包括由含铁的反铁磁材料制成的反铁磁层,由铁磁材料制成的磁化固定层,由介电材料制成的隧道势垒层和由铁磁材料制成的无磁化层。 将绝缘体材料层插入到与反铁磁性材料层和隧道势垒层相隔一定距离的磁化固定层中。 一种材料可由NX表示,其中X是选自氧,氮和碳的第一元素; 并且N是第二元素,条件是第一和第二元素之间的结合能高于锰与第一元素之间的键合能。 第二种材料可以由MX表示,其中M是选自钛,钽,钒,铝,铕和钪的元素; X是选自氧,氮和碳的元素。 隧道磁阻效应器件即使在进行热处理之后也能抑制构成反铁磁体层的Mn基合金的Mn扩散。