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    • 63. 发明授权
    • Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected
    • 半导体基板的制造方法以及检查被检查体的图案的缺陷的方法和装置
    • US06263099B1
    • 2001-07-17
    • US09107432
    • 1998-06-30
    • Shunji MaedaYasuhiko NakayamaMinoru YoshidaHitoshi KubotaKenji Oka
    • Shunji MaedaYasuhiko NakayamaMinoru YoshidaHitoshi KubotaKenji Oka
    • G06K900
    • G01N21/8806G01N21/9501G01N21/956G01N21/95607G01N2021/95615G01N2201/0618G01N2201/0634
    • A pattern detection method and apparatus thereof for inspecting with high resolution a micro fine defect of a pattern on an inspected object and a semiconductor substrate manufacturing method and system for manufacturing semiconductor substrates such as semiconductor wafers with a high yield. A micro fine pattern on the inspected object is inspected by irradiating an annular-looped illumination through an objective lens onto a wafer mounted on a stage, the wafer having micro fine patterns thereon. The illumination light may be circularly or elliptically polarized and controlled according to an image detected on the pupil of the objective lens and image signals are obtained by detecting a reflected light from the wafer. The image signals are compared with reference image signals and a part of the pattern showing inconsistency is detected as a defect so that simultaneously, a micro fine defect or defects on the micro fine pattern are detected with high resolution. Further, process conditions of a manufacturing line are controlled by analyzing a cause of defect and a factor of defect which occurs on the pattern.
    • 一种用于以高分辨率检查被检查物体上的图案的微细缺陷的图案检测方法及其装置以及以高产率制造半导体晶片等半导体基板的半导体基板的制造方法和系统。 通过将通过物镜的环形照明照射到安装在台架上的晶片上,检查被检查物体上的微细图案,晶片上具有微细精细图案。 照明光可以根据在物镜的光瞳上检测到的图像而被圆形或椭圆偏振并且被控制,并且通过检测来自晶片的反射光来获得图像信号。 将图像信号与参考图像信号进行比较,并且检测出显示不一致的图案的一部分作为缺陷,从而同时以高分辨率检测微细微图案或微细图案上的缺陷。 此外,通过分析缺陷的原因和在图案上发生的缺陷因素来控制生产线的工艺条件。
    • 64. 发明授权
    • Pupil detection device and pupil detection method
    • 瞳孔检测装置和瞳孔检测方法
    • US08983235B2
    • 2015-03-17
    • US13821382
    • 2011-09-22
    • Sotaro TsukizawaKenji Oka
    • Sotaro TsukizawaKenji Oka
    • G06K9/32G06K9/00
    • G06K9/00597G06K9/00604G06K9/00845
    • Disclosed is a pupil detection device capable improving the pupil detection accuracy even if a detection target image is a low-resolution image. In a pupil detection device (100), an eye area actual size calculation unit (102) acquires an actual scale value of an eye area, a pupil state prediction unit (103) calculates an actual scale prediction value of a pupil diameter, a necessary resolution estimation unit (105) calculates a target value of resolution on the basis of the calculated actual scale prediction value, an eye area image normalization unit (107) calculates a scale-up/scale-down factor on the basis of the calculated target value of resolution and the actual scale value of the eye area, and normalizes the image of the eye area on the basis of the calculated scale-up/scale-down factor, and a pupil detection unit (108) detects a pupil image from the normalized eye area image.
    • 公开了即使检测目标图像是低分辨率图像也能够提高瞳孔检测精度的瞳孔检测装置。 在瞳孔检测装置(100)中,眼部实际尺寸计算部(102)获取眼睛区域的实际比例值,瞳孔状态预测部(103)计算瞳孔直径的实际尺度预测值,必要 分辨率估计单元(105)根据计算出的实际比例预测值计算分辨率的目标值,眼睛区域图像归一化单元(107)基于计算出的目标值计算放大/缩小比例因子 的分辨率和眼睛区域的实际比例值,并且基于计算出的放大/缩小因子来对眼睛区域的图像进行归一化,并且瞳孔检测单元(108)从归一化后的瞳孔图像检测瞳孔图像 眼睛区域图像。
    • 65. 发明授权
    • Associating biometric information with passwords
    • 将生物特征信息与密码相关联
    • US08539248B2
    • 2013-09-17
    • US10956874
    • 2004-10-02
    • Mikio HagiwaraKishiko ItohKenji OkaAkira HinoMasaki Obinata
    • Mikio HagiwaraKishiko ItohKenji OkaAkira HinoMasaki Obinata
    • G06F21/00
    • G06F21/32
    • Associating biometric information with passwords is disclosed. If biometric information received from a user matches stored biometric information, stored passwords associated therewith are retrieved. If these stored passwords are identical to access-enabling passwords, then the user is permitted to gain access associated with the access-enabling passwords. If the biometric information matches the stored biometric information but the stored passwords do not match the access-enabling passwords or are not present, then the user is requested to manually enter passwords, which are stored. If these stored passwords are identical to the access-enabling passwords, the user is permitted to gain access. However, if the biometric information does not match the stored biometric information, or if the biometric information has not been received from the user or is not present, then the user is requested to manually enter passwords. If these passwords match the access-enabling passwords, then the user is permitted to gain access.
    • 公开了将生物特征信息与密码相关联。 如果从用户接收的生物特征信息与存储的生物特征信息相匹配,则检索与其相关联的存储的密码。 如果这些存储的密码与访问启用密码相同,则允许用户获得与访问启用密码相关联的访问。 如果生物特征信息与存储的生物特征信息匹配,但存储的密码与访问启用密码不匹配或不存在,则请求用户手动输入存储的密码。 如果这些存储的密码与访问启用密码相同,则允许用户访问。 然而,如果生物特征信息与存储的生物特征信息不匹配,或者如果没有从用户接收到生物特征信息或不存在生物特征信息,则请求用户手动输入密码。 如果这些密码与访问启用密码相匹配,则允许用户访问。
    • 67. 发明授权
    • Bias adjustment of radio frequency unit in radar apparatus
    • 雷达设备射频单元的偏置调整
    • US07821447B2
    • 2010-10-26
    • US12232067
    • 2008-09-10
    • Kenji OkaHiroshi ItoJun Ito
    • Kenji OkaHiroshi ItoJun Ito
    • G01S13/00
    • G01S7/4004G01S7/032
    • Disclosed is a method of bias adjustment for a millimeter wave radar apparatus that can efficiently and highly accurately adjust the bias of an MMIC used in a radio frequency circuit in the millimeter wave radar apparatus. The method comprises: providing a DA converter in a bias circuit in the millimeter wave radar apparatus comprising an antenna, a radio frequency unit, and a processing unit for performing transmission and reception processing of the radio frequency unit; connecting a signal generator in place of the antenna; and connecting a test processing unit and a control apparatus to the radio frequency unit, wherein the control apparatus applies an initial bias value in the form of a digital value to the MMIC, calculates the target value for the digital bias value based on the result of the measurement of the received signal, and takes the target value as the digital bias value for the production processing unit when the radio frequency characteristic of the received signal obtained by applying the target value to the MMIC lies within specified limits.
    • 公开了一种毫米波雷达装置的偏置调整方法,其能够高效且高精度地调整毫米波雷达装置中用于射频电路的MMIC的偏置。 该方法包括:在毫米波雷达装置的偏置电路中设置DA转换器,该雷达装置包括天线,射频单元和用于执行射频单元的发送和接收处理的处理单元; 连接信号发生器代替天线; 以及将测试处理单元和控制装置连接到所述射频单元,其中,所述控制装置将数字值形式的初始偏置值应用于所述MMIC,基于所述MMIC的结果来计算所述数字偏置值的目标值 当通过将目标值应用于MMIC而获得的接收信号的射频特性位于规定的限度内时,接收信号的测量,并将目标值作为生产处理单元的数字偏置值。