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51. 发明授权

US07323684B2 Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope 有权
标题翻译：扫描探针显微镜和样本观察方法以及使用所述扫描探针显微镜的半导体器件制造方法
公开(公告)号：US07323684B2
公开(公告)日：2008-01-29
申请号：US11439618
申请日：2006-05-23
申请人： Masahiro Watanabe , Toshihiko Nakata
发明人： Masahiro Watanabe , Toshihiko Nakata
IPC分类号： G01N13/16 , G01B5/28
CPC分类号： G01Q10/06 , G01Q10/02 , G01Q20/02 , G01Q60/32 , Y10S977/852
摘要： In order to provide a scanning probe microscope capable of measuring with high throughput distribution information relating to local characteristics of a sample concurrently with accurate three-dimensional shape information of the sample without damaging the sample, the speed of approach to each measurement location is increased by controlling the approach of the sample and probe by the provision of a high-sensitivity proximity sensor of the optical type. Also, additional information relating to the distribution of material quality on the sample can be obtained without lowering the scanning speed by: applying a voltage to the probe, or measuring the response on vibrating the probe, or detecting the local optical intensity of the sample surface concurrently with obtaining sample height data and concurrently with the contact period with the sample, whilst ensuring that the probe is not dragged over the sample, by bringing the probe into contact with the sample intermittently.
摘要翻译：为了提供一种扫描探针显微镜，能够与样品的局部特性相关的高通量分布信息同时测量而不损害样品的准确的三维形状信息，因此，每个测量位置的接近速度通过通过提供光学类型的高灵敏度接近传感器来控制样品和探针的接近。此外，通过以下方式可以获得关于样品的材料质量分布的附加信息，而不降低扫描速度：向探针施加电压，或测量振动探针时的响应，或检测样品表面的局部光强度同时获得样品高度数据，同时与样品的接触期，同时确保探针未被拖动到样品上，通过使探针间断地与样品接触。

52. 发明申请

US20070266780A1 Scanning Probe Microscope 失效
标题翻译：扫描探头显微镜
公开(公告)号：US20070266780A1
公开(公告)日：2007-11-22
申请号：US11737779
申请日：2007-04-20
申请人： SHUICHI BABA , Masahiro Watanabe , Toshihiko Nakata , Toru Kurenuma , Hiroshi Kuroda , Takafumi Morimoto , Yukio Kembo , Manabu Edamura
发明人： SHUICHI BABA , Masahiro Watanabe , Toshihiko Nakata , Toru Kurenuma , Hiroshi Kuroda , Takafumi Morimoto , Yukio Kembo , Manabu Edamura
IPC分类号： G01N13/10
CPC分类号： G01Q60/28 , G01Q10/06 , G01Q30/04
摘要： With a scanning probe microscope, if a plurality of sample properties are measured using a scanning scheme of allowing a probe to approach and withdraw from a sample, the sample properties need to be accurately and reliably detected in the minimum required measurement time. Further, the acting force between the probe and the sample varies depending on the type of the probe and the wear condition of a probe tip. Thus, disadvantageously, property values acquired using different probes cannot be compared with one another unless the artifactual effect of the measuring probes are eliminated. In accordance with the present invention, with a scanning probe microscope, the probe is brought into intermittent contact with the sample, while driving means repeatedly allows the probe to approach and withdraw from the sample with a variable amplitude. The sample property is thus acquired at a high speed. Further, a calibration sample is used in a given environment (given temperature and humidity) to acquire a force curve for at least one point. Information obtained from the force curve is used to correct measurements to display the distribution of the sample property.
摘要翻译：使用扫描探针显微镜，如果使用允许探针进入和退出样本的扫描方案测量多个样品特性，则需要在最小所需测量时间内精确可靠地检测样品性质。此外，探针和样品之间的作用力根据探针的类型和探针尖端的磨损情况而变化。因此，不利的是，使用不同探针获得的特性值不能相互比较，除非消除了测量探针的人为影响。根据本发明，利用扫描探针显微镜，使探针与样品间歇接触，同时驱动装置反复允许探针以可变的幅度从样品接近和退出。因此，以高速度获取样品特性。此外，在给定的环境（给定的温度和湿度）中使用校准样品以获得至少一个点的力曲线。从力曲线获得的信息用于校正测量值以显示样品属性的分布。

53. 发明授权

US07217573B1 Method of inspecting a DNA chip 有权
标题翻译：检查DNA芯片的方法
公开(公告)号：US07217573B1
公开(公告)日：2007-05-15
申请号：US09678652
申请日：2000-10-04
申请人： Yoshitada Oshida , Toshihiko Nakata , Tomoaki Sakata , Kenji Yasuda , Satoshi Takahashi
发明人： Yoshitada Oshida , Toshihiko Nakata , Tomoaki Sakata , Kenji Yasuda , Satoshi Takahashi
IPC分类号： G01N33/00 , G01N33/53 , C12Q1/68 , C12M3/00 , C07H21/04 , H01J3/14
CPC分类号： G01N21/6428 , G01N21/6452 , G01N21/6456 , Y10S436/80 , Y10T436/143333
摘要： A method of inspecting a DNA chip and an apparatus therefor that allow a picture to be reconstructed in the following steps: A plurality of irradiation spots are formed on a DNA probe array mounted on a stage. Then, the stage is displaced in X, Y directions so as to execute a scanning, thereby irradiating substantially all the entire surface of the DNA probe array. Next, a plurality of emitted fluorescent lights, which are generated from the plurality of irradiation spot portions on the DNA probe array, are converged and are then detected simultaneously by multi detectors. Finally, a data processing apparatus processes the detected signals, thereby reconstructing the picture.
摘要翻译：一种用于检查DNA芯片的方法及其装置，其允许以下列步骤重建图像：在安装在平台上的DNA探针阵列上形成多个照射点。然后，在X，Y方向上移位台，以进行扫描，从而基本上照射DNA探针阵列的整个表面。接下来，从DNA探针阵列上的多个照射点部分产生的多个发射荧光灯被会聚，然后由多个检测器同时检测。最后，数据处理装置处理检测到的信号，从而重建图像。

54. 发明申请

US20070041410A1 Apparatus for fabricating a display device 审中-公开
标题翻译：用于制造显示装置的装置
公开(公告)号：US20070041410A1
公开(公告)日：2007-02-22
申请号：US11588387
申请日：2006-10-27
申请人： Mikio Hongo , Sachio Uto , Mineo Nomoto , Toshihiko Nakata , Mutsuko Hatano , Shinya Yamaguchi , Makoto Ohkura
发明人： Mikio Hongo , Sachio Uto , Mineo Nomoto , Toshihiko Nakata , Mutsuko Hatano , Shinya Yamaguchi , Makoto Ohkura
IPC分类号： H01S3/10 , G02B27/10
CPC分类号： H01L21/02683 , H01L21/0268 , H01L21/02691 , H01L21/2026 , H01L21/268 , H01L27/1285 , H01L29/04 , H01L29/66757
摘要： Apparatus for fabricating a display device includes a stage capable of mounting an insulating substrate of the display device and moving the insulating substrate, linear scales which detect a position or moving distance of the substrate, a laser oscillator which generates continuous-waves laser light, a modulator which turns ON/OFF the continuous-wave laser light, a beam forming optic which shapes the continuous-wave laser light passing through the modulator into a linear or rectangular form, an objective lens which projects the at least one of the laser light on the insulating substrate so as to irradiate the insulating substrate with the laser light. The controller counts signals generated by the linear scales for every movement of the stage for a given distance, causes the modulator to turn the generated continuous-wave laser light in an ON state at time when a position of the insulating substrate on which the laser light irradiation is to be started reaches an area on which the laser light is projected, and causes the modulator to turn the generated continuous-wave laser light in an OFF state at another time.
摘要翻译：用于制造显示装置的装置包括能够安装显示装置的绝缘基板并移动绝缘基板的台，检测基板的位置或移动距离的线性标尺，产生连续波激光的激光振荡器，将连续波激光切换为ON / OFF的调制器，将通过调制器的连续波激光成形为直线或矩形的光束形成光学器件，将至少一个激光投射到的物镜绝缘基板，以激光照射绝缘基板。控制器对于给定距离的级的每次移动来对由线性标尺产生的信号进行计数，使得调制器将产生的连续波激光在其上的激光的绝缘基板的位置处于接通状态照射开始到达投射激光的区域，并且使得调制器在另一时间将所产生的连续波激光转为OFF状态。

55. 发明申请

US20060215171A1 Method and apparatus for measuring displacement of a sample 有权
公开(公告)号：US20060215171A1
公开(公告)日：2006-09-28
申请号：US11188732
申请日：2005-07-26
申请人： Toshihiko Nakata , Masahiro Watanabe , Shuichi Baba , Yasuhiro Yoshitake , Mineo Nomoto
发明人： Toshihiko Nakata , Masahiro Watanabe , Shuichi Baba , Yasuhiro Yoshitake , Mineo Nomoto
IPC分类号： G01B9/02
CPC分类号： G01B9/02057 , G01B9/02003 , G01B9/02081 , G01B2290/30 , G01B2290/70 , G03F7/70775
摘要： In a displacement measurement apparatus using light interference, a probe light path is spatially separated from a reference light path. Therefore, when a temperature or refractive index distribution by a fluctuation of air or the like, or a mechanical vibration is generated, an optical path difference fluctuates between both of the optical paths, and a measurement error is generated. In the solution, an optical axis of probe light is brought close to that of reference light by a distance which is not influenced by any disturbance, a sample is irradiated with the probe light, a reference surface is irradiated with the reference light, reflected light beams are allowed to interfere with each other, and a displacement of the sample is obtained from the resultant interference light to thereby prevent the measurement error from being generated by the fluctuation of the optical path difference.

56. 发明授权

US06943876B2 Method and apparatus for detecting pattern defects 失效
标题翻译：检测图案缺陷的方法和装置
公开(公告)号：US06943876B2
公开(公告)日：2005-09-13
申请号：US10223423
申请日：2002-08-20
申请人： Minoru Yoshida , Sachio Uto , Shunji Maeda , Toshihiko Nakata
发明人： Minoru Yoshida , Sachio Uto , Shunji Maeda , Toshihiko Nakata
IPC分类号： G01B11/30 , G01N21/956 , H01L21/66 , G02N21/88
CPC分类号： G01N21/95684
摘要： A method and apparatus for detecting pattern defects which includes annularly scanning of a laser beam emitted from a laser light source on a pupil of an objective lens, illuminating the scanned laser beam, through the objective lens, onto a sample on which there is formed a pattern coated with an optically transparent thin film, acquiring an optical image of the illuminated sample, and processing the acquired image to find defects in the pattern. The annular scan diameter of the laser beam is determined based on the thickness of the optically transparent thin film.
摘要翻译：一种用于检测图案缺陷的方法和装置，其包括从物镜的瞳孔上的激光光源发射的激光束的环状扫描，将扫描的激光束通过物镜照射到其上形成有涂覆有光学透明薄膜的图案，获取照射样品的光学图像，以及处理所获取的图像以发现图案中的缺陷。基于光学透明薄膜的厚度确定激光束的环形扫描直径。

57. 发明授权

US06825437B2 Apparatus enabling particle detection utilizing wide view lens 失效
标题翻译：利用广视镜进行粒子检测的装置
公开(公告)号：US06825437B2
公开(公告)日：2004-11-30
申请号：US10231267
申请日：2002-08-30
申请人： Hiroyuki Nakano , Takeshi Arai , Toshihiko Nakata
发明人： Hiroyuki Nakano , Takeshi Arai , Toshihiko Nakata
IPC分类号： B23K1000
CPC分类号： G01N21/51 , G01N21/94 , H01J2237/0225
摘要： When determining the presence of foreign particles in a processing chamber by radiating a laser beam inside a processing chamber and detecting scattered light from foreign particles within the processing chamber, the detection of scattered light is performed using a detecting lens having a wide field angle and deep focal depth. Accordingly, the detection of foreign particles floating in the processing chamber can be performed across a wide range, and with uniform sensitivity, with a detecting optical system having a simple constitution.
摘要翻译：当通过在处理室内辐射激光束并且检测处理室内的异物的散射光来确定处理室中外来颗粒的存在时，使用具有宽场角和深度的检测透镜来执行散射光的检测焦点深度因此，利用具有简单结构的检测光学系统，可以在宽范围内以及具有均匀灵敏度的方式对漂浮在处理室中的异物进行检测。

58. 发明授权

US06765201B2 Ultraviolet laser-generating device and defect inspection apparatus and method therefor 有权
标题翻译：紫外线激光发生装置及缺陷检查装置及其方法
公开(公告)号：US06765201B2
公开(公告)日：2004-07-20
申请号：US09764457
申请日：2001-01-19
申请人： Sachio Uto , Minoru Yoshida , Toshihiko Nakata , Shunji Maeda
发明人： Sachio Uto , Minoru Yoshida , Toshihiko Nakata , Shunji Maeda
IPC分类号： G21K700
CPC分类号： G01N21/956 , G01N21/33 , G02F2001/3505 , G02F2001/3542 , H01S3/0092
摘要： An ultraviolet laser-generating device, for use in a defect inspection apparatus and a method thereof, etc., comprising: a laser ray source for irradiating and emitting a basic wave of laser ray therefrom; a wavelength converter device for receiving the basic wave of laser ray emitted from the laser ray source and for converting it into an ultraviolet laser ray composed of a multiplied high harmonic light of the basic wave of laser ray; and a container having an inlet window, upon which the basic wave of laser ray emitted from the laser ray source is incident upon, and an outlet window for emitting the ultraviolet laser ray composed of the multiplied high harmonic light of the basic wave of laser ray, and installing the wavelength converter device therein, wherein the container is hermetically sealed and is filled up with an inert gas, such as nitrogen or argon gas, therein.
摘要翻译：一种用于缺陷检查装置及其方法的紫外线激光发生装置，包括：用于从其照射和发射激光光线的基本波的激光束源; 波长转换器装置，用于接收从激光射线源发射的激光的基波，并将其转换为由激光的基波的相乘的高次谐波构成的紫外激光; 以及具有入射窗的容器，从激光射线源发射的激光的基波入射到该入口窗口，以及用于发射由激光的基波的倍增的高次谐波构成的紫外线激光的出射窗并且在其中安装波长转换器装置，其中容器被气密密封，并在其中填充有惰性气体，例如氮气或氩气。

59. 发明授权

US5062715A Method and apparatus for detecting photoacoustic signal and method for detecting internal defect of semiconductor device 失效
标题翻译：用于检测光声信号的方法和装置以及用于检测半导体器件的内部缺陷的方法
公开(公告)号：US5062715A
公开(公告)日：1991-11-05
申请号：US479712
申请日：1990-02-14
申请人： Toshihiko Nakata , Yukio Kembo
发明人： Toshihiko Nakata , Yukio Kembo
IPC分类号： G01N29/00 , G01N29/04 , G01N29/24 , G02B21/00
CPC分类号： G02B21/0072 , G01N29/2418 , G01N2291/0423 , G01N2291/2697
摘要： A photoacoustic signal detecting method and apparatus for intensity-modulating light having a wavelength penetrating a sample such as a semiconductor device at a desired frequency, the light being emitted from a first light source, focusing the intensity-modulated light on the sample as a light spot, by changing the position of the sample and the optical constant of the means for focusing, scanning the light spot inside the sample in a depth direction thereof to detect the photoacoustic effect generated in the sample, and extracting information relative to the surface and inside of the sample and defect information therein. The photoacoustic effect is detected using an interferometer. Light incident on the sample surface for a second light source in order to obtain interference light and the interference light reflected from the sample surface are adjusted in response to a signal indicative of the depth of the light spot to detect optimum interference light. Light reflected from the sample surface when light emitted from a third light source is incident on the surface is detected through the focusing optical system to generate the signal indicative of the depth of the light spot.
摘要翻译：一种光声信号检测方法和装置，用于强度调制具有以期望频率穿透诸如半导体器件的样品的波长的光，所述光从第一光源发射，将强度调制光聚焦在样品上作为光通过改变样品的位置和聚焦装置的光学常数，扫描样品内的光斑在其深度方向上，以检测样品中产生的光声效应，并提取相对于表面和内部的信息的样品和缺陷信息。使用干涉仪检测光声效应。为了获得干涉光和从样品表面反射的干涉光，入射到用于第二光源的样品表面上的光被响应于指示光斑的深度的信号来调节以检测最佳干涉光。通过聚焦光学系统检测从第三光源发射的光入射在表面上的从样品表面反射的光，以产生指示光斑深度的信号。

60. 发明授权

US5046847A Method for detecting foreign matter and device for realizing same 失效
标题翻译：异物检测方法及其实现方法
公开(公告)号：US5046847A
公开(公告)日：1991-09-10
申请号：US262573
申请日：1988-10-25
申请人： Toshihiko Nakata , Nobuyuki Akiyama , Yoshihiko Yamuchi , Mitsuyoshi Koizumi , Yoshimasa Oshima
发明人： Toshihiko Nakata , Nobuyuki Akiyama , Yoshihiko Yamuchi , Mitsuyoshi Koizumi , Yoshimasa Oshima
IPC分类号： G01N21/21 , G01N21/94 , G03F9/00
CPC分类号： G03F9/70 , G01N21/94 , G01N21/95623 , G01N2021/473 , G01N21/21
摘要： A method and apparatus for detecting foreign matter on a sample by illuminating a stripe-shaped region with linearly polarized light. Some of the light reflected by the sample is intercepted by a light intercepting stage, and the rest of the light reflected by the sample, which passes through the light intercepting stage is directed to a detecting optical system, to be detected by a photo-detector. The sample is illuminated obliquely at a predetermined angle with respect to a group of straight lines constituting a primary pattern on the sample. The angle is selected so that the diffraction light reflected by the group of straight lines does not enter the detecting optical system. A polarizing spatial filter using a liquid crystal element may be disposed in a predetermined restricted region in a spacial frequency region, or Fourier transformation plane, within the detecting optical system. The light scattered by the sample may further be separated in the detecting optical system into partial beams having different wave orientation characteristics, which characteristics are detected by a number of one-dimensional solid state imaging elements. The signals are processed by a driver, adder, and quantizer in synchronism with the one-dimensional solid state imaging elements.
摘要翻译：一种通过用线性偏振光照射条形区域来检测样品上的异物的方法和装置。由样品反射的一些光被遮光阶段遮挡，并且通过遮光台的由样品反射的其余光指向检测光学系统，由光检测器检测。样品相对于构成样品上的主要图案的一组直线以预定角度倾斜照射。选择该角度使得由直线组反射的衍射光不进入检测光学系统。使用液晶元件的偏振空间滤光片可以设置在检测光学系统内的空间频率区域或傅立叶变换平面的预定限制区域中。由样本散射的光可以在检测光学系统中进一步分离成具有不同波取向特性的部分光束，该特征由多个一维固态成像元件检测。信号由驱动器，加法器和量化器与一维固态成像元件同步处理。

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