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    • 1. 发明申请
    • Apparatus for fabricating a display device
    • 用于制造显示装置的装置
    • US20070041410A1
    • 2007-02-22
    • US11588387
    • 2006-10-27
    • Mikio HongoSachio UtoMineo NomotoToshihiko NakataMutsuko HatanoShinya YamaguchiMakoto Ohkura
    • Mikio HongoSachio UtoMineo NomotoToshihiko NakataMutsuko HatanoShinya YamaguchiMakoto Ohkura
    • H01S3/10G02B27/10
    • H01L21/02683H01L21/0268H01L21/02691H01L21/2026H01L21/268H01L27/1285H01L29/04H01L29/66757
    • Apparatus for fabricating a display device includes a stage capable of mounting an insulating substrate of the display device and moving the insulating substrate, linear scales which detect a position or moving distance of the substrate, a laser oscillator which generates continuous-waves laser light, a modulator which turns ON/OFF the continuous-wave laser light, a beam forming optic which shapes the continuous-wave laser light passing through the modulator into a linear or rectangular form, an objective lens which projects the at least one of the laser light on the insulating substrate so as to irradiate the insulating substrate with the laser light. The controller counts signals generated by the linear scales for every movement of the stage for a given distance, causes the modulator to turn the generated continuous-wave laser light in an ON state at time when a position of the insulating substrate on which the laser light irradiation is to be started reaches an area on which the laser light is projected, and causes the modulator to turn the generated continuous-wave laser light in an OFF state at another time.
    • 用于制造显示装置的装置包括能够安装显示装置的绝缘基板并移动绝缘基板的台,检测基板的位置或移动距离的线性标尺,产生连续波激光的激光振荡器, 将连续波激光切换为ON / OFF的调制器,将通过调制器的连续波激光成形为直线或矩形的光束形成光学器件,将至少一个激光投射到的物镜 绝缘基板,以激光照射绝缘基板。 控制器对于给定距离的级的每次移动来对由线性标尺产生的信号进行计数,使得调制器将产生的连续波激光在其上的激光的绝缘基板的位置处于接通状态 照射开始到达投射激光的区域,并且使得调制器在另一时间将所产生的连续波激光转为OFF状态。