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    • 7. 发明授权
    • Interferometric distance measurement device using a scanning plate and transparent carrier substrate containing a reflector element
    • 使用扫描板的干涉测距装置和含有反射器元件的透明载体基板
    • US08797546B2
    • 2014-08-05
    • US13423481
    • 2012-03-19
    • Walter HuberRalph Joerger
    • Walter HuberRalph Joerger
    • G01B11/02
    • G01B11/14G01B9/02061G01B9/02081G01B11/026G01B2290/30G01B2290/45G01B2290/70
    • An interferometric distance measurement device that includes a light source that emits a beam of light and a scanning unit. The scanning unit includes a scanning plate having a splitter that splits the beam of light into a measurement beam and a reference beam, wherein the reference beam is propagated solely within the scanning plate before reaching interferential superposition with the measurement beam at a unification site. A reflector is provided, wherein the reflector is embodied such that the measurement beam striking the reflector undergoes retroreflection in a direction regardless of any possible relative tilting of the scanning unit and of the reflector downstream of the unification site. A detector arrangement is provided in which a distance signal relating to a distance between the scanning plate and the reflector is detectable from interference between the measurement beam and the reference beam.
    • 一种干涉距离测量装置,包括发射光束的光源和扫描单元。 扫描单元包括具有分束器的扫描板,该分离器将光束分成测量光束和参考光束,其中参考光束在与测量光束在统一位置达到相互叠加之前仅在扫描板内传播。 提供反射器,其中反射器被实施为使得撞击反射器的测量光束在一个方向上经历逆向反射,而不管扫描单元和反射器在统一部位下游的任何可能的相对倾斜。 提供了一种检测器装置,其中可以从测量光束和参考光束之间的干涉检测与扫描板和反射器之间的距离相关的距离信号。
    • 8. 发明申请
    • OPTICAL TOMOGRAPH AND OPTICAL TOMOGRAPHIC METHOD
    • 光学图像和光学方法
    • US20140204389A1
    • 2014-07-24
    • US14083636
    • 2013-11-19
    • HITACHI MEDIA ELECTRONICS CO., LTD.
    • Masaki MUKOHKentaro OSAWATatsuro IDE
    • G01B9/02
    • G01B9/02091A61B3/102G01B9/02007G01B9/02081G01B2290/70
    • A luminous flux including laser light of different wavelengths outgoing from a light source unit is split into two luminous fluxes, the first luminous flux is focused on a sample with an objective lens, and the second luminous flux functions as reference light without radiating it onto the sample. Signal light reflected from the sample and the reference light are multiplexed by a polarized beam splitter and are made to interfere on four photodetectors out of phase in a photodetection unit. A signal processing unit acquires the optical axis distribution of an object of examination in the sample by operating using the outputs of the plural photodetectors for input every wavelength, acquiring a detection signal and calculating the ratio of detection signals of different wavelengths every position in the sample.
    • 将包含从光源单元出射的不同波长的激光的光通量分成两个光束,第一光束聚焦在具有物镜的样品上,第二光束用作参考光,而不将其照射到 样品。 从采样和参考光反射的信号光被偏振光束分离器多路复用,并使其在光检测单元中相互干涉四个光电探测器。 信号处理单元通过使用多个光电检测器的输出进行各波长的输入来获取样本中的检查对象的光轴分布,获取检测信号并计算样本中每个位置的不同波长的检测信号的比率 。
    • 9. 发明授权
    • Method and device for measuring motion error of linear stage
    • 用于测量线性阶段运动误差的方法和装置
    • US08687200B2
    • 2014-04-01
    • US13479933
    • 2012-05-24
    • Sun-Kyu LeeChaBum LeeGyu Ha Kim
    • Sun-Kyu LeeChaBum LeeGyu Ha Kim
    • G01B9/02G01N21/86G01V8/00G01D5/36
    • G01B9/02081G01B9/02027G01B2290/30G01B2290/45G01B2290/70
    • Measurement of motion errors of a linear stage is performed to enable accurate measurement of motion errors in linear directions and a rotational direction in the linear stage using a diffraction grating. A first beam splitter splits a laser beam emitted from a light emitting unit. A first measurement unit measures a unidirectional linear motion error of the linear stage using one laser beam component split by the first beam splitter and a second measurement unit measures an angular motion error and another unidirectional linear motion of the linear stage error using a diffracted beam component obtained by diffracting another laser beam component split by the first beam splitter through the diffraction grating. A third measurement unit circularly polarizes the beam component diffracted through the diffraction grating to measure a third unidirectional linear motion error of the linear stage.
    • 执行线性级的运动误差的测量以使得能够使用衍射光栅精确地测量线性方向上的运动误差和线性级中的旋转方向。 第一分束器分离从发光单元发射的激光束。 第一测量单元使用由第一分束器分裂的一个激光束分量来测量线性平台的单向线性运动误差,第二测量单元使用衍射光束分量来测量角运动误差和线性级误差的另一单向线性运动 通过衍射由第一分束器分裂的另一激光束分量衍射光栅获得。 第三测量单元使通过衍射光栅衍射的束分量圆偏振,以测量线性级的第三单向线性运动误差。