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    • 56. 发明申请
    • Surface improvement method in fabricating high temperature superconductor devices
    • 制造高温超导体器件的表面改性方法
    • US20060172892A1
    • 2006-08-03
    • US10541296
    • 2003-07-24
    • Zhenghe HanSansheng WangKai WuMenglin Liu
    • Zhenghe HanSansheng WangKai WuMenglin Liu
    • H01L39/24
    • H01L39/2461H01L39/2464
    • A method of surface modification in fabricating High Temperature Superconducting devices, characterized in that bombarding the preformed material surface with a particle beam having energy, to improve the smoothness of the material surface and change the microstructure or internal defects of the processed material, wherein the energy of the particle beam is in the range of 5 ev to 50000 ev, and the incidence angle is in the range of 5 degree to 85 degree. In some cases, in order to achieve the desired superconductivity, the bombarded sample is annealed, and the annealing temperature is in the range of 100° C. to 1500° C. The present invention can improve the surface smoothness of the processed material, reduce the surface defect, change the microstructure of the material, and thereby improve the superconductivity of the whole device. The bombarded material comprises a substrate, a transition layer, superconducting layer or any combination of them during the process of the fabrication of the superconducting devices.
    • 一种在制造高温超导装置中的表面改性的方法,其特征在于用具有能量的粒子束轰击预成型材料表面,以改善材料表面的平滑度并改变加工材料的微观结构或内部缺陷,其中能量 的粒子束在5ev〜50000ev的范围内,入射角在5度〜85度的范围内。 在某些情况下,为了达到所需的超导性,对被轰击的样品进行退火,退火温度在100℃至1500℃的范围内。本发明可以提高加工材料的表面平滑度,减少 表面缺陷,改变材料的微结构,从而提高整个器件的超导性。 在制造超导装置的过程中,被轰击的材料包括衬底,过渡层,超导层或它们的任何组合。