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1. 发明申请

US20060172892A1 Surface improvement method in fabricating high temperature superconductor devices 审中-公开
标题翻译：制造高温超导体器件的表面改性方法
公开(公告)号：US20060172892A1
公开(公告)日：2006-08-03
申请号：US10541296
申请日：2003-07-24
申请人： Zhenghe Han , Sansheng Wang , Kai Wu , Menglin Liu
发明人： Zhenghe Han , Sansheng Wang , Kai Wu , Menglin Liu
IPC分类号： H01L39/24
CPC分类号： H01L39/2461 , H01L39/2464
摘要： A method of surface modification in fabricating High Temperature Superconducting devices, characterized in that bombarding the preformed material surface with a particle beam having energy, to improve the smoothness of the material surface and change the microstructure or internal defects of the processed material, wherein the energy of the particle beam is in the range of 5 ev to 50000 ev, and the incidence angle is in the range of 5 degree to 85 degree. In some cases, in order to achieve the desired superconductivity, the bombarded sample is annealed, and the annealing temperature is in the range of 100° C. to 1500° C. The present invention can improve the surface smoothness of the processed material, reduce the surface defect, change the microstructure of the material, and thereby improve the superconductivity of the whole device. The bombarded material comprises a substrate, a transition layer, superconducting layer or any combination of them during the process of the fabrication of the superconducting devices.
摘要翻译：一种在制造高温超导装置中的表面改性的方法，其特征在于用具有能量的粒子束轰击预成型材料表面，以改善材料表面的平滑度并改变加工材料的微观结构或内部缺陷，其中能量的粒子束在5ev〜50000ev的范围内，入射角在5度〜85度的范围内。在某些情况下，为了达到所需的超导性，对被轰击的样品进行退火，退火温度在100℃至1500℃的范围内。本发明可以提高加工材料的表面平滑度，减少表面缺陷，改变材料的微结构，从而提高整个器件的超导性。在制造超导装置的过程中，被轰击的材料包括衬底，过渡层，超导层或它们的任何组合。

2. 发明授权

US09261294B2 Joint heating system of gas combined cycle and solar power and dispatching method thereof 有权
标题翻译：气体联合循环和太阳能联合供热系统及其调度方法
公开(公告)号：US09261294B2
公开(公告)日：2016-02-16
申请号：US13809889
申请日：2011-12-31
申请人： Hongyu Long , Kai Wu , Yulong Yang
发明人： Hongyu Long , Kai Wu , Yulong Yang
IPC分类号： F24H9/20 , F24H4/00 , F02C3/28 , F02C6/18 , H02J3/38 , F24D19/10 , F24D15/04
CPC分类号： F24H9/2007 , F02C3/28 , F02C6/18 , F24D15/04 , F24D19/1039 , F24D19/1048 , F24D2200/12 , F24H4/00 , F24H2240/00 , H02J3/381 , H02J3/383 , Y02B10/20 , Y02B10/70 , Y02B30/12 , Y02E10/563 , Y02E20/14
摘要： A joint heating system of gas combined cycle and solar power and a dispatching method thereof, the user adopts two ways of the hot water radiator and the heat pump to supply heat, wherein the hot water comes from the gas combined cycle units, the electric power comes from the combination of the gas combined cycle units and the solar power generation units, and after detecting the power supplying and power consumption of the user in a historical time period by the comprehensive dispatching and controlling device, a future time period is predicted, and then dispatching is processed on the basis.
摘要翻译：气体联合循环和太阳能发电联合加热系统及其调度方法，用户采用热水散热器和热泵两种方式供热，其中热水来自气体联合循环装置，电力来自气体联合循环单元和太阳能发电单元的组合，并且在通过综合调度和控制装置检测用户在历史时间段内的供电和功耗之后，预测将来的时间段，然后在此基础上进行调度处理。

3. 发明授权

US08669784B1 Programmable pulse generator using inverter chain 有权
标题翻译：可编程脉冲发生器采用逆变链
公开(公告)号：US08669784B1
公开(公告)日：2014-03-11
申请号：US13448176
申请日：2012-04-16
申请人： Kai Wu
发明人： Kai Wu
IPC分类号： H03K19/00 , H03K3/017
CPC分类号： H03K5/05
摘要： In one embodiment, a method includes generating a first signal based on a clock signal and generating a second signal based on a programmable delayed clock signal. The method then generates a reset signal based on the first signal and the second signal. The clock signal is delayed using an inverter chain to generate a delayed version of the clock signal. An output signal is generated based on the delayed version of the clock signal and the reset signal. When a pulse width of the output signal is greater than a data duration determined from the clock signal, the pulse width of the output signal is reset to the pulse width of the data duration.
摘要翻译：在一个实施例中，一种方法包括基于时钟信号产生第一信号并基于可编程延迟时钟信号产生第二信号。该方法然后基于第一信号和第二信号产生复位信号。使用反相器链延迟时钟信号以产生时钟信号的延迟版本。基于延迟版本的时钟信号和复位信号产生输出信号。当输出信号的脉冲宽度大于从时钟信号确定的数据持续时间时，输出信号的脉冲宽度被重置为数据持续时间的脉冲宽度。

4. 发明申请

US20120322683A1 ENZYMATIC SIGNAL GENERATION AND DETECTION OF BINDING COMPLEXES IN STATIONARY FLUIDIC CHIP 有权
标题翻译：固定信号生成和检测固定液流芯片中的结合复合物
公开(公告)号：US20120322683A1
公开(公告)日：2012-12-20
申请号：US13543488
申请日：2012-07-06
申请人： David J. Liu , Kai Wu , Xing Su
发明人： David J. Liu , Kai Wu , Xing Su
IPC分类号： G01N33/558 , G01N33/53 , C40B30/04 , G01N33/573 , G01N21/78 , G01N27/26 , G01N21/00 , G01N21/76 , C12Q1/70 , B82Y15/00
CPC分类号： G01N21/658 , B01L3/50273 , B01L3/502761 , B01L2300/0654 , B01L2400/043 , B01L2400/086 , B82Y15/00 , B82Y30/00 , G01N21/255 , G01N21/6428 , G01N21/645 , G01N21/76 , G01N33/54333 , G01N33/587
摘要： An embodiment of the invention relates to a device for detecting an analyte in a sample. The device comprises a fluidic network and an integrated circuitry component. The fluidic network comprises a sample zone, a cleaning zone and a detection zone. The fluidic network contains a magnetic particle and/or a signal particle. A sample containing an analyte is introduced, and the analyte interacts with the magnetic particle and/or the signal particle through affinity agents. A microcoil array or a mechanically movable permanent magnet is functionally coupled to the fluidic network, which are activatable to generate a magnetic field within a portion of the fluidic network, and move the magnetic particle from the sample zone to the detection zone. A detection element is present which detects optical or electrical signals from the signal particle, thus indicating the presence of the analyte.
摘要翻译：本发明的一个实施例涉及用于检测样品中的分析物的装置。该装置包括流体网络和集成电路部件。流体网络包括样品区，清洁区和检测区。流体网络包含磁性颗粒和/或信号颗粒。引入含有分析物的样品，并且分析物通过亲和试剂与磁性颗粒和/或信号颗粒相互作用。微线圈阵列或机械可移动永磁体在功能上耦合到流体网络，流体网络可激活以在流体网络的一部分内产生磁场，并将磁性颗粒从样品区域移动到检测区域。存在检测元件，其检测来自信号颗粒的光学或电信号，从而指示分析物的存在。

5. 发明申请

US20120231626A1 FORMATION OF LINER AND BARRIER FOR TUNGSTEN AS GATE ELECTRODE AND AS CONTACT PLUG TO REDUCE RESISTANCE AND ENHANCE DEVICE PERFORMANCE 有权
标题翻译：形成用于电极电极和接触电极的衬里和障板，以降低电阻和增强器件性能
公开(公告)号：US20120231626A1
公开(公告)日：2012-09-13
申请号：US13415727
申请日：2012-03-08
申请人： SANG-HYEOB LEE , Sang Ho Yu , Kai Wu
发明人： SANG-HYEOB LEE , Sang Ho Yu , Kai Wu
IPC分类号： H01L21/768 , H01L21/285
CPC分类号： C23C16/0272 , C23C16/34 , C23C16/45529 , C23C16/56 , H01L21/28556 , H01L21/76846 , H01L27/10891
摘要： The invention provides a method of forming a film stack on a substrate, comprising performing a silicon containing gas soak process to form a silicon containing layer over the substrate, reacting with the silicon containing layer to form a tungsten silicide layer on the substrate, depositing a tungsten nitride layer on the substrate, subjecting the substrate to a nitridation treatment using active nitrogen species from a remote plasma, and depositing a conductive bulk layer directly on the tungsten nitride layer.
摘要翻译：本发明提供了一种在衬底上形成膜堆叠的方法，包括进行含硅气体保温工艺以在衬底上形成含硅层，与含硅层反应以在衬底上形成硅化钨层，沉积氮化硅层，使用来自远程等离子体的活性氮物质进行氮化处理，并将导电体层直接沉积在氮化钨层上。

6. 发明授权

US08211799B2 Atomic layer deposition of tungsten materials 有权
标题翻译：原子层沉积钨材料
公开(公告)号：US08211799B2
公开(公告)日：2012-07-03
申请号：US13160378
申请日：2011-06-14
申请人： Amit Khandelwal , Madhu Moorthy , Avgerinos V. Gelatos , Kai Wu
发明人： Amit Khandelwal , Madhu Moorthy , Avgerinos V. Gelatos , Kai Wu
IPC分类号： H01L21/44
CPC分类号： C23C16/0281 , C23C16/08 , C23C16/14 , C23C16/45525 , H01L21/28556 , H01L21/28562 , H01L21/76843 , H01L21/76855 , H01L21/76856 , H01L21/7687 , H01L21/76876 , H01L21/76877 , H01L2221/1089
摘要： Embodiments of the invention provide a method for depositing tungsten-containing materials. In one embodiment, a method includes forming a tungsten nucleation layer over an underlayer disposed on the substrate while sequentially providing a tungsten precursor and a reducing gas into a process chamber during an atomic layer deposition (ALD) process and depositing a tungsten bulk layer over the tungsten nucleation layer, wherein the reducing gas contains hydrogen gas and a hydride compound (e.g., diborane) and has a hydrogen/hydride flow rate ratio of about 500:1 or greater. In some examples, the method includes flowing the hydrogen gas into the process chamber at a flow rate within a range from about 1 slm to about 20 slm and flowing a mixture of the hydride compound and a carrier gas into the process chamber at a flow rate within a range from about 50 sccm to about 500 sccm.
摘要翻译：本发明的实施方案提供了一种沉积含钨材料的方法。在一个实施例中，一种方法包括在设置在衬底上的底层上形成钨成核层，同时在原子层沉积（ALD）工艺期间依次提供钨前体和还原气体到处理室中，并在其上沉积钨体积层钨成核层，其中所述还原气体包含氢气和氢化物化合物（例如乙硼烷），并且具有约500:1或更高的氢/氢化物流速比。在一些实例中，该方法包括以约1slm至约20slm的流速将氢气流入处理室，并将氢化物化合物和载气的混合物以流速流动到处理室中在约50sccm至约500sccm的范围内。

7. 发明申请

US20120140239A1 METHOD FOR MONITORING THIN FILM DEPOSITION USING DYNAMIC INTERFEROMETER 审中-公开
标题翻译：使用动态干涉仪监测薄膜沉积的方法
公开(公告)号：US20120140239A1
公开(公告)日：2012-06-07
申请号：US13152979
申请日：2011-06-03
申请人： Cheng-Chung LEE , Kai Wu
发明人： Cheng-Chung LEE , Kai Wu
IPC分类号： G01B9/02
CPC分类号： G01B11/0675 , G01B9/02021 , G01B9/02065 , G01B9/02081 , G01B9/0209 , G01B2290/70 , G01N21/45
摘要： A method for real-time monitoring thin film deposition using a dynamic interferometer is revealed. An optical monitoring extracting the temporal phase change of the reflection coefficient of the deposition film stacks. The dynamic interferometer, which gets rid of the influence of vibration and air turbulence, was used in the method to directly detect fluctuating phase of a deposition film stack. Combing with the reflectance or transmittance measurements, the real-time reflection coefficient under normal incidence of monitoring light can be found as well as optical admittance for enhancing the error compensation of the thin film deposition.
摘要翻译：揭示了使用动态干涉仪实时监测薄膜沉积的方法。提取沉积膜堆叠的反射系数的时间相位变化的光学监测。用于直接检测沉积膜叠层波动相位的方法中，摆脱了振动和空气湍流影响的动态干涉仪。配合反射率或透射率测量，可以发现在监控光的正常入射下的实时反射系数以及用于增强薄膜沉积的误差补偿的光学导纳。

8. 发明申请

US20120140235A1 METHOD FOR MEASURING THE FILM ELEMENT USING OPTICAL MULTI-WAVELENGTH INTERFEROMETRY 审中-公开
标题翻译：使用光学多波长干涉测量薄膜元件的方法
公开(公告)号：US20120140235A1
公开(公告)日：2012-06-07
申请号：US13152902
申请日：2011-06-03
申请人： Cheng-Chung LEE , Kai Wu
发明人： Cheng-Chung LEE , Kai Wu
IPC分类号： G01B9/02
CPC分类号： G01B11/0675
摘要： A method for measuring the film element using optical multi-wavelength interferometry is revealed. The invention uses reflection coefficients of thin films at different wavelengths to measure the thickness and optical constants of thin films. The phase difference coming from the phase difference between test and reference surfaces is distinguished from the phase difference from the spatial path difference between reference and test beams by doing measurements on different wavelengths, because they change in different ways as the measuring wavelength changes. The phase is then acquired. Combining with the measured reflectance of thin film, the reflection coefficient of thin film is obtained. Collecting the reflection coefficients of each point, the thin film thickness and optical constants distribution in 2 dimensions are calculated. The surface profile is known through the spatial path differences between reference and test beams. These can be measured in a interferometer to avoid the vibration influence.
摘要翻译：揭示了使用光学多波长干涉测量法测量薄膜元件的方法。本发明使用不同波长的薄膜的反射系数来测量薄膜的厚度和光学常数。来自测试和参考表面之间的相位差的相位差通过对不同波长进行测量而与参考和测试光束之间的空间路径差的相位差进行区分，因为它们随着测量波长的变化而以不同的方式变化。然后获得相位。结合薄膜的测量反射率，得到薄膜的反射系数。收集每个点的反射系数，计算二维的薄膜厚度和光学常数分布。通过参考和测试光束之间的空间路径差异已知表面轮廓。这些可以在干涉仪中测量，以避免振动的影响。

9. 发明授权

US07993525B2 Device and method for particle complex handling 有权
标题翻译：用于粒子复合物处理的装置和方法
公开(公告)号：US07993525B2
公开(公告)日：2011-08-09
申请号：US11647566
申请日：2006-12-29
申请人： Xing Su , David J. Liu , Kenneth B. Swartz , Kai Wu , Mineo Yamakawa
发明人： Xing Su , David J. Liu , Kenneth B. Swartz , Kai Wu , Mineo Yamakawa
IPC分类号： G01N1/00 , G01N21/00 , G01N33/48 , G01N33/53 , G01N33/553
CPC分类号： G01N1/4044 , B01L3/502761 , B01L3/502784 , B01L2200/0647 , B01L2200/0673 , B01L2300/0816 , B01L2400/0424 , B01L2400/043 , B01L2400/0638 , B01L2400/086 , G01N35/0098 , G01N35/08 , G01N2015/0038 , G01N2015/0092 , H01F7/20 , H01F7/206 , H01F2007/068 , Y10S436/805 , Y10S436/806 , Y10T29/49117 , Y10T29/4913 , Y10T29/49155 , Y10T436/25
摘要： An embodiment of the invention relates to a device for detecting an analyte in a sample. The device comprises a fluidic network and an integrated circuitry component. The fluidic network comprises a sample zone, a cleaning zone and a detection zone. The fluidic network contains a magnetic particle and/or a signal particle. A sample containing an analyte is introduced, and the analyte interacts with the magnetic particle and/or the signal particle through affinity agents. A microcoil array a mechanically movable permanent magnet is functionally coupled to the fluidic network, which are activatable to generate a magnetic field within a portion of the fluidic network, and move the magnetic particle from the sample zone to the detection zone. A detection element is present which detects optical or electrical signals from the signal particle, thus indicating the presence of the analyte.
摘要翻译：本发明的一个实施例涉及用于检测样品中的分析物的装置。该装置包括流体网络和集成电路部件。流体网络包括样品区，清洁区和检测区。流体网络包含磁性颗粒和/或信号颗粒。引入含有分析物的样品，并且分析物通过亲和试剂与磁性颗粒和/或信号颗粒相互作用。微机架阵列机械可移动的永磁体在功能上耦合到流体网络，其可激活以在流体网络的一部分内产生磁场，并将磁性颗粒从样品区域移动到检测区域。存在检测元件，其检测来自信号颗粒的光学或电信号，从而指示分析物的存在。

10. 发明授权

US07440216B2 Rotary piezoelectric microactuator with an optimum suspension arrangement 失效
标题翻译：具有最佳悬挂装置的旋转压电微致动器
公开(公告)号：US07440216B2
公开(公告)日：2008-10-21
申请号：US10455507
申请日：2003-06-04
申请人： Kai Wu , Tamon Kasajima , Masashi Shiraishi , Ping Shang
发明人： Kai Wu , Tamon Kasajima , Masashi Shiraishi , Ping Shang
IPC分类号： G11B21/02 , G11B5/58 , G11B21/24
CPC分类号： G11B5/5552
摘要： The invention relates to a microactuator comprising a movable structure having a symmetric axis about which the movable structure are divided into two parts which can produce the same movement but in opposite directions; two active arms built with piezoelectric material; two stationary structures to connect the two active arms at their two ends, respectively. The invention also relates to a disk drive suspension which is incorporated with the microactuator.
摘要翻译：本发明涉及一种微致动器，其包括具有对称轴的可移动结构，所述可移动结构围绕所述可移动结构分成两部分，所述两部分可以产生相同的运动但是在相反的方向上; 两个用压电材料制成的主动臂; 两个固定结构分别在两端连接两个活动臂。本发明还涉及一种与微型致动器并入的磁盘驱动器悬架。

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