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41. 发明授权

US08901522B2 Chamber apparatus and extreme ultraviolet light generation system 有权
标题翻译：室内设备和极紫外光发生系统
公开(公告)号：US08901522B2
公开(公告)日：2014-12-02
申请号：US13196311
申请日：2011-08-02
申请人： Yoshifumi Ueno , Shinji Nagai , Osamu Wakabayashi
发明人： Yoshifumi Ueno , Shinji Nagai , Osamu Wakabayashi
IPC分类号： H05G2/00 , G21K5/00 , G03F7/20
CPC分类号： H05G2/003 , G03F7/70033 , G03F7/70916 , H05G2/008
摘要： A chamber apparatus used with a laser apparatus may include: a chamber provided with at least one inlet through which a laser beam outputted from the laser apparatus enters the chamber; a target supply unit provided to the chamber for supplying a target material to a predetermined region inside the chamber; a magnetic field generation unit for generating a magnetic field in the predetermined region; and a charged particle collection unit disposed in a direction of a magnetic flux of the magnetic field for collecting a charged particle thereinto, the charged particle being generated when the target material is irradiated with the laser beam inside the chamber and traveling along the magnetic flux.
摘要翻译：与激光装置一起使用的室装置可以包括：设置有至少一个入口的室，从激光装置输出的激光束通过该入口进入室; 目标供给单元，其设置在所述室中，用于将目标材料供应到所述室内的预定区域; 用于在预定区域中产生磁场的磁场产生单元; 以及带电粒子收集单元，其设置在所述磁场的磁通方向上，用于收集带电粒子，所述带电粒子是当所述靶材料被所述腔室内的所述激光束照射并且沿着所述磁通量行进时产生的。

42. 发明申请

US20130134326A1 EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, TARGET COLLECTION DEVICE, AND TARGET COLLECTION METHOD 审中-公开
标题翻译：极光紫外线发光装置，目标收集装置和目标收集方法
公开(公告)号：US20130134326A1
公开(公告)日：2013-05-30
申请号：US13595312
申请日：2012-08-27
申请人： Takayuki Yabu , Youichi Sasaki , Yulaka Shiraishi , Shinji Nagai , Osamu Wakabayashi
发明人： Takayuki Yabu , Youichi Sasaki , Yulaka Shiraishi , Shinji Nagai , Osamu Wakabayashi
IPC分类号： G21K5/02 , B65B63/08
CPC分类号： H05G2/003 , G03F7/70033 , H05G2/005 , H05G2/006
摘要： A target collection device may include a collection container having an opening through which a target material is collected into the collection container, and a temperature adjuster configured to adjust a temperature of the collection container to a temperature that is equal to or higher than a melting point of the target material. The target collection device may be part of an extreme ultraviolet light generation apparatus. Methods of target collection are also provided.
摘要翻译：目标收集装置可以包括具有开口的收集容器，目标材料通过该开口被收集到收集容器中;温度调节器，被配置为将收集容器的温度调节到等于或高于熔点的温度的目标材料。目标收集装置可以是极紫外光发生装置的一部分。还提供目标收集方法。

43. 发明授权

US07989764B2 Ion trap mass spectrometry method 有权
标题翻译：离子阱质谱法
公开(公告)号：US07989764B2
公开(公告)日：2011-08-02
申请号：US11889232
申请日：2007-08-10
申请人： Hiroyuki Yasuda , Shinji Nagai , Tetsuya Nishida
发明人： Hiroyuki Yasuda , Shinji Nagai , Tetsuya Nishida
IPC分类号： H01J49/42 , H01J49/40
CPC分类号： H01J49/4265 , H01J49/0081
摘要： According to an aspect of the present invention, there are provided an ion trap mass spectrometry method and an ion trap mass spectrometry device using a mass spectrometer, the mass spectrometer including: an ion source part for ionizing a sample; an ion trap part for trapping ions generated in the ion source; a main high frequency power source for applying a main high frequency voltage to the ion trap part, and an auxiliary high frequency power source for applying an auxiliary high frequency voltage thereto; and a detector for detecting the ions ejected from the ion trap. The ion trap mass spectrometry method and the ion trap mass spectrometry device includes the steps of: accumulating desired ions into the ion trap part by ejecting undesired ions while accumulating ions into the ion trap part; and ejecting undesired ions that remain in the ion trap part and leaving the desired ions in the ion trap part are repeated alternately.
摘要翻译：根据本发明的一个方面，提供了一种离子阱质谱法和使用质谱仪的离子阱质谱仪，该质谱仪包括：用于电离样品的离子源部分; 用于捕获在离子源中产生的离子的离子阱部分; 用于向离子阱部分施加主高频电压的主高频电源和用于向其提供辅助高频电压的辅助高频电源; 以及用于检测从离子阱排出的离子的检测器。离子阱质谱方法和离子阱质谱装置包括以下步骤：通过在将离子聚集到离子阱部分的同时喷出不期望的离子将期望的离子累积到离子阱部分中; 并且交替地重复留在离子阱部分中并留下离子阱部分中的期望离子的不需要的离子。

44. 发明授权

US07903700B2 Narrow-spectrum laser device 有权
标题翻译：窄谱激光装置
公开(公告)号：US07903700B2
公开(公告)日：2011-03-08
申请号：US11631463
申请日：2005-07-07
申请人： Shinji Nagai , Osamu Wakabayashi , Koji Kakizaki , Takayuki Yabu , Takahito Kumazaki
发明人： Shinji Nagai , Osamu Wakabayashi , Koji Kakizaki , Takayuki Yabu , Takahito Kumazaki
IPC分类号： H01S3/10 , H01S3/22
CPC分类号： H01S3/2366 , H01S3/134 , H01S3/225
摘要： A spectral purity range (E95) of a laser beam output from an amplifying laser device (300) is measured by spectral purity range measuring means. To have the measured spectral purity range (E95) within an allowable range E950±dE95 of a target spectral purity range (E950), discharge timing from a time when discharge is started by an oscillating laser device (100) to a time when discharge is started by the amplifying laser device (300) is controlled, and the spectral purity range (E95) is controlled to be stabilized.
摘要翻译：通过光谱纯度范围测量装置测量从放大激光器件（300）输出的激光束的光谱纯度范围（E95）。为了使测得的光谱纯度范围（E95）在目标光谱纯度范围（E950）的允许范围E950±dE95内，从通过振荡激光装置（100）开始放电的时间到放电为止的放电时间由放大激光装置（300）开始的光谱纯度范围（E95）被控制为稳定。

45. 发明申请

US20090179148A1 MASS SPECTROMETER AND MASS SPECTROMETRY METHOD 审中-公开
标题翻译：质谱仪和质谱方法
公开(公告)号：US20090179148A1
公开(公告)日：2009-07-16
申请号：US12350328
申请日：2009-01-08
申请人： Hiroyuki Yasuda , Yasushi Terui , Shinji Nagai , Tetsuya Nishida
发明人： Hiroyuki Yasuda , Yasushi Terui , Shinji Nagai , Tetsuya Nishida
IPC分类号： B01D59/44 , H01J49/00
CPC分类号： H01J49/004 , H01J49/063
摘要： Performing an MS3 with a tandem mass spectrometer causes problems of increase in size of the device and of increase in cost. Likewise, a plural number of times MS/MS analyses are even more difficult. An electrode to create a harmonic potential is disposed in a collision cell, and fragment ions produced by the first-time collision induced dissociation are accumulated in the harmonic potential. Target ions of the subsequent stage are let out, by means of an axial resonance excitation, selectively from the accumulated ions. The ions are excited in the axial direction to have a potential exceeding the harmonic potential. Thereby, the second-time collision induced dissociation is performed by means of a potential difference provided at the subsequent stage. In addition, an operation to return the ions back to the harmonic potential enables a plural number of times MS/MS analyses to be performed.
摘要翻译：使用串联质谱仪进行MS3会导致设备尺寸增加和成本增加的问题。同样，多次MS / MS分析更加困难。用于产生谐波电位的电极设置在碰撞室中，并且由第一次碰撞引起的解离产生的碎片离子累积在谐波电位中。选择性地从累积的离子中排出后续阶段的目标离子，借助于轴向共振激发。离子在轴向上被激发以具有超过谐波电位的电位。因此，通过在后续阶段提供的电位差来执行第二次碰撞诱导解离。此外，使离子返回到谐波电位的操作能够进行多次MS / MS分析。

46. 发明申请

US20050279926A1 Ion trap/time-of-flight mass analyzing apparatus and mass analyzing method 有权
标题翻译：离子阱/飞行时间质量分析仪和质量分析方法
公开(公告)号：US20050279926A1
公开(公告)日：2005-12-22
申请号：US11149263
申请日：2005-06-10
申请人： Yasushi Terui , Toyoharu Okumoto , Tsukasa Shishika , Shinji Nagai , Masaru Tomioka
发明人： Yasushi Terui , Toyoharu Okumoto , Tsukasa Shishika , Shinji Nagai , Masaru Tomioka
IPC分类号： G01N27/62 , B01D59/44 , H01J49/40 , H01J49/42
CPC分类号： H01J49/424 , H01J49/0009 , H01J49/0031 , H01J49/004 , H01J49/40 , H01J49/427
摘要： An “ion trap-TOF/MS” capable of calibrating the observed mass for each of an ion trap and a TOF. In the ion trap-TOF/MS, sample ions having known mass numbers and ionized by an ion source are trapped within an ion trap. Auxiliary AC voltages having a frequency component ω are applied to the end cap electrodes of the ion trap to expel unwanted ions out of the ion trap. A measurement process is carried out by applying DC voltages to the ring electrode and the end cap electrodes to expel an ion remaining within the ion trap, and measuring the mass number of the expelled ion by the time-of-flight mass spectrometer. The measurement process is repeated while changing the frequency component ω, and the ion signal intensity measured by the time-of-flight mass spectrometer is compared with a previously stored threshold, thereby making calibration of the frequency component ω for the ion having the known mass number. Thus, the calibrating of the observed mass can be realized for each of the ion trap and the TOF.
摘要翻译：能够校准每个离子阱和TOF的观察质量的“离子阱TOF / MS”。在离子阱TOF / MS中，已知质量数和离子源电离的样品离子被捕获在离子阱内。具有频率分量ω的辅助AC电压被施加到离子阱的端盖电极以将不需要的离子排出离子阱。通过向环形电极和端盖电极施加直流电压以排出留在离子阱内的离子，并且通过飞行时间质谱仪测量排出的离子的质量数来进行测量处理。在改变频率分量ω时重复测量过程，并将通过飞行时间质谱仪测量的离子信号强度与先前存储的阈值进行比较，从而对具有已知质量的离子进行频率分量ω的校准数。因此，可以为每个离子阱和TOF实现观察质量的校准。

47. 发明授权

US06839373B1 Ultra-narrow band flourine laser apparatus 有权
标题翻译：超窄带激光设备
公开(公告)号：US06839373B1
公开(公告)日：2005-01-04
申请号：US09608964
申请日：2000-06-30
申请人： Kiwamu Takehisa , Hakaru Mizoguchi , Shinji Nagai , Tatsumi Gotou
发明人： Kiwamu Takehisa , Hakaru Mizoguchi , Shinji Nagai , Tatsumi Gotou
IPC分类号： H01S3/223 , B23K26/06 , H01S3/00 , H01S3/08 , H01S3/097 , H01S3/22 , H01S3/225 , H01S3/23
CPC分类号： H01S3/10092 , B23K26/064 , B23K26/0643 , B23K26/0648 , H01S3/005 , H01S3/08059 , H01S3/097 , H01S3/225 , H01S3/2325 , H01S3/2366
摘要： An ultra-narrow band fluorine laser apparatus is provided in which a line width of a fluorine laser can be narrowed to about 0.2 to 0.3 pm without using any band-narrowing element such as an etalon. In an oscillator 11, a laser chamber 15 is provided in a stable type resonator constituted by an output mirror 13 and a totally reflecting mirror 14. The laser chamber 15 is filled with a laser gas at about 0.8 atm. As a result, when discharge is caused in the laser chamber 15 to cause laser oscillation, laser light L10 in a bandwidth of about 0.3 pm is provided. The power of the laser light L10 is increased by an amplifier 12. The amplifier 12 emits laser light L20 in a bandwidth of about 0.3 pm having laser energy of 10 mJ or more.

48. 发明授权

US5675235A Charging apparatus for controlling supplement of electric current to a rechargeable battery 失效
标题翻译：用于控制对可再充电电池的电流补充的充电装置
公开(公告)号：US5675235A
公开(公告)日：1997-10-07
申请号：US605922
申请日：1996-02-23
申请人： Shinji Nagai
发明人： Shinji Nagai
IPC分类号： H02J7/10 , H01M10/44 , H02J7/00 , H01M10/46
CPC分类号： H02J7/008 , H01M10/44
摘要： A charging apparatus for charging a rechargeable battery, such as a Lithium-ion type battery. The charging apparatus is provided with a first current stabilized unit and a second current stabilized unit for stabilizing two different levels of electric current. The first current stabilized unit provides a relatively large electric current for charging the battery package. The second current stabilized unit provides a relatively small electric current for charging the battery package. A switching unit is provided for switching a connection of the first and second current stabilized units to provide current to the rechargeable battery. A detection unit is provided for detecting an electric voltage at terminals of the rechargeable battery. The detection unit controls the switching unit so as to switch connection of the first and second current stabilized units to provide current to the rechargeable battery based on the detected voltage.
摘要翻译：一种用于对诸如锂离子型电池的可再充电电池进行充电的充电装置。充电装置设置有用于稳定两个不同电平的电流的第一电流稳定单元和第二电流稳定单元。第一电流稳定单元提供相对较大的电流以对电池组充电。第二电流稳定单元提供相对小的电流来对电池组充电。提供开关单元用于切换第一和第二电流稳定单元的连接以向可再充电电池提供电流。提供检测单元，用于检测可再充电电池的端子处的电压。检测单元控制开关单元，以便基于检测到的电压来切换第一和第二电流稳定单元的连接以向可再充电电池提供电流。

49. 发明授权

US5216371A Battery pack including measuring and indicating 失效
标题翻译：电池组包括测量和显示
公开(公告)号：US5216371A
公开(公告)日：1993-06-01
申请号：US869070
申请日：1992-04-16
申请人： Shinji Nagai
发明人： Shinji Nagai
IPC分类号： G01R31/36
CPC分类号： G01R31/3686 , G01R31/3655
摘要： A battery pack including a casing adapted to be detachably attached to a battery-powered apparatus. A rechargeable secondary battery is housed within the casing and includes positive and negative terminals. At least a pair of power electrodes are connected to the positive and negative terminals of the secondary battery and positioned on an outer surface of the casing so as to be electrically connected to the battery-powered apparatus. A measuring circuit is provided within the casing for measuring the remaining amount of electric power in the secondary battery and generating one or more information signals related to the remaining amount of the electric power which has been measured. One or more signal electrodes are provided on the outer surface of the casing and adapted to transfer the information generated from the measuring circuit to an apparatus to be connected to the battery pack. In addition to or instead of the signal electrodes, an indicating unit may be provided for indicating information related to the remaining amount of the electric power of the secondary battery at the outer surface of the casing in accordance with the information signals generated from the measuring circuit.
摘要翻译：一种电池组，包括适于可拆卸地附接到电池供电设备的壳体。可再充电二次电池容纳在外壳内，包括正极和负极。至少一对电力电极连接到二次电池的正极和负极端子并且定位在壳体的外表面上，以便电连接到电池供电的装置。在壳体内设置有测量电路，用于测量二次电池中的剩余电量，并产生与已测量的电力剩余量相关的一个或多个信息信号。一个或多个信号电极设置在壳体的外表面上，并且适于将从测量电路产生的信息传送到要连接到电池组的装置。除了信号电极之外或替代信号电极，可以提供指示单元，用于根据从测量电路产生的信息信号来指示与外壳的外表面处的二次电池的电力的剩余量有关的信息。

50. 发明授权

US08872142B2 Extreme ultraviolet light generation apparatus 有权
标题翻译：极紫外光发生装置
公开(公告)号：US08872142B2
公开(公告)日：2014-10-28
申请号：US13474100
申请日：2012-05-17
申请人： Shinji Nagai , Tamotsu Abe , Hitoshi Nagano , Osamu Wakabayashi
发明人： Shinji Nagai , Tamotsu Abe , Hitoshi Nagano , Osamu Wakabayashi
IPC分类号： G21K5/00 , G21K5/02 , H05G2/00 , G03F7/20
CPC分类号： H05G2/008 , B23K10/00 , B23K26/12 , B23K26/36 , G03B27/32 , G03F7/70025 , G03F7/70033 , G21K1/067 , G21K5/00 , G21K5/02 , G21K2201/064 , H05G2/005
摘要： An apparatus for generating extreme ultraviolet light used with a laser apparatus and connected to an external device so as to supply the extreme ultraviolet light thereto includes a chamber provided with at least one inlet through which a laser beam is introduced into the chamber; a target supply unit provided on the chamber configured to supply a target material to a predetermined region inside the chamber; a discharge pump connected to the chamber; at least one optical element provided inside the chamber; an etching gas introduction unit provided on the chamber through which an etching gas passes; and at least one temperature control mechanism for controlling a temperature of the at least one optical element.
摘要翻译：一种用于产生与激光装置并且连接到外部装置以便提供极紫外光的极紫外光的装置，包括设置有至少一个入口的腔室，激光束通过该入口引入腔室; 设置在所述室上的目标供给单元，其构造成将目标材料供应到所述室内的预定区域; 连接到所述室的排出泵; 设置在所述室内的至少一个光学元件; 蚀刻气体导入单元，设置在所述室上，蚀刻气体通过所述蚀刻气体导入单元; 以及用于控制所述至少一个光学元件的温度的至少一个温度控制机构。

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