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    • 1. 发明授权
    • Ion trap/time-of-flight mass analyzing apparatus and mass analyzing method
    • 离子阱/飞行时间质量分析仪和质量分析方法
    • US07186973B2
    • 2007-03-06
    • US11149263
    • 2005-06-10
    • Yasushi TeruiToyoharu OkumotoTsukasa ShishikaShinji NagaiMasaru Tomioka
    • Yasushi TeruiToyoharu OkumotoTsukasa ShishikaShinji NagaiMasaru Tomioka
    • B01D59/44
    • H01J49/424H01J49/0009H01J49/0031H01J49/004H01J49/40H01J49/427
    • An “ion trap-TOF/MS” capable of calibrating the observed mass for each of an ion trap and a TOF. In the ion trap-TOF/MS, sample ions having known mass numbers and ionized by an ion source are trapped within an ion trap. Auxiliary AC voltages having a frequency component ω are applied to the end cap electrodes of the ion trap to expel unwanted ions out of the ion trap. A measurement process is carried out by applying DC voltages to the ring electrode and the end cap electrodes to expel an ion remaining within the ion trap, and measuring the mass number of the expelled ion by the time-of-flight mass spectrometer. The measurement process is repeated while changing the frequency component ω, and the ion signal intensity measured by the time-of-flight mass spectrometer is compared with a previously stored threshold, thereby making calibration of the frequency component ω for the ion having the known mass number. Thus, the calibrating of the observed mass can be realized for each of the ion trap and the TOF.
    • 能够校准每个离子阱和TOF的观察质量的“离子阱TOF / MS”。 在离子阱TOF / MS中,已知质量数和离子源电离的样品离子被捕获在离子阱内。 具有频率分量ω的辅助AC电压被施加到离子阱的端盖电极以将不需要的离子排出离子阱。 通过向环形电极和端盖电极施加直流电压以排出留在离子阱内的离子,并且通过飞行时间质谱仪测量排出的离子的质量数来进行测量处理。 在改变频率分量ω时重复测量过程,并将通过飞行时间质谱仪测量的离子信号强度与先前存储的阈值进行比较,从而对具有已知质量的离子进行频率分量ω的校准 数。 因此,可以为每个离子阱和TOF实现观察到的质量的校准。
    • 5. 发明申请
    • Ion trap/time-of-flight mass spectrometer and method of measuring ion accurate mass
    • 离子阱/飞行时间质谱仪和离子精确质量的测量方法
    • US20070069121A1
    • 2007-03-29
    • US11606046
    • 2006-11-30
    • Tadao MimuraYoshiaki KatoToyoharu Okumoto
    • Tadao MimuraYoshiaki KatoToyoharu Okumoto
    • H01J49/00
    • H01J49/42H01J49/0009H01J49/004H01J49/40
    • An ion trap/time-of-flight mass spectrometer, which can perform accurate mass measurement of a product ion based on MS/MS and MSn has an ion source for ionizing a sample, an ion trap capable of temporarily trapping ions, and a time-of-flight mass spectrometer. The ion source produces ions of the sample as a measurement target and ions of a reference sample each having a known mass value. A precursor ion is selected from among the ions of the measurement target sample, and the selected precursor ion is excited and fragmented in the ion trap to produce a product ion. The reference sample ions are introduced to and trapped in the ion trap. The trapped product ion and reference sample ions are expelled out of the ion trap and introduced to the time-of-flight mass spectrometer, thereby obtaining a mass spectrum.
    • 离子阱/飞行时间质谱仪可以基于MS / MS和MS进行产物离子的精确质量测量具有离子源,用于离子化样品,离子阱能力 暂时捕获离子和飞行时间质谱仪。 离子源产生样品的离子作为测量对象,每个参考样品的离子具有已知的质量值。 从测量对象样品的离子中选择前体离子,并且将所选择的前体离子在离子阱中激发并碎裂以产生产物离子。 将参考样品离子引入并捕获在离子阱中。 捕获的产物离子和参考样品离子从离子阱中排出并引入飞行时间质谱仪,从而获得质谱。
    • 9. 发明申请
    • Plasma processing apparatus and plasma processing method
    • 等离子体处理装置和等离子体处理方法
    • US20090001052A1
    • 2009-01-01
    • US12230460
    • 2008-08-29
    • Akitaka MakinoKoichi MishimaTakashi KanekoToyoharu Okumoto
    • Akitaka MakinoKoichi MishimaTakashi KanekoToyoharu Okumoto
    • C23F1/00
    • H01L21/67253G01N21/68H01J37/32935H01J37/32972
    • A plasma processing method for processing a sample mounted on a sample stage in a decompressable processing chamber in which plasma is produced. The method includes detecting a distribution of a concentration of a substance over a surface of a sample in the processing chamber using both of (1) a result of receiving light emission of the plasma and in different directions along the surface of the sample inside the processing chamber, detecting on the respective directions a constituent of the plasma and providing outputs indicative thereof, respectively, and (2) a result of taking in gases in the processing chamber and determining a mass of a constituent of the gases, and adjusting an operation of the processing of the sample so as to adjust a distribution of the processing on the sample surface based on the detected distribution of the concentration of the substance.
    • 一种用于处理安装在其中产生等离子体的减压处理室中的样品台上的样品的等离子体处理方法。 该方法包括使用(1)接收等离子体的发光和沿着处理中的样品表面的不同方向的结果,检测处理室中的样品表面上的物质浓度的分布 分别在各个方向上检测等离子体的成分并分别提供其输出的输出,以及(2)在处理室中吸入气体并确定气体成分的质量的结果,并且调节 根据检测到的物质浓度的分布,对样品进行处理,调整样品表面的处理分布。