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    • 33. 发明授权
    • Method and system for providing a self-aligned electrical contact for a TMR element
    • 用于为TMR元件提供自对准电接触的方法和系统
    • US06683763B1
    • 2004-01-27
    • US09990738
    • 2001-11-21
    • Hugh C. HinerKyusik SinWilliam JensenXizeng Shi
    • Hugh C. HinerKyusik SinWilliam JensenXizeng Shi
    • G11B5127
    • B82Y25/00B82Y10/00B82Y40/00G01R33/06G11B5/3909H01F10/3254H01F41/308H01L43/12
    • A method and structure for providing a tunneling magnetoresistive (TMR) element is disclosed. The method and structure include providing a TMR layer that includes a first magnetic layer, a second magnetic layer and a first insulating layer disposed between the first magnetic layer and the second magnetic layer. The method and structure also include providing a first material and a protective layer. The first material allows electrical contact to be made to the tunneling magnetoresistive layer and is disposed above the tunneling magnetoresistive layer. The first material is capable of being undercut by an plasma etch without exposing a portion of the tunneling magnetoresistive layer under a remaining portion of the first material. The second protective layer covers a portion of the tunneling magnetoresistive sensor and a portion of the first material. In one aspect, the method and structure also include providing a second material disposed between the tunneling magnetoresistive layer and the first material. The second material allows electrical contact to be made to the tunneling magnetoresistive layer and is resistant to removal by the plasma etch.
    • 公开了一种用于提供隧道磁阻(TMR)元件的方法和结构。 该方法和结构包括提供包括第一磁性层,第二磁性层和设置在第一磁性层和第二磁性层之间的第一绝缘层的TMR层。 该方法和结构还包括提供第一材料和保护层。 第一材料允许对隧道磁阻层进行电接触并且设置在隧道磁阻层之上。 第一种材料能够通过等离子体蚀刻而被切割,而不会在隧道磁阻层的一部分暴露在第一材料的剩余部分之下。 第二保护层覆盖隧道磁阻传感器的一部分和第一材料的一部分。 一方面,该方法和结构还包括提供设置在隧道磁阻层和第一材料之间的第二材料。 第二种材料允许对隧道磁阻层进行电接触,并且耐受等离子体蚀刻的去除。
    • 34. 发明授权
    • High performance thin film magnetic write element having high Bsat poles and method for making same
    • 具有高Bsat极的高性能薄膜磁性写入元件及其制造方法
    • US06381095B1
    • 2002-04-30
    • US09386889
    • 1999-08-31
    • Kyusik SinRonald Barr
    • Kyusik SinRonald Barr
    • G11B5147
    • G11B5/313G11B5/3133G11B5/3146G11B5/3163
    • A high performance magnetic write element incorporated in a read/write head having a lower pole including high Bsat back gap and write gap pedestals. The write element further including an upper pole connected with the lower pole to form a yoke and a coil disposed within the yoke and enclosed covered with a write gap material and surrounded by insulating material. The write gap material provides separation between the first and second poles at one end of the yoke to form a write gap therebetween. A method of forming the write element of the present invention includes forming the first pole and building thereupon a back gap pedestal and a write gap pedestal at back and front ends of the first pole respectively. A dielectric layer is deposited on top of the first pole and planarized to have an upper surface coplanar with the top of the first and second pedestals. Upon the dielectric layer the coil is formed on which is deposited the write gap material. The write gap material is deposited so as to cover both the back gap and write gap pedestals. An insulation layer is deposited over the write gap material and masked to avoid covering the pedestals. After curing the insulation layer, an etching process removes at the location of the back gap material. The upper pole can then be formed onto the structure to form the yoke. Covering back gap pedestal with write gap material until the insulation has been cured effectively prevents corrosion of the back gap pedestal which would otherwise be caused by the high temperatures necessary to cure the insulation layer.
    • 一种结合在读/写头中的高性能磁写元件,其具有包括高Bsat后间隙和写间隙基座的下极。 所述写入元件还包括与所述下极连接的上极,以形成轭,所述线圈设置在所述轭内,并被封闭地覆盖有写入间隙材料并被绝缘材料包围。 写间隙材料提供在轭的一端处的第一和第二极之间的间隔,以在它们之间形成写入间隙。 形成本发明的写入元件的方法包括分别在第一极的后端和前端形成第一极和其后面的后间隙基座和写间隙基座。 电介质层沉积在第一极的顶部上并且被平坦化以具有与第一和第二基座的顶部共面的上表面。 在电介质层上形成有在其上沉积写间隙材料的线圈。 写入间隙材料被沉积以覆盖后部间隙和写入间隙基座。 绝缘层沉积在写入间隙材料上并被掩蔽以避免覆盖基座。 在固化绝缘层之后,在后隙材料的位置处去除蚀刻工艺。 然后可以将上极形成在结构上以形成轭。 用间隙材料覆盖背面间隙基座直到绝缘体已经被固化有效地防止背面间隙基座的腐蚀,否则这将由固化绝缘层所需的高温引起。
    • 37. 发明授权
    • Narrow track width magnetoresistive sensor and method of making
    • 窄轨宽磁阻传感器及其制作方法
    • US06700759B1
    • 2004-03-02
    • US09585988
    • 2000-06-02
    • Kenneth E. KnappKyusik Sin
    • Kenneth E. KnappKyusik Sin
    • G11B539
    • B82Y25/00B82Y10/00G11B5/112G11B5/3116G11B5/3143G11B5/3163G11B5/3903G11B5/3909G11B5/3967Y10T29/49043Y10T29/49044Y10T29/49046Y10T29/49048Y10T29/49052
    • An electrically conductive sidewall for an electromagnetic transducer having a magnetoresistive sensor is formed as a layer oriented substantially perpendicular to other layers of the sensor, and is used as a mask for defining the width of the sensor. This allows the sensor to be made much thinner than conventional sensors, providing higher resolution in a track width direction. The sidewall can be nonmagnetic, serving as a spacer between the magnetic sensor layers and an adjacent magnetic shield without the need for a protective cap to guard against damage from polishing and wet etching. Alternatively, the sidewall can be magnetic, serving as an extension of the shield. In either case, the sidewall reduces the effective length of the sensor for linear resolution, sharpening the focus of the sensor and increasing linear density. Also reduced is the tolerance for error in sensor width and length. The combination of increased resolution in track width and track length directions provides a large increase in areal resolution, such that sensors in accordance with the present invention may be able to resolve signals at a density exceeding a terabit per square inch. A correspondingly narrow pole-tip for an inductive transducer that may be employed in conjunction with the magnetoresistive sensor is also disclosed.
    • 具有磁阻传感器的电磁换能器的导电侧壁形成为基本上垂直于传感器的其它层定向的层,并且被用作限定传感器宽度的掩模。 这允许传感器比常规传感器薄得多,在轨道宽度方向上提供更高的分辨率。 侧壁可以是非磁性的,用作磁性传感器层和相邻的磁屏蔽之间的间隔物,而不需要保护帽以防止抛光和湿蚀刻的损伤。 或者,侧壁可以是磁性的,用作屏蔽的延伸部分。 在任一情况下,侧壁减小了传感器的有效长度,用于线性分辨率,锐化传感器的焦点和增加线密度。 传感器宽度和长度误差的公差也减少了。 轨道宽度和轨道长度方向上增加的分辨率的组合提供了面积分辨率的大幅度增加,使得根据本发明的传感器可能能够以超过每平方英吋的密度来解析信号。 还公开了可以与磁阻传感器结合使用的用于感应换能器的相应窄的极尖。
    • 40. 发明授权
    • Write element for perpendicular recording in a data storage system
    • 在数据存储系统中用于垂直记录的写入元素
    • US07239478B1
    • 2007-07-03
    • US10769409
    • 2004-01-31
    • Kyusik SinYinshi LiuBenjamin ChenFrancis H. Liu
    • Kyusik SinYinshi LiuBenjamin ChenFrancis H. Liu
    • G11B5/127
    • G11B5/112G11B5/1278G11B5/3116G11B5/315G11B5/3163
    • A write element for perpendicular recording in a data storage system is fabricated to maintain the thickness of a side shield at both edges of a pole P3, and to form the pole P3 in a trapezoidal shape. Forming a side shield around the pole P3 removes stray fields, creating a quiet, noise-free write element and preventing side erasure. The fabrication method utilizes a magnetic buffer layer to protect a shield gap during trim of the pole P3, and thus to provide the shield gap with a uniform thickness. The magnetic buffer layer also protects the shield gap and pole P3 when the top hard mask is removed. Consequently, the write field is made uniform across the track width. The fabrication method uses a metal in the shield gap to improve the pole geometry after pole trim and to provide a uniform edge to the pole P3.
    • 制造用于在数据存储系统中进行垂直记录的写入元件,以将侧屏蔽件的厚度保持在极点P 3的两个边缘处,并且形成梯形形状的极点3。 在P 3周围形成一个侧面屏蔽可去除杂散场,创建一个安静,无噪音的写入元件,并防止侧面擦除。 该制造方法利用磁性缓冲层来保护极P 3的修整期间的屏蔽间隙,从而提供具有均匀厚度的屏蔽间隙。 当去除顶部硬掩模时,磁缓冲层还保护屏蔽间隙和极点P 3。 因此,写入磁道在磁道宽度上是均匀的。 制造方法使用屏蔽间隙中的金属来改善极修整之后的极几何形状,并且向极P 3提供均匀的边缘。