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1. 发明授权

US07726009B1 Method of fabricating a perpendicular recording write head having a gap with two portions 失效
标题翻译：制造具有两部分间隙的垂直记录写头的方法
公开(公告)号：US07726009B1
公开(公告)日：2010-06-01
申请号：US11779218
申请日：2007-07-17
申请人： Yinshi Liu , Benjamin Chen , Kyusik Sin , Hongping Yuan
发明人： Yinshi Liu , Benjamin Chen , Kyusik Sin , Hongping Yuan
IPC分类号： G11B5/187
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/235 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49052
摘要： A method of fabricating a write head for perpendicular recording includes forming a pole layer on an undercoat layer, forming a mask over at least a portion of the pole layer, and forming the pole by removing material from the pole layer. The method further includes forming a first gap portion of a gap along a first side and a second side of the pole, forming a protective layer over at least a portion of the first gap portion, removing the mask, and removing the protective layer. The method further includes forming a second gap portion of the gap over at least a top surface of the pole and forming a shield over at least the second gap portion.
摘要翻译：制造用于垂直记录的写头的方法包括在底涂层上形成极层，在极层的至少一部分上形成掩模，并通过从极层去除材料形成极。所述方法还包括沿着所述极的第一侧和第二侧形成间隙的第一间隙部分，在所述第一间隙部分的至少一部分上形成保护层，去除所述掩模，以及去除所述保护层。该方法还包括在极的至少顶表面上形成间隙的第二间隙部分，并在至少第二间隙部分上形成屏蔽。

2. 发明授权

US07248431B1 Method of fabricating a perpendicular recording write head having a gap with two portions 有权
标题翻译：制造具有两部分间隙的垂直记录写头的方法
公开(公告)号：US07248431B1
公开(公告)日：2007-07-24
申请号：US10837350
申请日：2004-04-30
申请人： Yinshi Liu , Benjamin Chen , Kyusik Sin , Hongping Yuan
发明人： Yinshi Liu , Benjamin Chen , Kyusik Sin , Hongping Yuan
IPC分类号： G11B5/127 , G11B5/187 , G11B5/147
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/235 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49052
摘要： A method of fabricating a write head for perpendicular recording is provided. The write head has a pole, a shield in proximity to the pole, and a gap between the pole and the shield. The method includes forming a pole layer on an undercoat layer, forming a mask over at least a portion of the pole layer, and forming the pole by removing material from the pole layer. The pole has a top surface, a first side, and a second side. The method further includes forming a first gap portion of the gap along the first side and along the second side of the pole, forming a protective layer over at least a portion of the first gap portion, removing the mask, and removing the protective layer. The method further includes forming a second gap portion of the gap over at least the top surface of the pole and forming the shield over at least the second gap portion.
摘要翻译：提供一种制造用于垂直记录的写入头的方法。写头具有极，靠近极的屏蔽，以及极与屏蔽之间的间隙。该方法包括在底涂层上形成极层，在极层的至少一部分上形成掩模，并通过从极层去除材料形成极。极具有顶表面，第一侧和第二侧。该方法还包括沿着第一侧沿着极的第二侧形成间隙的第一间隙部分，在第一间隙部分的至少一部分上形成保护层，去除掩模，以及去除保护层。所述方法还包括在至少所述极的顶表面上形成所述间隙的第二间隙部分，并在至少所述第二间隙部分上形成所述屏蔽。

3. 发明授权

US07239478B1 Write element for perpendicular recording in a data storage system 有权
标题翻译：在数据存储系统中用于垂直记录的写入元素
公开(公告)号：US07239478B1
公开(公告)日：2007-07-03
申请号：US10769409
申请日：2004-01-31
申请人： Kyusik Sin , Yinshi Liu , Benjamin Chen , Francis H. Liu
发明人： Kyusik Sin , Yinshi Liu , Benjamin Chen , Francis H. Liu
IPC分类号： G11B5/127
CPC分类号： G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： A write element for perpendicular recording in a data storage system is fabricated to maintain the thickness of a side shield at both edges of a pole P3, and to form the pole P3 in a trapezoidal shape. Forming a side shield around the pole P3 removes stray fields, creating a quiet, noise-free write element and preventing side erasure. The fabrication method utilizes a magnetic buffer layer to protect a shield gap during trim of the pole P3, and thus to provide the shield gap with a uniform thickness. The magnetic buffer layer also protects the shield gap and pole P3 when the top hard mask is removed. Consequently, the write field is made uniform across the track width. The fabrication method uses a metal in the shield gap to improve the pole geometry after pole trim and to provide a uniform edge to the pole P3.
摘要翻译：制造用于在数据存储系统中进行垂直记录的写入元件，以将侧屏蔽件的厚度保持在极点P 3的两个边缘处，并且形成梯形形状的极点3。在P 3周围形成一个侧面屏蔽可去除杂散场，创建一个安静，无噪音的写入元件，并防止侧面擦除。该制造方法利用磁性缓冲层来保护极P 3的修整期间的屏蔽间隙，从而提供具有均匀厚度的屏蔽间隙。当去除顶部硬掩模时，磁缓冲层还保护屏蔽间隙和极点P 3。因此，写入磁道在磁道宽度上是均匀的。制造方法使用屏蔽间隙中的金属来改善极修整之后的极几何形状，并且向极P 3提供均匀的边缘。

4. 发明授权

US06744608B1 Method and system for making TMR junctions 有权
标题翻译：制造TMR结的方法和系统
公开(公告)号：US06744608B1
公开(公告)日：2004-06-01
申请号：US10146517
申请日：2002-05-14
申请人： Kyusik Sin , Kristian M. Bjelland , Benjamin Chen , Hugh C. Hiner , Xizeng Shi
发明人： Kyusik Sin , Kristian M. Bjelland , Benjamin Chen , Hugh C. Hiner , Xizeng Shi
IPC分类号： G11B5127
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3906 , G11B5/3909 , G11B2005/3996
摘要： A method and system for providing a tunneling magnetoresistive sensor is disclosed. The method and system include providing a pinned layer, a free layer and an insulating layer between the pinned and free layers. The pinned and free layers are ferromagnetic. The method and system also include providing a hard mask layer to be used in defining the sensor at the top of the tunneling magnetoresistive sensor. The method and system also include using the hard mask layer to define the tunneling magnetoresistive sensor. Thus, the pinned layer, the free layer and the insulating layer are capable of having a minimum dimension of less than 0.2 &mgr;m.
摘要翻译：公开了一种用于提供隧道磁阻传感器的方法和系统。该方法和系统包括在钉扎层和自由层之间提供钉扎层，自由层和绝缘层。固定和自由层是铁磁性的。该方法和系统还包括提供用于在隧道磁阻传感器的顶部限定传感器的硬掩模层。该方法和系统还包括使用硬掩模层来定义隧道磁阻传感器。因此，被钉扎层，自由层和绝缘层能够具有小于0.2μm的最小尺寸。

5. 发明授权

US06785955B1 Method for providing pedestal-defined zero throat writer 失效
标题翻译：提供基座定义零喉作家的方法
公开(公告)号：US06785955B1
公开(公告)日：2004-09-07
申请号：US09769060
申请日：2001-01-23
申请人： Yingjian Chen , Hugh Craig Hiner , Benjamin Chen , Xizeng Shi , Kyusik Sin
发明人： Yingjian Chen , Hugh Craig Hiner , Benjamin Chen , Xizeng Shi , Kyusik Sin
IPC分类号： H04R3100
CPC分类号： G11B5/3967 , G11B5/3109 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49048 , Y10T29/49052 , Y10T29/49062
摘要： A method and system for providing a writer is disclosed. The method and system include providing a first pole, an insulator covering a portion of the first pole and a coil on the first insulator. The coil includes a plurality of turns. The method and system also include providing a second insulator covering the coil, providing a second pole on the second insulator and providing a write gap separating a portion of the first pole from a second portion of the second pole. A first portion of the second pole is coupled with the first pole. In one aspect, the method and system include providing a coil having a plurality of turns with a pitch of no more than 1.2 micrometers. In another aspect, the plurality of turns of the coil is provided using a hard mask layer on a photoresist layer. A portion of the hard mask layer and a portion of the photoresist layer define a plurality of spaces between the pluralities of turns of the coil. In another aspect, the writer is a pedestal defined zero throat writer. In this aspect, the first insulator has a depression therein and the coil is provided on the depression.
摘要翻译：公开了一种用于提供写入器的方法和系统。该方法和系统包括提供第一极，覆盖第一极的一部分的绝缘体和第一绝缘体上的线圈。线圈包括多个匝。该方法和系统还包括提供覆盖线圈的第二绝缘体，在第二绝缘体上提供第二极，并提供将第一极的一部分与第二极的第二部分分开的写间隙。第二极的第一部分与第一极耦合。在一个方面，该方法和系统包括提供具有不超过1.2微米的间距的多个匝的线圈。在另一方面，使用光致抗蚀剂层上的硬掩模层来提供线圈的多圈。硬掩模层的一部分和光致抗蚀剂层的一部分在线圈的多圈之间限定多个空间。在另一方面，作者是一个基座定义的零喉作家。在这方面，第一绝缘体具有凹陷，线圈设置在凹部上。

6. 发明授权

US08081403B1 Magnetic element having a smaller critical dimension of the free layer 有权
标题翻译：具有较小临界尺寸的自由层的磁性元件
公开(公告)号：US08081403B1
公开(公告)日：2011-12-20
申请号：US12170619
申请日：2008-07-10
申请人： Benjamin Chen , Hongping Yuan , Danning Yang , Wei Zhang , Hugh C. Hiner , Lei Wang , Yingjian Chen , Brant Nease
发明人： Benjamin Chen , Hongping Yuan , Danning Yang , Wei Zhang , Hugh C. Hiner , Lei Wang , Yingjian Chen , Brant Nease
IPC分类号： G11B5/39
CPC分类号： H01L43/12 , B82Y10/00 , B82Y25/00 , G11B5/3906 , G11B5/3909
摘要： A magnetic element includes a pinned layer, a nonferromagnetic spacer layer, and a free layer. The nonferromagnetic spacer layer resides between the pinned layer and the free layer. The free layer has a track width of not more than 0.08 micron.
摘要翻译：磁性元件包括钉扎层，非铁磁隔离层和自由层。非铁磁间隔层位于被钉扎层和自由层之间。自由层的轨道宽度不大于0.08微米。

7. 发明授权

US07419891B1 Method and system for providing a smaller critical dimension magnetic element utilizing a single layer mask 失效
标题翻译：用于使用单层掩模提供较小临界尺寸的磁性元件的方法和系统
公开(公告)号：US07419891B1
公开(公告)日：2008-09-02
申请号：US11352652
申请日：2006-02-13
申请人： Benjamin Chen , Hongping Yuan , Danning Yang , Wei Zhang , Hugh C. Hiner , Lei Wang , Yingjian Chen , Brant Nease
发明人： Benjamin Chen , Hongping Yuan , Danning Yang , Wei Zhang , Hugh C. Hiner , Lei Wang , Yingjian Chen , Brant Nease
IPC分类号： H01L21/20
CPC分类号： H01L43/12 , B82Y10/00 , B82Y25/00 , G11B5/3906 , G11B5/3909
摘要： The method and system for providing a magnetic element are disclosed. The method and system include providing a magnetic element stack that includes a plurality of layers and depositing a stop layer on the magnetic element stack. The method and system also include providing a dielectric antireflective coating (DARC) layer on the stop layer, forming a single layer mask for defining the magnetic element on a portion of the DARC layer, and removing a remaining portion of the DARC layer not covered by the single layer mask. The portion of the DARC layer covers a portion of the stop layer. The method further includes removing a remaining portion of the stop layer and defining the magnetic element using at least the portion of stop layer as a mask.
摘要翻译：公开了用于提供磁性元件的方法和系统。该方法和系统包括提供包括多个层的磁性元件堆叠并在磁性元件堆叠上沉积停止层。该方法和系统还包括在停止层上提供介电抗反射涂层（DARC）层，形成用于在DARC层的一部分上限定磁性元件的单层掩模，以及去除DARC层未覆盖的DARC层的剩余部分单层面膜。 DARC层的一部分覆盖停止层的一部分。该方法还包括使用停止层的至少一部分作为掩模去除停止层的剩余部分并限定磁性元件。

8. 发明授权

US09216339B2 Ball net structure 有权
标题翻译：球网结构
公开(公告)号：US09216339B2
公开(公告)日：2015-12-22
申请号：US13970685
申请日：2013-08-20
申请人： Benjamin Chen
发明人： Benjamin Chen
IPC分类号： A63B61/02 , A63B61/00 , A63B69/00 , A63B63/00 , A63B71/02
CPC分类号： A63B61/02 , A63B61/003 , A63B63/004 , A63B69/0002 , A63B2063/005 , A63B2071/024 , A63B2102/02 , A63B2102/04 , A63B2209/02 , A63B2209/10 , A63B2210/50 , A63B2243/0095
摘要： A ball net structure includes: a base; two tilted metallic pipes flanking the base and having front ends receiving two resilient rods, respectively, with the tilted metallic pipes longer than the resilient rods, allowing the resilient rods to bend and achieve optimal curvature and produce the evenest and largest tensile force; a net body stretched by and between the resilient rods to keep being flat and tight; a plastic sheet edge-binder disposed at each of four edges of the net body; clamping elements for clamping first and second edges of the net body; two net-clamping shells for clamping the clamping elements, the plastic sheet edge-binder, and the first and second edges of the net body; and at least two nails disposed on each of the net-clamping shells to fix the net-clamping shells in place, achieving uniform distribution of stress and extending the service life of the net body.
摘要翻译：球网结构包括：基座; 两个倾斜的金属管分别位于底座的两侧，并且前端分别容纳两个弹性杆，其中倾斜的金属管比弹性杆更长，允许弹性杆弯曲并实现最佳曲率并产生最大和最大的拉力; 网身由弹性杆之间和之间延伸，以保持平坦和紧密; 设置在所述网体的四个边缘中的每一个处的塑料片边缘粘合剂; 夹紧元件，用于夹紧网体的第一和第二边缘; 用于夹紧夹紧元件的两个净夹紧壳，塑料片边缘粘合剂以及网体的第一和第二边缘; 以及至少两个钉子，其布置在每个网夹紧壳体上以将网夹板固定到位，实现均匀的应力分布并延长网体的使用寿命。

9. 发明授权

US09105569B2 Method of etching MTJ using CO process chemistries 有权
标题翻译：使用CO工艺化学品蚀刻MTJ的方法
公开(公告)号：US09105569B2
公开(公告)日：2015-08-11
申请号：US13214107
申请日：2011-08-19
申请人： Krishnakumar Mani , Benjamin Chen
发明人： Krishnakumar Mani , Benjamin Chen
IPC分类号： H01L43/12 , H01L27/22
CPC分类号： H01L27/222 , H01L22/26 , H01L43/02 , H01L43/08 , H01L43/12
摘要： A method for fabricating a magnetic film structure is provided. The method comprises forming a magnetic structure on a bottom electrode layer, the magnetic structure comprising at least one pinned bottom magnetic film layer having a fixed magnetic orientation; at least one top magnetic film layer whose magnetic orientation can be manipulated by a current; and a tunneling layer between the bottom magnetic film layer and the top magnetic film layer; forming a metallic hard mask atop the magnetic structure; patterning and etching the metallic hard mask to define exposed areas of the magnetic structure; selectively etching the exposed areas of the magnetic structure by a chemical etch process based on a CO etch chemistry to form discrete magnetic bits.
摘要翻译：提供一种制造磁性膜结构的方法。该方法包括在底部电极层上形成磁性结构，所述磁性结构包括至少一个具有固定磁性取向的固定底部磁性薄膜层; 至少一个磁性取向可由电流操纵的顶部磁性膜层; 以及在底部磁性膜层和顶部磁性膜层之间的隧道层; 在磁性结构上形成金属硬掩模; 图案化和蚀刻金属硬掩模以限定磁结构的暴露区域; 通过基于CO蚀刻化学的化学蚀刻工艺来选择性地蚀刻磁性结构的暴露区域以形成离散磁性位。

10. 发明申请

US20150057109A1 Ball Net Structure 审中-公开
标题翻译：球网结构
公开(公告)号：US20150057109A1
公开(公告)日：2015-02-26
申请号：US13970685
申请日：2013-08-20
申请人： Benjamin Chen
发明人： Benjamin Chen
IPC分类号： A63B61/02 , A63B69/00 , A63B63/00 , A63B61/00
CPC分类号： A63B61/02 , A63B61/003 , A63B63/004 , A63B69/0002 , A63B2063/005 , A63B2071/024 , A63B2102/02 , A63B2102/04 , A63B2209/02 , A63B2209/10 , A63B2210/50 , A63B2243/0095
摘要： A ball net structure includes: a base; two tilted metallic pipes flanking the base and having front ends receiving two resilient rods, respectively, wherein the tilted metallic pipes are longer than the resilient rods, allowing the resilient rods to bend and achieve optimal curvature and produce the evenest and largest tensile force; a net body stretched by and between the resilient rods to keep being flat and tight; a plastic sheet edge-binder disposed at each of four edges of the net body; clamping elements for clamping first and second edges of the net body; two net-clamping shells for clamping the clamping elements, the plastic sheet edge-binder, and the first and second edges of the net body, wherein at least two nails are disposed on each of the net-clamping shells to fix the net-clamping shells in place, achieving uniform distribution of stress and extending the service life of the net body.
摘要翻译：球网结构包括：基座; 两个倾斜的金属管分别位于基座的两侧，并且前端分别容纳两个弹性杆，其中倾斜的金属管比弹性杆更长，允许弹性杆弯曲并实现最佳曲率并产生最大和最大的拉力; 网身由弹性杆之间和之间延伸，以保持平坦和紧密; 设置在所述网体的四个边缘中的每一个处的塑料片边缘粘合剂; 夹紧元件，用于夹紧网体的第一和第二边缘; 用于夹紧夹紧元件的两个网夹紧壳，塑料片边缘粘合剂以及网体的第一和第二边缘，其中至少两个钉设置在每个网夹紧壳上以固定网夹贝壳就位，实现均匀的应力分布，延长网体的使用寿命。

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