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11. 发明授权

US5717207A Transmission electron microscope with camera system 失效
标题翻译：带相机系统的透射电子显微镜
公开(公告)号：US5717207A
公开(公告)日：1998-02-10
申请号：US685105
申请日：1996-07-22
申请人： Masanari Koguchi , Hiroshi Kakibayashi , Hiroyuki Tanaka , Shigeto Isakozawa , Keiichi Kanehori , Tatsuo Makishima , Kazutaka Tsuji
发明人： Masanari Koguchi , Hiroshi Kakibayashi , Hiroyuki Tanaka , Shigeto Isakozawa , Keiichi Kanehori , Tatsuo Makishima , Kazutaka Tsuji
IPC分类号： H01J37/22 , H01J37/26
CPC分类号： H01J37/265 , H01J37/224 , H01J2237/2445 , H01J2237/2802
摘要： A transmission electron microscope has a camera system that is linked to the optical lens system of the electron microscope by linking the number of electron beam scanning lines of the camera system with the zoom function of the optical lens system. Thus, the number of scanning lines increases as the magnification of the transferred image decreases. Further, the specimen under observation is photographed with a constant number of pixels at all times regardless of the magnification of the transferred image by the optical lens system, thus preventing a reduction in the amount of specimen information.
摘要翻译：透射电子显微镜具有通过将相机系统的电子束扫描线的数量与光学透镜系统的变焦功能相关联而连接到电子显微镜的光学透镜系统的照相机系统。因此，扫描线的数量随着传送图像的放大倍数的减小而增加。此外，无论光学透镜系统的转印图像的放大率如何，始终以恒定数量的像素拍摄观察的样本，从而防止样本信息量的减少。

12. 发明申请

US20110049344A1 DIFFRACTION PATTERN CAPTURING METHOD AND CHARGED PARTICLE BEAM DEVICE 审中-公开
标题翻译：衍射图案捕获方法和充电粒子束装置
公开(公告)号：US20110049344A1
公开(公告)日：2011-03-03
申请号：US12936030
申请日：2009-04-03
申请人： Takashi Dobashi , Masanari Koguchi , Osamu Kamimura , Hiroya Ohta , Kazutoshi Gohara
发明人： Takashi Dobashi , Masanari Koguchi , Osamu Kamimura , Hiroya Ohta , Kazutoshi Gohara
IPC分类号： G01D18/00 , G01N23/00
CPC分类号： H01J37/222 , H01J37/26 , H01J37/295 , H01J2237/24578
摘要： A charged particle beam microscope device of the present invention is configured such that in a diffraction pattern obtained by radiating a parallel charged particle beam onto a sample (22) having a known structure, a distance (r) between spots of a diffraction pattern, which reflects the structure of the sample, is measured, and the variation of a distance (L) between the sample and a detector, which depends on a diffraction angle (θ), is corrected. This enables the correction of distortion that varies with an off-axis distance from the optical axis in a diffraction pattern, and a high precision structural analysis by performing accurately analyzing the spot positions of the diffraction pattern.
摘要翻译：本发明的带电粒子束显微镜装置被构造成使得在通过将平行带电粒子束照射到具有已知结构的样品（22）上获得的衍射图案中，衍射图案的点之间的距离（r）反映样品的结构，被测量，并且校正取决于衍射角（＆amp; s）的样品和检测器之间的距离（L）的变化。由此，能够通过对衍射图案的光斑位置进行精确的分析，能够进行与衍射图案中的离开光轴的离轴距离变化的畸变校正。

13. 发明申请

US20090078869A1 MAGNETIC ELECTRON MICROSCOPE 有权
标题翻译：磁电子显微镜
公开(公告)号：US20090078869A1
公开(公告)日：2009-03-26
申请号：US11543787
申请日：2006-10-06
申请人： Takao Matsumoto , Masanari Koguchi
发明人： Takao Matsumoto , Masanari Koguchi
IPC分类号： G01N23/00 , G01N13/10
CPC分类号： G01N23/04 , G03H5/00 , H01J37/26 , H01J2237/1514 , H01J2237/221 , H01J2237/2614
摘要： Below 50-nm-diameter extremely narrow electrically-conductive fiber is used instead of the electron beam biprism used in the conventional interference electron microscope method. A phenomenon is utilized where a focus-shifted shadow of this fiber is shifted from a straight line by a distance which is proportional to a differentiation of phase change amount of an electron beam due to a sample with respect to a direction perpendicular to the fiber. The phase change amount is quantified by calibrating this shift amount through its comparison with a shift amount caused by another sample in terms of which the corresponding phase change amount has been quantitatively evaluated in advance. The differentiation amount of the quantified phase change in the electron beam due to the sample is visualized, or eventually, is integrated thereby being transformed into absolute phase change amount to be visualized.
摘要翻译：使用低于50nm直径的非常窄的导电纤维来代替在常规干涉电子显微镜方法中使用的电子束双棱镜。使用这种现象，其中该光纤的聚焦移动阴影从直线移位一定距离，该距离与由于样品相对于垂直于光纤的方向的样品的电子束的相变量的微分成正比。通过与通过与预先对相应的相变量进行定量评价的另一个样品引起的移位量进行比较来校准该偏移量来量化相位变化量。由于样品而导致的电子束的量化相变的微分量被可视化，或最终被积分，从而被转换为绝对相变量以被可视化。

14. 发明授权

US07141790B2 Defect inspection instrument and positron beam apparatus 失效
标题翻译：缺陷检测仪器和正电子束装置
公开(公告)号：US07141790B2
公开(公告)日：2006-11-28
申请号：US10838207
申请日：2004-05-05
申请人： Masanari Koguchi , Ruriko Tsuneta
发明人： Masanari Koguchi , Ruriko Tsuneta
IPC分类号： G01N23/00 , G01N23/225 , G21K7/00
CPC分类号： H01J37/256 , G01N23/2252 , H01J37/26 , H01J2237/2807
摘要： The purpose of the present invention is to inspect the position, number, and size of fine defects in a variety of solid state materials, including a semiconductor device and metallic materials, with a high spatial resolution of nanometer order. The positron irradiation function is installed in the converged electron beam apparatus. The defect location information is obtained from the converged electron beam location information, and the number and size of defects are obtained from the detected information of γ-rays created by pair annihilation of electrons and positrons, and this two-dimensional distribution information is displayed in the monitor. Information on ultra-fine defects in a crystal can be provided with high-speed and high-resolution, and nondestructively in the case of a semiconductor wafer.
摘要翻译：本发明的目的是以纳米级的高空间分辨率来检查包括半导体器件和金属材料在内的各种固态材料的精细缺陷的位置，数量和尺寸。正电子照射功能安装在会聚电子束装置中。从会聚的电子束位置信息获得缺陷位置信息，并且从检测到的由电子和正电子的湮灭产生的伽马射线的信息获得缺陷的数量和大小，并且将该二维分布信息显示在监视器。在半导体晶片的情况下，可以以高速，高分辨率和非破坏性的方式提供关于晶体中超细缺陷的信息。

15. 发明授权

US06888139B2 Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US06888139B2
公开(公告)日：2005-05-03
申请号：US10402977
申请日：2003-04-01
申请人： Ruriko Tsuneta , Masanari Koguchi , Isao Nagaoki , Hiroyuki Kobayashi
发明人： Ruriko Tsuneta , Masanari Koguchi , Isao Nagaoki , Hiroyuki Kobayashi
IPC分类号： H01J37/20 , G01N23/225 , G21K7/00 , H01J37/147 , H01J37/21 , H01J37/22 , H01J37/26 , H01J37/28
CPC分类号： H01J37/26 , H01J37/28 , H01J2237/216 , H01J2237/221 , H01J2237/2487 , Y10S977/869 , Y10S977/881
摘要： The present invention provides an analysis of displacement by calculating the phase variance image P′ (k, l) between Fourier transformed images of paired images S1 (n, m) and S2 (n, m) to determine the center of gravity of δ peak appearing on the invert Fourier transform image of the images. The present invention provides numerous advantages such as a precision of displacement analysis of a fraction of pixel to thereby allow to improve the precision of focal analysis, or reduced number of pixels required to achieve the same precision, evaluation of reliability of the analysis by using the δ peak intensity, influence of varying background reduced by using a phase variance component. The improved performance by the present invention allows any operator skilled or not to achieve a best focusing.
摘要翻译：本发明通过计算配对图像S 1（n，m）和S 2（n，m）的傅立叶变换图像之间的相位差图像P'（k，l）来确定重心的位置，来提供位移分析在图像的反转傅立叶变换图像上出现Δ峰。本发明提供许多优点，例如像素的一部分的位移分析的精度，从而允许提高焦点分析的精度，或者减少实现相同精度所需的像素数量，通过使用 δ峰强度，通过使用相位方差分量减小了变化背景的影响。通过本发明的改进的性能允许任何操作者熟练或不能实现最佳聚焦。

16. 发明授权

US06838667B2 Method and apparatus for charged particle beam microscopy 失效
标题翻译：带电粒子束显微镜的方法和装置
公开(公告)号：US06838667B2
公开(公告)日：2005-01-04
申请号：US09983898
申请日：2001-10-26
申请人： Ruriko Tsuneta , Masanari Koguchi , Mari Nozoe , Muneyuki Fukuda , Mitsugu Sato
发明人： Ruriko Tsuneta , Masanari Koguchi , Mari Nozoe , Muneyuki Fukuda , Mitsugu Sato
IPC分类号： H01J37/04 , G01Q30/04 , H01J37/153 , H01J37/21 , H01J37/22 , H01J37/28 , G01N23/225
CPC分类号： H01J37/21 , H01J37/226 , H01J37/28 , H01J2237/1501 , H01J2237/216 , H01J2237/2482 , H01J2237/31745 , H01J2237/31749
摘要： By use of charged particle beam images picked up in different conditions, a positional displacement caused by parallax is analyzed, and an optics of an apparatus for charged particle beam microscopy is corrected automatically. An analysis method using phase difference of Fourier transform images and having analytic accuracy lower than that for one pixel is adopted for the displacement analysis. In addition, a degree of coincidence between images calculated in this analysis method is used as a criterion for evaluating the reliability of an analysis result. Since the analysis method based on parallax is low in specimen dependency, the operation range is expanded. In addition, by adopting a high-accuracy displacement analysis method, the apparatus correction accuracy is improved by one digit. A malfunction preventing flow is added using the degree of coincidence as a judgement criterion. Thus, the apparatus can deal with unmanned operation. In addition, the degree of coincidence can be used as a monitor of inspection states or a record of states in an inspection apparatus.

17. 发明授权

US06570156B1 Autoadjusting electron microscope 有权
标题翻译：自动调整电子显微镜
公开(公告)号：US06570156B1
公开(公告)日：2003-05-27
申请号：US09571976
申请日：2000-05-16
申请人： Ruriko Tsuneta , Masanari Koguchi , Isao Nagaoki , Hiroyuki Kobayashi
发明人： Ruriko Tsuneta , Masanari Koguchi , Isao Nagaoki , Hiroyuki Kobayashi
IPC分类号： G21K700
CPC分类号： H01J37/26 , H01J37/28 , H01J2237/216 , H01J2237/221 , H01J2237/2487 , Y10S977/869 , Y10S977/881
摘要： An autoadjusting electron microscope in which an image processor derives a third image constituting an analysis image from first and second images of a specimen by Fourier-transforming the first and second images to produce Fourier-transformed first and second images, computing a phase variant image from the Fourier-transformed first and second images, and Fourier-transforming or inverse Fourier-transforming the phase variant image to obtain the third image. A computer determines an amount of displacement between the first image and the second image based on a peak appearing in the third image. An identifier determines whether a consistency between the first image and the second image is within a predetermined range based on a magnitude of the peak appearing in the third image. A transformer transforms results obtained by the computer and the identifier into an amount of defocus of an electron lens relative to the specimen.
摘要翻译：一种自动调整电子显微镜，其中图像处理器通过对第一和第二图像进行傅立叶变换来产生构图分析图像的第一图像和第二图像，以产生经傅立叶变换的第一和第二图像，计算来自傅里叶变换的第一和第二图像，以及傅里叶变换或逆傅里叶变换相变图像以获得第三图像。计算机基于出现在第三图像中的峰值来确定第一图像和第二图像之间的位移量。标识符基于出现在第三图像中的峰值的大小来确定第一图像和第二图像之间的一致性是否在预定范围内。变压器将由计算机和标识符获得的结果转换成电子透镜相对于样本的散焦量。

18. 发明授权

US5932880A Scintillator device and image pickup apparatus using the same 失效
标题翻译：闪光装置及使用其的图像拾取装置
公开(公告)号：US5932880A
公开(公告)日：1999-08-03
申请号：US850480
申请日：1997-05-05
申请人： Masanari Koguchi , Hiroshi Kakibayashi , Tetsuya Ooshima , Kenji Sameshima , Tatsuo Makishima , Keiichi Kanehori , Hiroyuki Shinada
发明人： Masanari Koguchi , Hiroshi Kakibayashi , Tetsuya Ooshima , Kenji Sameshima , Tatsuo Makishima , Keiichi Kanehori , Hiroyuki Shinada
IPC分类号： H01J37/244 , H01J29/20
CPC分类号： H01J37/244 , H01J2237/2443
摘要： A scintillator device and an image pickup apparatus using the scintillator, in which the scintillator for converting an input particle or electron beam image into an optical image is applied with a voltage between electrodes formed at the input plane of the electron beam and the output plane of scintillation. This voltage generates an electric field in the scintillator so that scattering of a charged particle beam in the scintillator is prevented and the resolution and S/N ratio can be improved while retaining a large amount of scintillation. Accordingly, the shift amount of low energy charged particle beams from the incident axis, which greatly influences degradation of the resolution and S/N ratio, can be suppressed.
摘要翻译：使用闪烁体的闪烁体装置和图像拾取装置，其中将输入粒子或电子束图像转换成光学图像的闪烁体在电子束的输入平面和形成在电子束的输出平面的电极之间施加电压闪烁。该电压在闪烁器中产生电场，从而防止了闪烁体中的带电粒子束的散射，并且能够在保持大量的闪烁的同时提高分辨率和S / N比。因此，可以抑制极大地影响分辨率和S / N比的劣化的来自入射轴的低能量带电粒子束的偏移量。

19. 发明授权

US5866905A Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US5866905A
公开(公告)日：1999-02-02
申请号：US686740
申请日：1996-07-26
申请人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
发明人： Hiroshi Kakibayashi , Yasuhiro Mitsui , Hideo Todokoro , Katsuhiro Kuroda , Masanari Koguchi , Kazutaka Tsuji , Tatsuo Makishima , Mikio Ichihashi , Shigeto Isakozawa , Ruriko Tsuneta , Kuniyasu Nakamura , Kensuke Sekihara , Jun Motoike
IPC分类号： H01J37/26 , H01J37/28
CPC分类号： H01J37/28 , G01N23/046 , G01R31/305 , G01N2223/419 , H01J2237/226 , H01J2237/2802 , H01J2237/2807
摘要： A scanning transmission electron microscope including an electron detection system having a scattering angle limiting aperture (for the inner angle) and a scattering angle limiting aperture (for the outer angle) between a specimen and an electron detector (comprising a scintillator and a light guide) and only one electron detector is installed.
摘要翻译：一种扫描透射电子显微镜，包括具有散射角限制孔径（内角）的电子检测系统和检体与电子检测器（包括闪烁体和光导体）之间的散射角限制孔径（外角）并且仅安装一个电子检测器。

20. 发明授权

US08481932B2 Charged particle beam analyzer and analysis method 有权
标题翻译：带电粒子束分析仪及分析方法
公开(公告)号：US08481932B2
公开(公告)日：2013-07-09
申请号：US13433362
申请日：2012-03-29
申请人： Yoshihiro Anan , Masanari Koguchi
发明人： Yoshihiro Anan , Masanari Koguchi
IPC分类号： H01J37/26
CPC分类号： H01J37/228 , H01J37/244 , H01J37/28 , H01J2237/024 , H01J2237/2445 , H01J2237/24485
摘要： In a charged particle beam analyzer irradiating a charged particle beam to a sample in a vacuum container and detecting an X-ray generated from the sample to analyze the sample, two or more X-ray lenses configured in different manners are provided in the vacuum container. This no longer requires air opening in the vacuum container following X-ray lens replacement and also no longer requires vacuuming, making it possible to perform analysis with high efficiency and high sensitivity.
摘要翻译：在带电粒子束分析仪中将带电粒子束照射到真空容器中的样品并检测从样品产生的X射线以分析样品，在真空容器中设置两个或更多个以不同方式配置的X射线透镜。这不再需要X射线透镜更换后的真空容器中的开口，也不再需要抽真空，可以以高效率和高灵敏度进行分析。

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