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    • 91. 发明授权
    • Fastening element
    • 紧固件
    • US06848575B2
    • 2005-02-01
    • US10347167
    • 2003-01-17
    • Hideyuki UenoAkihiro Goto
    • Hideyuki UenoAkihiro Goto
    • B65D85/20B65C7/00B65D63/10B65D69/00G09F3/03G09F3/14G09F3/16B65D85/24
    • G09F3/037B65D63/1027B65D69/00G09F3/14Y10S206/82Y10T292/496Y10T292/499
    • A plurality of fastening elements are arranged parallel to each other, each of the unit fastening elements having a filament section, an inserting head section equipped with a suitable engagement section at one end, and a socket section equipped with a hole for irreversibly passing the inserting head section located at the other end. The socket sections arranged on one connection bar, and the inserting head sections are arranged on another connection bar. The connection bars are closely arranged to each other so as to be oppositely disposed to each other with a predetermined length displaced to each other along a longitudinal direction of the bars. The filament section of each one of the unit fastening elements is formed in a curved configuration which is in fixed condition, so jamming is reduced when the operator couples the fastening element using a coupler gun.
    • 多个紧固元件彼此平行地布置,每个单元紧固元件具有细丝部分,在一端配备有合适接合部分的插入头部分和配备有用于不可逆地穿过插入件的孔的插座部分 头部位于另一端。 布置在一个连接杆上的插座部分和插入头部分布置在另一连接杆上。 连接杆彼此紧密地布置成沿着杆的纵向彼此相对地设置成彼此相对设置。 单元紧固元件中的每一个的细丝部分形成为处于固定状态的弯曲构造,因此当操作者使用联动枪联接紧固元件时,卡住减少。
    • 94. 发明授权
    • Wire electric discharge machining method and wire electric discharge machine utilizing pressurized gas for removing machining solution
    • 线放电加工方法和利用加压气体去除加工溶液的线放电机
    • US06713705B1
    • 2004-03-30
    • US10148545
    • 2002-06-04
    • Seiji SatouAkihiro Goto
    • Seiji SatouAkihiro Goto
    • B23H702
    • B23H7/02B23H7/10B23H7/101B23H7/102
    • A workpiece is machined by consecutively performing at least two of machining in a machining solution, machining in a mist and machining in a gas, such that at a point of time before the start of machining, except for the machining conducted in the machining solution, and a point of time after the operation of an automatic wire connecting device for conducting an automatic wire connection while the wire electrode is being held by a water column, the machining solution nozzles, can change from supplying the machining solution to supplying the pressurized gas. By the machining solution nozzles, liquid of the machining solution adhering to the workpiece and liquid adhering to the machining solution nozzle which is capable of dripping onto a face to be machined of the workpiece, are removed.
    • 通过连续执行加工溶液中的加工中的至少两个,在雾中进行加工和气体加工中的至少两个加工,使得在加工开始之前的时间点,除了在加工溶液中进行的加工之外, 以及在线电极被水柱保持的情况下,用于进行自动线连接的自动线连接装置的操作后的时间点,加工液喷嘴可以从供给加压溶液到供给加压气体而变化。 通过加工溶液喷嘴,去除附着在工件上的加工液的液体和附着在能够滴加到被加工面上的加工液喷嘴的液体。
    • 95. 发明授权
    • Illumination apparatus
    • 照明装置
    • US06587182B1
    • 2003-07-01
    • US09534750
    • 2000-03-24
    • Akihiro Goto
    • Akihiro Goto
    • G03B2772
    • G03F7/70583
    • A compact illumination apparatus reduces nonuniformity in the Gaussian intensity distribution of a laser beam and reduces interference noise due to an optical integrator. The illumination apparatus illuminates a mask with a predetermined pattern. A light source supplies a light beam. The light beam is split into multiple beams by multiple reflections between a totally reflective surface and a partially reflective surface. The totally reflective and partially reflective surfaces being inclined with respect to each other. The multiple beams are split to form multiple light source images.
    • 小型照明装置降低了激光束的高斯强度分布的不均匀性,并降低了由于光学积分器引起的干扰噪声。 照明装置用预定图案照亮面罩。 光源提供光束。 光束通过在全反射表面和部分反射表面之间的多次反射被分成多个光束。 全反射和部分反射的表面相对于彼此倾斜。 多个光束被分割以形成多个光源图像。
    • 97. 发明授权
    • Bipolar electrical discharge machine which detects misfire
    • 检测失火的双极放电机
    • US5919381A
    • 1999-07-06
    • US881933
    • 1997-06-25
    • Akihiro GotoMitsuyoshi WadaYoshio Ozaki
    • Akihiro GotoMitsuyoshi WadaYoshio Ozaki
    • B23H1/02B23H7/16B23H11/00
    • B23H11/00B23H1/02B23H1/022B23H1/024B23H7/16
    • An electrical discharge machine for applying a pulsed voltage to a machining gap between an electrode and a workpiece disposed opposite thereto. An insulating dielectric fluid, such as oil or water mixed with a compound additive, is disposed in the gap. A positive polarity voltage and an opposite polarity voltage are applied via switches and respective impedances to the machining gap in order to generate a discharge for machining the workpiece. A pulse having a first polarity is applied to machine the workpiece and a pulse having a second polarity is applied when the first polarity pulse is not applied. A misfire pulse detector detects an undesired drop in the machining voltage by determining whether the first polarity voltage is in a range between two voltages, the first of which has a magnitude greater than the magnitude of the machining gap during discharge and the second of which has a magnitude greater than the magnitude of the first voltage.
    • 一种放电机,用于对电极和与其相对设置的工件之间的加工间隙施加脉冲电压。 绝缘介质流体,例如与复合添加剂混合的油或水,设置在间隙中。 通过开关和相应的阻抗将正极性电压和相反极性电压施加到加工间隙,以便产生用于加工工件的放电。 施加具有第一极性的脉冲来加工工件,并且当不施加第一极性脉冲时施加具有第二极性的脉冲。 失火脉冲检测器通过确定第一极性电压是否在两个电压之间的范围内来检测加工电压的不希望的下降,第一极性电压具有大于放电期间加工间隙的幅度的幅度,第二极性电压具有 大于第一电压的大小的幅度。
    • 99. 发明授权
    • Exposure method and apparatus using holographic techniques
    • 使用全息技术的曝光方法和装置
    • US5504596A
    • 1996-04-02
    • US169055
    • 1993-12-20
    • Akihiro GotoTakashi GemmaYutaka IchiharaNobutaka MagomeNaomasa ShiraishiHiroshi ShirasuToshio Matsuura
    • Akihiro GotoTakashi GemmaYutaka IchiharaNobutaka MagomeNaomasa ShiraishiHiroshi ShirasuToshio Matsuura
    • G03F7/20G03H1/00G03H1/26
    • G03F7/70558G03F7/70625G03H1/00
    • An exposure apparatus is used for reproducing a mask pattern of a semiconductor device or the like onto a photosensitive substrate using a holography. The holography is utilized also in a process for alignment between a mask pattern hologram and an exposure region of the substrate. The pattern hologram is recorded to a recording medium by interference between an object wave from the pattern and a reference wave, and a second hologram is formed to the medium by diffraction light from an alignment mark formed on the mask. Prior to reconstruction of the pattern image, reconstruction light from the second hologram, illuminated with a reconstruction wave, is irradiated onto the substrate arranged in place of the mask. A reproduction image of the alignment mark on the substrate surface illuminated with the reconstruction light is measured, and relative displacement between the medium and the substrate is detected from a result of the measurement. The relative positional relationship between the medium and the substrate is corrected in accordance with the displacement information, and, thereafter, the surface is exposed with a reconstruction image of the pattern hologram.
    • 使用曝光装置将半导体装置等的掩模图案再现到使用全息术的感光基板上。 全息术也用于掩模图案全息图和衬底的曝光区域之间的对准的过程。 图案全息图通过来自图案的对象波与参考波之间的干涉而被记录到记录介质上,并且通过衍射光从形成在掩模上的对准标记的衍射光形成第二全息图。 在图案图像重建之前,用重建波照射的来自第二全息图的重建光被照射到布置在掩模上的衬底上。 测量用重建光照射的基板表面上的对准标记的再现图像,并且从测量结果检测介质和基板之间的相对位移。 根据位移信息来校正介质和基板之间的相对位置关系,然后用图案全息图的重构图像曝光表面。
    • 100. 发明授权
    • Microhole electric discharge machining apparatus and electric discharge machining method
    • 微孔放电加工装置和放电加工方法
    • US08933361B2
    • 2015-01-13
    • US13056609
    • 2008-07-29
    • Satoshi SuzukiAkihiro GotoKazushi Nakamura
    • Satoshi SuzukiAkihiro GotoKazushi Nakamura
    • B23H1/04B23H9/14B23H7/26B23H7/28
    • B23H9/14B23H7/265B23H7/28B23H2200/20B23H2400/10
    • A microhole electric discharge machining apparatus that forms a conical inverse-tapered hole on a workpiece by a thin wire electrode, includes, an electrode holder that holds an upper part of the thin wire electrode and feeds a lower part of the thin wire electrode downward to stretch the lower part to the workpiece by rotating the thin wire electrode; a first guide member that is arranged near the workpiece upper surface and is provided with a first guide hole through which the thin wire electrode is penetrated on a hole-machining axis; a second guide member that is arranged between the first guide member and the electrode holder and is provided with a second guide hole through which the thin wire electrode is penetrated at a position eccentric from the hole-machining axis; and a swivel driving unit that circularly swivels the second guide member around the hole-machining axis.
    • 一种微细孔放电加工装置,其通过细线电极在工件上形成锥形倒锥形孔,包括:电极保持器,其保持细线电极的上部并将细线电极的下部向下供给到 通过旋转细线电极将下部拉伸到工件; 第一引导构件,其布置在工件上表面附近并且设置有第一引导孔,细线电极穿过该第一引导孔穿过孔加工轴线; 第二引导构件,布置在第一引导构件和电极保持器之间,并且设置有第二引导孔,细线电极穿过第二引导孔偏心于孔加工轴线的位置; 以及旋转驱动单元,其围绕所述孔加工轴线旋转所述第二引导构件。