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    • 91. 发明授权
    • Photodiode for multiple wavelength operation
    • 用于多波长操作的光电二极管
    • US07485486B2
    • 2009-02-03
    • US11532762
    • 2006-09-18
    • Dong ZhengPhillip J. BenzelJoy JonesAlexander KalnitskyPerumal Ratman
    • Dong ZhengPhillip J. BenzelJoy JonesAlexander KalnitskyPerumal Ratman
    • H01L21/00
    • H01L27/1462H01L27/1463H01L31/02165
    • A method of a fabricating a multiple wavelength adapted photodiode and resulting photodiode includes the steps of providing a substrate having a first semiconductor type surface region on at least a portion thereof, implanting and forming a second semiconductor type shallow surface layer into the surface region, and forming a multi-layer anti-reflective coating (ARC) on the shallow surface layer. The forming step includes depositing or forming a thin oxide layer on the shallow surface layer and depositing a second dielectric layer different from the thin oxide layer on the thin oxide layer. An etch stop is formed on the second dielectric, wherein the etch stop includes at least one layer resistant to oxide etch. At least one oxide including layer (e.g. ILD) is then deposited on the etch stop. The oxide including layer and etch stop are then removed to expose at least a portion of the ARC to the ambient.
    • 一种制造多波长适应光电二极管和所得光电二极管的方法包括以下步骤:在其至少一部分上提供具有第一半导体类型表面区域的衬底,将表面区域中的第二半导体型浅表面层注入并形成,以及 在浅表面层上形成多层抗反射涂层(ARC)。 形成步骤包括在浅表面层上沉积或形成薄氧化物层,并在薄氧化物层上沉积不同于薄氧化物层的第二电介质层。 蚀刻停止件形成在第二电介质上,其中蚀刻停止层包括至少一层抵抗氧化物蚀刻的层。 然后将至少一种包括层(例如ILD)的氧化物沉积在蚀刻停止件上。 然后去除包括氧化物层和蚀刻停止层,以将ARC的至少一部分暴露于环境中。
    • 92. 发明申请
    • MEMORY ARRAY OF FLOATING GATE-BASED NON-VOLATILE MEMORY CELLS
    • 基于盖帽的不挥发性记忆细胞的记忆阵列
    • US20080266959A1
    • 2008-10-30
    • US11861111
    • 2007-09-25
    • Hosam HaggagAlexander KalnitskyEdgardo LaberMichael D. ChurchYun Yue
    • Hosam HaggagAlexander KalnitskyEdgardo LaberMichael D. ChurchYun Yue
    • G11C16/04
    • G11C16/0433
    • A memory array comprises a plurality of memory cells organized in a matrix of rows and columns. Each of the memory cells includes a high voltage access transistor, a floating gate memory transistor electrically connected to the access transistor, and a coupling capacitor electrically connected to the memory transistor. A first set of word lines are each electrically connected to the capacitor in each of the memory cells in a respective row. A second set of word lines are each electrically connected to the access transistor in each of the memory cells in a respective row. A first set of bit lines are each electrically connected to the access transistor in each of the memory cells in a respective column. A second set of bit lines are each electrically connected to the memory transistor in each of the memory cells in a respective column. Various combinations of voltages can be applied to the word lines and bit lines in operations to program, erase, read, or inhibit a logic state stored by the memory transistor in one or more of the memory cells.
    • 存储器阵列包括以行和列的矩阵组织的多个存储器单元。 每个存储单元包括高电压存取晶体管,电连接到存取晶体管的浮动栅极存储晶体管和电连接到存储晶体管的耦合电容器。 第一组字线分别电连接到相应行中的每个存储器单元中的电容器。 第二组字线各自电连接到相应行中的每个存储单元中的存取晶体管。 第一组位线分别电连接到相应列中每个存储单元中的存取晶体管。 第二组位线分别电连接到相应列中每个存储器单元中的存储晶体管。 在操作中可以对字线和位线施加电压的各种组合,以对存储器晶体管存储在一个或多个存储器单元中的逻辑状态进行编程,擦除,读取或禁止。
    • 96. 发明授权
    • Bipolar transistor and methods of forming bipolar transistors
    • 双极晶体管和形成双极晶体管的方法
    • US06593640B1
    • 2003-07-15
    • US10114526
    • 2002-04-01
    • Alexander KalnitskySudarsan Uppili
    • Alexander KalnitskySudarsan Uppili
    • H01L27082
    • H01L29/1004H01L29/161H01L29/167
    • A bipolar transistor comprises a base region and an an extrinsic base region being located generally adjacent to the base region. The extrinsic base region has implanted therein a dopant and a dopant diffusion-retarding substance. The dopant diffusion-retarding substance serves to reduce the diffusion of the dopant into the base region. Preferably, the dopant and diffusion-retarding substances are implanted such that there is a buffer zone in the extrinsic base region immediately adjacent to the base region into which the dopant may diffuse after implantation. The dopant may for example be boron, and the dopant diffusion-retarding substance may for example be a group IV element such as carbon or germanium.
    • 双极晶体管包括基本区域和大致相邻于基极区域的非本征基极区域。 外部基极区域注入掺杂剂和掺杂剂扩散阻滞物质。 掺杂剂扩散阻滞物质用于减少掺杂剂扩散到基极区域中。 优选地,注入掺杂剂和扩散阻滞物质,使得在植入后掺杂剂可以扩散的基极区域紧邻的外在碱性区域中存在缓冲区。 掺杂剂可以例如是硼,并且掺杂剂扩散阻滞物质可以例如是IV族元素,例如碳或锗。
    • 97. 发明授权
    • CMOS compatible pixel cell that utilizes a gated diode to reset the cell
    • CMOS兼容像素单元,利用门控二极管复位单元
    • US06380571B1
    • 2002-04-30
    • US09173276
    • 1998-10-14
    • Alexander KalnitskyAlbert BergemontPavel Poplevine
    • Alexander KalnitskyAlbert BergemontPavel Poplevine
    • H01L31113
    • H01L27/14654H01L27/14609H01L27/1463
    • The potential on a pixel cell having a gated diode and a read out transistor is set to an initial level prior to an image integration period. During the image integration period, absorbed photons cause the potential on the pixel cell to change. After the image integration period, the pixel cell is then reset and read out by applying a number of pulses to the gated diode. Each of the pulses causes a fixed amount of charge to be injected into the cell. When the potential on the cell has again returned to the initial level, the number of absorbed photons is determined by counting the number of pulses that were required to return the potential to the initial level. The read out transistor is used to determine when the potential is at the initial level by biasing the transistor to output a current that corresponds to the potential on the pixel cell.
    • 具有门控二极管和读出晶体管的像素单元上的电位在图像积分周期之前被设置为初始电平。 在图像积分期间,吸收的光子导致像素单元的电位发生变化。 在图像积分周期之后,通过向门控二极管施加多个脉冲来复位和读出像素单元。 每个脉冲导致固定量的电荷注入到电池中。 当电池上的电位再次恢复到初始电平时,通过计算将电位恢复到初始电平所需的脉冲数来确定吸收光子的数量。 读出晶体管用于通过偏置晶体管来输出对应于像素单元上的电位的电流来确定电位何时处于初始电平。