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1. 发明申请

US20060038137A1 Charged particle beam apparatus and method of forming electrodes having narrow gap therebetween by using the same 失效
标题翻译：带电粒子束装置和通过使用它们形成具有窄间隙的电极的方法
公开(公告)号：US20060038137A1
公开(公告)日：2006-02-23
申请号：US11196094
申请日：2005-08-03
申请人： Toshiaki Fujii , Masao Abe , Kunji Shigeto , Minuru Kawamura , Alekber Kasumov , Kazuhito Tsukagoshi , Yoshinobu Aoyagi
发明人： Toshiaki Fujii , Masao Abe , Kunji Shigeto , Minuru Kawamura , Alekber Kasumov , Kazuhito Tsukagoshi , Yoshinobu Aoyagi
IPC分类号： G21K7/00
CPC分类号： H01J37/3056 , H01J37/304 , H01J2237/043 , H01J2237/30466 , H01J2237/31732 , H01J2237/31737 , H01J2237/31749
摘要： A focused ion beam apparatus having two pieces of probers brought into contact with two points of a surface of a sample, a voltage source for applying a constant voltage between the two points with which the probers are brought into contact, and an ammeter for measuring a current flowing between the two points, in which a conductive film is formed to narrow a gap thereof between the two points by operating a deflection electrode and a gas gun and the current flowing between the two points is monitored, and when the current becomes a predetermined value, a focused charged particle beam irradiated to the surface of the sample is made OFF by the blanking electrode.
摘要翻译：一种聚焦离子束装置，其具有与样品表面的两个点接触的两个探测器，用于在与探测器接触的两个点之间施加恒定电压的电压源，以及用于测量在两点之间流动的电流，其中通过操作偏转电极和气枪来形成导电膜以使两点间的间隙变窄，并且监测在两点之间流动的电流，并且当电流变为预定的通过消隐电极使照射到样品表面的聚焦带电粒子束截止。

2. 发明授权

US07301159B2 Charged particle beam apparatus and method of forming electrodes having narrow gap therebetween by using the same 失效
标题翻译：带电粒子束装置和通过使用它们形成具有窄间隙的电极的方法
公开(公告)号：US07301159B2
公开(公告)日：2007-11-27
申请号：US11196094
申请日：2005-08-03
申请人： Toshiaki Fujii , Masao Abe , Kunji Shigeto , Minuru Kawamura , Alekber Yu Kasumov , Kazuhito Tsukagoshi , Yoshinobu Aoyagi
发明人： Toshiaki Fujii , Masao Abe , Kunji Shigeto , Minuru Kawamura , Alekber Yu Kasumov , Kazuhito Tsukagoshi , Yoshinobu Aoyagi
IPC分类号： A61N5/00
CPC分类号： H01J37/3056 , H01J37/304 , H01J2237/043 , H01J2237/30466 , H01J2237/31732 , H01J2237/31737 , H01J2237/31749
摘要： A focused ion beam apparatus having two pieces of probers brought into contact with two points of a surface of a sample, a voltage source for applying a constant voltage between the two points with which the probers are brought into contact, and an ammeter for measuring a current flowing between the two points, in which a conductive film is formed to narrow a gap thereof between the two points by operating a deflection electrode and a gas gun and the current flowing between the two points is monitored, and when the current becomes a predetermined value, a focused charged particle beam irradiated to the surface of the sample is made OFF by the blanking electrode.
摘要翻译：一种聚焦离子束装置，其具有与样品表面的两个点接触的两个探测器，用于在与探测器接触的两个点之间施加恒定电压的电压源，以及用于测量在两点之间流动的电流，其中通过操作偏转电极和气枪来形成导电膜以使两点间的间隙变窄，并且监测在两点之间流动的电流，并且当电流变为预定的通过消隐电极使照射到样品表面的聚焦带电粒子束截止。

3. 发明授权

US08664598B2 Electron microscope and specimen analyzing method 有权
标题翻译：电子显微镜和样品分析方法
公开(公告)号：US08664598B2
公开(公告)日：2014-03-04
申请号：US12931411
申请日：2011-01-28
申请人： Masakatsu Hasuda , Atsushi Uemoto , Toshiaki Fujii , Junichi Tashiro
发明人： Masakatsu Hasuda , Atsushi Uemoto , Toshiaki Fujii , Junichi Tashiro
IPC分类号： H01J37/29
CPC分类号： G01N23/225 , H01J37/28
摘要： An electron microscope has a focused ion beam column positioned relative to an electron beam column so that the focused ion beam substantially perpendicularly intersects the electron beam. A backscattered electron detector is positioned relative to the focused ion beam column so that the direction normal to a detection plane of the backscattered electron detector is substantially perpendicular to the direction of the focused ion beam. The backscattered electron detector is configured and positioned to detect backscattered electrons released in a spread of at least about 70 degrees in width from the surface of the section by irradiation of the section with the electron beam 1a.
摘要翻译：电子显微镜具有相对于电子束柱定位的聚焦离子束柱，使得聚焦离子束基本上垂直于电子束相交。反向散射电子检测器相对于聚焦离子束柱定位，使得垂直于后向散射电子检测器的检测平面的方向基本上垂直于聚焦离子束的方向。背散射电子检测器被配置和定位成通过照射具有电子束1a的部分来检测从该部分的表面以宽度至少约70度的扩散中释放的反向散射电子。

4. 发明授权

US08348583B2 Container and loader for substrate 有权
标题翻译：用于基材的容器和装载机
公开(公告)号：US08348583B2
公开(公告)日：2013-01-08
申请号：US10036802
申请日：2001-12-21
申请人： Toshiaki Fujii , Osamu Horita , Koji Ohyama , Toshiya Nakayama , Fumio Sakiya , Mineo Kinpara
发明人： Toshiaki Fujii , Osamu Horita , Koji Ohyama , Toshiya Nakayama , Fumio Sakiya , Mineo Kinpara
IPC分类号： B65G49/07
CPC分类号： H01L21/67772
摘要： A loader is provided, which is disposed in a low cleanliness room along a border between the low cleanliness room and a high cleanliness room, for transporting a dust free article between an inside of a container receiving the dust free article and the high cleanliness room, comprising a movable stage for mounting the container; an opening portion through which the dust free article is transported between the container and the high cleanliness room; a door for opening and closing the opening portion; a unifying means for unifying a cover of the container and the door when the container approaches the door; and a driving apparatus for moving the cover and the door unified within the loader to open and close the opening portion and the container.
摘要翻译：提供一种装载机，其设置在低洁净室和低洁净室之间的边界的低洁净室中，用于在容纳无尘物品的容器的内部和高洁净室之间运送无尘物品，包括用于安装所述容器的可移动台; 开口部分，无尘物品通过该开口部分在容器和高洁净室之间输送; 用于打开和关闭开口部分的门; 用于当容器接近门时统一容器和门的盖的统一装置; 以及驱动装置，用于将盖和门一体地移动到装载机内，以打开和关闭开口部分和容器。

5. 发明申请

US20110186734A1 Electron microscope and specimen analyzing method 有权
标题翻译：电子显微镜和样品分析方法
公开(公告)号：US20110186734A1
公开(公告)日：2011-08-04
申请号：US12931411
申请日：2011-01-28
申请人： Masakatsu Hasuda , Atsushi Uemoto , Toshiaki Fujii , Junichi Tashiro
发明人： Masakatsu Hasuda , Atsushi Uemoto , Toshiaki Fujii , Junichi Tashiro
IPC分类号： G01N23/225 , H01J37/28
CPC分类号： G01N23/225 , H01J37/28
摘要： An electron microscope includes: an electron beam column for irradiating a specimen with an electron beam; a specimen stage that supports the specimen; a scattered electron detector for detected backscattered electrons released from the specimen; and a focused ion beam column for irradiating the specimen with a focused ion beam.
摘要翻译：电子显微镜包括：用电子束照射试样的电子束柱; 支撑样本的样本台; 用于检测从样品释放的反向散射电子的散射电子检测器; 以及用聚焦离子束照射样品的聚焦离子束柱。

6. 发明申请

US20100288924A1 COMPOSITE FOCUSED ION BEAM DEVICE, PROCESS OBSERVATION METHOD USING THE SAME,AND PROCESSING METHOD 有权
标题翻译：复合聚焦离子束装置，使用该方法的方法观察方法和处理方法
公开(公告)号：US20100288924A1
公开(公告)日：2010-11-18
申请号：US12733091
申请日：2008-08-06
申请人： Takashi Kaito , Yoshitomo Nakagawa , Junichi Tashiro , Yasuhiko Sugiyama , Toshiaki Fujii , Kazuo Aita , Takashi Ogawa
发明人： Takashi Kaito , Yoshitomo Nakagawa , Junichi Tashiro , Yasuhiko Sugiyama , Toshiaki Fujii , Kazuo Aita , Takashi Ogawa
IPC分类号： H01J37/26 , H01J37/30 , H01J37/08
CPC分类号： H01J37/08 , G01N1/04 , G01N1/06 , H01J37/3005 , H01J37/3056 , H01J2237/0807 , H01J2237/0817 , H01J2237/31745
摘要： A composite focused ion beam device includes a first ion beam irradiation system 10 including a liquid metallic ion source for generating a first ion, and a second ion beam irradiation system 20 including a gas field ion source for generating a second ion. A beam diameter of the second ion beam 20A emitted from the second ion beam irradiation system 20 is smaller than that of the first ion beam 10A emitted from the first ion beam irradiation system 1
摘要翻译：复合聚焦离子束装置包括包括用于产生第一离子的液体金属离子源的第一离子束照射系统10和包括用于产生第二离子的气体离子源的第二离子束照射系统20。从第二离子束照射系统20发射的第二离子束20A的光束直径小于从第一离子束照射系统1发射的第一离子束10A的光束直径

7. 发明授权

US07531796B2 Focused ion beam apparatus and sample section forming and thin-piece sample preparing methods 有权
标题翻译：聚焦离子束装置和样品截面成型及薄片样品制备方法
公开(公告)号：US07531796B2
公开(公告)日：2009-05-12
申请号：US11840575
申请日：2007-08-17
申请人： Junichi Tashiro , Yutaka Ikku , Toshiaki Fujii
发明人： Junichi Tashiro , Yutaka Ikku , Toshiaki Fujii
IPC分类号： H01J37/305 , H01J37/30 , G01N23/22
CPC分类号： G01N23/2255 , G01N1/32 , G01N2223/104 , G01N2223/32 , G01N2223/611 , H01J37/3005 , H01J37/3045 , H01J37/3056 , H01J2237/30466 , H01J2237/30488 , H01J2237/31745 , H01J2237/31749
摘要： Detected is a secondary electron generated by irradiating a focused ion beam while performing etching a sample section and the around through scan-irradiating the focused ion beam. From a changing amount of the detected secondary electron signal an end-point detecting mechanism detects an end point to thereby terminate the etching, so that a center position of a defect or a contact hole is effectively detected even with an FIB apparatus not having a SEM observation function.
摘要翻译：检测到的是通过照射聚焦离子束而同时进行蚀刻样品部分和周围扫描照射聚焦离子束而产生的二次电子。从检测到的二次电子信号的变化量中，终点检测机构检测终点，从而终止蚀刻，即使不具有SEM的FIB装置也能够有效地检测缺陷或接触孔的中心位置观察功能。

8. 发明申请

US20080224198A1 APPARATUS FOR WORKING AND OBSERVING SAMPLES AND METHOD OF WORKING AND OBSERVING CROSS SECTIONS 有权
标题翻译：用于工作和观察样本的工具及其工作方法和观察截面
公开(公告)号：US20080224198A1
公开(公告)日：2008-09-18
申请号：US12047013
申请日：2008-03-12
申请人： Toshiaki Fujii , Haruo Takahashi , Junichi Tashiro
发明人： Toshiaki Fujii , Haruo Takahashi , Junichi Tashiro
IPC分类号： G01N23/225
CPC分类号： H01J37/3056 , G01N1/286 , H01J2237/31745
摘要： The apparatus for working and observing samples comprises a sample plate on which a sample is to be placed; a first ion beam lens barrel capable of irradiating a first ion beam over a whole predetermined irradiation range at one time; a mask that can be arranged between the sample plate and the first ion beam lens barrel, and shields part of the first ion beam; mask-moving means capable of moving the mask; a charged particle beam lens barrel capable of scanning a focused beam of charged particles in the range irradiated with the first ion beam; and detection means capable of detecting a secondarily generated substance.
摘要翻译：用于工作和观察样品的装置包括样品板，样品板将放置在样品板上; 一次能够在整个预定照射范围内照射第一离子束的第一离子束透镜镜筒; 可以在样品板和第一离子束透镜筒之间布置的掩模，并且屏蔽第一离子束的一部分; 掩模移动装置，能够移动面罩; 带电粒子束透镜镜筒，其能够扫描在第一离子束照射的范围内的聚集的带电粒子束; 以及能够检测次要生成物质的检测装置。

9. 发明授权

US06939859B1 Skin preparations for external use 有权
标题翻译：外用皮肤准备
公开(公告)号：US06939859B1
公开(公告)日：2005-09-06
申请号：US09937414
申请日：2000-03-30
申请人： Hironobu Murase , Toshiaki Fujii
发明人： Hironobu Murase , Toshiaki Fujii
IPC分类号： A01N43/04 , A01N43/16 , A61K31/35 , A61K31/70 , A61K31/7048 , A61P17/00 , A61P17/16 , A61P43/00 , C07H15/26 , C07H17/065
CPC分类号： A61K8/602 , A61Q19/02 , A61Q19/08
摘要： An dermatological agent for external use is disclosed which contains a chromanol glycoside represented by the following general formula (1) (wherein R1, R2, R3, and R4 which may be the same or different, each represent a hydrogen atom or a lower alkyl group, R5 represents a hydrogen atom, a lower alkyl group, or a lower acyl group, X represents a monosaccharic residue or an oligosaccharic residue optionally having the hydrogen atom of the hydroxyl group in the saccharic residue substituted with a lower alkyl group or a lower acyl group, n represents an integer in the range of 0-6, and m represents an integer in the range of 1-6). This is a novel dermatological agent for external use which excels in stability and percutaneous absorbency, manifests an effective action safely at a small application rate, and effectively prevents and cures the dermopathy. It is very useful as an agent for preventing and curing the disorders caused by the ultraviolet light, an agent for preventing and allaying the sedimentation of pigment in the skin, an agent for beautifying the skin in white, an agent for preventing the senescence of the skin, an agent for activating cells, an agent for preventing and curing the dermopathy, and a cosmetic preparation.
摘要翻译：公开了一种外用皮肤病药，其含有以下通式（1）表示的色原糊精糖苷（其中R 1，R 2，R 3，R 3，和/或相同或不同的R 4各自表示氢原子或低级烷基，R 5表示氢原子，低级烷基基团或低级酰基，X表示任选具有由低级烷基或低级酰基取代的糖残基中的羟基的氢原子的单糖残基或寡糖残基，n表示在 0-6，m表示1-6的整数。这是一种外用的新型皮肤病学药剂，其稳定性和经皮吸收性优异，以小的施用率安全地显示出有效的作用，有效地防止并治愈了皮肤病。作为用于预防和治疗由紫外线引起的疾病的药剂，用于预防和消除皮肤中色素沉淀的药剂，美白白皮肤剂，防止紫外线衰老的药剂是非常有用的皮肤，活化细胞的药剂，用于预防和治愈皮肤病的药剂和化妆品制剂。

10. 发明授权

US06489612B1 Method of measuring film thickness 失效
标题翻译：测量薄膜厚度的方法
公开(公告)号：US06489612B1
公开(公告)日：2002-12-03
申请号：US09701606
申请日：2001-01-30
申请人： Toshio Kodama , Yasuhiko Sugiyama , Toshiaki Fujii
发明人： Toshio Kodama , Yasuhiko Sugiyama , Toshiaki Fujii
IPC分类号： H01J3728
CPC分类号： G01N23/2258 , G01B15/02 , H01J37/304 , H01J37/3056 , H01J2237/2814 , H01J2237/30466
摘要： A thin film is etched by irradiating charged particles to a surface of the thin film. An etching time of the thin film is measured by observing a change in intensity of secondary charged particles emitted by etched portions of the thin film. A thickness of the thin film is calculated in accordance with the measured etching time.
摘要翻译：通过将带电粒子照射到薄膜的表面来蚀刻薄膜。通过观察由薄膜的蚀刻部分发射的二次带电粒子的强度变化来测量薄膜的蚀刻时间。根据测量的蚀刻时间计算薄膜的厚度。

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