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1. 发明公开

US20240369505A1 METHOD AND SYSTEM FOR SPECTROSCOPIC ANALYSIS 审中-公开
公开(公告)号：US20240369505A1
公开(公告)日：2024-11-07
申请号：US18774491
申请日：2024-07-16
申请人： FEI Company
发明人： Garrett Budnik
IPC分类号： G01N23/2258
CPC分类号： G01N23/2258 , G01N2223/081
摘要： Methods and systems for spectroscopic analysis of focused ion beam induced optical emission include accessing a spectrum acquired from a sample responsive to irradiating the sample with an ion beam and identifying the spectral peaks of the spectrum. The emission type of the spectral peak is determined based on a spectral resolution of a light collection system for collecting the spectrum. The emission types include elemental emission, molecular emission, and bandgap emission.

2. 发明公开

US20240090111A1 MULTIPLE PLASMA ION SOURCE FOR INLINE SECONDARY ION MASS SPECTROMETRY 审中-公开
公开(公告)号：US20240090111A1
公开(公告)日：2024-03-14
申请号：US17941473
申请日：2022-09-09
申请人： Applied Materials, Inc.
发明人： Ming Hong YANG , Dimitry KOUZMINOV , Arun Ramaswamy SRIVATSA
IPC分类号： H05H1/00 , H01J37/32 , H01J37/34
CPC分类号： H05H1/0037 , H01J37/3244 , H01J37/3402 , G01N23/2258
摘要： Methods leverage premixed gas mixtures to perform a metrology process on a substrate using an inline secondary ion mass spectrometry (SIMS) process. The premixed gas mixture of two or more gases is injected into a plasma chamber that is configured to produce sputtering ions for the inline SIMS process. The two or more gases produce non-metallic ion species which are compatible with downstream substrate fabrication processes and allow further fabrication to be performed on the substrate after the inline SIMS process has completed. The sputtering ions are ejected from the plasma chamber into a magnetic field. The intensity of the magnetic field is altered to select a single species of ions. The single species of ions are directed towards a surface of the substrate and secondary ions sputtered from the surface of the substrate by the selected species of ions are detected and analyzed.

3. 发明公开

US20230175993A1 JOINT NANOSCALE THREE-DIMENSIONAL IMAGING AND CHEMICAL ANALYSIS 审中-公开
公开(公告)号：US20230175993A1
公开(公告)日：2023-06-08
申请号：US18104508
申请日：2023-02-01
申请人： LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
发明人： Tom Wirtz , Florian Vollnhals
IPC分类号： G01N23/2251 , G01N23/2258 , H01J49/00
CPC分类号： G01N23/2251 , G01N23/2258 , H01J49/0004
摘要： A method for in-situ joint nanoscale three-dimensional imaging and chemical analysis of a sample. A single charged particle beam device is used for generating a sequence of two-dimensional nanoscale images of the sample, and for sputtering secondary ions from the sample. which are analysed using a secondary ion mass spectrometry device. The two-dimensional images are combined into a three-dimensional volume representation of the sample, the data of which is combined with the results of the chemical analysis.

4. 发明申请

US20170343529A1 SINGLE CELL ANALYSIS USING SECONDARY ION MASS SPECTROMETRY 审中-公开
公开(公告)号：US20170343529A1
公开(公告)日：2017-11-30
申请号：US15679044
申请日：2017-08-16
申请人： The Board of Trustees of the Leland Stanford Junior University
发明人： Garry P. Nolan , Sean C. Bendall , Robert M. Angelo
IPC分类号： G01N33/483 , G01N23/225 , H01J49/00 , H01J49/14
CPC分类号： G01N33/4833 , G01N23/2258 , H01J49/0036 , H01J49/14 , H01J49/142
摘要： A method of analyzing a population of cells is disclosed. In certain embodiments, the method includes i) obtaining an array of cells on a substrate, wherein the cells are labeled with one or more mass tags and are separated from one another, ii) measuring, using secondary ion mass spectrometry (SIMS), the abundance of the one or more mass tags at a plurality of locations occupied by the cells, thereby generating, for each individual cell measured, a set of data, and iii) outputting the set of data for each of the cells analyzed. Also provided herein are systems that find use in performing the subject method. In some embodiments, the system is an automated system for analyzing a population of cells using SIMS.

5. 发明授权

US09372161B2 Ion source, ion gun, and analysis instrument 有权
标题翻译：离子源，离子枪和分析仪
公开(公告)号：US09372161B2
公开(公告)日：2016-06-21
申请号：US14600338
申请日：2015-01-20
申请人： ULVAC-PHI, Inc.
发明人： Daisuke Sakai , Mauo Sogou , Kenzo Hiraoka
IPC分类号： G01N23/02 , H01J49/26 , H01J37/08 , H01J37/252 , H01J27/26 , H01J49/04 , H01J49/16 , G01N23/225
CPC分类号： G01N23/02 , G01N23/2258 , H01J27/26 , H01J37/08 , H01J37/252 , H01J49/0468 , H01J49/165 , H01J2237/0812 , H01J2237/2527 , H01J2237/3174
摘要： Provided are an ion source, an ion gun, and an analysis instrument, which are capable of performing sputtering without damage to a surface of a sample and improving detection sensitivity in mass spectroscopy. In the ion source, an emission opening to which ionization liquid is supplied is disposed in an electric field formed in vacuum environment by an extracting electrode so that super large droplet cluster ions are generated from the emission opening. When the sample is irradiated with a super large droplet cluster ion beam, the sample surface is subjected to sputtering without damage, so as to remove contamination substances or to expose a new surface of the sample. In mass spectroscopy, detection sensitivity is improved.
摘要翻译：提供离子源，离子枪和分析仪器，其能够进行溅射而不损害样品的表面并提高质谱中的检测灵敏度。在离子源中，在真空环境中由提取电极形成的电场中配置有供给电离液体的发射开口，从而从发射开口产生超大的液滴簇离子。当用超大液滴簇离子束照射样品时，样品表面经受溅射而不损坏，以便去除污染物质或露出样品的新表面。在质谱中，检测灵敏度得到改善。

6. 发明申请

US20150313801A1 DETECTION OF CARIOUS DENTIN TISSUE AND REMOVAL THEREOF BY MEANS OF A DENTAL INSTRUMENT 审中-公开
标题翻译：通过牙科仪器检测重度牙垢组织及其去除
公开(公告)号：US20150313801A1
公开(公告)日：2015-11-05
申请号：US14647495
申请日：2013-11-29
申请人： RLS GLOBAL AB
发明人： Ulrica ALMHÖJD , Åke NILSSON , Fredrik FLORBERGER , Kenth HANSSEN
IPC分类号： A61K6/00 , A61C5/02 , G01N23/225 , A61B5/00 , G01N33/483 , G01N21/35 , A61C3/02 , A61C19/06
CPC分类号： A61C3/02 , A61B5/0088 , A61B5/4547 , A61C5/42 , A61C19/063 , A61K6/002 , A61K6/0061 , G01N21/35 , G01N23/2258 , G01N33/4833 , G01N2021/3595
摘要： The application relates to a method for testing a dental instrument comprising the steps of: a) subjecting healthy dentin tissue free from smear layer(s) to treatment with a dental instrument, thereby yielding treated dentin tissue, b) addition of a composition comprising one or more hydrazine derivative(s) to the treated dentin tissue obtained in step a), c) examining if the treated dentin tissue in step b) is stained by the one or more hydrazine derivative(s), and d) determining whether or not the treated dentin tissue contains a smear layer, wherein said one or more hydrazine derivatives is a compound of formula (I) RNHNH2 wherein R is a chemical group containing a chromophore or forming a chromophore with NHNH2. Further, the application relates to a kit of parts for detection and removal of carious dentin tissue and to a method for detection and removal of carious dentin tissue.
摘要翻译：本申请涉及一种用于牙科器械测试的方法，包括以下步骤：a）使没有涂片层的健康牙本质组织用牙科设备进行治疗，从而产生经治疗的牙质组织，b）加入包含一种或更多的肼衍生物，c）检查步骤b）中处理的牙质组织是否被一种或多种肼衍生物染色，以及d）确定是否经处理的牙质组织含有涂片层，其中所述一种或多种肼衍生物是式（I）化合物RNHNH 2，其中R是含有发色团或与NHNH 2形成发色团的化学基团。此外，本申请涉及用于检测和去除龋牙质牙本质组织的试剂盒以及用于检测和去除龋齿牙本质组织的方法。

7. 发明申请

US20140374587A1 ION GROUP IRRADIATION DEVICE AND SECONDARY ION MASS SPECTROMETER 有权
标题翻译：离子组辐射器件和二次离子质谱仪
公开(公告)号：US20140374587A1
公开(公告)日：2014-12-25
申请号：US14307696
申请日：2014-06-18
申请人： CANON KABUSHIKI KAISHA
发明人： Yohei Murayama , Kota Iwasaki , Masafumi Kyogaku
IPC分类号： H01J49/10
CPC分类号： H01J49/10 , G01N23/2258 , G01N2223/105 , G01N2223/314 , H01J49/142
摘要： The present invention provides an ion group irradiation device which includes: an ion source which generates an ion; and an ion group selecting unit which selects an ion group containing a cluster ion from ions released from the ion source, in an ion group irradiation device for irradiating a sample with the ion group, wherein the ion source has a pressure gradient forming unit for changing a pressure with which a material of the cluster ion is jetted, with time, the ion group selecting unit has a chopper which performs a chopping operation of selecting the ion group by passing and blocking the cluster ions in a traveling direction by the opening and closing of the chopper, and the chopper performs two or more times of the chopping operations per one time of a pressure gradient forming operation by the pressure gradient forming unit.
摘要翻译：本发明提供一种离子组照射装置，其包括：离子源，其产生离子; 以及离子组选择单元，其在离子源照射装置中从离子源释放的离子中选择含有离子团的离子群，其中离子源具有用于变化的压力梯度形成单元离子组选择单元随时间喷射簇离子的材料的压力，具有斩波器，该斩波器通过使开闭通过并阻挡簇离子在行进方向进行选择离子群，进行斩波动作的斩波器，并且所述斩波器通过所述压力梯度形成单元进行每次压力梯度形成操作的两次或多次斩波操作。

8. 发明申请

US20140374585A1 ION GROUP IRRADIATION DEVICE, SECONDARY ION MASS SPECTROMETER, AND SECONDARY ION MASS SPECTROMETRY METHOD 审中-公开
标题翻译：离子组辐射装置，二次离子质谱仪和二次离子质谱方法
公开(公告)号：US20140374585A1
公开(公告)日：2014-12-25
申请号：US14296973
申请日：2014-06-05
申请人： CANON KABUSHIKI KAISHA
发明人： Yohei Murayama , Masafumi Kyogaku , Kota Iwasaki , Naofumi Aoki
IPC分类号： H01J49/14 , H01J49/00 , H01J49/44
CPC分类号： H01J49/142 , G01N23/2258 , G01N2223/0816 , G01N2223/506
摘要： The present invention provides an ion group irradiation device for irradiating a sample with an ion group, comprising: an ion group selecting unit configured to select, from ions released from an ion source, at least two ion groups formed of ions having different average masses; and a primary ion irradiation unit configured to irradiate the sample with the at least two ion groups selected by the ion group selecting unit, wherein the ion group selecting unit selects at least one ion group and further selects the at least two ion groups from each of the selected at least one ion group.
摘要翻译：本发明提供了一种用于对离子基团照射样品的离子组照射装置，包括：离子组选择单元，被配置为从离子源释放的离子中选择由具有不同平均质量的离子形成的至少两个离子基; 以及初级离子照射单元，被配置为用所述离子群选择单元选择的所述至少两个离子群照射所述样品，其中所述离子选择单元选择至少一个离子基团，并且还从所述离子组中选择所述至少两个离子基团所选择的至少一个离子基团。

9. 发明授权

US08669525B2 Sample inspection methods, systems and components 有权
标题翻译：样品检验方法，系统和组件
公开(公告)号：US08669525B2
公开(公告)日：2014-03-11
申请号：US12997686
申请日：2009-05-26
申请人： Sybren Sijbrandij , John Notte, IV , William B. Thompson
发明人： Sybren Sijbrandij , John Notte, IV , William B. Thompson
IPC分类号： H01J37/26
CPC分类号： G01N23/2251 , G01N23/2208 , G01N23/2258 , H01J37/244 , H01J37/28 , H01J2237/0807 , H01J2237/2441 , H01J2237/2444 , H01J2237/2445 , H01J2237/24475 , H01J2237/24485 , H01J2237/2449 , H01J2237/24585 , H01J2237/24592 , H01J2237/2803 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： The disclosure relates to sample inspection using an ion-beam microscope. In some embodiments, the disclosure involves the use of multiple detectors, each of which provides different information about a sample.
摘要翻译：本公开涉及使用离子束显微镜的样品检查。在一些实施例中，本公开涉及多个检测器的使用，每个检测器提供关于样品的不同信息。

10. 发明授权

US08614416B2 Nonoparticulate assisted nanoscale molecular imaging by mass spectrometery 有权
标题翻译：通过质谱法测定无微粒辅助纳米级分子成像
公开(公告)号：US08614416B2
公开(公告)日：2013-12-24
申请号：US13156111
申请日：2011-06-08
申请人： J. Albert Schultz , Thomas F. Egan , Ernest K. Lewis , Steven Ulrich , Kelley L. Waters
发明人： J. Albert Schultz , Thomas F. Egan , Ernest K. Lewis , Steven Ulrich , Kelley L. Waters
IPC分类号： H01J49/40 , H01J49/26 , H01J37/26 , G01N21/64
CPC分类号： H01J49/10 , G01N21/64 , G01N21/6458 , G01N21/65 , G01N21/658 , G01N23/2258 , G01N2021/6417 , H01J49/0004 , H01J49/0422 , H01J49/0463 , H01J49/142 , H01J49/164 , H01J49/26 , H01J49/40
摘要： Methods and devices for mass spectrometry are described, specifically the use of nanoparticulate implantation as a matrix for secondary ion and more generally secondary particles. A photon beam source or a nanoparticulate beam source can be used a desorption source or a primary ion/primary particle source.
摘要翻译：描述了用于质谱的方法和装置，具体地，使用纳米颗粒注入作为二次离子的基质，更一般地说是二次粒子。光子束源或纳米颗粒束源可用于解吸源或初级离子/一次粒子源。

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