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    • 1. 发明授权
    • 필름 박리 방법 및 필름 박리 장치
    • 薄膜剥离法和薄膜剥离装置
    • KR100983910B1
    • 2010-09-28
    • KR1020087010639
    • 2006-07-05
    • 도쿄 세이미츄 코퍼레이션 리미티드
    • 가나자와마사키
    • H01L21/683H01L21/304
    • H01L21/67132B23K26/40B23K2203/50H01L21/3043H01L21/68764Y10T29/49815Y10T29/49819Y10T29/49822Y10T29/53683Y10T156/1092Y10T156/1168Y10T156/195
    • 웨이퍼(20)의 외주부를 포함하는 제1 부분(121)과 이 제1 부분보다 안쪽에 위치하는 제2 부분(122)에 첩부된 필름(3)을 박리하는 필름 박리 장치(100)에 있어서, 웨이퍼의 제1 부분의 필름이 제2 부분의 필름보다 위쪽에 위치하도록 제1 부분 및/또는 제2 부분을 상대적으로 이동시키는 이동 수단(61, 62)과, 제1 부분 및 제2 부분에 첩부된 필름 위에 박리 테이프(103)를 피딩하는 테이프 피딩 수단(142)과, 테이프 피딩 수단으로부터 피딩된 박리 테이프를 제1 부분의 필름에만 눌러 붙이고 제1 부분을 따라서 이동시킴으로써, 필름을 웨이퍼의 제1 부분 및 제2 부분으로부터 박리하는 박리수단(146)을 구비하는 필름 박리 장치가 제공된다. 이것에 의하여, 표면 보호 필름을 박리할 때에 웨이퍼가 파손되는 것이 방지된다.
      웨이퍼, 필름, 박리, 보호 필름
    • 在第一部分121和位于在内侧比第一部分122的第二部分,用于剥离粘贴到包含晶片20的周边部的膜(3)的膜分离装置(100), 粘贴到所述第一部分和/或所述移动装置(61,62),第一部分和第二部分的相对运动的第二部分被加载的第一部分被定位在晶片的第二部分的膜上方 带输送装置142用于供给剥离用带(103)在薄膜上,移动把从带馈送供给的剥离用带按压装置仅沿着所述第一部分的所述第一部分的膜,所述膜晶片1的 以及用于将第一部分和第二部分彼此剥离的剥离装置(146)。 因此,当表面保护膜被剥离时,防止晶片破裂。
    • 4. 发明授权
    • 웨이퍼 링 테이프 제거 장치
    • 웨이퍼링테이프제거장치
    • KR100389513B1
    • 2003-06-27
    • KR1020000074290
    • 2000-12-07
    • 삼성전자주식회사
    • 고석
    • H01L21/02
    • H01L21/67132Y10S156/941Y10T29/49819Y10T29/49822Y10T156/1051Y10T156/19
    • An apparatus for removing a wafer ring tape, on which defective chips remain, from a wafer ring after normal chips are detached from the wafer ring tape, is provided. The apparatus comprises a ring table for supporting a tape-adhered wafer ring in which the wafer ring tape is attached to the wafer ring; a detaching head positionable above the ring table and movable for detaching the wafer ring tape from the wafer ring; a blocking pin disposed under the ring table to support the wafer ring tape detached from the wafer ring; and a pair of compressing plates disposed under the ring table to compress the wafer ring tape supported by the blocking pin.
    • 本发明提供一种在晶片环带上剥离普通芯片后,从晶片环上除去残留有缺陷芯片的晶片环带的装置。 该设备包括:环形台,用于支撑粘合有胶带的晶片环,其中晶片环带附着到晶片环; 可拆卸的头部,可定位在环形台上方并可移动以将晶片环带从晶片环上拆下; 设置在所述环形台下方以阻挡从所述晶片环脱离的所述晶片环带的阻挡销; 以及一对压缩板,设置在环形台下方以压缩由阻挡销支撑的晶片环带。
    • 9. 发明公开
    • 풍차용 설비의 교환 방법
    • 更换风车设备的方法
    • KR1020090096413A
    • 2009-09-10
    • KR1020097008761
    • 2008-05-28
    • 미츠비시 쥬고교 가부시키가이샤
    • 누마지리도모히로
    • F03D11/04F03D1/06F03D11/00
    • B66C17/04B66C23/207F03D13/10F03D13/40F03D80/00F03D80/50F05B2240/916Y02E10/721Y02E10/726Y02E10/728Y10T29/49318Y10T29/49819F05B2230/60F05B2230/80
    • A method of replacing a wind wheel facility can reduce costs required to replace a large-sized facility in a nacelle. The method includes a winch lifting step (S1) that, by using a permanent winch that is provided on a girder moving in the nacelle placed on a column, lifts up to the nacelle both a reciprocating winch used to replace a wind wheel facility, which is placed in the nacelle, and a balance for supporting the wind wheel facility; a wire lifting step (S2) that lifts a wire used to replace the wind wheel facility up to the nacelle from a drum placed on the ground; a winch replacement step (S3) for removing the permanent winch from the girder and mounting a replacement winch on the girder; and a wire placement step (S4) for passing the lifted wire over the reciprocating winch and a moving pulley that is provided between the balance and the girder.
    • 更换风轮设备的方法可以降低更换机舱中的大型设备所需的成本。 该方法包括:绞车提升步骤(S1),通过使用设置在放置在塔架上的机舱中的梁上设置的永久绞盘,将机舱提升到用于更换风轮设备的往复绞车,其中 被放置在机舱中,并且用于支撑风轮设备的平衡; 电线提升步骤(S2),其从放置在地面上的鼓提起用于将风轮设备更换到机舱的电线; 用于从大梁移除永久绞盘并将替换绞盘安装在大梁上的绞盘更换步骤(S3) 以及用于使提升的线材通过往复式绞盘的导线布置步骤(S4)和设置在平衡块和梁之间的移动滑轮。
    • 10. 发明公开
    • 양면 점착시트에 고정된 물품의 박리방법 및 박리장치
    • 分离固定在压敏胶粘双层涂层上的方法和装置
    • KR1020010067149A
    • 2001-07-12
    • KR1020000051942
    • 2000-09-04
    • 린텍 가부시키가이샤
    • 구로카와슈지
    • H01L21/78
    • H01L21/67092H01L21/6836H01L2221/68381H01L2221/68386Y10S438/976Y10T29/49819Y10T29/49822Y10T156/1153
    • PURPOSE: To provide a separating method and a separating apparatus for an article fixed to a pressure sensitive adhesive double coated sheet which can efficiently separate an article such as a very thin wafer or the like without breaking the article by use of a heat contractive pressure sensitive adhesive double coated sheet. CONSTITUTION: In separating the article B from a sticking unit C where the article B is fixed to a support plate A through the pressure sensitive adhesive double coated sheet 1 deformed by heat to exhibit a separating effect, at least a part of the outside of the sticking unit C is heated to first raise the temperature of at least a part of the outside area of the sticking unit and raise the temperature of the other area later, whereby the article B is separated from the pressure sensitive adhesive double coated sheet 1 from the outside area toward the other area.
    • 目的:提供一种用于固定到压敏双面涂布片上的制品的分离方法和分离装置,其可以有效地分离诸如非常薄的晶片等的物品,而不会通过使用热收缩压敏感 粘合剂双面涂层。 构成:在通过热变形以显示分离效果的压敏粘合剂双面涂布片1将制品B与粘贴单元C分离,其中制品B固定到支撑板A上的情况下,至少部分外部 加热粘合单元C以首先升高粘贴单元的外部区域的至少一部分的温度,并且稍后升高另一区域的温度,由此将物品B与压敏粘合剂双面涂布片材1从 外部区域朝向其他区域。