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    • 4. 发明公开
    • 양자점 레이저 다이오드 및 그 제조방법
    • 量子激光二极管及其制造方法
    • KR1020070059871A
    • 2007-06-12
    • KR1020060056212
    • 2006-06-22
    • 한국전자통신연구원
    • 김진수이진홍홍성의곽호상최병석오대곤
    • H01S5/30
    • H01S5/341B82Y20/00H01S5/3403H01S5/3412H01S5/34306H01S2304/00
    • A quantum dot laser diode and a manufacturing method there of are provided to improve uniformity of a quantum dot by using a quantum dot of an ideal shape as an active layer of the quantum dot laser diode. A quantum dot laser diode(200) includes a first clad layer(220) on an InP substrate(210). A first lattice matching layer(230) is formed on the first clad layer(220). An active layer(240) is formed on the first lattice matching layer(230) and includes at least one quantum dot layer(245) composed of an In(Ga,Al)As quantum dot or an In(Ga,Al,P)As quantum dot grown by an alternative growth process. A second lattice matching layer(231) is formed on the active layer(240). A second clad layer(250) is formed on the second lattice matching layer(231). An ohmic-contact layer(260) is formed on the second clad layer(250).
    • 提供了量子点激光二极管及其制造方法,以通过使用量子点激光二极管的有源层的理想形状的量子点来提高量子点的均匀性。 量子点激光二极管(200)包括在InP衬底(210)上的第一覆盖层(220)。 在第一覆盖层(220)上形成第一晶格匹配层(230)。 活性层(240)形成在第一晶格匹配层(230)上,并且包括由In(Ga,Al)As量子点或In(Ga,Al,P)组成的至少一个量子点层(245) 作为通过替代生长过程生长的量子点。 第二晶格匹配层(231)形成在有源层(240)上。 第二覆盖层(250)形成在第二晶格匹配层(231)上。 欧姆接触层(260)形成在第二覆层(250)上。
    • 5. 发明公开
    • 반도체 레이저소자 및 그 제조방법
    • 半导体激光元件及其制作方法
    • KR1020020033524A
    • 2002-05-07
    • KR1020010065584
    • 2001-10-24
    • 후지필름 가부시키가이샤
    • 후쿠나가토시아키
    • H01S5/30
    • B82Y20/00H01S5/164H01S5/2004H01S5/2231H01S5/3403H01S5/3434H01S5/34373H01S5/34386
    • PURPOSE: To obtain a semiconductor laser element having an end face window structure in which high reliability is ensured from low output to high output. CONSTITUTION: An n-Ga1-z1Alz1As lower clad layer 2, an n or i-Inx2Ga1-x2As1-y2 Py2 lower first optical waveguide layer 3, an i-In0.49Ga0.51P etching block layer 4, an i-Inx2Ga1-x2As1-y2Py2 lower second optical waveguide layer 5, an compressive stain Inx1Ga1-x1As1-y1Py1 quantum well active layer 6, a p or i-Inx2Ga1-x2 As1-y2Py2 upper first optical waveguide layer 7, and an In0.49Ga0.51P cap layer 8 are formed, in layer, on an n-GaAs substrate 1. Using resist opening in the vicinity of the end face of a resonator, the In0.49Ga0.51P cap layer 8 is etched with a hydrochloric acid based etching liquid followed by etching with a sulfuric acid based etching liquid until the In0.49Ga0.51P etching block layer 4 is exposed. Subsequently, a p or i-Inx2Ga1-x2As1-y2Py2 upper second optical waveguide layer 9 and a p-Ga1-z1Alz1As first upper clad layer 10 are grown.
    • 目的:获得具有从低输出到高输出保证高可靠性的端面窗结构的半导体激光元件。 构成:n-Ga1-z1Alz1为下包层2,n或i-Inx2Ga1-x2As1-y2 Py2下第一光波导层3,i-In0.49Ga0.51P蚀刻块层4,i-Inx2Ga1-x2As1 -y2Py2下第二光波导层5,压缩染色In x1Ga1-x1As1-y1Py1量子阱有源层6,ap或i-Inx2Ga1-x2 As1-y2Py2上第一光波导层7和In0.49Ga0.51P覆盖层8 在n-GaAs衬底1上形成层。使用在谐振器的端面附近的抗蚀剂开口,用盐酸基蚀刻液蚀刻In0.49Ga0.51P覆盖层8,然后用 直到暴露了In0.49Ga0.51P蚀刻阻挡层4的硫酸基蚀刻液。 随后,生长p或i-Inx2Ga1-x2As1-y2Py2上第二光波导层9和p-Ga1-z1Alz1As第一上覆层10。
    • 10. 发明公开
    • 반도체 광전 소자
    • SEMICONDUCTOR OPTO-ELECTRONIC DEVICE
    • KR1020080035217A
    • 2008-04-23
    • KR1020060101579
    • 2006-10-18
    • 삼성전자주식회사
    • 손중곤유한열사공탄백호선이성남
    • H01L31/02
    • H01L33/02B82Y20/00H01L33/06H01L33/32H01S5/0014H01S5/2004H01S5/2009H01S5/321H01S5/3213H01S5/3403H01S5/3406H01S5/34333
    • A semiconductor opto-electronic device is provided to improve inner quantum efficiency by effectively increasing optical confinement effect and by reducing internal loss. An active layer is composed of a quantum well and a barrier layer. Upper and lower wave guide layers are formed on and under the active layer. Upper and lower clad layers are formed on and under the upper and lower wave guide layers. The stacked layers are supported by a substrate. Upper and lower optical confinement layers are formed between the active layer and the upper and lower wave guide layers. The upper optical confinement layer has a small energy gap as compared with the upper wave guide layer and an energy gap not smaller than that of the barrier layer. The lower optical confinement layer has a small energy gap as compared with the lower wave guide layer and an energy gap not greater than that of the barrier layer. An electron blocking layer can be interposed between the upper wave guide layer and the upper optical confinement layer positioned under the upper wave guide layer.
    • 提供了一种半导体光电器件,通过有效增加光限制效应和减少内部损耗来提高内量子效率。 有源层由量子阱和阻挡层组成。 上下波导层形成在有源层上和下方。 上和下包层形成在上下波导层上和下。 堆叠的层由衬底支撑。 在有源层和上下波导层之间形成上和下光限制层。 上光限制层与上波导层相比具有小的能隙,能隙不小于阻挡层的能隙。 下部光学限制层与下部波导层相比具有小的能隙,能隙不大于阻挡层的能隙。 电子阻挡层可以位于上波导层和位于上波导层下方的上光限制层之间。