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    • 1. 发明公开
    • 광 변환 모듈 및 광학 측정 시스템
    • 光学转换模块和光学测量系统
    • KR1020160010974A
    • 2016-01-29
    • KR1020140091807
    • 2014-07-21
    • 삼성전자주식회사
    • 김태중정용덕김광수전병환양유신이상길전충삼
    • H01L21/66G01N21/00
    • G01N21/9501G02B3/0006G02B21/0016G02B26/0808
    • 예시적인실시예들에따른광학측정시스템은검사대상체의표면에입사시키기위한평행광을생성하고평행광의파장을가변할수 있는평행광생성부, 평행광의경로상에위치하여소정의회전각으로회전가능하도록구비되어평행광의파장및 회전각에따라검사대상체의표면에대한평행광의입사각및 입사위치를각각변경할수 있는회전격자, 및회전격자를통과한평행광이입사각및 입사위치로검사대상체의표면에입사및 반사하여생성되는반사광을수집하는수집부를포함할수 있다. 파장을가변하고회전격자를회전시켜검사대상체의표면에대한평행광의입사각및 입사위치를변경할수 있기때문에, 빠른속도로검사대상체의표면을검사할수 있다. 광학측정시스템의결점검출효율이높일수 있고반도체생산공정의전체효율및 생산성을높일수 있다.
    • 根据本发明的实施例的光学测量系统可以包括:平行光产生部分,其产生入射到待测试物体的表面的平行光,并且可以改变平行光的波长; 旋转光栅,其可以根据旋转角度和平行光的波长相对于待测试物体的表面改变平行光的入射角和入射位置,被配置为可以以固定的旋转角度旋转 同时位于平行光的路径上; 并且收集通过经过旋转光栅的平行光产生的反射光的收集部分入射到入射角和入射位置的待测试物体表面并从其反射。 光学测量系统可以快速测试被测物体的表面,因为光学测量系统可以通过改变波长来改变平行光相对于待测物体表面的入射角和入射位置, 旋转旋转光栅。 此外,本发明可以提高光学测量系统的缺陷检测效率,并且可以提高半导体生产过程的总效率和生产率。
    • 4. 发明公开
    • 광 마이크로폰 및 제작 방법
    • 光学麦克风和制造它们
    • KR1020140084903A
    • 2014-07-07
    • KR1020120154914
    • 2012-12-27
    • 전자부품연구원
    • 임영민
    • G02B26/02G02B26/00
    • G02B26/0833G02B7/1821G02B26/02G02B26/0808H04R23/008
    • The present invention relates to an optical microphone and a manufacturing method thereof. The optical microphone includes a square frame with first and second ends facing each other, wherein the first end is opened; a vibration plate which is formed on the second end and shakes while being spaced apart from a plurality of faces of the square frame according to external sound; and a sound detector which reflects an optical signal on one surface of the vibration plate and detects the shaking of the vibration plate. Therefore, a unidirectional effect can be increased, and the reliability can be obtained as the reception of optical signal transmission is improved.
    • 本发明涉及一种光麦克风及其制造方法。 该光学麦克风包括一个正方形框架,第一和第二端部彼此面对,其中第一端部打开; 振动板,其形成在所述第二端上并且根据外部声音与所述正方形框架的多个面间隔开地摇动; 以及声音检测器,其将振动板的一个表面上的光信号反射并检测振动板的振动。 因此,可以提高单向效应,并且随着光信号传输的接收得到改善,可以获得可靠性。
    • 6. 发明公开
    • 라인 빔을 이용한 실시간 T-ray 시스템 및 이에 적용되는 토릭 렌즈
    • 使用线光束和透镜的实时T-RAY系统
    • KR1020120137918A
    • 2012-12-24
    • KR1020110057085
    • 2011-06-13
    • 한국전기연구원
    • 박욱기한성태
    • G02B3/06G02B3/00G01N21/88
    • G02B3/06G01N21/35G01N21/88G02B13/18G02B26/0808G02B27/646
    • PURPOSE: A real-time T-ray system using line beam and toric lens applied therein are provided to inspect a large amount of objects under test in a short time. CONSTITUTION: A real-time T-ray system using line beam comprises a THz source(100), a reflective mirror(110), a toric lens(200), an image lens(250), and a line detector(300). The THz source transmits the signal beam of the THz frequency band. The toric lens receives the signal beam emitted from the source part and emits toward the object under test in the form of the line beam. The image lens forms the image of the line beam passing through the object under test from the toric lens. A line detecting part detects information about the object under test with the line beam emitted from the image lens and processes in the image signal.
    • 目的:提供使用线束和复曲面镜头的实时T-ray系统,以在短时间内检查大量被测物体。 构成:使用线束的实时T射线系统包括THz源(100),反射镜(110),复曲面透镜(200),图像透镜(250)和线检测器(300)。 太赫兹源发射THz频带的信号波束。 复曲面透镜接收从源部分发射的信号光束,并以线束的形式向受测对象发射。 图像透镜从复曲面透镜形成通过被测物体的线束的图像。 线检测部分利用从图像透镜发射的线束检测关于被测物体的信息并处理图像信号。
    • 7. 发明公开
    • 원터치 확산판을 구비한 세극등 현미경
    • SLIT LAMP MICROSCOPE HAVING ONE TOUCH DIFFUSER
    • KR1020120094329A
    • 2012-08-24
    • KR1020110013767
    • 2011-02-16
    • 주식회사 휴비츠
    • 김혜경
    • G02B21/12G02B21/06G02B26/08
    • G02B21/06A61B3/135G02B21/0012G02B26/0808
    • PURPOSE: A slit lamp microscope is provided to reduce intensity reduction of illumination and visual field occlusion of an eye by being inserted or eliminated on a route of the illumination. CONSTITUTION: An illumination system housing(12) radiates measurement light of slit type. A diffusing unit(50) is combined with one end of the illumination system housing and is placed on a route of the measurement light radiated in the illumination system housing with a one touch method. The diffusing unit diffuses the measurement light and changes it into illumination. A reflective mirror(18) reflects the measurement light radiated in the illumination system housing and the illumination passing through the diffusing unit. The reflective mirror induces the measurement light and the illumination to an eye. An observing optical unit observes the eye in which the measurement light and illumination are radiated.
    • 目的:提供裂隙灯显微镜,以通过在照明路线上插入或消除来减少照明的强度降低和眼睛的视野闭塞。 构成:照明系统壳体(12)辐射狭缝型测量光。 漫射单元(50)与照明系统壳体的一端组合,并且通过一触式方式放置在照射系统壳体中辐射的测量光的路线上。 漫射单元扩散测量光并将其改变为照明。 反射镜(18)反射照射在照明系统壳体中的测量光和通过漫射单元的照明。 反射镜引起测量光和对眼睛的照明。 观察光学单元观察测量光和照射辐射的眼睛。
    • 8. 发明公开
    • 패턴 제어 또는 입사광 제어를 이용한 반사광 제어 유닛 및 반사광 제어 방법과, 이를 이용한 광학적 디스플레이 장치 및 반사광 제어 시스템
    • 反射光控制单元和控制模式通过图案控制或偶发光控制,以及光学显示装置和使用其的反射光控制系统
    • KR1020110043038A
    • 2011-04-27
    • KR1020090099961
    • 2009-10-20
    • 연세대학교 산학협력단
    • 민병권이상조한진
    • G02B26/08
    • G02B26/0858G02B7/182G02B26/0808G02B27/4205G09G3/346
    • PURPOSE: A reflection light control unit and a control method by pattern control or incident light control, and optical display device and reflection light control system using the same are provided to control a pattern including a radiation unit radiating an incident having a specific wavelength and incident angle on the surface of medium. CONSTITUTION: In a reflection light control unit and a control method by pattern control or incident light control, and optical display device and reflection light control system using the same, medium has a certain pattern on the surface of the medium and has the pitch and shape of the pattern which are changed from outer stimulus. The stimulus unit applies stimulus to the medium to control the pitch and shape of the pattern which is formed on the surface of the medium. A radiation unit radiates a light having a specific wavelength and an incident on the surface of the medium.
    • 目的:提供一种反射光控制单元和通过图案控制或入射光控制的控制方法,以及使用其的光学显示装置和反射光控制系统,以控制包括辐射具有特定波长和事件的事件的辐射单元的图案 介质表面的角度。 构成:在反射光控制单元和通过图案控制或入射光控制的控制方法以及使用其的光学显示装置和反射光控制系统中,介质在介质表面上具有一定的图案,并具有间距和形状 从外部刺激变化的模式。 刺激单元对介质施加刺激以控制形成在介质表面上的图案的间距和形状。 辐射单元辐射具有特定波长并入射在介质表面上的光。