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    • 8. 发明公开
    • 오르토-니트로벤질 에스테르 화합물 및 이를 포함하는 포지티브형 감광성 수지 조성물
    • 邻氨基苯甲酸酯化合物和包含其的阳性类型的感光性树脂组合物
    • KR1020110069467A
    • 2011-06-23
    • KR1020090126211
    • 2009-12-17
    • 제일모직주식회사
    • 정민국유용식조현용이정우정지영이종화정두영전환승
    • C07C205/42C08G73/22C08K5/32G03F7/004
    • C07C205/42C08G73/22C08K5/32G03F7/004G03F7/0045G03F7/039G03F7/0392
    • PURPOSE: A positive type photosensitive resin composition including an ortho-nitrobenzyl ester compound is provided to ensure excellent sensitivity, resolution, pattern formation capablity and residue removal proeprty. CONSTITUTION: An ortho-nitrobenzyl ester compound includes a compound represented by chemical formula 1, a compound represented by chemical formula 2, or combination thereof. In chemical formulas 1 and 2, R1, R2, R5 and R6 are the same and different and represent substituted or unsubstituted aliphatic organic group or substituted or unsubstituted alicyclic organic group; R3 and R7 are the same and different and represent a single bond, or substituted or unsubstituted divalent organic group; R4, R8 and R9 are the same and different and represent substituted or unsubstituted aliphatic organic group or substituted or unsubstituted alicyclic organic group; n1 is an integer of 1-5; n2 is an integer of 0-3; n3 is an integer of 0-4; and n2+n3 is an integer of 1 or greater.
    • 目的:提供包含邻硝基苄基酯化合物的正型感光性树脂组合物,以确保优异的灵敏度,分辨率,图案形成能力和残留物去除率。 构成:邻硝基苄基酯化合物包括由化学式1表示的化合物,由化学式2表示的化合物或其组合。 在化学式1和2中,R 1,R 2,R 5和R 6相同且不同,表示取代或未取代的脂族有机基团或取代或未取代的脂环族有机基团; R3和R7相同且不同,表示单键或取代或未取代的二价有机基团; R4,R8和R9相同且不同,表示取代或未取代的脂族有机基团或取代或未取代的脂环族有机基团; n1为1-5的整数; n2是0-3的整数; n3是0-4的整数; n2 + n3为1以上的整数。