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1. 发明公开

KR1020110064199A 액츄에이터, 스테이지 장치, 노광장치 有权
标题翻译：执行器，阶段装置，曝光装置
公开(公告)号：KR1020110064199A
公开(公告)日：2011-06-15
申请号：KR1020090120694
申请日：2009-12-07
申请人： 삼성전자주식회사
发明人： 홍상준 , 박상현 , 장상돈 , 김의석 , 구자춘 , 인용석 , 장정웅 , 김유창
IPC分类号： H01L21/68 , H01L21/027
CPC分类号： G03B27/52 , F16H25/183 , F16H25/2204 , G03F7/70258 , Y10T74/18616 , Y10T74/20341 , Y10T279/1037 , Y10T279/1041 , G03F7/70716 , G03F7/70758 , H01L21/68
摘要： PURPOSE: An actuator, a stage device, and a light exposure device are provided to overcome spatial restriction by miniaturizing the actuator. CONSTITUTION: A ball screw member(20) includes a ball screw unit(22) and a ball nut unit(23) coupled with a base member(10). A driving member(30) is coupled with the ball nut unit so that the driving member is operated together with the ball nut unit. A first direction displacement member(40) moves in a first direction in connection with the driving member. A wedge member(50) is coupled with the driving member and moves in a second direction. A second direction displacement member(60) is coupled with the wedge member and moves in the second direction.
摘要翻译：目的：提供致动器，平台装置和曝光装置，以通过使致动器小型化来克服空间限制。构造：滚珠丝杠构件（20）包括滚珠丝杠单元（22）和与基座构件（10）联接的滚珠螺母单元（23）。驱动构件（30）与滚珠螺母单元联接，使得驱动构件与滚珠螺母单元一起操作。第一方向位移构件（40）在与驱动构件相关联的第一方向上移动。楔形构件（50）与驱动构件联接并沿第二方向移动。第二方向位移构件（60）与楔形构件联接并沿第二方向移动。

2. 发明公开

KR1020110043035A 경통 지지장치 및 이를 갖춘 마스크리스 노광 장치 有权
标题翻译：镜头支撑装置和具有相同装置的镜头装置
公开(公告)号：KR1020110043035A
公开(公告)日：2011-04-27
申请号：KR1020090099958
申请日：2009-10-20
申请人： 삼성전자주식회사
发明人： 박상현 , 홍상준 , 장상돈 , 김의석 , 백동석
IPC分类号： G03F7/20
CPC分类号： G02B7/023 , G03B27/54 , G03F7/70275 , G03F7/70833 , G03F7/20 , H01L21/027
摘要： PURPOSE: A lens barrel supporting apparatus and a maskless exposing apparatus including the same are provided to adjust the position and the angle of a lens barrel using the lens barrel supporting apparatus. CONSTITUTION: A lens barrel supporting apparatus(20) supports a lens barrel guiding light to a substrate. The lens barrel is supported to be capable of rotating based on the first axis of the lens barrel. The lens barrel is tiltably supported based on the second axis and the third axis of the lens barrel. The second axis and the third axis are orthogonal to the first axis of the lens barrel. The lens barrel supporting apparatus includes a guide frame(210), a rotary guide(220), and a tilting frame.
摘要翻译：目的：提供一种镜筒支撑装置和包括该镜筒的无罩曝光装置，以使用镜筒支撑装置来调节镜筒的位置和角度。构成：镜筒支撑装置（20）支撑将光引导到基底的镜筒。镜筒被支撑为能够基于镜筒的第一轴线旋转。透镜筒基于第二轴线和透镜筒的第三轴线可倾斜地支撑。第二轴和第三轴与镜筒的第一轴正交。镜筒支撑装置包括引导框架（210），旋转引导件（220）和倾斜框架。

3. 发明公开

KR1020100093666A 홀로그램 노광 장치 无效
标题翻译： HOLOGRAM曝光装置
公开(公告)号：KR1020100093666A
公开(公告)日：2010-08-26
申请号：KR1020090012711
申请日：2009-02-17
申请人： 삼성전자주식회사
发明人： 김의석 , 조성휘 , 이근희 , 홍상준 , 박상욱 , 장인배
IPC分类号： H01L21/027
CPC分类号： G03H1/22 , G03F7/70408 , G03H1/0408 , G03H2001/0094 , G03F7/70716 , G03F7/70758
摘要： PURPOSE: A hologram exposure apparatus is provided to control the gap between a hologram mask and a target by minutely driving a mask stage. CONSTITUTION: A mask stage(30) is supported in a main body(1). A hologram mask(20) is supported by the mask stage. A drive unit(80) is arranged between the main body and the mask stage. The drive unit moves relatively the mask stage to the main body. A driving unit includes piezoelectric element(10) and a power supply source(90) supplying power to the piezoelectric element.
摘要翻译：目的：提供一种全息曝光装置，通过微小地驱动掩模台来控制全息掩模与目标之间的间隙。构成：荫罩台（30）支撑在主体（1）中。全息掩模（20）由掩模台支撑。驱动单元（80）布置在主体和掩模台之间。驱动单元将掩模台相对于主体移动。驱动单元包括压电元件（10）和向压电元件供电的电源（90）。

4. 发明授权

KR101670670B1 액츄에이터, 스테이지 장치, 노광장치 有权
标题翻译：执行器舞台装置曝光装置
公开(公告)号：KR101670670B1
公开(公告)日：2016-11-01
申请号：KR1020090120694
申请日：2009-12-07
申请人： 삼성전자주식회사
发明人： 홍상준 , 박상현 , 장상돈 , 김의석 , 구자춘 , 인용석 , 장정웅 , 김유창
IPC分类号： H01L21/68 , H01L21/027
CPC分类号： G03B27/52 , F16H25/183 , F16H25/2204 , G03F7/70258 , Y10T74/18616 , Y10T74/20341 , Y10T279/1037 , Y10T279/1041
摘要： 본발명의일 측면은 2자유도의구동이가능하고공간적제약을극복할수 있도록소형화된액츄에이터에관한것으로, 본발명의실시예에따른액츄에이터는베이스부재;와, 베이스부재에결합되는볼 스크류부와, 볼스크류부에나사결합되는볼 너트부를포함하는볼 스크류부재;와, 볼너트부에결합되어볼 너트부와연동되는구동부재;와, 구동부재에연동하여제1방향으로이동되는제1방향변위부재;와, 구동부재에결합되어구동부재에연동하여제2방향으로이동되는쐐기부재;와, 쐐기부재에연동되어제2방향으로이동되는제2방향변위부재;와, 구동부재와제1방향변위부재또는쐐기부재와제1방향변위부재또는제1방향변위부재와베이스부재중 적어도어느하나를결속시키는결속부재;를포함하는것을특징으로한다.

5. 发明公开

KR1020120064234A 위치 정렬 장치 및 이의 조인트 모듈 有权
标题翻译：位置安排设备和联合模块
公开(公告)号：KR1020120064234A
公开(公告)日：2012-06-19
申请号：KR1020100125374
申请日：2010-12-09
申请人： 삼성전자주식회사
发明人： 홍상준 , 장인배 , 박상현 , 최호석
IPC分类号： G02B7/00 , B23Q1/00 , B23Q1/25
CPC分类号： G02B7/00 , Y10T403/45 , B23Q1/0054 , B23Q1/25
摘要： PURPOSE: A position aligning device and a joint module thereof are provided to maximize the strength for a degree of freedom except for desirable degree of freedom and reduce assembling tolerance. CONSTITUTION: A position aligning device comprises first and second bases(11, 12) and a plurality of joint modules(13). The second base is installed separately from the first base. The joint modules are installed between the first and second bases. The joint modules are elastically deformed for adjusting the space between the first and second bases.
摘要翻译：目的：提供一种位置对齐装置及其接头模块，以使除了所需自由度以外的自由度的强度最大化，并减少组装公差。构成：位置对准装置包括第一和第二基座（11,12）和多个接头模块（13）。第二个基座与第一个基座分开安装。联接模块安装在第一和第二基座之间。关节模块弹性变形以调节第一和第二基座之间的空间。

6. 发明公开

KR1020120043594A 겐트리 장치 有权
标题翻译： GANTRY APPARATUS
公开(公告)号：KR1020120043594A
公开(公告)日：2012-05-04
申请号：KR1020100104962
申请日：2010-10-26
申请人： 삼성전자주식회사
发明人： 홍상준 , 김의석 , 박상현 , 로저프란시세스메튜드어스마리아하멜링크
IPC分类号： H01J9/42 , G03F7/20 , F16H21/44
CPC分类号： F16H21/44 , G03F7/70391 , Y10T74/18888 , H01J9/42
摘要： PURPOSE: A gantry apparatus is provided to unite a plurality of optical systems by reinforcing a structure which unites and supports the optical system and to minimize deformation of the structure. CONSTITUTION: A driving device drives an optical system. A structure unites and supports the driving device. A plurality of first(110) plates is arranged side by side. A plurality of second plates(120) forms receiving parts(130, 140). The receiving parts accept the driving device by being crossed with the plurality of first plates. The driving device comprises a driving part and an operating part. The operating part is combined to the optical system. The driving part operates the operating part. The driving part comprises a panel which combines with the receiving parts.
摘要翻译：目的：提供龙门装置，通过加强结合并支撑光学系统并最小化结构的变形的结构来联合多个光学系统。构成：驱动装置驱动光学系统。结构结合并支撑驱动装置。多个第一（110）板并排排列。多个第二板（120）形成接收部分（130,140）。接收部件通过与多个第一板交叉接受驱动装置。驱动装置包括驱动部和操作部。操作部分与光学系统相结合。驾驶部分操作操作部分。驱动部包括与接收部组合的面板。

7. 发明公开

KR1020100088736A 노광장치 无效
标题翻译：曝光装置
公开(公告)号：KR1020100088736A
公开(公告)日：2010-08-11
申请号：KR1020090007816
申请日：2009-02-02
申请人： 삼성전자주식회사
发明人： 홍상준 , 장인배 , 김의석 , 이성진
IPC分类号： H01L21/027
CPC分类号： G03B27/00 , G03F7/70408 , G03F7/7055
摘要： PURPOSE: An exposure apparatus is provided to maintain the sizes of an optical unit and a prism regardless of the size of a hologram mask by moving the optical unit on the hologram mask in order to perform an exposure process. CONSTITUTION: Light source generates light. A hologram pattern is formed on a hologram mask(30). An optical unit(40) is arranged on the hologram mask to be movable. The optical unit guides the light from the light source to the hologram mask. The optical unit includes a prism(42) and an optical frame(43) which are opposite to the hologram mask. The optical frame is arranged to be movable on the hologram mask.
摘要翻译：目的：为了进行曝光处理，通过移动全息掩模上的光学单元，设置曝光装置以保持光学单元和棱镜的尺寸，而与全息掩模的尺寸无关。规定：光源产生光。在全息图掩模（30）上形成全息图。光学单元（40）布置在全息掩模上以可移动。光学单元将来自光源的光引导到全息掩模。光学单元包括与全息掩模相对的棱镜（42）和光学框架（43）。光学框架布置成可在全息掩模上移动。

8. 发明公开

KR1020020052647A ＥＯＳ에 안전한 반도체 장치 失效
标题翻译：用于安全的半导体器件
公开(公告)号：KR1020020052647A
公开(公告)日：2002-07-04
申请号：KR1020000082058
申请日：2000-12-26
申请人： 삼성전자주식회사
发明人： 홍상준 , 박광진 , 임철수
IPC分类号： H01L27/04
摘要： PURPOSE: A semiconductor device for safe at EOS(Electrical Over Stress) is provided to protect a metal line and internal circuits from EOS surge by improving tolerance for EOS due to surge, over-current, and over-voltage. CONSTITUTION: A semiconductor device has ESD(Electro-Static Discharge) protection diodes(176,178) connected between a data input/output pad(170,180) and supply voltage and between the data input/output pad(170,180) and ground power in order to protect the data input/output pads(170,180) and internal circuits from ESD. An error of a semiconductor device due to undesired EOS surge is prevented by widening a metal line connected to the data input/output pads(170,180). The width of the metal line is widened as much as 20 or more micro meters. Accordingly, the metal line connected to the ESD protection diodes(176,178) is protected from the EOS surge.
摘要翻译：目的：提供EOS（电气过应力）安全保护的半导体器件，通过提高浪涌，过电流和过电压对EOS的耐受性，保护金属线和内部电路不受EOS浪涌的影响。构成：半导体器件具有连接在数据输入/输出焊盘（170,180）和电源电压之间以及数据输入/输出焊盘（170,180）与地电之间的ESD（静电放电）保护二极管（176,178），以保护数据输入/输出焊盘（170,180）和ESD的内部电路。通过加宽连接到数据输入/输出焊盘（170,180）的金属线来防止由于不期望的EOS浪涌引起的半导体器件的误差。金属线的宽度扩大了多达20个或更多微米。因此，连接到ESD保护二极管（176,178）的金属线被保护免受EOS浪涌。

9. 发明授权

KR101678065B1 위치 정렬 장치 및 이의 조인트 모듈 有权
标题翻译：位置安排设备和联合模块
公开(公告)号：KR101678065B1
公开(公告)日：2016-12-07
申请号：KR1020100125374
申请日：2010-12-09
申请人： 삼성전자주식회사
发明人： 홍상준 , 장인배 , 박상현 , 최호석
IPC分类号： G02B7/00 , B23Q1/00 , B23Q1/25
CPC分类号： G02B7/00 , Y10T403/45
摘要： 본발명은위치정렬장치에관한것으로, 제1베이스와제2베이스사이에마련되는조인트모듈을포함하고, 조인트모듈이탄성변형되면서제1베이스와제2베이스사이의간격이조절되도록하는것을포함하여구성되는것이다.
摘要翻译：根据示例性实施例，位置排列装置包括在第一基座和第二基座之间的至少一个关节模块。所述至少一个接头模块构造成基于所述接头模块中的弹性弯曲来调节所述第二基座相对于所述第一基座的位置。

10. 发明授权

KR101678016B1 바미러 장치 有权
标题翻译：酒吧镜子设备
公开(公告)号：KR101678016B1
公开(公告)日：2016-11-23
申请号：KR1020100053390
申请日：2010-06-07
申请人： 삼성전자주식회사
发明人： 박상욱 , 김기현 , 김자열 , 장상돈 , 홍상준
IPC分类号： G03F7/20 , H01L21/027
摘要： 본발명은스테이지에설치되는바미러의자세를용이하게정렬하고응력집중을줄일수 있는바미러장치에관한것으로, 상기바미러와결합되어상기스테이지에고정됨으로써상기바미러가상기스테이지에설치되도록하고상기바미러에집중되는응력을분산시키도록형성된적어도하나의힌지구조물을포함한다.

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