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    • 8. 发明公开
    • 프로브 카드
    • 探针卡
    • KR1020140110443A
    • 2014-09-17
    • KR1020130024753
    • 2013-03-08
    • 삼성전자주식회사
    • 김유겸김준연주성호
    • H01L21/66G01R1/073
    • G01R1/07378H05K3/368H05K2203/061
    • A probe card comprises a first circuit board, a second circuit board, a probe head, and a probe holder. The first circuit board is electrically connected with a tester and has the first size. The second circuit board is electrically connected with the first circuit board as installed on a lower surface of the first circuit board and has a second size smaller than the first size. The probe head is installed in the lower part of the second circuit board, electrically connected with the second circuit board, and equipped with a plurality of probes which comes into contact with electrodes of a device under test. The probe holder supports the probe head as installed on the lower part of the first circuit board.
    • 探针卡包括第一电路板,第二电路板,探针头和探针支架。 第一个电路板与测试仪电连接并具有第一个尺寸。 第二电路板与第一电路板电连接,安装在第一电路板的下表面上,并具有小于第一尺寸的第二尺寸。 探针头安装在第二电路板的下部,与第二电路板电连接,并且配备有与被测器件的电极接触的多个探针。 探头支架将探头安装在第一个电路板的下部。