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    • 4. 发明公开
    • 관성센서
    • 惯性传感器
    • KR1020120053741A
    • 2012-05-29
    • KR1020100115015
    • 2010-11-18
    • 삼성전기주식회사
    • 박흥우정원규이현기양시중
    • G01P15/08G01P3/44G01P13/00
    • G01C19/5783
    • PURPOSE: An inertia sensor is provided to improve driving properties, a Q value, and design freedom of space conjugation by optimizing thickness of a cap covering a driver and a piezoelectric element, and distance between the driver and the piezoelectric element. CONSTITUTION: An inertia sensor(100) comprises a sensor unit(110), an ASIC(Application Specific Integrated Circuit) chip(120), a molding unit(130), a wire(140), and a lead frame(150). The sensor unit comprises a driver(111), a flexible substrate unit(112), a supporter(113), a top cap(114), and a bottom cap(115). The flexible substrate unit comprises a flexible substrate, an electrode, and a piezoelectric element. The flexible substrate is composed of a silicon substrate or an SOI(Silicon on Insulator) substrate. The driver is located at the lower side of the flexible substrate unit which can be displaced. The supporter supports the driver and the flexible substrate. The top cap and the bottom cap respectively protect the flexible substrate, the electrode, and the piezoelectric element of the flexible substrate.
    • 目的:通过优化覆盖驱动器和压电元件的盖的厚度以及驱动器和压电元件之间的距离来提供惯性传感器来改善驱动特性,Q值和空间共轭的设计自由度。 构造:惯性传感器(100)包括传感器单元(110),ASIC(专用集成电路)芯片(120),模制单元(130),导线(140)和引线框架(150)。 传感器单元包括驱动器(111),柔性基板单元(112),支撑件(113),顶盖(114)和底盖(115)。 柔性基板单元包括柔性基板,电极和压电元件。 柔性基板由硅衬底或SOI(绝缘体上硅)衬底构成。 驱动器位于可移动的柔性基板单元的下侧。 支持者支持驱动器和柔性基板。 顶盖和底盖分别保护柔性基板,柔性基板的电极和压电元件。