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1. 发明专利

JP4217218B2 Method of manufacturing a semiconductor probe with a resistive tip 有权
公开(公告)号：JP4217218B2
公开(公告)日：2009-01-28
申请号：JP2004570585
申请日：2003-11-11
申请人：サムスンエレクトロニクスカンパニーリミテッド
发明人：ジュファンジュン , ホンシクパク , センブンホン
IPC分类号： H01L21/66 , G01Q60/00 , G01Q60/14 , G01Q60/16 , G01Q80/00 , G11B9/14
CPC分类号： G01Q60/30 , G01Q80/00 , G11B9/1409
摘要： Provided is a method of fabricating a semiconductor probe with a resistive tip. The method includes steps of forming a mask layer on a substrate doped with first impurities and forming first and second semiconductor electrode regions heavily doped with the second impurities on the substrate uncovered by the mask layer, annealing the first and second semiconductor electrode regions and diffusing the second impurities of the first and second semiconductor electrode regions to portions facing each other to form resistive regions lightly doped with the second impurities at the outer boundaries of the first and second semiconductor electrode regions, and patterning the mask layer in a predetermined shape and etching a portion of a top surface of the substrate not covered by the patterned mask layer to form a resistive tip.

2. 发明专利

JP2003329564A METHOD AND APPARATUS FOR MEASURING VALUE OF pH INSIDE THIN FILM ON SURFACE OF METAL 有权
标题翻译：用于测量金属表面的薄膜内部pH值的方法和装置
公开(公告)号：JP2003329564A
公开(公告)日：2003-11-19
申请号：JP2002139170
申请日：2002-05-14
申请人： National Institute For Materials Science , 独立行政法人物質・材料研究機構
发明人： MASUDA HIROYUKI
IPC分类号： G01N27/416 , G01Q10/00 , G01Q30/02 , G01Q30/08 , G01Q30/20 , G01Q60/04 , G01Q60/10 , G01Q60/14 , G01Q60/16 , G01Q60/24 , G01Q60/30 , G01Q70/00 , G01N13/10 , G01N13/12 , G01N13/16
摘要： PROBLEM TO BE SOLVED: To provide a method which enables the measurement of an object out of doors while keeping its state and a value of pH of a thin liquid film with the thickness of not more than 10 μm on the surface of a metal. SOLUTION: In the method, an electric potential inside the thin liquid film is measured by using a probe of a scanning tunneling microscope, and an electric potential of the surface is measured by using a non-contact type surface electrometer, and then the deference between the measured electric potentials is converted to the value of pH, thereby measuring the value of pH inside the thin liquid film on the surface of the metal. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种方法，其能够在保持其状态的同时测量对象，同时保持其状态，并且在表面上具有厚度不大于10μm的薄液膜的pH值金属。解决方案：在该方法中，通过使用扫描隧道显微镜的探针测量薄液膜内的电位，并且通过使用非接触型表面静电计来测量表面的电位，然后将测量的电位之间的差值转换为pH值，从而测量金属表面上的薄液膜内的pH值。版权所有（C）2004，JPO

3. 发明专利

JPH09166603A SCANNING PROBE MICROSCOPE 失效
公开(公告)号：JPH09166603A
公开(公告)日：1997-06-24
申请号：JP32897095
申请日：1995-12-18
申请人： OLYMPUS OPTICAL CO
发明人： SAKAI NOBUAKI
IPC分类号： G01B21/30 , G01N37/00 , G01Q10/06 , G01Q60/12 , G01Q60/14 , G01Q60/24 , G01Q90/00 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To provide STS(scanning tunneling spectrometry) and STP(scanning tunneling potentiometry) by which a sample can be measured while the distance between a probe and the sample is maintained constantly. SOLUTION: A cantilever 302 is supported by a holding table 300 so that a probe 303 at the front end of the cantilever 302 can be positioned below a metallic probe 301 and a Z-displacement sensor 304 which detects the displacement of the cantilever 302 is fixed to the table 300. An I/V converter 311 detects the signal of a tunnel current flowing to the probe 31 and a numerical value computing processor 313 finds spectral data by performing prescribed computation on tunnel current data from an ADC 312. A memory circuit 605 temporarily stores the displacement data of the cantilever 302 when the distance between the probe 303 and a sample is a desired value. A servo circuit 30 controls a piezoelectric element 305 by feeding back so that a tunnel current signal Ir or the displacement signal ΔZ of the cantilever 302 can become coincident with a servo reference signal S1 or S2 .

4. 发明专利

JP2604968B2 失效
公开(公告)号：JP2604968B2
公开(公告)日：1997-04-30
申请号：JP24015493
申请日：1993-09-27
IPC分类号： G01N27/72 , G01N37/00 , G01Q60/02 , G01Q60/14 , G01Q60/16 , G01Q60/54 , G01Q80/00 , G01R33/038 , G01R33/10 , G01R33/12 , G11B5/00 , G11B5/02 , G11B9/00 , G11C13/00

5. 发明专利

JPH02206705A CHARGE INTEGRATION TYPE SCANNING TUNNELLING MICROSCOPE 失效
公开(公告)号：JPH02206705A
公开(公告)日：1990-08-16
申请号：JP2679389
申请日：1989-02-07
申请人： NAKAGAWA APPLIED RES KK
发明人： NAKAGAWA HIDEMOTO
IPC分类号： G01B7/34 , G01N23/00 , G01N37/00 , G01Q60/10 , G01Q60/12 , G01Q60/14 , G01Q60/24 , H01J37/28
摘要： PURPOSE:To analyze the physical and chemical characteristics of the surface of a sample by applying a bias voltage between a probe and the sample and charging a capacitor with a flowing weak current, and detecting the time variation of a terminal voltage as a current signal. CONSTITUTION:A parasitic capacitance capacitor 7 is annexed to an analog switch 4, and a component of a discharge pulse 16 applied to a discharge control terminal 8 is coupled with an output and becomes a noise, therefore, it is desirable to be as small as possible. In a linear amplification output waveform 18 shown in the figure, at the time of rise and at the time of fall of a discharge pulse 16, a whisker-like noise is seen due to this influence. A tunnelling current is obtained as a difference voltage at every prescribed time of an integration waveform, therefore, even if the discharge pulse 16 is coupled with the output, the accuracy of current measurement is not deteriorated directly. The current data is obtained as a discrete data of the period of A/D conversion, so that the frequency component of a current signal which can respond with this system is limited to the frequency of half or below of the reciprocal of a conversion period.

6. 发明专利

JP3603120B2 Method and apparatus for measuring the pH of the internal thin film of metal surface 有权
公开(公告)号：JP3603120B2
公开(公告)日：2004-12-22
申请号：JP2002139170
申请日：2002-05-14
申请人：独立行政法人物質・材料研究機構
发明人：博之升田
IPC分类号： G01N27/416 , G01Q10/00 , G01Q30/02 , G01Q30/08 , G01Q30/20 , G01Q60/04 , G01Q60/10 , G01Q60/14 , G01Q60/16 , G01Q60/24 , G01Q60/30 , G01Q70/00 , G01N13/10 , G01N13/12 , G01N13/16 , G12B21/00

7. 发明专利

JP2001108599A STANDARD SAMPLE FOR ELECTRIC FORCE MICROSCOPE 失效
公开(公告)号：JP2001108599A
公开(公告)日：2001-04-20
申请号：JP28701699
申请日：1999-10-07
申请人： SHIMADZU CORP , IMADA HIROSHI
发明人： OTA MASAHIRO , NAKANISHI HIROAKI , FUJIYAMA YOICHI , IMADA HIROSHI
IPC分类号： G01B7/34 , G01N1/00 , G01Q40/02 , G01Q60/14 , G01Q60/30 , G01N13/12
摘要： PROBLEM TO BE SOLVED: To simultaneously evaluate potential resolution and space resolution and reduce the time required for evaluation. SOLUTION: A standard sample 1 for an electric force microscope has known values of potential and shape and includes a substrate 2 made from a dielectric and a conductive electrode pattern 4 formed on the substrate 2, the electrode pattern 4 having a potential pattern whose potential distribution is known and a space pattern whose shape is known. The potential distribution and the space resolution of the electric force microscope are evaluated by comparing the known values of potential and shape with measurements made by the electric force microscope. Use of the standard sample with the known values of potential and shape enables simultaneous evaluation of the potential resolution and the space resolution, thereby reducing evaluation time, and enhancing the accuracy of evaluation.

8. 发明专利

JP3085960B2 失效
公开(公告)号：JP3085960B2
公开(公告)日：2000-09-11
申请号：JP25258789
申请日：1989-09-28
IPC分类号： G01B7/34 , G01N37/00 , G01Q60/10 , G01Q60/12 , G01Q60/14 , H01J37/28 , G01N13/12

9. 发明专利

JP2000097838A SURFACE OBSERVATION DEVICE AND SURFACE OBSERVATION METHOD 失效
公开(公告)号：JP2000097838A
公开(公告)日：2000-04-07
申请号：JP28336198
申请日：1998-09-18
申请人： CANON KK
发明人： YANO KYOJI , KIYOUGAKU MASABUMI
IPC分类号： G01B21/30 , G01N37/00 , G01Q60/14 , G01Q60/30 , G01N13/12
摘要： PROBLEM TO BE SOLVED: To observe a potential distribution on the sample surface with a resolution of the nanometer scale by measuring both the shape of the sample surface and the potential distribution corresponding to it simultaneously. SOLUTION: A voltage is applied on an observation sample 101 by a power source 106, and a sample holder 114 is moved in the Z-direction with a sample driving mechanism 113, and a deflection quantity of a cantilever 103 by the contact between the sample 101 and a probe 102 is detected by a deflection quantity detection device 110. A Z-direction position control circuit 111 continues the Z-direction position control of the driving mechanism 113, so that the deflection quantity will agree with a fixed value, and makes the holder 114 scan in the XY-directions by the driving mechanism 113. A microcomputer 115 calculates the surface shape of the sample 101 from the movement of the driving mechanism 113 in the Z-direction calculated by the control circuit 111 during this while. At the same time during the scanning in the XY- directions, a voltmeter 109 measures a potential of the search needle 102, and the microcomputer 115 calculates a potential distribution on the sample 101 surface from potentials on each position in the XY-directions. Therefore, both the sample 101 surface shape and the potential distribution corresponding to it can be measured simultaneously.

10. 发明专利

JPH097238A PROBE AND RECORDING MEDIUM OF INFORMATION HIGH-SPEED RECORDING DEVICE AND INFORMATION HIGH-SPEED RECORDING METHOD USING SAME 失效
公开(公告)号：JPH097238A
公开(公告)日：1997-01-10
申请号：JP17549095
申请日：1995-06-19
申请人： CANON KK
发明人： KURODA AKIRA , SHITO SHUNICHI
IPC分类号： G02B21/00 , G01Q30/18 , G01Q60/14 , G01Q60/38 , G01Q60/42 , G01Q80/00 , G11B9/00 , G11B9/04 , G11B9/14 , G11B19/04
摘要： PURPOSE: To provide a probe, a recording medium of an information high-speed recording device, having high reliability and capable of recording at high speed, and the method thereof using the same device. CONSTITUTION: By arranging a current limiting resistor 106 on or in the vicinity of a probe 104 or in the vicinity of a part opposed to the probe 104 of a recording medium or reducing the stray capacity of a pulse applying circuit system, the frequency characteristic of the pulse applying circuit system for recording is improved and high-speed recording is enabled.

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