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    • 1. 发明专利
    • PROBE FOR SCAN TYPE TUNNELING MICROSCOPE WITH AUXILIARY ELECTRODE
    • JPH02243906A
    • 1990-09-28
    • JP6355689
    • 1989-03-17
    • NAKAGAWA APPLIED RES KK
    • NAKAGAWA HIDEMOTO
    • G01B7/34G01N37/00G01Q60/10G01Q60/16H01J37/28
    • PURPOSE:To reduce measurement disturbance due to an adsorbed ion by providing >=1 auxiliary electrodes nearby the probe and controlling the electric field nearby the probe with a voltage applied to the auxiliary electrodes. CONSTITUTION:An auxiliary electrode 3 is provided at the periphery of the probe 1 through an insulator 2. Further, when the tip of the probe 1 is cleaned by electric field ion radiation, a pulsating voltage which is necessary for the electric field ion radiation is applied the probe 1 and electrode 3 in a vacuum state to dissocinate adsorbed ions with the electric field. Then when a leak current is reduced in an electrolytic solution, the same potential with the probe 1 is applied to the electrode 3 and then the leak current from the flank of the probe 1 to the solution is reduced greatly because the level of the leak current is proportional to the density of lines of electric force. Then if movable adsorbed ions are present on the surface of a sample 4 when a measurement is taken in an atmosphere, a large voltage having the opposite polarity from the adsorbed ions is applied to the electrode 3 and then no influence is exerted upon the measurement of a tunneling current at the tip of the probe 1.