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    • 5. 发明专利
    • Microprobe
    • 微探针
    • JP2008026281A
    • 2008-02-07
    • JP2006202474
    • 2006-07-25
    • Sumitomo Electric Ind Ltd住友電気工業株式会社
    • NISHIBAYASHI YOSHIKITATSUMI NATSUOIMAI TAKAHIRO
    • G01Q60/16G01Q60/38G01Q60/40G01Q70/00G01Q70/10
    • PROBLEM TO BE SOLVED: To provide a microprobe having a sharp tip, and enhancing a strength.
      SOLUTION: The microprobe comprises: a base 4; an intermediate layer 6 provided on the base 4; and a probe 8 provided on the intermediate layer 6 and formed from diamond. The probe 8 has a root 10 connected to the intermediate layer 6, and the sharp tip 12. A tip diameter D of the probe 8 is 0.5 μm or less. A first aspect ratio T1 of a width L2 of a cross section of the probe 8 at a predetermined distance from the tip 12 of the probe 8 divided by a length L1 from the tip 12 to the cross section is 0.3 or more. A second aspect ratio T2 of a width L4 at the root 10 of the probe 8 divided by a length L3 from the tip 12 of the probe 8 to the root 10 is 0.36 or more.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供具有尖尖的微探针并提高强度。 解决方案:微探针包括:基座4; 设置在基座4上的中间层6; 以及设置在中间层6上并由金刚石形成的探针8。 探头8具有与中间层6连接的根部10以及尖端12.探针8的尖端直径D为0.5μm以下。 探针8的与探针8的尖端12相隔预定距离的横截面的宽度L2的第一宽高比T1除以从尖端12到横截面的长度L1为0.3以上。 探针8的根部10处的宽度L4除以从探针8的尖端12到根部10的长度L3的第二宽高比T2为0.36以上。 版权所有(C)2008,JPO&INPIT
    • 6. 发明专利
    • Sample surface measuring device
    • JP4032932B2
    • 2008-01-16
    • JP2002324972
    • 2002-11-08
    • カシオ計算機株式会社
    • 道也 山口
    • G01B7/34G01N23/225G01N23/227G01Q30/02G01Q60/02G01Q60/10G01Q60/16
    • PROBLEM TO BE SOLVED: To measure irregularities on the sample surface and the kind of an element constituting a sample by one device. SOLUTION: When measuring the irregularities on the sample 1 surface, the tip part of a probe 3 provided movably into/from the inside of a cylindrical extraction electrode 4 is projected from the lead electrode 4, and the projected tip part of the probe 3 is drawn close to the sample 1 surface, and a tunnel current between them is detected, to thereby measure the irregularities on the sample 1 surface. On the other hand, When measuring the kind of the element constituting the sample 1, the whole probe 3 is stored in the lead electrode 4, and an extraction voltage of about 3.5-4.5 kV is applied between the probe 3 and the lead electrode 4 from an extraction voltage application circuit 13, and the sample 1 surface is irradiated with electron beams emitted by field emission from the tip part of the probe 3, and a characteristic X-ray emitted from the sample 1 surface is detected, to thereby measure the kind of the element constituting the sample 1 based on the detection result. COPYRIGHT: (C)2004,JPO
    • 7. 发明专利
    • Probe holder and scanning probe microscope
    • 探测器和扫描探针显微镜
    • JP2007271358A
    • 2007-10-18
    • JP2006095150
    • 2006-03-30
    • Sii Nanotechnology Incエスアイアイ・ナノテクノロジー株式会社
    • KITAJIMA SHUSHIGENO MASAJINOSAKA NAOKATSU
    • G01B21/30G01Q60/16G01Q60/22G01Q60/38G01Q70/02
    • PROBLEM TO BE SOLVED: To provide a probe holder for performing probe change simply and in a short time without troubling a worker and being applicable also to a small-sized scanning probe microscope.
      SOLUTION: This probe holder 3 is disposed opposite to a specimen S and used for thereon fixing a plurality of probes 2 each having a probe 2b on an end of a lever part 2a with the base end side of the lever part supported in a cantilevered state on a body part 2c. This probe holder 3 is equipped with a fixation plate 10 comprising an opposite surface 10a standing opposite to a specimen surface S1 for fixing the plurality of probes severally removably on the opposite surface via the body part, a holder body 11 for movably supporting the fixation plate, and a movable means 12 for moving the fixation plate while positioning any selected probe among the plurality of probes at an observation position P.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了简单且短时间地提供用于执行探针变化的探针保持器,而不会使工作人员困扰,并且也适用于小型扫描探针显微镜。 解决方案:该探针支架3与样本S相对设置,用于将多个探针2固定在杠杆部分2a的端部上,探针2b在杠杆部分2a的端部固定,杆部的基端侧被支撑在 身体部分2c上的悬臂状态。 该探针支架3配备有固定板10,固定板10包括与试样表面S1相对的相对表面10a,用于经由主体部分将多个探头分别可拆卸地固定在相对的表面上;保持器主体11,用于可移动地支撑固定板 ,以及可移动装置12,用于在观察位置P的多个探针之间定位任何选择的探针的同时移动固定板。(C)2008,JPO&INPIT