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    • 5. 发明专利
    • Semiconductor device manufacturing method and semiconductor device
    • 半导体器件制造方法和半导体器件
    • JP2014123681A
    • 2014-07-03
    • JP2012280071
    • 2012-12-21
    • Lapis Semiconductor Co Ltdラピスセミコンダクタ株式会社
    • YOSHINARI MASATAKA
    • H01L21/336H01L29/739H01L29/78
    • H01L29/66348H01L21/02016H01L21/0209H01L21/26513H01L21/268H01L21/304H01L21/306H01L21/30625H01L21/324H01L21/463H01L29/36H01L29/4916H01L29/66712H01L29/7397H01L29/7813Y10S438/977
    • PROBLEM TO BE SOLVED: To provide a semiconductor device manufacturing method which can ensure removal of an unintended impurity adhering to a semiconductor substrate with etching of the semiconductor substrate and which enables elaborate designing of a concentration profile of an impurity of the semiconductor substrate; and provide a semiconductor device manufactured by the manufacturing method.SOLUTION: A semiconductor device manufacturing method comprises: a process of a first semiconductor region including an active element for controlling a current flowing in a surface of a substrate in a thickness direction of the substrate; a process of grinding a rear face of the substrate; a first etching process of etching the rear face of the substrate after grinding by a phosphorous-containing medicinal solution; a second etching process of etching the rear face after the first etching by an etching method of an etching rate lower than that of the first etching; and a process of implanting an impurity from the rear face of the substrate after the second etching to form a second semiconductor region where a current flows.
    • 要解决的问题:提供一种半导体器件制造方法,其可以通过蚀刻半导体衬底来确保去除附着在半导体衬底上的非预期杂质,并且能够精细地设计半导体衬底的杂质的浓度分布; 并提供通过制造方法制造的半导体器件。解决方案:一种半导体器件制造方法,包括:第一半导体区域的工艺,其包括用于控制在衬底的厚度方向上在衬底的表面中流动的电流的有源元件; 研磨基板的背面的工序; 用含磷药物溶液研磨后蚀刻基板的背面的第一蚀刻工艺; 通过蚀刻速率低于第一蚀刻的蚀刻速率的蚀刻方法在第一蚀刻之后蚀刻后表面的第二蚀刻工艺; 以及在第二蚀刻之后从基板的背面注入杂质以形成电流流过的第二半导体区域的工序。
    • 6. 发明专利
    • Surface protection member and processing method
    • 表面保护构件和加工方法
    • JP2014067970A
    • 2014-04-17
    • JP2012214123
    • 2012-09-27
    • Disco Abrasive Syst Ltd株式会社ディスコ
    • PRIEWASSER KARL
    • H01L21/304
    • H01L29/06H01L21/6835H01L21/78H01L2221/68318H01L2221/68327H01L2221/6834H01L2221/68381Y10S438/977
    • PROBLEM TO BE SOLVED: To provide a surface protection member which allows a protection member to be easily peeled from a wafer surface and no adhesive agent to be left on a device surface, to provide a processing method of the wafer using the surface protection member.SOLUTION: A processing method includes the steps of: arranging a wafer 1 on a surface protection member 10 by making a device region 3 of the wafer 1 correspond to an unevenness absorption member 14 arranged in a recess 12 of the surface protection member 10, and fixing the surface protection member 10 and the wafer 1 by arranging an adhesive agent 20 on the outside of the device region 3 (fixing step); holding the surface protection member 10 side with a holding table 21 and grinding a rear face 1b of the wafer 1 with grinding means 22 to thin the rear face down to a predetermined thickness (grinding step); and removing the surface protection member 10 from the wafer 1 (removing step). This method makes peeling easy and allows no adhesive agent to be left on the device surface by locally arranging the adhesive agent 20 on the outside of the device region 3.
    • 要解决的问题:提供一种表面保护构件,其允许保护构件容易地从晶片表面剥离并且不会留在装置表面上的粘合剂,以提供使用表面保护构件的晶片的处理方法。 解决方案:一种处理方法,包括以下步骤:通过使晶片1的器件区域3对应于布置在表面保护构件10的凹部12中的凹凸吸收构件14,将晶片1布置在表面保护构件10上,以及 通过在装置区域3的外侧设置粘合剂20来固定表面保护构件10和晶片1(固定步骤); 用保持台21保持表面保护构件10一侧,并用研磨装置22研磨晶片1的后表面1b,将背面减薄至预定厚度(研磨步骤); 并将表面保护构件10从晶片1移除(去除步骤)。 该方法使得剥离容易,并且通过将粘合剂20局部地布置在器件区域3的外部,不会使器件表面上留下粘合剂。