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    • 2. 发明专利
    • Semiconductor integrated circuit device
    • 半导体集成电路设备
    • JPS61125080A
    • 1986-06-12
    • JP24660284
    • 1984-11-21
    • Nec Corp
    • TAKEUCHI TOKUO
    • H01L21/762H01L27/06H01L29/74
    • H01L29/7436H01L27/0641
    • PURPOSE:To prevent erroneous operation due to a late effect, by forming a silicon single crystal island, in which a PNPN thyristor is formed and which has high impurity concentration with respect to another silicon single crystal island, and forming a junction constituting the PNPN thyristor deeper than the junction of the other element. CONSTITUTION:A first silicon single crystal island 11 is formed so that impurity concentration becomes 3X10 atom/cm . A second silicon single crystal island 12 is formed so that impurity concentration becomes 4.5X10 atom/cm . Thus a dielectric isolating silicon substrate is formed. A transistor having a junction 13 with a depth of 5mum is formed in the silicon single crystal island 11. An PNPN thyristor is formed by using a deep junction 14 having a depth of 30mum in the silicon single crystal island 12. With respect to the PNPN thyristor formed by the deep junction 14, the transistor constituting a late-effect-error preventing circuit is formed by the shallow junction 13. Therefore, a transition time to a conducting state is short, and the erroneous operation due to the late effect can be prevented.
    • 目的:为了防止由于后期影响引起的错误操作,通过形成其中形成PNPN晶闸管并且相对于另一个硅单晶岛具有高杂质浓度的硅单晶岛,并形成构成PNPN晶闸管的结 比另一个元件的结点更深。 构成:形成第一硅单晶岛11,使杂质浓度成为3×10 14原子/ cm 3。 形成第二硅单晶岛12,使得杂质浓度为4.5×10 14原子/ cm 3。 因此形成绝缘隔离硅衬底。 在硅单晶岛11中形成具有深度5μm的结13的晶体管。在硅单晶岛12中使用深度为30μm的深结14形成PNPN晶闸管。相对于PNPN 由深结14形成的晶闸管,构成后期效应误差防止电路的晶体管由浅结13形成。因此,导通状态的过渡时间短,由于延迟效应引起的误操作可以是 防止了