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    • 6. 发明专利
    • Semiconductor device and manufacturing method thereof
    • 半导体器件及其制造方法
    • JP2009064996A
    • 2009-03-26
    • JP2007232242
    • 2007-09-07
    • Sony Corpソニー株式会社
    • SUGIZAKI TARO
    • H01L29/749H01L27/10
    • H01L29/7436H01L27/1027H01L29/0834H01L29/66393H01L29/7455
    • PROBLEM TO BE SOLVED: To prevent a semiconductor substrate from being short-circuited to a silicide layer formed on an epitaxially-grown layer and the epitaxially-grown layer. SOLUTION: A semiconductor device has: the element formation region 12 of the semiconductor substrate 11 isolated by an element isolation region 14 formed on the semiconductor substrate 11; an insulating film 41 formed on the semiconductor substrate 11; an opening portion 42 formed on the insulating film 41 over a region for selective epitaxial growth in the element formation region 12; and a semiconductor layer 15 formed by selective epitaxial growth from the element formation region 12 of the semiconductor substrate 11 in the opening portion 42. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:为了防止半导体衬底与形成在外延生长层和外延生长层上的硅化物层短路。 解决方案:半导体器件具有:通过形成在半导体衬底11上的元件隔离区域14隔离的半导体衬底11的元件形成区域12; 形成在半导体基板11上的绝缘膜41; 形成在元件形成区域12中用于选择性外延生长的区域上的绝缘膜41上的开口部分42; 以及通过从开口部分42中的半导体衬底11的元件形成区域12选择性地外延生长而形成的半导体层15.版权所有(C)2009,JPO&INPIT
    • 9. 发明专利
    • Semiconductor integrated device
    • 半导体集成器件
    • JP2006114823A
    • 2006-04-27
    • JP2004302830
    • 2004-10-18
    • Nec Electronics CorpNecエレクトロニクス株式会社
    • MORISHITA YASUYUKI
    • H01L27/04H01L21/822H01L21/8234H01L27/06H01L27/088H01L29/74
    • H01L29/7436H01L27/0262
    • PROBLEM TO BE SOLVED: To further reduce the area of an electrostatic protection circuit by suppressing the eccentricity of current density in a thyristor-type ESD protective element.
      SOLUTION: An n-type well 11 and p-type wells 12a and 12b which are formed, while facing each other and proximately with the n-type well 11 in-between are formed on the surface of a semiconductor substrate. Furthermore, a high-density n-type region 15a is formed on the surface of the p-type well 12a, a high-density n-type region 15b is formed on the surface of the p-type well 12b, and the regions are grounded, respectively. Moreover, a high-density p-type region 14a is formed on the surface of the n-type well 11 facing the high-density n-type region 15a, a high density p-type region 14b is formed on the surface of the n-type well 11 facing the high-density n-type region 15b, and the p-type regions are connected to an I/O pad, respectively. A high-density n-type region 13 is formed on the surface of the n-type well 11, while being held between the high density p-type region 14a and the high-density p-type region 14b, and connected to a trigger element. The surge applied to the I/O pad is released to a ground terminal via the right and the left SCR structures.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:通过抑制晶闸管型ESD保护元件中的电流密度的偏心,来进一步减小静电保护电路的面积。 解决方案:在半导体衬底的表面上形成有形成在其间的n型阱11彼此并且近似形成的n型阱11和p型阱12a和12b。 此外,在p型阱12a的表面上形成高密度的n型区域15a,在p型阱12b的表面上形成高密度的n型区域15b, 分别接地。 此外,在面向高密度n型区域15a的n型阱11的表面上形成高密度p型区域14a,在n型阱表面上形成高密度p型区域14b 型阱11面向高密度n型区域15b,p型区域分别连接到I / O焊盘。 在n型阱11的表面上形成高密度n型区域13,同时保持在高密度p型区域14a和高密度p型区域14b之间,并连接到触发器 元件。 施加到I / O焊盘的浪涌通过右侧和左侧SCR结构释放到接地端子。 版权所有(C)2006,JPO&NCIPI