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    • 8. 发明专利
    • Substrate transfer system
    • 基板传送系统
    • JP2014007193A
    • 2014-01-16
    • JP2012139883
    • 2012-06-21
    • Kawasaki Heavy Ind Ltd川崎重工業株式会社
    • BANDO KENJIFUKUDA TAKUYATAMADA SOICHI
    • H01L21/677B65G19/02B65G49/06
    • H01L21/67778B65G19/02B65G49/065H01L21/6732H01L21/67706H01L21/67769H01L21/67784
    • PROBLEM TO BE SOLVED: To provide a substrate transfer system which can prevent adhesion of particles to a surface and a rear face of a substrate W other than edges.SOLUTION: A substrate transfer system comprises: a substrate supply device 2 including movable shelves 21 and a lifting unit 22 for descending the movable lift 21; a levitation device 3 including one and more air outlets 35 for discharging air upward, which are formed such that substrates supported by the movable shelves 21 float in the air by a pressure of air discharged from the air outlets 35 when the movable shelves 21 are descended by the lifting device 22; a transfer device 4 which includes a conveyor 40 and clicks 41 vertically arranged on the conveyor 40 and which is formed such that the clicks 41 push the substrate W floating in the air by the pressure of the air discharged from the air outlets 35 to a transfer direction.
    • 要解决的问题:提供一种能够防止颗粒附着到除了边缘之外的基板W的表面和背面的基板传送系统。解决方案:基板传送系统包括:基板供给装置2,包括可移动的搁架21和 用于使可移动升降机21下降的提升单元22; 悬挂装置3,其包括用于向上排出空气的一个和多个空气出口35,其形成为使得当可移动的搁架21下降时,由可移动的搁架21支撑的基板在从空气出口35排出的空气的压力下在空气中漂浮 通过提升装置22; 传送装置4,其包括垂直布置在传送器40上的传送器40和咔嗒声41,其形成为使得咔嗒声41通过从空气出口35排出的空气的压力将漂浮在空气中的基板W推到传送 方向。