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    • 1. 发明专利
    • Charged beam drawing apparatus
    • 充电光束绘图设备
    • JPH11274036A
    • 1999-10-08
    • JP7388898
    • 1998-03-23
    • Toshiba Corp株式会社東芝
    • HARA SHIGEHIROMURAKAMI EIJIHIGURE HITOSHIOKUZONO KAZUYUKIYAMAGUCHI TOSHIOMATSUKI KAZUTOKOIKARI SOUJITAMAMUSHI SHUICHI
    • H01J37/147G03F7/20H01J37/302H01L21/027
    • G03F7/704H01J37/3026H01J2237/3175
    • PROBLEM TO BE SOLVED: To perform multi-drawing where deflection boundary is shifted, without increasing the amount of drawing data. SOLUTION: In this electron beam drawing apparatus for drawing a desired pattern on the surface of a specimen through deflection of an electron beam by means of deflectors, a magnetic disk 31 where drawing data divided into a plurality of frames is stored, a pattern region extracting unit 41 for extracting the drawing data of a frame unit in order which are inputted from the magnetic disk 31, a pattern data dividing unit 42 for dividing the extracted data into pattern data whose size is at most subfield size which can be deflected by a subdeflector 23d having a minimum deflection width, and a pattern data memory 32 for temporarily storing divided pattern data is installed. Stripes where deflection boundary is shifted are constituted by using stored pattern data, and drawing is performed by every constituted stripe.
    • 要解决的问题:在不增加绘图数据量的情况下进行偏移边界偏移的多次绘图。 解决方案:在用于通过偏转器偏转电子束在试样表面上画出期望图案的电子束描绘装置中,存储分割成多个帧的绘图数据的磁盘31,提取图形区域 单元41,用于从磁盘31输入的顺序提取帧单元的绘图数据;图形数据分割单元42,用于将提取的数据划分为尺寸最大为子字段尺寸的图形数据,该尺寸可以由子反转器偏转 23d具有最小的偏转宽度,以及用于临时存储划分的图案数据的图案数据存储器32。 通过使用存储的图案数据构成偏移边界偏移的条纹,并且通过每个构成的条纹进行绘制。
    • 2. 发明专利
    • Medical image diagnostic apparatus
    • 医学图像诊断装置
    • JP2006167042A
    • 2006-06-29
    • JP2004361802
    • 2004-12-14
    • Toshiba CorpToshiba Medical System Co LtdToshiba Medical Systems Corp東芝メディカルシステムズ株式会社東芝医用システムエンジニアリング株式会社株式会社東芝
    • YAMAGUCHI TOSHIO
    • A61B6/03
    • PROBLEM TO BE SOLVED: To provide a medical image diagnostic apparatus in which the accuracy of image comparison among a plurality of inspections is improved.
      SOLUTION: The medical image diagnostic apparatus comprises: an image storage part 40 for storing images G for storage; a condition storage part 50 for storing a gathering condition and a reconstitution condition; a scano image forming processing 21 for forming the scano image Pb of a subject P at the time of setting the gathering condition and the reconstitution condition; a monitor 140 for simultaneously displaying the scano image Pb formed this time and the image Pa for comparison based on the image G for storage in the past; and a condition setting part 60 for selecting the past gathering condition at the time of gathering the original data of the image Pa for comparison and the past reconstitution condition at the time of forming a reconstitution image based on the data from the condition storage part 50 when the display positions of the image Pa for comparison and the scano image Pb are matched by an input device 150 and setting them as the gathering condition and reconstitution condition of the inspection of this time.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种医疗图像诊断装置,其中提高了多个检查中的图像比较的精度。 医疗图像诊断装置包括:图像存储部40,用于存储用于存储的图像G; 用于存储收集条件和重新配置条件的条件存储部分50; 用于在设定聚集条件和重构条件时形成被检体P的扫描图像Pb的扫描图像形成处理21; 用于同时显示此时形成的扫描图像Pb的监视器140和用于比较的图像Pa,用于基于过去存储的图像G; 以及条件设定部分60,用于在收集用于比较的图像Pa的原始数据的时候选择过去的收集条件,以及基于来自条件存储部分50的数据形成重构图像时的过去的重建条件, 用于比较的图像Pa和扫描图像Pb的显示位置由输入装置150匹配,并将其设置为此次检查的收集条件和重建条件。 版权所有(C)2006,JPO&NCIPI
    • 4. 发明专利
    • Orbital synchronism helical shuttle scan ct apparatus
    • ORBITAL SYNCHRONISM HELICAL SHUTTLE SCAN CT APPARATUS
    • JP2014054354A
    • 2014-03-27
    • JP2012200362
    • 2012-09-12
    • Toshiba Corp株式会社東芝Toshiba Medical Systems Corp東芝メディカルシステムズ株式会社Toshiba Medical System Co Ltd東芝医用システムエンジニアリング株式会社
    • YAMAGUCHI TOSHIOSHINODA TAKAYUKIAMANOME TAKEOKAKINUMA TSUNENORIMIYASHITA OSAMU
    • A61B6/03
    • PROBLEM TO BE SOLVED: To correct an angle error at an orbital start position of an X-ray vessel to an allowable range in each going passage or each return passage, respectively, in helical shuttle scan.SOLUTION: An orbital synchronism helical shuttle scan CT apparatus includes: X-ray vessel position detecting parts 30, 31 for detecting an angle of an orbital start position of an X-ray vessel 26 in a going route or a return route of a bed top plate; an X-ray vessel angle error detecting part 32 for detecting an angle error of the X-ray vessel 26 at the respective orbital start positions by comparing the angle of the orbital start position in every going passage or return passage; a correction possible/impossible determination part 41 for determining whether or not an angle error is in the correctable range in helical shuttle scanning to collect images by rotating the X-ray vessel 26 and reciprocatingly moving the bed top plate 17; a data creating part 42 for creating angle error correction data when the determination result of the correction possible/impossible determination part 41 falls within the correctable range; and a control part 38 for correcting an angle error in the respective orbital start positions of the going passage and the return passage to an allowable range according to the angle error correction data from the data creating part 42.
    • 要解决的问题:将螺旋穿梭扫描中的X射线容器的轨道起始位置的角度误差分别校正到每个往复通道或每个返回通道中的允许范围。解决方案:轨道同步螺旋穿梭扫描CT 装置包括:X射线容器位置检测部30,31,用于检测床顶板的行进路线或返回路径中的X射线容器26的轨道开始位置的角度; X射线容器角度误差检测部32,用于通过比较每个往返通道中的轨道开始位置的角度来检测X射线容器26在各轨道开始位置的角度误差; 用于通过旋转X射线容器26和往复移动床顶板17来确定在螺旋穿梭扫描中角度误差是否在可校正范围内以收集图像的校正可能/不可能确定部41; 数据创建部42,用于当校正可能/不可能确定部41的确定结果落在校正范围内时产生角度误差校正数据; 以及控制部分38,用于根据来自数据创建部分42的角度误差校正数据,将进近通道和返回通道的各个轨道开始位置中的角度误差校正到允许范围。
    • 6. 发明专利
    • X-ray ct apparatus
    • X射线CT装置
    • JP2013146381A
    • 2013-08-01
    • JP2012008782
    • 2012-01-19
    • Toshiba Corp株式会社東芝Toshiba Medical Systems Corp東芝メディカルシステムズ株式会社Toshiba Medical System Co Ltd東芝医用システムエンジニアリング株式会社
    • MIYASHITA OSAMUAMANOME TAKEOKAKINUMA TSUNENORISHINODA TAKAYUKIYAMAGUCHI TOSHIO
    • A61B6/03
    • PROBLEM TO BE SOLVED: To provide an X-ray CT apparatus capable of providing an optimal tomographic image to simply and reliably securing a route for reaching an object in order to be treated while avoiding other organs.SOLUTION: An X-ray CT apparatus includes: a bed device 2 on which an object H lies down; a rack 3 for obtaining internal information of the object H by moving the bed device 2 including a top plate 2a to which the object H directly contacts and inserting the top plate 2a to the tunnel-like inside thereof to photograph the object H positioned in the inner part; and a control part 4 for controlling driving of the bed device 2 and the rack 3. The control part 4 includes an image generation part 4m generating medical images for each of a plurality of angles, obtained when the object H is photographed at a position where the rack 3 is inclined based on the obtained inner information, and a display part 4g for displaying the medical images generated at the image generation part 4m side by side for each of the angles of the rack 3.
    • 要解决的问题:提供一种能够提供最佳断层图像的X射线CT装置,以便简单可靠地确保达到物体的路线,以便在避免其他器官的同时进行治疗。解决方案:X射线CT装置包括 物体H位于其上的床装置2; 用于通过移动包括物体H直接接触的顶板2a的床装置2并将顶板2a插入其中的隧道状内部来拍摄物体H的内部信息的支架3,以拍摄位于 内部 以及用于控制床装置2和架子3的驱动的控制部分4.控制部分4包括图像生成部分4m,该图像产生部分4m产生当在被摄体H被拍摄时在多个角度中的每一个获得的医学图像, 基于所获得的内部信息使架子3倾斜;以及显示部4g,用于显示针对架子3的每个角度在图像生成部分4m处生成的医学图像。
    • 9. 发明专利
    • JPH05234862A
    • 1993-09-10
    • JP17578992
    • 1992-07-02
    • TOSHIBA CORP
    • YAMAZAKI SATOSHIABE TAKAYUKIUMAGOE TOSHIYUKIYAMAGUCHI TOSHIO
    • G03F7/20H01L21/027
    • PURPOSE:To compensate for proximity effect without lowering throughput by dividing a total writing region into a repetitive pattern region which enables writing with the character projection system and a write-disable region and writing patterns in each region with individual stage moving system in individual moving direction and moving speed. CONSTITUTION:A total writing region is divided into a region 1 in which repetitive patterns to be written by the character projection system exists and a region 2 in which repetitive patterns do not exist. A pattern is written in the region 1 with a charged beam by the character projection system and a pattern is also written in the region 2 with a charged beam or light. In this case, the stage moving system, stage moving direction or stage moving speed for the region 1 are different from those for the region 2. Thereby, the number of shots for the exposure can be reduced by making the spot size of character beam on a sample as large as possible.
    • 10. 发明专利
    • CHARGED PARTICLE BEAM LITHOGRAPHY
    • JPH04326718A
    • 1992-11-16
    • JP9664191
    • 1991-04-26
    • TOSHIBA CORP
    • YAMAGUCHI TOSHIOMORI ICHIRO
    • H01L21/027
    • PURPOSE:To provide an electron beam lithography method which eliminates the misalignment between a pattern drawing operation and a corrective drawing operation, which does not damage the controllability, the stability and the reproducibility of an electron optical system and which can draw a desired pattern on a resist with good accuracy. CONSTITUTION:An electron beam lithography method includes the following: a process to draw a desired pattern by irradiating a specimen with an electron beam; and a process to correctively draw an electron beam on the specimen in order to reduce a proximity effect due to backward scattered electrons when a pattern is drawn after the process. In the photolithography method, as a corrective drawing process, the whole drawing region is divided into figures 42 which are smaller than the backward scattering spread of the electron beam and which can be drawn. The irradiation amount of the individual figures 42 is set respectively on the basis of the reversed pattern of patterns 41 at a distance within 3sigmab from the figures 42, and the individual figures 42 are drawn according to said set irradiation amount.