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1. 发明专利

JP2014108744A Transporter for minimal device 有权
标题翻译：最小装置运输机
公开(公告)号：JP2014108744A
公开(公告)日：2014-06-12
申请号：JP2012264853
申请日：2012-12-04
申请人： National Institute Of Advanced Industrial & Technology , 独立行政法人産業技術総合研究所 , Design Network Co Ltd , 株式会社デザインネットワーク
发明人： HARA SHIRO , MAEKAWA HITOSHI , NAKANO ZEN , KUMPUAN SOMAWANG , IIDA MINORU
IPC分类号： B62B3/06 , B66F9/06
摘要： PROBLEM TO BE SOLVED: To provide a transporter utilizing speciality of a minimal device.SOLUTION: The transporter has a frame 48 supported by a wheel to a floor surface and a pair of first arms 72 for lifting up and down a first supporting arm 80 to a floor surface with one point on the frame 48 serving as a supporting point and which are bar-shaped and a pair of second arms 74 for lifting up and down a second supporting arm 82 to a floor surface with one point on the frame 48 serving as a supporting point and which are bar-shaped. They support a lifting plate 42. On the frame 48, a wedge guide 78 moving toward a cross direction to the frame 48 with a wedge-shaped inclined plane contacting with a lower surface of the first supporting arm 80 of the first arms 72 is supported. The wedge guide 78 lifts up the first supporting arm 80 when it moves to one direction while contacting with the lower surface of the first supporting arm 80 of the first arms 72, and lifts down the first supporting arm 80 when it moves to the other direction.
摘要翻译：要解决的问题：提供利用最小装置的特性的运输机。解决方案：运输机具有由车轮支撑到地板表面的框架48和用于将第一支撑臂80上升和下降的一对第一臂72 框架48上的一个点作为支撑点并且是棒状的地板表面和用于将第二支撑臂82上升和下降到地板表面上的一对第二臂74，其中一个点在框架48上服务作为支撑点，是棒状的。它们支撑提升板42.在框架48上，楔形引导件78以与第一臂72的第一支撑臂80的下表面接触的楔形倾斜平面朝向框架48的横向方向移动，。楔形引导件78在第一支撑臂80向第一臂72的第一支撑臂80的下表面移动同时向一个方向移动时提升第一支撑臂80，并且当第一支撑臂80向另一方向。

2. 发明专利

JP2014110359A Minimal manufacturing device, production line and method of rearranging production line 有权
标题翻译：最小制造装置，生产线及后期生产线的方法
公开(公告)号：JP2014110359A
公开(公告)日：2014-06-12
申请号：JP2012264850
申请日：2012-12-04
申请人： National Institute Of Advanced Industrial & Technology , 独立行政法人産業技術総合研究所 , Design Network Co Ltd , 株式会社デザインネットワーク
发明人： HARA SHIRO , MAEKAWA HITOSHI , NAKANO ZEN , KUMPUAN SOMAWANG , FUTAGAWA SHINJI , IIDA MINORU
IPC分类号： H01L21/02
摘要： PROBLEM TO BE SOLVED: To quickly, safely and securely rearrange a production line using minimal manufacturing devices.SOLUTION: A pair of leg parts is provided in parallel in portions positioned right below a left side wall and a right side wall of a bottom plate 36 of a minimal manufacturing device body. A space to which a lifting mechanism 25 of a conveyance device 14 is inserted is formed in a portion sandwiched by the pair of leg parts right below the bottom plate 36. A fixing structure 16 for supporting the bottom plate 36 is provided on a floor surface. A position leg 42 and a connection mechanism 71 are provided on the pair of leg parts and the bottom plate. A V-groove base 66 is provided on the position facing the positioning leg 42 on the fixing structure 16. The positioning leg 42 is brought into contact with the V-groove base 66 to position and support the bottom plate 36 when the bottom plate 36 descends toward the fixing structure 16.
摘要翻译：要解决的问题：使用最少的制造装置快速，安全和安全地重新排列生产线。解决方案：一对腿部部件平行设置，位于底板36的左侧壁和右侧壁的正下方的最小制造装置主体。输送装置14的提升机构25的空间形成在底板36的正下方被夹在该对腿部之间的部分内。支撑底板36的固定结构16设置在地面。位置支腿42和连接机构71设置在该对腿部和底板上。 V形槽底座66设置在与固定结构16上的定位支脚42相对的位置上。定位支脚42与V形槽底座66接触，以便当底板36 下降到固定结构16。

3. 发明专利

JP2014110358A Unit for configuring manufacturing line and assembly method thereof 有权
标题翻译：用于配置制造线的组件及其组装方法
公开(公告)号：JP2014110358A
公开(公告)日：2014-06-12
申请号：JP2012264845
申请日：2012-12-04
申请人： National Institute Of Advanced Industrial & Technology , 独立行政法人産業技術総合研究所 , Design Network Co Ltd , 株式会社デザインネットワーク
发明人： HARA SHIRO , MAEKAWA HITOSHI , FUTAGAWA SHINJI , MATSUMIYA YOSHIKAZU
IPC分类号： H01L21/677
摘要： PROBLEM TO BE SOLVED: To achieve high assembly accuracy as a whole, even if manufacturing each processor in a unit 12 while designing separately and independently.SOLUTION: A frame 14 of the unit 12 (minimal device) includes a front chamber 24 and a processing chamber 26. A processed object is received from an adjacent unit 12 by a holding mechanism 42. In the unit 12, the processed object moves from the front chamber 24 to a processor through a window 32 in a reference plate 30. An arbitrary processor is disposed in the processing chamber 26. Assembly accuracy is ensured by providing the holding mechanism 42 or a positioning mechanism of the processor on the reference plate 30 closest to the front chamber 24 and the processing chamber 26 and having the strength as a partition between them.
摘要翻译：要解决的问题：为了实现整体的高的组装精度，即使在单独地设计单元12中制造每个处理器的同时独立地设计。解决方案：单元12的框架14（最小装置）包括前室24和处理处理对象通过保持机构42从相邻单元12接收。在单元12中，处理对象通过参考板30中的窗口32从前室24移动到处理器。任意处理器设置在处理室26中。通过在最靠近前室24和处理室26的参考板30上设置保持机构42或处理器的定位机构并且具有作为它们之间的分隔的强度来确保装配精度。

4. 发明专利

JP2008248903A Load sensitive transmission 有权
标题翻译：负载敏感传输
公开(公告)号：JP2008248903A
公开(公告)日：2008-10-16
申请号：JP2007087052
申请日：2007-03-29
申请人： National Institute Of Advanced Industrial & Technology , 独立行政法人産業技術総合研究所
发明人： MAEKAWA HITOSHI
IPC分类号： F16H3/54 , F16D43/20
摘要： PROBLEM TO BE SOLVED: To realize a highly efficient driving system making the most of power sources responding to various types of power sources (such as a high-speed/low-torque power like an electric motor and a low-speed/high-torque power like human power) and loads.
SOLUTION: In the high-speed/low-torque state, with a magnetic clutch 27, the axial positions of a speed-up gear side transmission plate 41 and a middle disc 46 are energized and positioned by a clutch switching mechanism 47 such that a yoke 40 of the speed-up gear side transmission plate 41 is disposed opposite a magnetic ring 45 of the middle disc 46, which results in the output of the speed-up gear 23 side to be outputted from an output shaft 28 whereas in the low-speed/high-torque state, the direction of thrust generated by the clutch switching mechanism 47 is reversed, so that a yoke 43 of a speed reducer transmission ring 44 is disposed opposite the magnetic ring 45, which results in the output of the speed reducer 25 side to be outputted from the output shaft 28.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了实现高效率的驱动系统，使得大部分电源对各种电源（例如电动机和低速/低扭矩电源等高速/低扭矩功率）高扭矩功率，如人力）和负载。解决方案：在高速/低扭矩状态下，通过电磁离合器27，加速齿轮侧传动板41和中间盘46的轴向位置由离合器切换机构47通电并定位使得加速齿轮侧传递板41的轭40与中间盘46的磁环45相对设置，这导致加速齿轮23侧的输出从输出轴28输出，而在低速/高扭矩状态下，由离合器切换机构47产生的推力方向相反，使得减速传动环44的轭43与磁环45相对设置，这导致输出的减速器25侧从输出轴28输出。版权所有（C）2009，JPO＆INPIT

5. 发明专利

JP2009287603A Clutch device 有权
标题翻译：离合器件
公开(公告)号：JP2009287603A
公开(公告)日：2009-12-10
申请号：JP2008137944
申请日：2008-05-27
申请人： Kito Corp , National Institute Of Advanced Industrial & Technology , Shoei Koki:Kk , 株式会社キトー , 株式会社松栄工機 , 独立行政法人産業技術総合研究所
发明人： MAEKAWA HITOSHI , FUKAZAWA MICHIO , ENDO JUNICHI
IPC分类号： F16D27/01 , F16D43/20
CPC分类号： F16D27/01 , F16D43/20 , H02K49/10
摘要： PROBLEM TO BE SOLVED: To provide a clutch device of good transmission of torque while eliminating the possibility of increasing the size of the whole device. SOLUTION: The clutch device comprises an output rotary member 10 provided in the form of being rotatable around a rotating shaft L and displaceable between a low load position P1 and a high load position P2 depending on the magnitude of an external load, and a low-speed-side input rotary member 30 to be magnetically joined to the output rotary member 10 displaced to the high load position P2, in a non-contact condition, and rotated around the rotating shaft L to transmit torque. Herein, an engaging means is provided so that a pair of structural elements 13, 32 provided between the output rotary member 10 and the low-speed-side input rotary member 30 is arranged opposing each other via a cavity when the output rotary member 10 is displaced to the high load position P2, while they abut on and engage with each other to transmit torque between the output rotary member 10 and the low-speed-side rotary member 30 when the output rotary member 10 is rotated relative to the low-speed-side input rotary member 30 in the state of being located on the high load position P2. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供具有良好传递扭矩的离合器装置，同时消除了增加整个装置的尺寸的可能性。解决方案：离合器装置包括输出旋转构件10，该输出旋转构件10可以围绕旋转轴L旋转并且可以根据外部载荷的大小在低负载位置P1和高负载位置P2之间移动，并且低速侧输入旋转构件30以非接触状态磁性地接合到移动到高负载位置P2的输出旋转构件10，并且围绕旋转轴L旋转以传递扭矩。这里，设置接合装置，使得当输出旋转构件10为输出旋转构件10时，设置在输出旋转构件10和低速侧输入旋转构件30之间的一对构造元件13,32经由空腔相对地布置当输出旋转构件10相对于低速侧旋转时，它们彼此抵接并相互接合以在输出旋转构件10和低速侧旋转构件30之间传递扭矩，位于高负载位置P2的状态下的输入旋转构件30。版权所有（C）2010，JPO＆INPIT

6. 发明专利

JP2006048064A High-precision relief map production system and high-precision relief map generation process 有权
标题翻译：高精度救济地图生成系统和高精度救援地图生成过程
公开(公告)号：JP2006048064A
公开(公告)日：2006-02-16
申请号：JP2005233291
申请日：2005-08-11
申请人： National Institute Of Advanced Industrial & Technology , 独立行政法人産業技術総合研究所
发明人： MAEKAWA HITOSHI
IPC分类号： G09B25/06 , B29C67/00 , G06T17/05 , G09B29/00
摘要： PROBLEM TO BE SOLVED: To provide a high-precision relief map production system capable of producing a high-precision relief map of an arbitrary area from numerical map data at a low cost in a short period of time.
SOLUTION: The high-precision relief map production system produces the relief map by converting the numerical map data to STL data and inputting the STL data to an optical shaping device. In performing automatic conversion processing by a computer to the STL data from the numerical map data, a horizontal plane is set within a production range of the relief map; a lattice point which is a base point and three lattice points adjacent to the lattice point are set on the horizontal plane; an altitude at each lattice point is read in from a numerical map CD-ROM and new four lattice points are set upward distant the above altitude from each lattice point; a quadrilateral constituted by the four lattice points is divided by diagonals to two triangles; the assembly of the divided triangles is converted into the STL data and the relief map is shaped by inputting the STL data to the optical shaping device.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够在短时间内以低成本从数字地图数据产生任意区域的高精度浮雕图的高精度浮雕图制作系统。解决方案：高精度浮雕图生产系统通过将数字图数据转换为STL数据并将STL数据输入到光学成形装置来产生浮雕图。在通过计算机对来自数值图数据的STL数据的自动转换处理中，在浮雕图的生产范围内设置水平面; 作为基点的格点和与格点相邻的三个格点设置在水平面上; 从数字地图CD-ROM中读取每个格点处的高度，并且将新的四个格点设置为从每个格点向上远离上述高度; 由四个格点组成的四边形由对角线分成两个三角形; 通过将STL数据输入到光学整形装置，将分割的三角形的组合转换成STL数据并且形成浮雕图。版权所有（C）2006，JPO＆NCIPI

7. 发明专利

JP2005351336A Non-contact load-sensing type automatic transmission 有权
标题翻译：非接触式感应式自动变速器
公开(公告)号：JP2005351336A
公开(公告)日：2005-12-22
申请号：JP2004171453
申请日：2004-06-09
申请人： National Institute Of Advanced Industrial & Technology , 独立行政法人産業技術総合研究所
发明人： MAEKAWA HITOSHI
IPC分类号： F16H3/66 , F16D27/01 , F16H49/00
摘要： PROBLEM TO BE SOLVED: To provide a non-contact load-sensing type automatic transmission enabling the stable operation, a reduction in size, and an easy increase in the number of stages. SOLUTION: A first yoke 12 and a second yoke 13 are fixed on both sides of a first permanent magnet 11 through a clearance 16, and a third yoke 20 is disposed through the clearance. A second permanent magnet 25 on the inner peripheral surface of a cylindrical magnet fixing member 49 is detachably disposed in the space 16 between the yokes. When the second permanent magnet 25 is inserted into the clearance 16, the magnetic circuit of the first permanent magnet 11 is passed through the second permanent magnet 25 side and the third yoke 20 is brought into a free state. When the second permanent magnet 25 is released from the clearance 16, the magnetic circuit of the first permanent magnet is passed through the third yoke 20, and both permanent magnets are magnetically joined to each other. The magnetic clutches 10 are disposed in three rows parallel with each other, and the third yoke in each row is fixed to the internal gear outer peripheral surface of a planetary gear installed at the center thereof. The internal gear in any row is fixed by the magnetic clutch, and an output shaft 75 is driven at the deceleration of the operating planetary gear. According to a load, a spring 44 is extended/retracted to select the magnetic clutch in operation. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供能够进行稳定操作，尺寸减小和阶段容易增加的非接触式负载感应型自动变速器。解决方案：第一磁轭12和第二磁轭13通过间隙16固定在第一永磁体11的两侧，并且第三磁轭20通过间隙设置。圆筒状磁铁固定部件49的内周面上的第二永磁体25可拆卸地设置在磁轭之间的空间16中。当第二永磁体25插入到间隙16中时，第一永磁体11的磁路通过第二永磁体25侧，第三磁轭20进入自由状态。当第二永磁体25从间隙16释放时，第一永久磁铁的磁路通过第三磁轭20，并且两个永久磁铁彼此磁接合。磁离合器10彼此平行配置成三行，每行的第三磁轭固定在安装在其中心的行星齿轮的内齿轮外周面上。任何一列的内齿轮均由磁性离合器固定，输出轴75以行星齿轮的减速度驱动。根据负载，弹簧44被延伸/缩回以选择操作中的磁性离合器。版权所有（C）2006，JPO＆NCIPI

8. 发明专利

JP2004347027A Non-contact load-sensing type automatic transmission 有权
公开(公告)号：JP2004347027A
公开(公告)日：2004-12-09
申请号：JP2003144826
申请日：2003-05-22
申请人： National Institute Of Advanced Industrial & Technology , 独立行政法人産業技術総合研究所
发明人： MAEKAWA HITOSHI
IPC分类号： B60K17/02 , F16D27/01 , F16D43/20 , F16H3/44 , F16H49/00
摘要： PROBLEM TO BE SOLVED: To perform the switching operation of a magnetic clutch magnetically according to a load.
SOLUTION: An inside yoke 14 fixed to an inside disk 15 connected to the high speed side of a speed reducer 1 and an outside yoke 12 fixed to an outside ring 13 connected to the low speed side are disposed opposite to each other by axially shifting each other, and a permanent magnet 17 with an intermediate yoke 18 fixed to an intermediate disk 16 is disposed between these yokes. Magnets M
OA and M
OA ' are disposed on an output disk 20 opposed to a magnet M
1 fixed to the intermediate disk 16 and connected to an output shaft. The magnet M
1 is disposed to position between the magnets M
OA and M
OA ' so that the opposed poles thereof are the same ones to produce a repulsion to press the intermediate disk 16 so as to oppose the intermediate yoke 18 to a high speed stage inside yoke 14 in order to integrally rotate the magnet. When a load is increased, the magnet M
1 is rotated to a position where the magnet is opposed to the magnet M
OA so that the magnet M is attracted by the magnet M
OA so as to integrally rotate the inside yoke oppositely to the low speed stage outside yoke 12. An adjacent magnet M
OB generates a returning force.
COPYRIGHT: (C)2005,JPO&NCIPI

9. 发明专利

JP2014110309A Opening and closing device of conveyance container 有权
标题翻译：输送容器的开启和关闭装置
公开(公告)号：JP2014110309A
公开(公告)日：2014-06-12
申请号：JP2012263582
申请日：2012-11-30
申请人： National Institute Of Advanced Industrial & Technology , 独立行政法人産業技術総合研究所
发明人： HARA SHIRO , MAEKAWA HITOSHI
IPC分类号： H01L21/673 , B65D85/86
摘要： PROBLEM TO BE SOLVED: To open and close a lid of a container more easily, reduce the time in which a wafer is exposed to the atmosphere outside the container, and reduce the possibility that the wafer is contaminated due to fine dust when opening and closing the lid.SOLUTION: An opening and closing device of a conveyance container for opening and closing a conveyance container door of a conveyance container which is constituted by a conveyance container body and the conveyance container door includes such a configuration that a placement part consisting of a recess for accommodating the conveyance container body is provided on the upper part of the opening and closing device, the interior of the recess has a shape corresponding to the outer surface shape of the conveyance container body, the bottom surface of the placement part has a protrusion fit into a recess formed on the conveyance container door, a hole for accommodating a magnet is formed at a position on the bottom surface of the placement part corresponding to the magnet provided on the conveyance container door, and the magnet can move vertically with driving force so as to cross the bottom surface of the placement part.
摘要翻译：要解决的问题：为了更容易地打开和关闭容器的盖子，减少了晶片暴露于容器外部的大气的时间，并且减少了当打开和关闭时晶片被细粉尘污染的可能性盖子。解决方案：一种用于打开和关闭由输送容器主体和输送容器门构成的输送容器的运输容器门的运输容器的开闭装置，包括：由在开闭装置的上部设置有用于容纳输送容器体的凹部，凹部的内部具有与输送容器主体的外表面形状对应的形状，放置部的底面具有突起装配在形成在输送容器门上的凹部中，在t的底表面上的位置处形成用于容纳磁体的孔对应于设置在输送容器门上的磁体的放置部分，并且磁体可以用驱动力垂直移动，以便穿过放置部分的底表面。

10. 发明专利

JP2014109418A Laminarization mechanism in apparatus 有权
标题翻译：装置中的层压机构
公开(公告)号：JP2014109418A
公开(公告)日：2014-06-12
申请号：JP2012265075
申请日：2012-12-04
申请人： National Institute Of Advanced Industrial & Technology , 独立行政法人産業技術総合研究所 , Nanometric Technology Inc , 株式会社ナノテック , Sanmei Co Inc , 株式会社三明
发明人： HARA SHIRO , MAEKAWA HITOSHI , YOKOYAMA YASUAKI , INUZUKA YOSHIKI
IPC分类号： F24F7/06
摘要： PROBLEM TO BE SOLVED: To create laminar air flow in a small semiconductor manufacturing apparatus without using a HEPA filter.SOLUTION: A cleaning room 210 in an apparatus front chamber 120 which loads and unloads semiconductor wafers to a processing chamber 110 includes an upper punching plate 254 having a plurality of through-holes 1101 for making air supplied from an air supply valve 251 flow therethrough and a lower punching plate 255 having a plurality of through-holes 1102 for making air exhausted from an exhaust valve 253 flow therethrough. Overall height of the apparatus can be reduced because air purified by an external filter is moved in laminar flow through the upper punching plate 254 and the lower punching plate 255 and there is no need to set a HEPA filter in the cleaning room 210 for purification of air and creation of laminar air flow.
摘要翻译：要解决的问题：在不使用HEPA过滤器的情况下在小型半导体制造装置中形成层流气流。解决方案：将半导体晶片装载和卸载到处理室110的装置前室120中的清洁室210包括上冲孔板 254具有多个用于从供气阀251供应的空气的通孔1101流过，并且具有多个用于使排气阀253排出的空气的通孔1102的下冲孔255流过其中。可以减少设备的整体高度，因为通过外部过滤器净化的空气通过上冲孔板254和下冲孔板255以层流的方式移动，并且不需要在清洁室210中设置HEPA过滤器来净化空气和层流气流的产生。

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