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1. 发明专利

JP2014071927A Method and apparatus for inspecting thermally assisted magnetic head 有权
标题翻译：用于检查热辅助磁头的方法和装置
公开(公告)号：JP2014071927A
公开(公告)日：2014-04-21
申请号：JP2012216338
申请日：2012-09-28
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： TOKUTOMI TERUAKI , SAITO NAOYA , KITANO KEISHO , CHANG KE-BONG , WATANABE MASAHIRO , HIROSE TAKESHI
IPC分类号： G11B5/455 , G01Q60/02 , G01Q60/18 , G01Q60/54 , G01Q80/00
CPC分类号： G11B20/1816 , B82Y35/00 , G01Q60/08 , G11B5/455 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To effectively and highly accurately measure a magnetic field generated by a thermally assisted magnetic head and a near-field light generation area.SOLUTION: An apparatus for inspecting a thermally assisted magnetic head comprises: scanning type probe microscope means provided with a cantilever whose tip has a probe having its surface formed with a magnetic film; a probe unit that feeds an AC current to a terminal formed on a thermally assisted magnetic head element and makes a drive current or a drive voltage apply to a near-field light emitting unit; scattered light detection means for detecting scattered light generated from the probe in a generation area of near-field light by scanning with the probe while applying a drive current or a drive voltage to the near-field light emitting unit; image taking means for taking images of the thermally assisted magnetic head element including the near-field light emitting unit; and signal processing means for performing detection of the thermally assisted magnetic head element, by the use of an output signal output from scanning type probe microscope means by scanning with the probe while feeding a terminal with an AC current and an output signal from the scattered light detection means.
摘要翻译：要解决的问题：有效和高精度地测量由热辅助磁头和近场光产生区域产生的磁场。解决方案：用于检查热辅助磁头的装置包括：扫描型探针显微镜装置，其尖端具有其表面形成有磁性膜的探针的悬臂; 探针单元，其将AC电流馈送到形成在热辅助磁头元件上的端子，并将驱动电流或驱动电压施加到近场发光单元; 散射光检测装置，用于在向近场发光单元施加驱动电流或驱动电压的同时用探头扫描在近场光的产生区域中检测从探头产生的散射光; 摄像装置，用于拍摄包括近场光发射单元的热辅助磁头元件的图像; 以及信号处理装置，用于通过使用从扫描型探针显微镜装置输出的输出信号，通过用探针向扫描器馈送交流电流的端子和来自散射光的输出信号，来执行热辅助磁头元件的检测检测手段。

2. 发明专利

JP2012233845A Cantilever for a magnetic force microscope and manufacturing method of the same 有权
标题翻译：磁力显微镜及其制造方法的CANTILEVER
公开(公告)号：JP2012233845A
公开(公告)日：2012-11-29
申请号：JP2011104151
申请日：2011-05-09
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： CHANG KE-BONG , HIROSE TAKESHI , WATANABE MASAHIRO , MATSUI TETSUYA , NAKAGOME TSUNEO , TOKUTOMI TERUAKI
IPC分类号： G01Q60/54 , G01Q60/56 , G01Q70/12
CPC分类号： G01Q60/36 , G01Q60/42 , G01Q60/54 , G01Q60/56 , G01Q70/12 , G01Q70/14 , G01Q70/16
摘要： PROBLEM TO BE SOLVED: To manufacture a durable cantilever for a magnetic force microscope by depositing a protection film on a probe on which a magnetic film is added.SOLUTION: In the manufacturing method of a magnetic force microscope, a magnetic film 2 is deposited on the probe 401 at a tip end of the cantilever 1 of the magnetic force microscope. When depositing a non-magnetic hard protection film 3 at the periphery of the probe 401, the non-magnetic hard protection film 3 is deposited from two directions of an angle between (15° to -45°) from a front side of the probe 401 of the cantilever 1 of the magnetic force microscope, and an angle between (15° to -30°) from a rear side of the probe 401 of the cantilever 1 of the magnetic force microscope.
摘要翻译：要解决的问题：通过在添加有磁性膜的探针上沉积保护膜来制造用于磁力显微镜的耐用悬臂。解决方案：在磁力显微镜的制造方法中，磁性膜2沉积在磁力显微镜的悬臂1的前端的探针401上。当在探针401的周围沉积非磁性硬保护膜3时，非磁性硬保护膜3从探头的前侧（15°至-45°）之间的角度的两个方向沉积磁力显微镜的悬臂1的401，以及来自磁力显微镜的悬臂1的探针401的后侧的（15°〜-30°）之间的角度。版权所有（C）2013，JPO＆INPIT

3. 发明专利

JP2012047539A Spm probe and light emitting portion inspection apparatus 审中-公开
标题翻译： SPM探头和发光部分检查装置
公开(公告)号：JP2012047539A
公开(公告)日：2012-03-08
申请号：JP2010188651
申请日：2010-08-25
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： CHANG KE-BONG , HIROSE TAKESHI , NAKAGOME TSUNEO , WATANABE MASAHIRO
IPC分类号： G01Q60/22 , G01Q60/32 , G01Q70/00 , G01Q70/12
CPC分类号： G01Q70/12 , G01Q60/22 , G01Q60/58
摘要： PROBLEM TO BE SOLVED: To provide an SPM probe capable of observing the spatial distribution of micro-scale energy sources such as near-field light or microwaves over a wide measurement range and with a high spatial resolution.SOLUTION: An SPM probe includes: an SPM cantilever 1; a heat resistance 2 formed in a probe part of the SPM cantilever; an insulator film 3 formed on the heat resistance 2; and one filament 4 formed on the insulator film 3 for converting micro-scale energy sources into heat.
摘要翻译：要解决的问题：提供能够在宽测量范围和高空间分辨率下观察诸如近场光或微波等微尺度能量的空间分布的SPM探针。
解决方案：SPM探头包括：SPM悬臂1; 形成在SPM悬臂的探针部分中的耐热性2; 形成在耐热性2上的绝缘膜3; 以及形成在绝缘膜3上的用于将微尺度能量源转换成热量的一根细丝4。版权所有（C）2012，JPO＆INPIT

4. 发明专利

JP2010097671A Method and device for inspecting patterned medium 有权
标题翻译：用于检查图案的方法和装置
公开(公告)号：JP2010097671A
公开(公告)日：2010-04-30
申请号：JP2008269633
申请日：2008-10-20
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： SASAZAWA HIDEAKI , HIROSE TAKESHI , YOSHIDA MINORU , SAITO HIROYA , SERIKAWA SHIGERU
IPC分类号： G11B5/84 , G01N21/95
CPC分类号： G11B5/746 , G01B11/24 , G01N21/8851 , G01N21/956 , G11B5/855
摘要： PROBLEM TO BE SOLVED: To provide a system for inspecting defects of a pattern shape and positional deviation of a servo pattern at high speed in inspection of a patterned medium for a hard disk.
SOLUTION: An inspection region 2 is designated using design information 1, region division 3 for measurement by a scatterometry method is performed, and pattern classification 4 of obtained and detected data is performed to classify patterns into a periodic region 5 and a non-periodic region 6. Spectral characteristics are detected 7 by an optical sensor to extract 8 feature amounts. The extracted feature amounts 8 are compared with the feature amounts stored in a feature amounts map database 11 for each region to evaluate the state of the patterned medium.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于在检查用于硬盘的图案化介质时高速检查图案形状的缺陷和伺服图案的位置偏差的系统。解决方案：使用设计信息1指定检查区域2，执行用于通过散射测量法进行测量的区域划分3，并且执行所获取和检测到的数据的图案分类4以将图案分类为周期性区域5和非均匀区域通过光学传感器检测光谱特性7以提取8个特征量。将提取的特征量8与存储在特征量图数据库11中的每个区域的特征量进行比较，以评估图案化介质的状态。版权所有（C）2010，JPO＆INPIT

5. 发明专利

JP2014228838A 微細パターンの形成方法审中-公开
标题翻译：形成精细图案的方法
公开(公告)号：JP2014228838A
公开(公告)日：2014-12-08
申请号：JP2013110959
申请日：2013-05-27
申请人：株式会社日立ハイテクノロジーズ , Hitachi High-Technologies Corp
发明人： HIROSE TAKESHI , MATSUI SHIGERU , TSUNODA KAZUYUKI
IPC分类号： G02B5/18 , G03F7/20 , H01L21/027
摘要：【課題】任意の断面形状を有する微細パターンを効率的に形成する。【解決手段】回折格子の溝パターンを形成する方法は、光学特性のシミュレーションに基づいて所望の光学特性を得るための断面形状の最適化工程S401と、加工プロセスのシミュレーションに基づいて所望の断面形状を得るための加工プロセスの最適化工程S402と、最適化工程S402で最適化された加工プロセスに基づいて基板を加工する加工工程S403と、加工工程S403で加工された基板の断面形状を測定する測定工程S404と、加工された基板の光学特性を評価する評価工程S405とを有する。【選択図】図1
摘要翻译：要解决的问题：有效地形成具有任意横截面形状的精细图案。解决方案：一种用于形成衍射光栅的凹槽图案的方法，包括：用于获得所需光学特性的横截面形状优化步骤S401，光学特性的模拟; 处理过程优化步骤S402，用于基于处理过程的模拟获得期望的横截面形状; 基于由优化步骤S402优化的处理过程来处理基板的处理步骤S403; 用于测量由处理步骤S403处理的基板的横截面形状的测量步骤S404; 以及用于评价被处理基板的光学特性的评价步骤S405。

6. 发明专利

JP2014071925A Method and apparatus for inspecting thermally assisted magnetic head 有权
标题翻译：用于检查热辅助磁头的方法和装置
公开(公告)号：JP2014071925A
公开(公告)日：2014-04-21
申请号：JP2012216219
申请日：2012-09-28
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： MURAKAMI SHINICHIRO , TOKUTOMI TERUAKI , SAITO NAOYA , HIROSE TAKESHI , CHANG KE-BONG , KITANO KEISHO
IPC分类号： G11B5/455 , G01Q60/02 , G01Q60/18 , G01Q60/54 , G01Q80/00
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for inspecting a thermally assisted magnetic head that optimizes a positional relation between a near-field light emitting unit and scattered light detection means.SOLUTION: An apparatus for inspecting a thermally assisted magnetic head comprises: scanning type probe microscope means provided with a cantilever whose tip has a probe having its surface formed with a magnetic film; image taking means for taking an image of a thermally assisted magnetic head element in the visual field that is mounted on a XY table; scattered light detection means having a light detector for detecting scattered light generated from the probe when the probe is in a generation area of near-field light generated from a near-field light emitting unit formed on the thermally assisted magnetic head element; light detector switching means for mechanically switching between a layout of a CCD camera of the image taking means and a layout of the light detector of the scattered light detection means, except a lens system used in common for both the means, to enable application of either one of the means; and alignment means for recognizing and processing an image taken by the image taking means to adjust a relative position between the near-field light emitting unit and the scattered light detection means to an appropriate position for detecting the scattered light with the scattered light detection means.
摘要翻译：要解决的问题：提供一种用于检查热辅助磁头的装置，其优化近场发光单元和散射光检测装置之间的位置关系。解决方案：用于检查热辅助磁头的装置包括：扫描型具有悬臂的探针显微镜装置，其尖端具有其表面形成有磁性膜的探针; 用于在安装在XY工作台上的视场中拍摄热辅助磁头元件的图像的摄像装置; 散射光检测装置，具有光检测器，用于当探针处于形成在热辅助磁头元件上的近场发光单元产生的近场光的产生区域中时，用于检测由探头产生的散射光; 光检测器切换装置，用于在图像获取装置的CCD照相机的布局与散射光检测装置的光检测器的布局之间机械地切换，除了用于两个装置的共同使用的透镜系统之外，以使得能够应用其中一种手段; 以及对准装置，用于识别和处理由摄像装置拍摄的图像，以将近场发光单元和散射光检测装置之间的相对位置调整到用于利用散射光检测装置检测散射光的适当位置。

7. 发明专利

JP2014070970A Method and apparatus for inspecting thermally assisted magnetic head 有权
标题翻译：用于检查热辅助磁头的方法和装置
公开(公告)号：JP2014070970A
公开(公告)日：2014-04-21
申请号：JP2012216337
申请日：2012-09-28
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： KITANO KEISHO , TOKUTOMI TERUAKI , SAITO NAOYA , HIROSE TAKESHI , CHANG KE-BONG
IPC分类号： G01Q60/18 , G01Q60/50 , G01Q80/00 , G11B5/31 , G11B5/455
CPC分类号： G01Q60/22 , B82Y20/00 , B82Y25/00 , B82Y35/00 , G01Q60/02 , G01Q60/56 , G11B5/455 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To surely detect scattered light generated at a probe in a tip of a cantilever in a near-field light emitting area when detecting a thermally assisted magnetic head.SOLUTION: An apparatus for inspecting a thermally assisted magnetic head comprises: scanning type probe microscope means provided with a cantilever whose tip has a probe having its surface formed with a magnetic film; a probe unit that feeds an AC current to a terminal formed on a thermally assisted magnetic head element and makes a laser incident to a near-field light emitting unit; image taking means for taking images of the probe unit and the thermally assisted magnetic head element; scattered light detection means for detecting scattered light generated from the probe through a pinhole when the probe is in a generation area of near-field light in the thermally assisted magnetic head element; and signal processing means for performing detection, by the use of an output signal output from scanning type probe microscope means by scanning with the probe in a state where an AC current is fed to the terminal and an output signal output from the scattered light detection means by scanning with the probe in a state where near-field light is generated.
摘要翻译：要解决的问题：当检测到热辅助磁头时，确保在近场发光区域中检测在悬臂的尖端处的探针处产生的散射光。解决方案：用于检查热辅助磁头的装置包括：扫描型探针显微镜装置，其具有悬臂，其尖端具有其表面形成有磁性膜的探针; 探针单元，其将AC电流馈送到形成在热辅助磁头元件上的端子，并使激光入射到近场发光单元; 用于拍摄探针单元和热辅助磁头元件的图像的图像拍摄装置; 散射光检测装置，用于当探头处于热辅助磁头元件中的近场光的产生区域时，通过针孔检测从探针产生的散射光; 以及信号处理装置，用于通过使用从扫描型探针显微镜装置输出的输出信号，通过在AC电流被馈送到端子的状态下用探头扫描并且从散射光检测装置输出的输出信号进行检测通过在产生近场光的状态下用探针进行扫描。

8. 发明专利

JP2014070959A Method and apparatus for inspecting thermally assisted magnetic head 有权
标题翻译：用于检查热辅助磁头的方法和装置
公开(公告)号：JP2014070959A
公开(公告)日：2014-04-21
申请号：JP2012216218
申请日：2012-09-28
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： HIDA AKIRA , TOKUTOMI TERUAKI , SAITO NAOYA , HIROSE TAKESHI , CHANG KE-BONG , KITANO KEISHO
IPC分类号： G01Q60/18 , G01Q60/24 , G01Q60/50 , G11B5/31 , G11B5/455
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for inspecting a thermally assisted magnetic head that optimizes a positional relation between a near-field light emitting unit and scattered light detection means.SOLUTION: An apparatus for inspecting a thermally assisted magnetic head comprises: scanning type probe microscope means provided with a cantilever whose tip has a probe having its surface formed with a magnetic film; image taking means for taking an image of a heat assisted magnetic head element, in the visual field, mounted on a XY table; scattered light detection means having a light detector for detecting scattered light generated from the probe when the probe is in a generation area of near-field light generated from a near-field light emitting unit formed on the thermally assisted magnetic head element; optical system switching means for mechanically switching between a layout of the image taking means and a layout of the scattered light detection means to enable application of either one of the means; and alignment means for recognizing and processing an image taken by the image taking means to adjust a relative position between the near-field light emitting unit and the scattered light detection means to an appropriate position for detecting the scattered light with the scattered light detection means.
摘要翻译：要解决的问题：提供一种用于检查热辅助磁头的装置，其优化近场发光单元和散射光检测装置之间的位置关系。解决方案：用于检查热辅助磁头的装置包括：扫描型具有悬臂的探针显微镜装置，其尖端具有其表面形成有磁性膜的探针; 摄像装置，用于拍摄安装在XY台上的视野中的热辅助磁头元件的图像; 散射光检测装置，具有光检测器，用于当探针处于形成在热辅助磁头元件上的近场发光单元产生的近场光的产生区域中时，用于检测由探头产生的散射光; 光学系统切换装置，用于在图像拍摄装置的布局和散射光检测装置的布局之间进行机械切换，以实现装置中的任一个; 以及对准装置，用于识别和处理由摄像装置拍摄的图像，以将近场发光单元和散射光检测装置之间的相对位置调整到用于利用散射光检测装置检测散射光的适当位置。

9. 发明专利

JP2014006236A Cross-sectional shape measurement method for minute pattern and apparatus for the same 有权
标题翻译：用于分钟图案的交叉形状形状测量方法及其设备
公开(公告)号：JP2014006236A
公开(公告)日：2014-01-16
申请号：JP2012280729
申请日：2012-12-25
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： HIROSE TAKESHI , MATSUI SHIGERU
IPC分类号： G01B11/24
摘要： PROBLEM TO BE SOLVED: To solve such a problem that, if a cross-sectional shape including such characteristics as asymmetry and roundness like a diffraction grating is modeled, the number of parameters is large, library calculation is virtually impossible and shape measurement is also impossible.SOLUTION: There is provided a pattern cross-sectional shape measurement method by which a sample on whose surface a minute repetitive pattern having a bilaterally asymmetrical cross-sectional shape is irradiated with light, light reflected by the sample surface is spectroscopically detected, the data obtained by spectroscopic detection and prestored data are used to obtain the cross-sectional shape of the minute repetitive pattern formed on the sample surface. In the method, the prestored data is data resulting from modeling of data of the same kind as the data obtained by spectroscopic detection and of the cross-sectional shape of the minute repetitive pattern associated with the same kind of data obtained by the spectroscopic detection, and the data resulting from modeling of the cross-sectional shape is data formed of a bilaterally asymmetric curve, represented by a combination of a single function or a plurality of functions.
摘要翻译：要解决的问题为了解决这样一个问题，如果对像衍射光栅那样具有不对称性和圆度等特性的横截面形状进行建模，则参数数量大，库计算实际上是不可能的，并且形状测量也是不可能的解决方案：提供了一种图案横截面形状测量方法，通过该图形横截面形状测量方法，其表面上具有双向不对称横截面形状的微小重复图案的样品被光照射，由样品表面反射的光被光谱检测，数据通过光谱检测得到的预先存储的数据用于获得在样品表面上形成的微小重复图案的横截面形状。在该方法中，预先存储的数据是通过与通过光谱检测获得的数据相同类型的数据的建模以及与通过光谱检测获得的相同种类的数据相关联的微小重复模式的横截面形状的数据得到的数据，并且由横截面形状的建模产生的数据是由双功能不对称曲线形成的数据，由单个功能或多个功能的组合表示。

10. 发明专利

JP2012172999A Pattern shape inspection method and device thereof 有权
标题翻译：图案形状检查方法及其装置
公开(公告)号：JP2012172999A
公开(公告)日：2012-09-10
申请号：JP2011032274
申请日：2011-02-17
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： HIROSE TAKESHI , SERIKAWA SHIGERU
IPC分类号： G01B11/24 , G11B5/84 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To previously know by spectral reflectance measurement whether an object structure is measurable or how much error is generated in shape measurement of a pattern.SOLUTION: A pattern shape inspection method comprises: performing spectroscopic detection of a repeated pattern to obtain spectral reflectance; obtaining an amount of noise for every detection wavelength generated at the time of detection; calculating the shape of the repeated pattern using information on the spectral reflectance, information on the amount of noise for every detection wavelength generated at the time of detection, information on optical material including refractive index and extinction coefficient of the repeated pattern, and information on the shape of the repeated pattern; evaluating whether it is possible to measure the repeated pattern with predetermined accuracy; and sequentially performing spectroscopic detection of a substrate formed with the same pattern as the repeated pattern when determining to be measurable with the predetermined accuracy as a result of the evaluation, in order to inspect the shape of the pattern.
摘要翻译：要解决的问题：先前通过光谱反射测量知道物体结构是否可测量，或者在图案的形状测量中产生多少误差。解决方案：图案形状检查方法包括：对重复图案进行光谱检测以获得光谱反射率; 获得检测时产生的每个检测波长的噪声量; 使用关于光谱反射率的信息计算重复图案的形状，关于检测时生成的每个检测波长的噪声量的信息，包括重复图案的折射率和消光系数的光学材料的信息，以及关于重复图案的形状; 评估是否可以以预定精度测量重复图案; 并且当作为评估的结果确定可以以预定的精度进行测量时，顺序地对与重复图案相同的图案形成的基板进行光谱检测，以便检查图案的形状。版权所有（C）2012，JPO＆INPIT

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