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1. 发明专利

JP2014192395A Solar battery module 审中-公开
标题翻译：太阳能电池模块
公开(公告)号：JP2014192395A
公开(公告)日：2014-10-06
申请号：JP2013067520
申请日：2013-03-27
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： YOSHIDA MINORU , OTAKE MITSUYUKI , KAMAISHI KOSEI
IPC分类号： H01L31/042
CPC分类号： Y02E10/50
摘要： PROBLEM TO BE SOLVED: To improve reliability of a solar battery module.SOLUTION: Inside a case 2 constituting a solar battery module 1, a string which is configured by electrically connecting a plurality of solar battery cells 3a by wiring 3b is arranged. The string is covered with a sealing body 4 packed inside the case 2. The sealing body 4 is provided with a space 5. The space 5 is a portion for relaxing a stress applied to the solar battery cell 3a and the wiring 3b from the sealing body 4 because of thermal expansion of the sealing body 4, by absorbing the thermal expansion of the sealing body 4. Thus, a failure such as cracking of the solar battery cell 3a, disconnection of the wiring 3b, peeling at a border surface between an inner wall of the case 2 and the sealing body 4, and peeling at a border surface between the sealing body 4 and the solar battery cell 3a, can be suppressed or prevented. Thus, reliability of the solar battery module 1 can be maintained or improved.
摘要翻译：要解决的问题：提高太阳能电池模块的可靠性。解决方案：在构成太阳能电池模块1的壳体2内部布置有通过布线3b电连接多个太阳能电池单元3a而构成的串。绳子被封装在壳体2内的密封体4覆盖。密封体4设置有空间5.空间5是用于放松施加到太阳能电池单元3a的应力的部分和来自密封件通过吸收密封体4的热膨胀，由于密封体4的热膨胀，因此太阳能电池单元3a的断裂，布线3b的断开，壳体2的内壁和密封体4以及密封体4与太阳能电池单体3a之间的边界面的剥离能够被抑制或防止。因此，能够维持或改善太阳能电池模块1的可靠性。

2. 发明专利

JP2013211373A Solar cell module 审中-公开
标题翻译：太阳能电池模块
公开(公告)号：JP2013211373A
公开(公告)日：2013-10-10
申请号：JP2012079884
申请日：2012-03-30
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： YOSHIDA MINORU , ARAKI MASAKI , SATO KAZUTAKA
IPC分类号： H01L31/042
CPC分类号： Y02E10/50
摘要： PROBLEM TO BE SOLVED: To provide a solar cell module which relaxes internal stress caused by a resin thereby achieving high reliability when solar cells are resin sealed.SOLUTION: A solar cell module of the invention includes: a substrate 6 where a frame part 6b is provided at a periphery thereof; a string having multiple solar cells 1 that are disposed in a recessed part on the substrate 6 enclosed by the frame part 6b and are connected by wiring materials 2a. The solar cell module further includes: a resin layer 7b placed in the recessed part so as to bury the string; and a lid member 9 disposed on the resin layer 7b; and a space Sp exposing the resin layer 7b between the frame part 6b and the lid member 9. As just described, the space Sp is provided between the frame part 6b and the lid member 9 thereby relaxing stress due to expansion or contraction of the resin layer 7b even when a resin having a large thermal expansion coefficient is used as a material of the resin layer 7b.
摘要翻译：要解决的问题：提供一种太阳能电池模块，其可以缓和由树脂引起的内部应力，从而在太阳能电池被树脂密封时实现高可靠性。解决方案：本发明的太阳能电池模块包括：基板6，其中框架部分6b为设置在其周边; 具有多个太阳能电池1的串，其设置在由框架部6b包围的基板6的凹部中并且通过布线材料2a连接。太阳能电池模块还包括：设置在凹部中的树脂层7b，以埋置线; 以及设置在树脂层7b上的盖构件9。以及将树脂层7b暴露在框架部6b和盖部件9之间的间隔Sp。如上所述，空间Sp设置在框架部6b和盖部件9之间，由此由于树脂的膨胀或收缩而产生的松弛应力即使使用具有大的热膨胀系数的树脂作为树脂层7b的材料，也可以使用层7b。

3. 发明专利

JP2010091295A Method and apparatus for detecting surface shape of substrate 有权
标题翻译：用于检测基板表面形状的方法和装置
公开(公告)号：JP2010091295A
公开(公告)日：2010-04-22
申请号：JP2008258833
申请日：2008-10-03
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： YOSHIDA MINORU , HIROSE TAKESHI , SASAZAWA HIDEAKI , SERIKAWA SHIGERU
IPC分类号： G01N21/95 , G01B11/24 , G01B11/30 , G01N21/956
CPC分类号： G11B20/1883 , G11B2020/1826 , G11B2220/20 , G11B2220/2516
摘要： PROBLEM TO BE SOLVED: To distinguish between the flaw of a substrate and the foreign matter adhered to the surface of the substrate or the crack of the substrate during nano-imprinting in the inspection of patterned media to inspect the substrate.
SOLUTION: In the inspection of the flaw of a disk substrate 1 during nano-imprinting, the disk substrate 1 is irradiated with the light from a first light source containing a plurality of wavelengths through a half mirror 7 and an object lens 8 and the reflected light from the disk substrate 1 is thrown on a spectroscope 9 through the object lens 8 and the half mirror 7 to inspect the disk substrate 1 by a scatterometry method. The foreign matter or crack on the surface of the disk substrate 1 is irradiated with a laser beam 10 from an oblique direction to be detected by detectors 11 and 12 arranged at first and second angles of elevation. If the coordinates of the flaw by the scatterometry method coincide with those of the foreign matter or crack, the flaw is determined to be not the flaw during nano-imprinting and, if the coordinates of the flaw do not coincide with those of the foreign matter or crack, the flaw is determined to be the flaw during nano-imprinting.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了在图案化介质的检查以检查基板期间，在纳米压印期间区分衬底的缺陷和附着到衬底表面的异物或衬底的裂纹。解决方案：在纳米压印期间检查盘基片1的缺陷时，通过半透半反镜7和物镜8照射来自包含多个波长的第一光源的光并且通过物镜8和半反射镜7将来自盘基板1的反射光投射到分光镜9上，以通过散射法检查盘基板1。盘状基板1的表面上的异物或裂纹用从第一和第二仰角设置的检测器11和12的倾斜方向用激光束10照射。如果通过散射法的缺陷的坐标与异物或裂纹的坐标相一致，则在纳米压印过程中确定缺陷不是缺陷，如果缺陷的坐标与异物的坐标不一致或裂纹，在纳米压印过程中，缺陷被确定为缺陷。版权所有（C）2010，JPO＆INPIT

4. 发明专利

JP2005091182A Pattern defect inspection apparatus and pattern defect inspection method 有权
标题翻译：图案缺陷检查装置和图案缺陷检查方法
公开(公告)号：JP2005091182A
公开(公告)日：2005-04-07
申请号：JP2003325526
申请日：2003-09-18
申请人： Hitachi High-Technologies Corp , Hitachi Ltd , 株式会社日立ハイテクノロジーズ , 株式会社日立製作所
发明人： YOSHIDA MINORU , MAEDA SHUNJI , NISHIYAMA HIDETOSHI
IPC分类号： G01B11/30 , G01N21/47 , G01N21/95 , G01N21/956 , G06T1/00 , H01L21/027 , H01L21/66
CPC分类号： G01N21/9501 , G01N21/4788 , G01N21/956
摘要： PROBLEM TO BE SOLVED: To provide a defect inspection apparatus for detecting finer defects with high sensitivity by varying illumination conditions for irradiating a sample with light arbitrarily and easily, and further by changing the transmittance of a pupil filter at a detection side and by changing phase conditions.
SOLUTION: The defect inspection apparatus of a pattern to be inspected comprises an illumination light source 4; a rotary diffusion plate 29 for reducing the coherence of illumination light that is emitted after an illumination range is formed by adjusting the quantity of light from the illumination light source 4; rocking mirrors 14, 19, or the like for imaging by irradiating a wafer 1 with luminous flux in which the coherence is reduced by varying the shape of the luminous flux on a pupil; an image sensor 35 for detecting an image signal by imaging the image of a wafer 1 formed by the imaging of reflection light from the wafer 1; an observation camera 32 for observing the detected detection image; and an image processing unit 37 for detecting the defect of the pattern formed on the wafer 1, based on information regarding the detected detection image signal.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：解决的问题：提供一种用于通过改变用于用光照射样品的任意和容易的光照条件来检测更高的灵敏度的缺陷检查装置，并且还通过改变检测侧的瞳孔滤光片的透射率，以及通过改变相位条件。检查图案的缺陷检查装置包括照明光源4，旋转漫射板29，用于通过调节来自照明光源4的光量来减少在照明范围形成后发出的照明光的相干性; 摆动反射镜14,19等，用于通过对光瞳1的光束的形状进行变化来照射具有相干性降低的光束的晶片1成像; 图像传感器35，用于通过对来自晶片1的反射光的成像形成的晶片1的图像进行成像来检测图像信号; 观察摄像机32，用于观察检测出的检测图像; 以及图像处理单元37，用于基于关于检测到的检测图像信号的信息来检测形成在晶片1上的图案的缺陷。版权所有（C）2005，JPO＆NCIPI

5. 发明专利

JP2004233163A Method and device for inspecting pattern defect 审中-公开
标题翻译：检测图案缺陷的方法和装置
公开(公告)号：JP2004233163A
公开(公告)日：2004-08-19
申请号：JP2003020896
申请日：2003-01-29
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： YOSHIDA MINORU , MAEDA SHUNJI , NISHIYAMA HIDETOSHI , WATANABE MASAHIRO
IPC分类号： G01B11/30 , G01N21/88 , G01N21/956 , G06T1/00 , H01L21/66
CPC分类号： G01N21/8806 , G01N21/956
摘要： PROBLEM TO BE SOLVED: To provide a method and device for detecting a minute circuit pattern with high resolution to detect defects with only a little damage to a specimen and an optical system. SOLUTION: This device for detecting pattern defects is equipped with a recipe setting means 3300 for setting a recipe, a lighting optical system, and a detecting optical system. The lighting optical system is equipped with a laser light source 3 for launching ultraviolet laser light, light quantity adjusting means 4 and 11 for adjusting the light quantity of the laser light launched from the light source in obedience to the recipe set by the setting means, a lighting area forming means 14 for forming a lighting area of the laser light to the specimen, the light quantity of the laser light being adjusted by the adjusting means, a coherence reducing means 17, and an irradiation optical system 20 for irradiating the specimen with ultraviolet light flux having a reduced coherence. The detecting optical system is equipped with a condensing optical system 20 for condensing reflected light from the specimen, a diffracted light control optical system 19 for controlling diffracted light of the reflected light condensed by the condensing optical system, and a detector for imaging a reflected light image from the specimen obtained through the control optical system to detect image signals 21 and 28. COPYRIGHT: (C)2004,JPO&NCIPI
摘要翻译：解决的问题：提供一种用于检测具有高分辨率的微小电路图案的方法和装置，以便仅对样本和光学系统造成的损害只有很小的损害。解决方案：用于检测图案缺陷的装置配备有用于设置配方的配方设置装置3300，照明光学系统和检测光学系统。照明光学系统配备有用于发射紫外线激光的激光光源3，光量调节装置4和11，用于根据由设定装置设定的配方调节从光源发射的激光的光量，照明区域形成装置14，用于形成激光的照明区域到样本，激光的光量由调节装置调节;相干减少装置17;以及照射光学系统20，用于将样本照射具有降低的相干性的紫外光通量。检测光学系统配备有用于聚集来自试样的反射光的聚光光学系统20，用于控制由会聚光学系统会聚的反射光的衍射光的衍射光控制光学系统19和用于对反射光进行成像的检测器来自通过控制光学系统获得的样本的图像以检测图像信号21和28.（C）2004年，JPO和NCIPI

6. 发明专利

JP2010185692A Device, system and method for inspecting disk surface 审中-公开
标题翻译：用于检查盘表面的装置，系统和方法
公开(公告)号：JP2010185692A
公开(公告)日：2010-08-26
申请号：JP2009028453
申请日：2009-02-10
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： HARIYAMA TATSUO , SASAZAWA HIDEAKI , YOSHIDA MINORU , SERIKAWA SHIGERU
IPC分类号： G01N21/95
CPC分类号： G01N21/9501 , G01N21/94 , G01N21/9506
摘要： PROBLEM TO BE SOLVED: To provide a disk surface inspection device capable of adjusting automatically an optical system so as to have sufficient sensitivity for detecting a defect which is an inspection object.
SOLUTION: This device has a function capable of adjusting automatically arrangement of an optical system by sorting to form a database, each relation between each defect shape and arrangement of the optical system capable of detecting the shape with high sensitivity. As a method for forming the database, a method using an optical simulation, or an experimental method using a sample having an optional shape is applied. A pinhole position or a beam size is adjusted automatically so as to acquire the optimum arrangement of the optical system based on the database with respect to an input defect shape.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够自动调整光学系统以便具有足够的灵敏度来检测作为检查对象的缺陷的盘表面检查装置。解决方案：该装置具有能够通过排序来自动调整光学系统的布置以形成数据库的功能，每个缺陷形状和能够以高灵敏度检测形状的光学系统的布置之间的每个关系。作为形成数据库的方法，应用使用光学模拟的方法或使用具有可选形状的样本的实验方法。自动调整针孔位置或光束尺寸，以便相对于输入缺陷形状获得基于数据库的光学系统的最佳布置。版权所有（C）2010，JPO＆INPIT

7. 发明专利

JP2009139248A Defect detecting optical system and surface defect inspecting device for mounting defect detecting image processing 审中-公开
标题翻译：缺陷检测光学系统和表面缺陷检查装置安装缺陷检测图像处理
公开(公告)号：JP2009139248A
公开(公告)日：2009-06-25
申请号：JP2007316524
申请日：2007-12-07
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： HARIYAMA TATSUO , YOSHIDA MINORU , SERIKAWA SHIGERU
IPC分类号： G01N21/95 , G01N21/88
CPC分类号： G01B11/022 , G01B11/0608 , G01B11/285 , G01N21/88 , G01N2021/8887
摘要： PROBLEM TO BE SOLVED: To solve the problem, wherein the precision for the size and the height of a defect cannot be improved with conventional techniques that determine irregular defects by means of lens effect.
SOLUTION: A surface defect inspecting device includes an irradiating optical system for making the surface of the face plate of a disc mounted on a stage irradiated with optical beams, and then scanning the surface of the face plate; a contrast filter having a contrast difference for varying the amount of the optical beams that the optical beams irradiated to the disc are reflected specularly from the face plate; a receiving optical system for receiving the specularly reflected light that is transmitted through the contrast filter; and a processing means for discriminating the defects on the surface of the face plate by the change in the amount of specularly reflected light that is obtained by the transmission through the filter.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题为了解决这样的问题，其中通过利用透镜效应确定不规则缺陷的常规技术，不能够提高缺陷的尺寸和高度的精度。解决方案：表面缺陷检查装置包括：照射光学系统，用于制造安装在被光束照射的台上的盘的表面，然后扫描面板的表面; 具有用于改变照射到盘的光束的光束量的对比度差的对比度滤光器从面板镜面反射; 接收光学系统，用于接收通过对比度滤光器透射的镜面反射光; 以及用于通过通过过滤器的透射获得的镜面反射光量的变化来鉴别面板表面的缺陷的处理装置。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP2013211376A Manufacturing method of solar cell panel 审中-公开
标题翻译：太阳能电池板的制造方法
公开(公告)号：JP2013211376A
公开(公告)日：2013-10-10
申请号：JP2012079896
申请日：2012-03-30
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： ARAKI MASAKI , OTAKE MITSUYUKI , YOSHIDA MINORU , UEMURA NAOHITO
IPC分类号： H01L31/042 , H01L31/04
CPC分类号： Y02E10/50
摘要： PROBLEM TO BE SOLVED: To improve the performance of a solar cell panel.SOLUTION: This invention relates to a manufacturing method of a solar cell panel which includes a substrate 11 where a frame part 12 is provided at a periphery thereof and a lid 13. Solar cells 1 are prepared, the substrate 11 where the frame part 12 is provided at the periphery is prepared, and the lid 13 where a through hole 23 is formed is prepared. Subsequently, after the solar cells 1 are placed on the substrate 11 enclosed by the frame part 12, a resin 15a is applied onto the substrate 11 enclosed by the frame part 12. After the resin 15a is applied, the lid 13 is attached to the frame part 12. Then, a pressure of a space 24 enclosed by the substrate 11, the frame part 12, and the lid 13 is decompressed to a pressure lower than the atmospheric pressure through the through hole 23.
摘要翻译：要解决的问题：提高太阳能电池板的性能。解决方案本发明涉及一种太阳能电池板的制造方法，其包括其周边设置框架部分12的基板11和盖13。制备太阳能电池1，准备在周边设置框架部分12的基板11，并且准备形成有通孔23的盖13。随后，在将太阳能电池1放置在由框架部12包围的基板11上之后，将树脂15a施加到由框架部12包围的基板11上。在施加树脂15a之后，将盖13附接到然后，由基板11，框架部12和盖13包围的空间24的压力通过通孔23减压至低于大气压的压力。

9. 发明专利

JP2013201212A Photoelectric conversion device and manufacturing method of the same 审中-公开
标题翻译：光电转换装置及其制造方法
公开(公告)号：JP2013201212A
公开(公告)日：2013-10-03
申请号：JP2012067666
申请日：2012-03-23
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： YOSHIDA MINORU , OTAKE MITSUYUKI
IPC分类号： H01L31/042
CPC分类号： Y02E10/50
摘要： PROBLEM TO BE SOLVED: To improve the reliability of a photoelectric conversion device.SOLUTION: A solar cell module (a photoelectric conversion device) 30 includes: an assembly 31 having multiple wiring materials 32 electrically connecting multiple solar cells (solar cell elements) SC with each other; and a substrate 33 having a surface 33a on which the assembly 31 is mounted. Dent parts 33c are formed on the surface 33a of the substrate 33, and parts of the wiring materials 32 are disposed and sag on the dent parts 33c. This structure inhibits the damage of the wiring materials 32 due to linear expansion coefficient differences between component members that are caused when a temperature cycle is applied.
摘要翻译：要解决的问题：提高光电转换装置的可靠性。解决方案：太阳能电池模块（光电转换装置）30包括：具有多个布线材料32的组件31，其将多个太阳能电池（太阳能电池元件）SC与彼此; 以及具有安装有组件31的表面33a的基板33。在基板33的表面33a上形成有凹部33c，并且配线材32的一部分配置在凹部33c上。这种结构由于施加温度周期而引起的部件之间的线膨胀系数差异，因此抑制了布线材料32的损伤。

10. 发明专利

JP2012242630A Exposure apparatus, exposure method, manufacturing method for display panel substrate and inspection method for exposure apparatus 审中-公开
标题翻译：曝光装置，曝光方法，显示面板基板的制造方法和曝光装置的检查方法
公开(公告)号：JP2012242630A
公开(公告)日：2012-12-10
申请号：JP2011113048
申请日：2011-05-20
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： HAYASHI TOMOAKI , YOSHIDA MINORU , HONDA HIDEYUKI
IPC分类号： G03F7/20 , G02F1/13 , G03F9/00 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To reduce distortion of light beam output from a light beam irradiation device and improve drawing accuracy.SOLUTION: An exposure apparatus comprises: a first image acquisition device (CCD camera 51) that is provided at a chuck 10; and a reticle 2 that is provided with a testing pattern and is arranged between a head part of a light beam irradiation device 20 and the first image acquisition device. The exposure apparatus executes steps of: supplying drawing data for testing to a drive circuit of the light beam irradiation device 20; using the first image acquisition device to acquire an image of the testing pattern 2a of the reticle 2 and an image 2c of light beam incident from the light beam irradiation device 20; detecting displacement of the light beam on the basis of the image of the testing pattern 2a of the reticle 2 and the image 2c of the light beam that are acquired by the first image acquisition device, and detecting distortion of the light beam; correcting a coordinate of drawing data for exposure on the basis of a result of detecting the distortion of the light beam; and supplying the drawing data for exposure to the drive circuit of the light beam irradiation device 20.
摘要翻译：要解决的问题：减少从光束照射装置输出的光束的失真并提高绘制精度。解决方案：曝光装置包括：设置在卡盘10处的第一图像获取装置（CCD照相机51）; 以及设置有测试图案并设置在光束照射装置20的头部与第一图像采集装置之间的标线片2。曝光装置执行以下步骤：将用于测试的绘制数据提供给光束照射装置20的驱动电路; 使用第一图像获取装置获取光栅2的测试图案2a的图像和从光束照射装置20入射的光束的图像2c; 基于由第一图像获取装置获取的标线片2的测试图案2a和图像2c的图像，检测光束的位移，并检测光束的变形; 基于检测光束的失真的结果，校正用于曝光的绘图数据的坐标; 并提供用于曝光于光束照射装置20的驱动电路的绘图数据。版权所有（C）2013，JPO＆INPIT

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