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1. 发明专利

JP2014070971A Method and apparatus for inspecting thermally assisted magnetic head 有权
标题翻译：用于检查热辅助磁头的方法和装置
公开(公告)号：JP2014070971A
公开(公告)日：2014-04-21
申请号：JP2012216339
申请日：2012-09-28
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： SAITO NAOYA , HONMA SHINJI , TOKUTOMI TERUAKI , KITANO KEISHO
IPC分类号： G01Q60/50 , G01Q60/18 , G01Q80/00
CPC分类号： G11B20/1816 , G01Q60/06 , G01Q60/22 , G01Q60/56 , G11B5/314 , G11B5/3166 , G11B5/3173 , G11B5/455 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To perform measurement with high accuracy in a condition in which an effect caused by heat generation in a near-field light generation area is reduced as much as possible.SOLUTION: An apparatus for inspecting a thermally assisted magnetic head comprises: scanning type probe microscope means provided with a cantilever whose tip has a probe having its surface formed with a magnetic film; a probe unit that feeds an AC current to a terminal formed on a thermally assisted magnetic head element and makes a pulse drive current or a pulse drive voltage incident to a near-field light emitting unit; image taking means for taking images of the probe unit and the thermally assisted magnetic head element; scattered light detection means for detecting scattered light generated from the probe when it is in a generation area of near-field light; and signal processing means for performing detection, by the use of an output signal from scanning type probe microscope means when a surface of the thermally assisted magnetic head element, where a magnetic field is generated in a condition in which the incidence of the pulse drive current or the pulse drive voltage is stopped to the near-field light emitting unit, is scanned with the probe and an output signal from the scattered light detection means when scanning is performed with the probe while near-field light is generated in a condition in which feeding of an AC current to the terminal is stopped.
摘要翻译：要解决的问题：在尽可能减少近场光产生区域中的发热效果的条件下，以高精度进行测量。解决方案：用于检查热辅助磁头的装置包括：具有悬臂的扫描式探针显微镜装置，其尖端具有形成有磁性膜的表面的探针; 探针单元，其将AC电流馈送到形成在热辅助磁头元件上的端子，并且使脉冲驱动电流或脉冲驱动电压入射到近场发光单元; 用于拍摄探针单元和热辅助磁头元件的图像的图像拍摄装置; 散射光检测装置，用于当探测器处于近场光的产生区域时，检测从探针产生的散射光; 以及信号处理装置，用于通过使用来自扫描型探针显微镜装置的输出信号来进行检测，当热辅助磁头元件的表面在脉冲驱动电流的入射条件下产生磁场时或脉冲驱动电压停止到近场光发射单元时，在使用探针进行扫描时，用探针扫描探测器和来自散射光检测装置的输出信号，同时在其中产生近场光的条件下停止向终端馈送交流电流。

2. 发明专利

JP2014071927A Method and apparatus for inspecting thermally assisted magnetic head 有权
标题翻译：用于检查热辅助磁头的方法和装置
公开(公告)号：JP2014071927A
公开(公告)日：2014-04-21
申请号：JP2012216338
申请日：2012-09-28
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： TOKUTOMI TERUAKI , SAITO NAOYA , KITANO KEISHO , CHANG KE-BONG , WATANABE MASAHIRO , HIROSE TAKESHI
IPC分类号： G11B5/455 , G01Q60/02 , G01Q60/18 , G01Q60/54 , G01Q80/00
CPC分类号： G11B20/1816 , B82Y35/00 , G01Q60/08 , G11B5/455 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To effectively and highly accurately measure a magnetic field generated by a thermally assisted magnetic head and a near-field light generation area.SOLUTION: An apparatus for inspecting a thermally assisted magnetic head comprises: scanning type probe microscope means provided with a cantilever whose tip has a probe having its surface formed with a magnetic film; a probe unit that feeds an AC current to a terminal formed on a thermally assisted magnetic head element and makes a drive current or a drive voltage apply to a near-field light emitting unit; scattered light detection means for detecting scattered light generated from the probe in a generation area of near-field light by scanning with the probe while applying a drive current or a drive voltage to the near-field light emitting unit; image taking means for taking images of the thermally assisted magnetic head element including the near-field light emitting unit; and signal processing means for performing detection of the thermally assisted magnetic head element, by the use of an output signal output from scanning type probe microscope means by scanning with the probe while feeding a terminal with an AC current and an output signal from the scattered light detection means.
摘要翻译：要解决的问题：有效和高精度地测量由热辅助磁头和近场光产生区域产生的磁场。解决方案：用于检查热辅助磁头的装置包括：扫描型探针显微镜装置，其尖端具有其表面形成有磁性膜的探针的悬臂; 探针单元，其将AC电流馈送到形成在热辅助磁头元件上的端子，并将驱动电流或驱动电压施加到近场发光单元; 散射光检测装置，用于在向近场发光单元施加驱动电流或驱动电压的同时用探头扫描在近场光的产生区域中检测从探头产生的散射光; 摄像装置，用于拍摄包括近场光发射单元的热辅助磁头元件的图像; 以及信号处理装置，用于通过使用从扫描型探针显微镜装置输出的输出信号，通过用探针向扫描器馈送交流电流的端子和来自散射光的输出信号，来执行热辅助磁头元件的检测检测手段。

3. 发明专利

JP2013058288A Inspection method of magnetic head element and inspection apparatus thereof 审中-公开
标题翻译：磁头元件检查方法及其检测装置
公开(公告)号：JP2013058288A
公开(公告)日：2013-03-28
申请号：JP2011197145
申请日：2011-09-09
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： TOKUTOMI TERUAKI , SATO TAKESHI , HIDA AKIRA , SAITO NAOYA , MATSUSHITA NORIMITSU
IPC分类号： G11B5/455 , G01Q30/18 , G01Q60/50
CPC分类号： G01Q60/54 , G01R33/1207
摘要： PROBLEM TO BE SOLVED: To measure a two-dimensional distribution of magnetic field formed by each of magnetic head elements formed on a row bar of a magnetic head, without being affected by the external environment.SOLUTION: The magnetic head element inspection apparatus inspects the effective track width of a write track of each of magnetic heads of a row bar including a large number of the magnetic heads formed thereon. The magnetic head element inspection apparatus comprises: an anti-vibration table part for preventing vibrations from being transmitted from the outside, on which a tray part, a stage part, a sample receiving and delivering part, a magnetic field measurement part and an effective track width measurement part are placed; and an anti-noise part which covers the tray part, the stage part, the sample receiving and delivering part, the magnetic field measurement part, the effective track width measurement part and the anti-vibration table part to prevent noises from being transmitted from the outside.
摘要翻译：要解决的问题：测量由形成在磁头的行杆上的每个磁头元件形成的磁场的二维分布，而不受外部环境的影响。解决方案：磁头元件检查装置检查包括形成在其上的大量磁头的行棒的每个磁头的写入磁道的有效磁道宽度。磁头元件检查装置包括：用于防止振动从外部传递的防振台部件，托盘部件，台部件，样品接收和传送部件，磁场测量部件和有效轨道放置宽度测量部件; 以及覆盖托盘部，台部，样本接收输送部，磁场测量部，有效轨迹宽度测量部和防振台部的防噪声部，以防止噪声从外。版权所有（C）2013，JPO＆INPIT

4. 发明专利

JP2014071925A Method and apparatus for inspecting thermally assisted magnetic head 有权
标题翻译：用于检查热辅助磁头的方法和装置
公开(公告)号：JP2014071925A
公开(公告)日：2014-04-21
申请号：JP2012216219
申请日：2012-09-28
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： MURAKAMI SHINICHIRO , TOKUTOMI TERUAKI , SAITO NAOYA , HIROSE TAKESHI , CHANG KE-BONG , KITANO KEISHO
IPC分类号： G11B5/455 , G01Q60/02 , G01Q60/18 , G01Q60/54 , G01Q80/00
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for inspecting a thermally assisted magnetic head that optimizes a positional relation between a near-field light emitting unit and scattered light detection means.SOLUTION: An apparatus for inspecting a thermally assisted magnetic head comprises: scanning type probe microscope means provided with a cantilever whose tip has a probe having its surface formed with a magnetic film; image taking means for taking an image of a thermally assisted magnetic head element in the visual field that is mounted on a XY table; scattered light detection means having a light detector for detecting scattered light generated from the probe when the probe is in a generation area of near-field light generated from a near-field light emitting unit formed on the thermally assisted magnetic head element; light detector switching means for mechanically switching between a layout of a CCD camera of the image taking means and a layout of the light detector of the scattered light detection means, except a lens system used in common for both the means, to enable application of either one of the means; and alignment means for recognizing and processing an image taken by the image taking means to adjust a relative position between the near-field light emitting unit and the scattered light detection means to an appropriate position for detecting the scattered light with the scattered light detection means.
摘要翻译：要解决的问题：提供一种用于检查热辅助磁头的装置，其优化近场发光单元和散射光检测装置之间的位置关系。解决方案：用于检查热辅助磁头的装置包括：扫描型具有悬臂的探针显微镜装置，其尖端具有其表面形成有磁性膜的探针; 用于在安装在XY工作台上的视场中拍摄热辅助磁头元件的图像的摄像装置; 散射光检测装置，具有光检测器，用于当探针处于形成在热辅助磁头元件上的近场发光单元产生的近场光的产生区域中时，用于检测由探头产生的散射光; 光检测器切换装置，用于在图像获取装置的CCD照相机的布局与散射光检测装置的光检测器的布局之间机械地切换，除了用于两个装置的共同使用的透镜系统之外，以使得能够应用其中一种手段; 以及对准装置，用于识别和处理由摄像装置拍摄的图像，以将近场发光单元和散射光检测装置之间的相对位置调整到用于利用散射光检测装置检测散射光的适当位置。

5. 发明专利

JP2014070970A Method and apparatus for inspecting thermally assisted magnetic head 有权
标题翻译：用于检查热辅助磁头的方法和装置
公开(公告)号：JP2014070970A
公开(公告)日：2014-04-21
申请号：JP2012216337
申请日：2012-09-28
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： KITANO KEISHO , TOKUTOMI TERUAKI , SAITO NAOYA , HIROSE TAKESHI , CHANG KE-BONG
IPC分类号： G01Q60/18 , G01Q60/50 , G01Q80/00 , G11B5/31 , G11B5/455
CPC分类号： G01Q60/22 , B82Y20/00 , B82Y25/00 , B82Y35/00 , G01Q60/02 , G01Q60/56 , G11B5/455 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To surely detect scattered light generated at a probe in a tip of a cantilever in a near-field light emitting area when detecting a thermally assisted magnetic head.SOLUTION: An apparatus for inspecting a thermally assisted magnetic head comprises: scanning type probe microscope means provided with a cantilever whose tip has a probe having its surface formed with a magnetic film; a probe unit that feeds an AC current to a terminal formed on a thermally assisted magnetic head element and makes a laser incident to a near-field light emitting unit; image taking means for taking images of the probe unit and the thermally assisted magnetic head element; scattered light detection means for detecting scattered light generated from the probe through a pinhole when the probe is in a generation area of near-field light in the thermally assisted magnetic head element; and signal processing means for performing detection, by the use of an output signal output from scanning type probe microscope means by scanning with the probe in a state where an AC current is fed to the terminal and an output signal output from the scattered light detection means by scanning with the probe in a state where near-field light is generated.
摘要翻译：要解决的问题：当检测到热辅助磁头时，确保在近场发光区域中检测在悬臂的尖端处的探针处产生的散射光。解决方案：用于检查热辅助磁头的装置包括：扫描型探针显微镜装置，其具有悬臂，其尖端具有其表面形成有磁性膜的探针; 探针单元，其将AC电流馈送到形成在热辅助磁头元件上的端子，并使激光入射到近场发光单元; 用于拍摄探针单元和热辅助磁头元件的图像的图像拍摄装置; 散射光检测装置，用于当探头处于热辅助磁头元件中的近场光的产生区域时，通过针孔检测从探针产生的散射光; 以及信号处理装置，用于通过使用从扫描型探针显微镜装置输出的输出信号，通过在AC电流被馈送到端子的状态下用探头扫描并且从散射光检测装置输出的输出信号进行检测通过在产生近场光的状态下用探针进行扫描。

6. 发明专利

JP2014070959A Method and apparatus for inspecting thermally assisted magnetic head 有权
标题翻译：用于检查热辅助磁头的方法和装置
公开(公告)号：JP2014070959A
公开(公告)日：2014-04-21
申请号：JP2012216218
申请日：2012-09-28
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： HIDA AKIRA , TOKUTOMI TERUAKI , SAITO NAOYA , HIROSE TAKESHI , CHANG KE-BONG , KITANO KEISHO
IPC分类号： G01Q60/18 , G01Q60/24 , G01Q60/50 , G11B5/31 , G11B5/455
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for inspecting a thermally assisted magnetic head that optimizes a positional relation between a near-field light emitting unit and scattered light detection means.SOLUTION: An apparatus for inspecting a thermally assisted magnetic head comprises: scanning type probe microscope means provided with a cantilever whose tip has a probe having its surface formed with a magnetic film; image taking means for taking an image of a heat assisted magnetic head element, in the visual field, mounted on a XY table; scattered light detection means having a light detector for detecting scattered light generated from the probe when the probe is in a generation area of near-field light generated from a near-field light emitting unit formed on the thermally assisted magnetic head element; optical system switching means for mechanically switching between a layout of the image taking means and a layout of the scattered light detection means to enable application of either one of the means; and alignment means for recognizing and processing an image taken by the image taking means to adjust a relative position between the near-field light emitting unit and the scattered light detection means to an appropriate position for detecting the scattered light with the scattered light detection means.
摘要翻译：要解决的问题：提供一种用于检查热辅助磁头的装置，其优化近场发光单元和散射光检测装置之间的位置关系。解决方案：用于检查热辅助磁头的装置包括：扫描型具有悬臂的探针显微镜装置，其尖端具有其表面形成有磁性膜的探针; 摄像装置，用于拍摄安装在XY台上的视野中的热辅助磁头元件的图像; 散射光检测装置，具有光检测器，用于当探针处于形成在热辅助磁头元件上的近场发光单元产生的近场光的产生区域中时，用于检测由探头产生的散射光; 光学系统切换装置，用于在图像拍摄装置的布局和散射光检测装置的布局之间进行机械切换，以实现装置中的任一个; 以及对准装置，用于识别和处理由摄像装置拍摄的图像，以将近场发光单元和散射光检测装置之间的相对位置调整到用于利用散射光检测装置检测散射光的适当位置。

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