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1. 发明专利

JPWO2016059703A1 定位置制御装置、及び方法审中-公开
公开(公告)号：JPWO2016059703A1
公开(公告)日：2017-06-29
申请号：JP2016553927
申请日：2014-10-16
申请人：株式会社日立ハイテクノロジーズ
发明人：満藤岡 , 満藤岡 , 曽根原　剛志 , 剛志曽根原 , 板橋　直志 , 直志板橋
IPC分类号： G01N21/65 , G01N21/64
CPC分类号： G01N21/658 , G01N21/6458 , G01N21/65 , G01N33/48721 , G01Q60/22 , G11B7/08 , G11B7/08576 , G11B7/1387 , G11B7/22 , G11B23/0318
摘要：マルチナノポア基板への励起光照射を、測定を中断することなく、簡単な構成で高精度に制御する。観察容器103中に設置された基板上の少なくとも一つのナノポアと少なくとも一つ基準対象に対し、励起光の照射を同時に行い、検出器109で検出される基準対象から発生する信号に基づき、測定試料に励起光が照射される位置を演算し、演算結果に基づき測定試料に対する励起光照射の位置を駆動制御部115で制御しながら、測定対象の測定を行うことにより、測定と定位置制御を同時に行うことで、測定試料の解析を短時間で行うことが可能となる。

2. 发明专利

JP5940603B2 分光測定のためのチューニングフォーク基盤の近接場探針およびこれを用いた近接場顕微鏡、近接場顕微鏡を用いた分光分析方法有权
标题翻译：的近场光探头和使用用于光谱测量该音叉基部近场显微镜，使用近场显微镜光谱法
公开(公告)号：JP5940603B2
公开(公告)日：2016-06-29
申请号：JP2014153198
申请日：2014-07-28
申请人：浦項工科大學校産學協力團 , POSTECH ACADEMY−INDUSTRY FOUNDATION
发明人：ハン・ヘウク , ト・ヨンウン , ムン・キウォン
IPC分类号： G01Q60/18 , G01Q60/22
CPC分类号： G01N21/35 , G01N21/3586 , G01Q30/02 , G01Q60/22

3. 发明专利

JP5922240B2 走査プローブ顕微鏡およびそれを用いた計測方法有权
标题翻译：扫描探针显微镜和测量方法，使用相同的
公开(公告)号：JP5922240B2
公开(公告)日：2016-05-24
申请号：JP2014532621
申请日：2012-08-28
申请人：株式会社日立製作所
发明人：南部英 , 山本剛 , 小泉英明 , 橋詰富博 , 平家誠嗣
IPC分类号： G01Q30/14 , G01Q60/18
CPC分类号： G01Q10/04 , G01Q30/02 , G01Q30/14 , G01Q60/22

4. 发明专利

JP5796056B2 光の散乱を用いた近接場制御装置及び方法有权
标题翻译：利用光散射的近场控制装置和方法
公开(公告)号：JP5796056B2
公开(公告)日：2015-10-21
申请号：JP2013220726
申请日：2013-10-24
申请人：韓国科学技術院 , KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
发明人：パクヨンクン , パクジョンフン , チョヨンフン , パクチュンヒョン
IPC分类号： G01Q80/00 , G01N21/17 , G01Q60/18
CPC分类号： G01N21/4788 , G01N21/49 , G01Q60/18 , G01Q60/22 , G01N2021/479 , G01N21/45 , G01N2201/0675

5. 发明专利

JP5733724B2 走査型プローブ顕微鏡及びそのプローブ近接検出方法有权
标题翻译：扫描探针显微镜和探针接近检测方法
公开(公告)号：JP5733724B2
公开(公告)日：2015-06-10
申请号：JP2011519892
申请日：2010-06-21
申请人：国立大学法人京都大学
发明人：西村活人 , 川上養一 , 船戸充 , 金田昭男 , 橋本恒明
IPC分类号： G01Q10/06 , G01Q60/18 , G01Q20/04
CPC分类号： G01Q20/04 , B82Y20/00 , B82Y35/00 , G01Q10/045 , G01Q10/065 , G01Q60/22 , G01Q70/06

6. 发明专利

JP5292128B2 Scanning probe microscope and methods of observation sample using the same 有权
公开(公告)号：JP5292128B2
公开(公告)日：2013-09-18
申请号：JP2009042242
申请日：2009-02-25
申请人：株式会社日立製作所
发明人：俊彦中田 , 正浩渡辺 , 隆史井上 , 貴志夫日高 , 誠岡井 , 誠之廣岡
IPC分类号： G01Q60/22 , G01Q60/06 , G01Q70/12
CPC分类号： G01Q60/22 , G01Q70/12
摘要： In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.

7. 发明专利

JP2013101099A Cantilever of scan probe microscope, method for manufacturing the same, method for inspecting heat-assisted magnetic head element, and device for the same 有权
标题翻译：扫描探针微型扫描仪，其制造方法，检测热辅助磁头元件的方法及其装置
公开(公告)号：JP2013101099A
公开(公告)日：2013-05-23
申请号：JP2012116361
申请日：2012-05-22
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： CHANG KE-BONG , HIROSE TAKESHI , WATANABE MASAHIRO , NAKAGOME TSUNEO , HONMA SHINJI , TOKUTOMI TERUAKI , NAKADA TOSHIHIKO , TACHIZAKI TAKEHIRO
IPC分类号： G01Q70/08 , G01Q60/22 , G01Q60/54 , G01Q80/00 , G11B5/455 , G11B7/135
CPC分类号： G01Q60/56 , G01Q60/06 , G01Q60/22 , G01Q60/50 , G11B5/314 , G11B5/3166 , G11B5/3173 , G11B5/3196 , G11B2005/0021
摘要： PROBLEM TO BE SOLVED: To inspect a heat-assisted magnetic head by measuring both of near-field light and a magnetic field to be generated by the heat-assisted magnetic head.SOLUTION: A cantilever of a scan probe microscope is constituted by being provided with: a lever in which a probe is formed at the tip part of a tabular member; a magnetic material film formed like a thin film on the surface of the probe of the lever; and a noble metal, fine particles of alloy containing the noble metal or a thin film formed on the surface of the magnetic material film. In addition, an inspection device which inspects a heat-assisted magnetic head element is provided with: the cantilever in which a magnetic film is formed on the surface of the probe, and the noble metal, the fine particles of the alloy containing the noble metal or the thin film is formed on the surface of the magnetic film; displacement detection means for detecting vibration of the cantilever; near-field light detection means for detecting diffused light due to the near-field light generated from a near-field light generation part, and reinforced by the noble metal, the fine particles of the alloy containing the noble metal or the thin film of the probe of the cantilever; and processing means for processing a signal obtained by being detected by the displacement detection means and the near-field light detection means.
摘要翻译：要解决的问题：通过测量由热辅助磁头产生的近场光和磁场两者来检查热辅助磁头。解决方案：扫描探针显微镜的悬臂由以下部件构成：杆，其中探针形成在平板状构件的末端部分; 在杠杆的探针的表面上形成为薄膜的磁性材料膜; 贵金属，含有贵金属的合金微粒或形成在磁性材料膜的表面上的薄膜。此外，检查热辅助磁头元件的检查装置设置有：在探针表面上形成有磁性膜的悬臂和贵金属，含有贵金属的合金微粒或者在磁性膜的表面上形成薄膜; 用于检测悬臂的振动的位移检测装置; 近场光检测装置，用于检测由近场光产生部分产生的近场光引起的扩散光，并由贵金属加强，含有贵金属或含有贵金属的薄膜的合金微粒探针悬臂; 以及处理装置，用于处理由位移检测装置和近场光检测装置检测到的信号。版权所有（C）2013，JPO＆INPIT

8. 发明专利

JP4909273B2 A method and apparatus for enhanced nano-spectral scanning 有权
公开(公告)号：JP4909273B2
公开(公告)日：2012-04-04
申请号：JP2007535808
申请日：2005-10-05
申请人：ブィピーホールディング、エルエルシー
发明人：ポポニン、ブラディミール
IPC分类号： G01N21/65 , C12M1/34 , G01N33/50 , G01N33/53 , G01N37/00
CPC分类号： G01N21/658 , C12Q1/6872 , G01N2021/656 , G01Q60/22 , C12Q2565/632
摘要： Apparatus and method for examining the identity of chemical groups in a sample are disclosed. The apparatus has a substrate having a plasmon resonant surface on which the sample is supported, a source of a beam of light, and a lens assembly having a tip region and a nanolens composed of one or more plasmon resonance particles (PRPs) on the tip region. The PRPs are arranged to produce near-field electromagnetic gap modes in a space between the nanolens and a confronting detection region on the substrate surface when the gap between the nanolens and substrate is 30 nm or less. A focusing mechanism in the apparatus operates to move the lens assembly toward and away from the substrate surface, with a gap of less than 30 nm, to produce electromagnetic gap modes that enhance the Raman spectroscopy signals produced by the sample in the detection region.

9. 发明专利

JP4847123B2 Near-field light distribution transmission element 有权
公开(公告)号：JP4847123B2
公开(公告)日：2011-12-28
申请号：JP2005367201
申请日：2005-12-20
申请人：独立行政法人理化学研究所
发明人：純一加藤 , 篤史小野 , 聡河田
IPC分类号： G02F1/01
CPC分类号： G02B6/1226 , G01Q60/22 , G02B5/008

10. 发明专利

JP4791752B2 Near-field polarized-light measurement apparatus 有权
公开(公告)号：JP4791752B2
公开(公告)日：2011-10-12
申请号：JP2005122311
申请日：2005-04-20
申请人：日本分光株式会社
发明人：勉井上 , 文則佐藤 , 貴人成田 , 睦瀬沼
IPC分类号： G01Q60/18 , G01B11/00 , G01N21/21 , G01Q60/22
CPC分类号： G01J4/00 , B82Y20/00 , B82Y35/00 , G01N21/21 , G01Q30/02 , G01Q60/22
摘要： A near-field polarized-light measurement apparatus 10 comprises a near-field probe 14, an analyzer 18, a detector 22, and an analyzer-rotating unit 20. The near-field probe 14 has at a tip thereof an opening smaller than the wavelength of light used for measurement and generates linearly polarized near-field light from the opening and irradiates a sample with the near-field light. The detector 22 detects light transmitted through the sample via the analyzer 18. The analyzer-rotating unit 20 rotates the analyzer 18 about an optical axis to vary the angle of a transmission axis thereof. And optical rotation of the sample is measured by rotating the analyzer 18 with the analyzer-rotating unit 20.

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