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1. 发明专利

JP2004220872A Dust-free discharging and dust-removing system 审中-公开
公开(公告)号：JP2004220872A
公开(公告)日：2004-08-05
申请号：JP2003005335
申请日：2003-01-14
申请人： Hamamatsu Photonics Kk , Harada Sangyo Kk , Techno Ryowa Ltd , 原田産業株式会社 , 株式会社テクノ菱和 , 浜松ホトニクス株式会社
发明人： MIZUNO AKIRA , SUGITA AKIO , SUZUKI MASANORI , SATO TOMOKATSU , HINO TOSHIHIKO , MINE HARUYUKI
IPC分类号： B03C3/02 , B03C3/40 , H01T23/00 , H05F3/06
摘要： PROBLEM TO BE SOLVED: To provide a dust-free discharging and dust-removing system available for use with an explosion-proof facility or device without causing to generate ozone, electromagnetic noise, dust or the like and capable of surely removing dust accreted to a charged body. SOLUTION: An intermittent high-speed jet flow generating device D is fitted at a gas conveying channel 2b and is equipped with an electromagnetic valve 2c inside. The device D intermittently blows off ion-carrying gas sent from the gas conveying channel as high-speed airstream into a downstream chamber 1 by switching the electromagnetic valve 2c, and the gas conveying channel 2b supplies the ion-carrying gas blown off from the device D to the chamber 1 through a gas conveying channel connecting part 2a fitted at a side end part (at a right side end part in the figure) of the chamber 1. The intermittent high-speed jet flow is sprayed on the surface of the charged body S from a nozzle 9 of the chamber 1 to discharge/remove the dust accreted on the surface of the charged body S. COPYRIGHT: (C)2004,JPO&NCIPI

2. 发明专利

JP2002352997A EXPLOSION-PROOF, NON-DUSTING IONIZER 失效
公开(公告)号：JP2002352997A
公开(公告)日：2002-12-06
申请号：JP2001161060
申请日：2001-05-29
申请人： TECHNO RYOWA LTD , HAMAMATSU PHOTONICS KK , HARADA SANGYO KK
发明人： MIZUNO AKIRA , SUGITA AKIO , SUZUKI MASANORI , SATO TOMOKATSU , HINO TOSHIHIKO , MINE HARUYUKI
IPC分类号： H01T23/00 , H05F3/06
摘要： PROBLEM TO BE SOLVED: To provide an explosion-proof, non-dusting ionizer, capable of being used in explosion-proof facility and apparatus, without using production of ozone, electromagnetic noise dust, etc. SOLUTION: The ionizer is equipped with an ionization part for ionizing a part of an ion-transport gas fed within a chamber and a chamber having a blowing part for feeding the ion-carrying gas toward a charged body, and the ionization part is constructed by an ionization source built in the chamber and a control unit, connected to the ionization source through a high-voltage cable. As the ionizing source, is used any of the generating part of a soft X-ray generator, the generating part of a low-energy electron beam generator and the generating part of an ultraviolet ray generator, and the control unit is used, and a connected area between the control unit and the high-voltage cable and a connecting area between the ionization source and the high-voltage cable are each made into an explosion-proof structure.

3. 发明专利

JP2013034945A Apparatus for treating wastewater 审中-公开
标题翻译：废水处理设备
公开(公告)号：JP2013034945A
公开(公告)日：2013-02-21
申请号：JP2011173214
申请日：2011-08-08
申请人： Techno Ryowa Ltd , 株式会社テクノ菱和 , Toyohashi Univ Of Technology , 国立大学法人豊橋技術科学大学
发明人： MIZUNO AKIRA , SUZUKI MASANORI , SATO TOMOKATSU
IPC分类号： C02F1/48 , C02F1/78
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for treating wastewater which has high decomposing treatment efficiency of organic matter.SOLUTION: The apparatus 10 for treating wastewater is provided with a wet wall column 12 and a discharge wire 13. The wet wall column 12 is constituted of a cylinder which has open both ends and an inside diameter of 10 to 25 mm and wastewater is made to flow down along the inner wall surface of the cylinder from its upper end to its lower end to form a liquid film. The discharge wire is inserted inside the cylinder so as to pass the central axis of the cylinder in a longitudinal direction and the discharge wire and the wet wall column constitute an electrode pair. Radicals produced by plasma discharge generated between the wet wall column 12 and the discharge wire 13 are absorbed by the liquid film and decompose the organic matter in the wastewater.
摘要翻译：待解决的问题：提供一种处理有机物分解效率高的废水的设备。解决方案：用于处理废水的装置10设置有湿壁柱12和排出线13.湿壁柱12由具有开口两端和内径为10至25mm的圆筒构成，使废水从其上端到其下端沿着圆筒的内壁表面向下流动以形成液膜。放电线插入圆筒内，使其沿纵向方向通过圆筒的中心轴线，放电线和湿壁柱构成电极对。在湿壁柱12和放电丝13之间产生的等离子体放电产生的自由基被液膜吸收并分解废水中的有机物质。版权所有（C）2013，JPO＆INPIT

4. 发明专利

JP2014082471A Process-liquid-supplying apparatus, substrate processing apparatus, process-liquid-supplying method, and substrate processing method 有权
标题翻译：过程液体供应装置，基板处理装置，方法 - 液体供应方法和基板处理方法
公开(公告)号：JP2014082471A
公开(公告)日：2014-05-08
申请号：JP2013194293
申请日：2013-09-19
申请人： Dainippon Screen Mfg Co Ltd , 大日本スクリーン製造株式会社 , Techno Ryowa Ltd , 株式会社テクノ菱和
发明人： MIYAGI MASAHIRO , ARAKI HIROYUKI , SUZUKI MASANORI , SATO TOMOKATSU , KAWASE NOBUO
IPC分类号： H01L21/304 , B05C11/08 , B05C11/10 , B08B3/02 , G21K5/00 , G21K5/02 , G21K5/10 , H05F1/00 , H05F3/06
摘要： PROBLEM TO BE SOLVED: To provide a process-liquid-supplying apparatus and a process-liquid-supplying method by which a process liquid can be supplied to a processing object while preventing the electrification of or diselectrifying the processing object, and to provide a substrate processing apparatus and a substrate processing method by which a treatment by use of a process liquid can be performed on a substrate while preventing the electrification of or diselectrifying the substrate.SOLUTION: A substrate processing apparatus 1 comprises: a spin chuck 4 for rotating a substrate W while holding it in a horizontal attitude; and an integral-type head 6 disposed to face a surface(upper face) of the substrate W held by the spin chuck 4 for supplying the surface of the substrate W with DIW(deionized water) as an example of water and irradiating the surface of the substrate W with soft X rays. The integral-type head 6 has a water nozzle 61 extending in a vertical direction, and a soft X-ray irradiation unit 62 for laterally directing soft X rays toward the water nozzle 61, which are assembled integrally. The water nozzle 61 is connected with a water-supplying line 13 to which DIW is supplied from a DIW supply source.
摘要翻译：要解决的问题：提供一种处理液供给装置和处理液供给方法，通过该方法，可以在防止加工对象的带电或不均化的同时将处理液体供给到处理对象物，并且提供基板处理装置和基板处理方法，通过该方法可以在基板上进行使用处理液的处理，同时防止基板的通电或使其失电。解决方案：基板处理装置1包括：用于旋转基板的旋转卡盘4 同时把握在一个横向的态度; 以及设置成面对由旋转卡盘4保持的基板W的表面（上表面）的一体型头6，用于以DIW（去离子水）作为水的一个表面供给衬底W的表面，并照射具有软X射线的衬底W。整体式头部6具有沿垂直方向延伸的水喷嘴61和用于将软X射线横向引导到水喷嘴61的软X射线照射单元62，它们被整体组装。水喷嘴61与DIW供给源供给DIW的供水管13连接。

5. 发明专利

JP2013200967A Ionizer electrode 有权
标题翻译：离子电极
公开(公告)号：JP2013200967A
公开(公告)日：2013-10-03
申请号：JP2012067510
申请日：2012-03-23
申请人： Techno Ryowa Ltd , 株式会社テクノ菱和
发明人： SUZUKI MASANORI , SATO TOMOKATSU
IPC分类号： H05F3/04 , H01T23/00
摘要： PROBLEM TO BE SOLVED: To provide an ionizer electrode of an independent heating type which heats an electrode only with a discharge power source without the need for a heating power source.SOLUTION: In an ionizer electrode heated to prevent, by thermophoretic force, deposition of fine particles on the ionizer electrode, the ionizer electrode 3 is divided into a tip part 4 and a root part 5, and a resistor 6 is interposed between the tip part 4 and the root part 5 divided. With this configuration, the tip part 4, the root part 5, and the resistor 6 are electrically connected in series.
摘要翻译：要解决的问题：提供一种独立加热型的离子发生器电极，其仅利用放电源加热电极而不需要加热电源。解决方案：在加热的电离器电极中，通过热压力来沉积离子电极电极上的细颗粒，电离器电极3被分成尖端部分4和根部5，并且电阻器6插在尖端部分4和分割的根部5之间。利用这种构造，电极部4，根部5和电阻6串联电连接。

6. 发明专利

JP2007194453A Electricity removing system in non-contact sheet-conveyance 审中-公开
标题翻译：非接触式输送机中的电力去除系统
公开(公告)号：JP2007194453A
公开(公告)日：2007-08-02
申请号：JP2006012029
申请日：2006-01-20
申请人： Techno Ryowa Ltd , 株式会社テクノ菱和
发明人： SUZUKI MASANORI , SATO TOMOKATSU
IPC分类号： H01L21/677 , B65G49/06
摘要： PROBLEM TO BE SOLVED: To provide an electricity removing system in non-contact sheet-conveyance, which is capable of effecting highly accurate electricity removing operation at any time when a conveyance object is charged.
SOLUTION: An ionizer 2 is installed on the way of an air pipe line for supplying air to an air levitation stage 1. The ionizer 2 is constituted so that an ionizing source 22 is received in a tubular chamber 21 and air or non-reactive gas is supplied into the chamber 21 through a clean air supplying port 23 provided at one end of the chamber 21, while ionized air can be blown out of a blow-out port 24 provided at the other end of the chamber 21. A shielding plate 25 is provided at the inside of the blow-out port 24. On the other hand, the front surface of the air levitation stage 1 is provided with a blow-out port 13 for blowing out high-pressure air, and a suction port 14 for attracting a glass substrate 11 by suction. In this case, air or gas is ionized by the ionizer 2 to supply to the air levitation stage 1, and the ionized air is blown uniformly against the rear side of a large-size glass substrate 11 through the air levitation stage 1.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种非接触式纸张传送中的电力去除系统，其能够在输送物体被充电时的任何时候进行高精度的除电操作。解决方案：电离器2安装在用于向空气悬浮台1供应空气的空气管线的路上。离子发生器2被构造成使得电离源22被容纳在管状室21中，空气或非空气 - 反应气体通过设置在室21的一端的清洁空气供给口23供应到室21中，而电离空气可以从设置在室21的另一端的吹出口24吹出。遮蔽板25设置在吹出口24的内部。另一方面，空气悬浮台1的前表面设置有用于吹出高压空气的吹出口13，端口14，用于通过抽吸吸引玻璃基板11。在这种情况下，空气或气体被电离器2离子化，供给到空气悬浮台1，电离空气通过空气悬浮台1均匀地吹向大尺寸玻璃基板11的后侧。
版权所有（C）2007，JPO＆INPIT

7. 发明专利

JP2005172431A Attaching type soft x-ray detector using electrostatic repulsive force 有权
标题翻译：使用静电传播力连接类型的软X射线探测器
公开(公告)号：JP2005172431A
公开(公告)日：2005-06-30
申请号：JP2003408137
申请日：2003-12-05
申请人： Techno Ryowa Ltd , 株式会社テクノ菱和
发明人： MIZUNO AKIRA , MATSUHASHI HIDEAKI , SUZUKI MASANORI , IMAI SEIICHI , SATO TOMOKATSU
IPC分类号： G01T1/14 , G01T7/00
摘要： PROBLEM TO BE SOLVED: To provide a small-sized and inexpensive attaching type soft X-ray detector carried easily by a worker or the like.
SOLUTION: A soft X-ray transmitting film is arranged in an opening part formed on a side face of a cylindrical transparent resin chamber, a metal charge plate is arranged in a bottom part of the chamber via an insulator, a conductive ball with a surface of the ball comprising a dielectric member made conductive is sealed inside the chamber, a stopper for regulating motion of the conductive ball is arranged between the charge plate and an upper face inside of the chamber, the charge plate is charged in the polarity same to that of the conductive ball before the detector is attached, the conductive ball is thereby floated along the stopper, and the conductive ball is moved downwards in response to an exposure amount of the soft X-ray, after the detector is attached.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供由工人等容易地携带的小型廉价的附着型软X射线检测器。解决方案：软的X射线透射膜布置在形成在圆柱形透明树脂室的侧面上的开口部分中，金属充电板通过绝缘体布置在腔室的底部，导电球其中包括导电的电介质构件的表面被密封在腔室内，用于调节导电球的运动的止动件设置在充电板和腔室的上表面之间，充电板被充电为极性与检测器附接前的导电球相同，导电球因此沿着止动器浮动，并且导电球在安装检测器之后响应于软X射线的曝光量而向下移动。版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2014072255A Substrate processing apparatus and substrate processing method 有权
标题翻译：基板处理装置和基板处理方法
公开(公告)号：JP2014072255A
公开(公告)日：2014-04-21
申请号：JP2012215294
申请日：2012-09-27
申请人： Dainippon Screen Mfg Co Ltd , 大日本スクリーン製造株式会社 , Techno Ryowa Ltd , 株式会社テクノ菱和
发明人： MIYAGI MASAHIRO , ARAKI HIROYUKI , SUZUKI MASANORI , SATO TOMOKATSU , KAWASE NOBUO
IPC分类号： H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide a substrate processing apparatus and a substrate processing method which prevent static electrification of a substrate during the processing by a process liquid.SOLUTION: A substrate processing apparatus 1 includes: a spin chuck 4 which holds a substrate W; an X ray radiation head 6 which radiates a soft X ray to a surface of the substrate W held by the spin chuck 4; and a water nozzle 5 which discharges deionized water serving as a process liquid to the surface of the substrate W held by the spin chuck 4. Supply of the deionized water and radiation of the soft X ray to the surface of the substrate W are concurrently conducted.
摘要翻译：要解决的问题：提供一种基板处理装置和基板处理方法，其防止在处理液体的处理期间基板的静电带电。解决方案：基板处理装置1包括：保持基板W的旋转卡盘4; X射线头6，其将软X射线照射到由旋转卡盘4保持的基底W的表面; 以及将由作为处理液体的去离子水排出到由旋转卡盘4保持的基板W的表面的水喷嘴5.将去离子水和软X射线的辐射供给到基板W的表面同时进行。

9. 发明专利

JP2012055849A System for removing volatile organic compound 审中-公开
标题翻译：去除挥发性有机化合物的系统
公开(公告)号：JP2012055849A
公开(公告)日：2012-03-22
申请号：JP2010202829
申请日：2010-09-10
申请人： Techno Ryowa Ltd , Toyohashi Univ Of Technology , 国立大学法人豊橋技術科学大学 , 株式会社テクノ菱和
发明人： MIZUNO AKIRA , SUZUKI MASANORI , SATO TOMOKATSU
IPC分类号： B01D53/44 , B01D53/14 , B01D53/34 , B01D53/77
CPC分类号： Y02A50/235
摘要： PROBLEM TO BE SOLVED: To provide a system for removing volatile organic compound, which excels in usefulness and cost effectiveness.SOLUTION: The system includes a VOC adsorption part, VOC discharge part and VOC recovery part, and is configured so that oil for VOC adsorption circulates between the adsorption part and the discharge part. A porous body 2 with a numerous number of open fine holes is provided in a chamber 1, and oil is atomized or dripped from above by means of an oil distributor 5 to form an oil film on the porous body 2. The inside of the chamber 1 is made a pressurized state, air containing VOC is supplied to be brought into contact with the oil film, and the VOC is adsorbed and removed. The oil with the VOC adsorbed in the adsorption part is introduced into the discharge part, the inside of the VOC discharging chamber 20 is made a decompressed state and the VOC adsorbed in the oil is discharged.
摘要翻译：要解决的问题：提供一种除去有用性和成本效益优异的挥发性有机化合物的除去系统。解决方案：该系统包括一个VOC吸附部分，VOC排放部分和VOC回收部分，并被配置为使VOC吸附油在吸附部分和排出部分之间循环。在室1中设置有多个开孔的多孔体2，通过油分配器5将油从上方喷雾或滴落，在多孔体2上形成油膜。室内 1被制成加压状态，供给包含VOC的空气以与油膜接触，并且VOC被吸附和去除。将吸附在吸附部上的VOC的油引入排出部，使VOC排出室20的内部成为减压状态，吸附在油中的VOC被排出。版权所有（C）2012，JPO＆INPIT

10. 发明专利

JP2006236763A Sheath air type ionizer 有权
标题翻译： SHEATH AIR TYPE IONIZER
公开(公告)号：JP2006236763A
公开(公告)日：2006-09-07
申请号：JP2005049092
申请日：2005-02-24
申请人： Techno Ryowa Ltd , 株式会社テクノ菱和
发明人： SUZUKI MASANORI , MATSUHASHI HIDEAKI , SATO TOMOKATSU
IPC分类号： H05F3/04 , H01T19/04 , H01T23/00
摘要： PROBLEM TO BE SOLVED: To provide a sheath air type ionizer capable of sending ionized flow far to a distance while maintaining a sheath air effect.
SOLUTION: A plurality of corona electrodes 11 are provided in this sheath air type ionizer 10, a high voltage generator 12 is connected to each of the corona electrodes 11, and each corona electrode 11 is disposed in the inside of a sheath air nozzle 13. An assist air nozzle 13 is concentrically provided on the periphery of the sheath air nozzle 13, and high purity N
2 gas is supplied to the sheath air nozzle 13 as sheath air through a valve 16 for a sheath air supply passage 15 and the sheath air, and clean dry air is supplied to the assist air nozzle 14 as assist air through a valve 18 for an assist air supply passage 17 and the assist air.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够在保持护套空气效果的同时将电离流远离一定距离的护套空气型电离器。解决方案：在该护套空气型电离器10中设置多个电晕电极11，将高电压发生器12连接到每个电晕电极11，并且每个电晕电极11设置在护套空气的内部喷嘴13.辅助空气喷嘴13同心地设置在护套空气喷嘴13的周围，高纯度N SB 2气体作为鞘气通过阀16供给到鞘空气喷嘴13，用于护套空气供给通道15和护套空气，并且干净的干燥空气作为辅助空气通过辅助空气供应通道17的辅助空气和辅助空气供给到辅助空气喷嘴14。版权所有（C）2006，JPO＆NCIPI

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