专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JP2014082471A Process-liquid-supplying apparatus, substrate processing apparatus, process-liquid-supplying method, and substrate processing method 有权
标题翻译：过程液体供应装置，基板处理装置，方法 - 液体供应方法和基板处理方法
公开(公告)号：JP2014082471A
公开(公告)日：2014-05-08
申请号：JP2013194293
申请日：2013-09-19
申请人： Dainippon Screen Mfg Co Ltd , 大日本スクリーン製造株式会社 , Techno Ryowa Ltd , 株式会社テクノ菱和
发明人： MIYAGI MASAHIRO , ARAKI HIROYUKI , SUZUKI MASANORI , SATO TOMOKATSU , KAWASE NOBUO
IPC分类号： H01L21/304 , B05C11/08 , B05C11/10 , B08B3/02 , G21K5/00 , G21K5/02 , G21K5/10 , H05F1/00 , H05F3/06
摘要： PROBLEM TO BE SOLVED: To provide a process-liquid-supplying apparatus and a process-liquid-supplying method by which a process liquid can be supplied to a processing object while preventing the electrification of or diselectrifying the processing object, and to provide a substrate processing apparatus and a substrate processing method by which a treatment by use of a process liquid can be performed on a substrate while preventing the electrification of or diselectrifying the substrate.SOLUTION: A substrate processing apparatus 1 comprises: a spin chuck 4 for rotating a substrate W while holding it in a horizontal attitude; and an integral-type head 6 disposed to face a surface(upper face) of the substrate W held by the spin chuck 4 for supplying the surface of the substrate W with DIW(deionized water) as an example of water and irradiating the surface of the substrate W with soft X rays. The integral-type head 6 has a water nozzle 61 extending in a vertical direction, and a soft X-ray irradiation unit 62 for laterally directing soft X rays toward the water nozzle 61, which are assembled integrally. The water nozzle 61 is connected with a water-supplying line 13 to which DIW is supplied from a DIW supply source.
摘要翻译：要解决的问题：提供一种处理液供给装置和处理液供给方法，通过该方法，可以在防止加工对象的带电或不均化的同时将处理液体供给到处理对象物，并且提供基板处理装置和基板处理方法，通过该方法可以在基板上进行使用处理液的处理，同时防止基板的通电或使其失电。解决方案：基板处理装置1包括：用于旋转基板的旋转卡盘4 同时把握在一个横向的态度; 以及设置成面对由旋转卡盘4保持的基板W的表面（上表面）的一体型头6，用于以DIW（去离子水）作为水的一个表面供给衬底W的表面，并照射具有软X射线的衬底W。整体式头部6具有沿垂直方向延伸的水喷嘴61和用于将软X射线横向引导到水喷嘴61的软X射线照射单元62，它们被整体组装。水喷嘴61与DIW供给源供给DIW的供水管13连接。

2. 发明专利

JP2014072255A Substrate processing apparatus and substrate processing method 有权
标题翻译：基板处理装置和基板处理方法
公开(公告)号：JP2014072255A
公开(公告)日：2014-04-21
申请号：JP2012215294
申请日：2012-09-27
申请人： Dainippon Screen Mfg Co Ltd , 大日本スクリーン製造株式会社 , Techno Ryowa Ltd , 株式会社テクノ菱和
发明人： MIYAGI MASAHIRO , ARAKI HIROYUKI , SUZUKI MASANORI , SATO TOMOKATSU , KAWASE NOBUO
IPC分类号： H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide a substrate processing apparatus and a substrate processing method which prevent static electrification of a substrate during the processing by a process liquid.SOLUTION: A substrate processing apparatus 1 includes: a spin chuck 4 which holds a substrate W; an X ray radiation head 6 which radiates a soft X ray to a surface of the substrate W held by the spin chuck 4; and a water nozzle 5 which discharges deionized water serving as a process liquid to the surface of the substrate W held by the spin chuck 4. Supply of the deionized water and radiation of the soft X ray to the surface of the substrate W are concurrently conducted.
摘要翻译：要解决的问题：提供一种基板处理装置和基板处理方法，其防止在处理液体的处理期间基板的静电带电。解决方案：基板处理装置1包括：保持基板W的旋转卡盘4; X射线头6，其将软X射线照射到由旋转卡盘4保持的基底W的表面; 以及将由作为处理液体的去离子水排出到由旋转卡盘4保持的基板W的表面的水喷嘴5.将去离子水和软X射线的辐射供给到基板W的表面同时进行。

3. 发明专利

JP2014082472A Process-liquid-processing apparatus and process-liquid-processing method 有权
标题翻译：流程 - 液体加工设备和流程 - 液体加工方法
公开(公告)号：JP2014082472A
公开(公告)日：2014-05-08
申请号：JP2013194294
申请日：2013-09-19
申请人： Dainippon Screen Mfg Co Ltd , 大日本スクリーン製造株式会社 , Techno Ryowa Ltd , 株式会社テクノ菱和
发明人： MIYAGI MASAHIRO , ARAKI HIROYUKI , SUZUKI MASANORI , SATO TOMOKATSU , KAWASE NOBUO
IPC分类号： H01L21/304 , B08B3/04 , B08B3/10
摘要： PROBLEM TO BE SOLVED: To provide a process-liquid-processing apparatus and a process-liquid-processing method by which a treatment by use of a process liquid can be performed on a processing object while preventing the electrification of or diselectrifying the processing object.SOLUTION: A substrate processing apparatus 1 comprises: a processing tank 2 for storing a process liquid and immersing a substrate W which is a processing object in the process liquid; and a circulation mechanism 5 for circulating the process liquid stored in the processing tank 2. The circulation mechanism 5 includes: a circulation nozzle 13 disposed in the processing tank 2; and branch lines 16 connected with the circulation nozzle 13. To one of the branch lines 16, a soft X-ray irradiation unit 17 is attached. The inside of the branch lines 16 communicate with the inside of the processing tank 2.
摘要翻译：要解决的问题：提供一种处理液处理装置和处理液处理方法，通过该处理液处理装置和处理液处理方法，通过该处理液处理方法，可以对加工对象进行处理液的处理，同时防止加工对象的通电或使其失电。解决方案：基板处理装置1包括：处理槽2，用于存储处理液并将作为处理对象的基板W浸入处理液中; 以及循环机构5，其使存储在处理槽2中的处理液循环。循环机构5包括：设置在处理槽2中的循环喷嘴13; 以及与循环喷嘴13连接的分支管路16.在分支管线16之一上安装有软X射线照射单元17。分支管线16的内部与处理槽2的内部连通。

4. 发明专利

JP2013165797A Sterilizer 有权
标题翻译：杀菌剂
公开(公告)号：JP2013165797A
公开(公告)日：2013-08-29
申请号：JP2012030218
申请日：2012-02-15
申请人： Techno Ryowa Ltd , 株式会社テクノ菱和
发明人： TAKIGUCHI YOSUKE , SUZUKI MASANORI , EBINE TAKESHI
IPC分类号： A61L2/20 , B01D53/22 , B01D53/26 , B01D63/02 , B01D71/70
摘要： PROBLEM TO BE SOLVED: To sterilize the interior by stably feeding low-humidity gas containing hydrogen peroxide gas into a target space.SOLUTION: A sterilizer for sterilizing a target space by evaporating a hydrogen peroxide solution includes: a gas generating part A for generating hydrogen peroxide gas within a gas generation chamber 1; a dehumidifying part B made of resin with corrosion resistance against hydrogen peroxide gas and having a hollow fibrous filter 8 for separating water vapor; and a water vapor collecting part C for cooling and condensing the separated water vapor. Hydrogen peroxide gas is generated to achieve such a low humidity as not to generate dew condensation water on a wall surface of the target space.
摘要翻译：要解决的问题：通过将含有过氧化氢气体的低湿度气体稳定地输送到目标空间来对内部进行消毒。解决方案：通过蒸发过氧化氢溶液对目标空间进行灭菌的灭菌器包括：用于产生氢气的气体发生部分A 气体发生室1内的过氧化物气体; 由具有耐过氧化氢气体的耐腐蚀性的树脂制成的除湿部分B，并具有用于分离水蒸汽的中空纤维过滤器8; 以及用于冷却和冷凝分离的水蒸汽的水蒸气收集部分C. 产生过氧化氢气体以达到如此低的湿度，不会在目标空间的壁表面上产生结露水。

5. 发明专利

JP2013034945A Apparatus for treating wastewater 审中-公开
标题翻译：废水处理设备
公开(公告)号：JP2013034945A
公开(公告)日：2013-02-21
申请号：JP2011173214
申请日：2011-08-08
申请人： Techno Ryowa Ltd , 株式会社テクノ菱和 , Toyohashi Univ Of Technology , 国立大学法人豊橋技術科学大学
发明人： MIZUNO AKIRA , SUZUKI MASANORI , SATO TOMOKATSU
IPC分类号： C02F1/48 , C02F1/78
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for treating wastewater which has high decomposing treatment efficiency of organic matter.SOLUTION: The apparatus 10 for treating wastewater is provided with a wet wall column 12 and a discharge wire 13. The wet wall column 12 is constituted of a cylinder which has open both ends and an inside diameter of 10 to 25 mm and wastewater is made to flow down along the inner wall surface of the cylinder from its upper end to its lower end to form a liquid film. The discharge wire is inserted inside the cylinder so as to pass the central axis of the cylinder in a longitudinal direction and the discharge wire and the wet wall column constitute an electrode pair. Radicals produced by plasma discharge generated between the wet wall column 12 and the discharge wire 13 are absorbed by the liquid film and decompose the organic matter in the wastewater.
摘要翻译：待解决的问题：提供一种处理有机物分解效率高的废水的设备。解决方案：用于处理废水的装置10设置有湿壁柱12和排出线13.湿壁柱12由具有开口两端和内径为10至25mm的圆筒构成，使废水从其上端到其下端沿着圆筒的内壁表面向下流动以形成液膜。放电线插入圆筒内，使其沿纵向方向通过圆筒的中心轴线，放电线和湿壁柱构成电极对。在湿壁柱12和放电丝13之间产生的等离子体放电产生的自由基被液膜吸收并分解废水中的有机物质。版权所有（C）2013，JPO＆INPIT

6. 发明专利

JP2010263794A System for measuring growth of plant, method for controlling the system, and program for controlling the system 有权
标题翻译：用于测量植物生长的系统，用于控制系统的方法和用于控制系统的程序
公开(公告)号：JP2010263794A
公开(公告)日：2010-11-25
申请号：JP2009115208
申请日：2009-05-12
申请人： Techno Ryowa Ltd , Toyohashi Univ Of Technology , 国立大学法人豊橋技術科学大学 , 株式会社テクノ菱和
发明人： MIZUNO AKIRA , MIZUNO TAMAE , MATSUHASHI HIDEAKI , SUZUKI MASANORI , MATSUDA TAKASHI
IPC分类号： A01G7/00
摘要： PROBLEM TO BE SOLVED: To provide a system for measuring the growth of plants with which the growth condition of plants mass-produced in a plant factory or the like is objectively and quantitatively measured by a simple and easy method: to provide a method for controlling the growth condition of plants: and to provide a program for controlling the growth condition of plants.
SOLUTION: The system for measuring the growth of plants is structured as follows: a sheet-like first electric conductor 11 is set up on the surface of cultivation culture medium 4 in an insulated condition by being superimposed on the upper layer of a sheet-like insulating material 13; the first electric conductor 11 comprises a conductive sheet, conductive film, metal net or the like; the insulating material 13 comprises an insulating sheet such as a plastic sheet, or an insulating film; a direct-current power source 15 is connected to the first conductor 11 and the tip end of the first conductor is grounded; a low voltage at around 10 V is applied onto the first conductor 11 via the power source 15; an ammeter 16 is connected to a second conductor 12, and the tip end of the second conductor is grounded; and the ammeter 16 comprises an electrometer with which minute electric current flowing between the second conductor 12 and a grounding wire can be detected.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于测量植物生长的系统，其通过简单和容易的方法客观地和定量地测量植物工厂等大规模生产的植物的生长条件：提供控制植物生长状况的方法：提供控制植物生长状况的程序。解决方案：用于测量植物生长的系统的结构如下：通过叠加在培养培养基4的上层上的绝缘条件下将片状第一导电体11设置在培养培养基4的表面上片状绝缘材料13; 第一电导体11包括导电片，导电膜，金属网等; 绝缘材料13包括诸如塑料片的绝缘片或绝缘膜; 直流电源15连接到第一导体11，并且第一导体的末端接地; 大约10V的低电压经由电源15施加到第一导体11上; 电流表16连接到第二导体12，并且第二导体的尖端接地; 并且电流表16包括可以检测在第二导体12和接地线之间流动的微小电流的静电计。版权所有（C）2011，JPO＆INPIT

7. 发明专利

JP2009211889A Dust-free ionizer system using low-energy electron beam 审中-公开
标题翻译：使用低能量电子束的无尘离子系统
公开(公告)号：JP2009211889A
公开(公告)日：2009-09-17
申请号：JP2008052416
申请日：2008-03-03
申请人： Techno Ryowa Ltd , 株式会社テクノ菱和
发明人： SUZUKI MASANORI , MATSUDA TAKASHI
IPC分类号： H05F3/04 , H01T19/04 , H01T23/00
摘要： PROBLEM TO BE SOLVED: To provide a dust-free ionizer system that uses air in a clean room or compressed air as a sheath air supply source while using a low-energy electron beam which highly efficiently removes minute impurities.
SOLUTION: Each sheath air nozzle 5 is provided in a plurality of sheath air type ionizers 2 that are installed on the ceiling of a clean room via a ULPA filter 1 while a corona electrode 3 is arranged in each nozzle. Each sheath air nozzle 5 is connected with sheath air supply piping 10. On its upstream side, a membrane filter 20 and a granulation device 30 are sequentially arranged. The granulation device 30 is a means for granulating air in the clean room or gaseous impurities in compressed air by using a low-energy electron beam. The membrane filter 20 is a means for collecting impurities granulated by the granulation device 30.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种无尘电离器系统，其使用洁净室中的空气或压缩空气作为护套空气供应源，同时使用高效除去微小杂质的低能电子束。解决方案：每个护套空气喷嘴5设置在多个护套空气型电离器2中，其经由ULPA过滤器1安装在洁净室的天花板上，同时在每个喷嘴中布置电晕电极3。每个护套空气喷嘴5与护套空气供给管道10连接。在其上游侧依次布置有膜过滤器20和造粒装置30。造粒装置30是通过使用低能量电子束将洁净室中的空气或压缩空气中的气态杂质造粒的装置。膜过滤器20是用于收集由造粒装置30造粒的杂质的装置。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP2008229472A Volatile organic matter removal system 审中-公开
标题翻译：有挥发性有机物去除系统
公开(公告)号：JP2008229472A
公开(公告)日：2008-10-02
申请号：JP2007071883
申请日：2007-03-20
申请人： Techno Ryowa Ltd , Toyohashi Univ Of Technology , 国立大学法人豊橋技術科学大学 , 株式会社テクノ菱和
发明人： MIZUNO AKIRA , MATSUHASHI HIDEAKI , SUZUKI MASANORI , MATSUDA TAKASHI
IPC分类号： B01D53/72 , B01D53/34 , B01D53/77
CPC分类号： Y02A50/235
摘要： PROBLEM TO BE SOLVED: To provide a volatile organic matter removal system which is excellent in usefulness and economical efficiency. SOLUTION: A VOC absorption chamber 1 is installed indoor, and a VOC discharge chamber 2 is installed outdoor. Silicone oil 3a, 3b is accommodated in both chambers. An air to be treated supply duct 11, first oil circulation piping 12, and a treated air supply duct 13 are installed in the absorption chamber 1, and the inside of the absorption chamber 1 can be conditioned to a predetermined pressurized state by a pressurizing fan 14 installed in the air to be treated supply duct 11. An air or inert gas supply duct 21, second oil circulation piping 22, and treated air discharge duct 23 are installed in the discharge chamber 2, and the inside of the discharge chamber 2 can be conditioned to a predetermined vacuum state by a vacuum fan 14 installed in the treated air discharge duct 23. When a partial vapor pressure around the silicone oil is high, the oil absorbs VOC, and when low, it discharges the VOC. By using this action of the oil, the absorption and discharge of the VOC are carried out. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种挥发性有机物去除系统，其有用性和经济性优异。解决方案：将VOC吸收室1安装在室内，将VOC排出室2安装在室外。硅油3a，3b容纳在两个室中。待吸收空气供给管道11，第一油循环管道12和处理过的空气供应管道13安装在吸收室1中，吸收室1的内部可以通过加压风扇调节到预定的加压状态 14被安装在被处理空气供给管道11中。空气或惰性气体供应管道21，第二油循环管道22和经处理的排气管道23安装在排出室2中，并且排出室2的内部通过安装在经处理的空气排放管道23中的真空风扇14调节到预定的真空状态。当硅油周围的部分蒸汽压高时，油吸收VOC，并且当其低时排出VOC。通过使用油的这种作用，进行VOC的吸收和排出。版权所有（C）2009，JPO＆INPIT

9. 发明专利

JP2013200967A Ionizer electrode 有权
标题翻译：离子电极
公开(公告)号：JP2013200967A
公开(公告)日：2013-10-03
申请号：JP2012067510
申请日：2012-03-23
申请人： Techno Ryowa Ltd , 株式会社テクノ菱和
发明人： SUZUKI MASANORI , SATO TOMOKATSU
IPC分类号： H05F3/04 , H01T23/00
摘要： PROBLEM TO BE SOLVED: To provide an ionizer electrode of an independent heating type which heats an electrode only with a discharge power source without the need for a heating power source.SOLUTION: In an ionizer electrode heated to prevent, by thermophoretic force, deposition of fine particles on the ionizer electrode, the ionizer electrode 3 is divided into a tip part 4 and a root part 5, and a resistor 6 is interposed between the tip part 4 and the root part 5 divided. With this configuration, the tip part 4, the root part 5, and the resistor 6 are electrically connected in series.
摘要翻译：要解决的问题：提供一种独立加热型的离子发生器电极，其仅利用放电源加热电极而不需要加热电源。解决方案：在加热的电离器电极中，通过热压力来沉积离子电极电极上的细颗粒，电离器电极3被分成尖端部分4和根部5，并且电阻器6插在尖端部分4和分割的根部5之间。利用这种构造，电极部4，根部5和电阻6串联电连接。

10. 发明专利

JP2009146595A Charged particle transfer ionizer using ion nucleus condensation by adiabatic expansion 有权
标题翻译：使用离子核聚变通过自发扩散的带电粒子转移离子
公开(公告)号：JP2009146595A
公开(公告)日：2009-07-02
申请号：JP2007319703
申请日：2007-12-11
申请人： Techno Ryowa Ltd , Toyohashi Univ Of Technology , 国立大学法人豊橋技術科学大学 , 株式会社テクノ菱和
发明人： MIZUNO AKIRA , SUZUKI MASANORI , MATSUDA TAKASHI , MATSUHASHI HIDEAKI
IPC分类号： H01T23/00 , F24F7/06 , H05F3/06
摘要： PROBLEM TO BE SOLVED: To provided a charged particle transfer type ionizer using ion nucleus condensation by an adiabatic expansion which has a simple structure and in which ionized air can stably be transferred over a long distance. SOLUTION: The charged particle transfer ionizer is provided with an irradiation window 11 on a side wall portion on an upper side of a chamber 10, a radiation ray shielding cover 12 on an outer side of the side wall portion inside of which an ionizing source 20 is arranged, and air in the chamber is ionized by radiation ray from the irradiation window. Further, a charged particle generating nozzle 30 is arranged inside the chamber 10, and positive/negative ions are introduced inside the charged particle generating nozzle 30, and humidified air and compressed air are supplied and steam under a super-saturation condition is condensed in the nozzle on the positive/negative ions as nucleuses to generate positive and negative fine mists. Then, a mixture of the positive and negative ions and the positive and negative fine mists are sprayed to a charged body being a destaticizing target through a tube. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：提供一种带有离子核冷凝的带电粒子转移型离子发生器，其通过绝热膨胀而具有简单的结构，其中电离空气能够长期稳定地转移。解决方案：带电粒子转移离子发生器在室10的上侧的侧壁部分设置有辐射窗口11，在侧壁部分的外侧的辐射线屏蔽盖12上，电离源20被布置，室内的空气被来自照射窗的辐射线电离。此外，在室10的内部配置有带电粒子生成用喷嘴30，在带电粒子产生喷嘴30的内部引入正/负离子，供给加湿空气和压缩空气，超饱和条件下的蒸汽在喷嘴在正/负离子上作为核产生正负阴极细雾。然后，将正离子和负离子以及正，负微细混合物通过管喷射到作为去静电靶的带电体。版权所有（C）2009，JPO＆INPIT

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式