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1. 发明专利

JPH10170368A SEMICONDUCTOR DEVICE AND ITS MANUFACTURE 失效
公开(公告)号：JPH10170368A
公开(公告)日：1998-06-26
申请号：JP32997596
申请日：1996-12-10
申请人： DENSO CORP
发明人： OBA NOBUKAZU , IKUTA TOSHIO , SAKAI MINEICHI , FUKADA TAKESHI , SUZUKI YASUTOSHI
IPC分类号： G01L9/04 , B81B3/00 , G01L9/00 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To improve the leaking characteristic of leakage currents which occur at the P-N junctions between gauge resistors and an epitaxial layer in a semiconductor pressure detecting device. SOLUTION: A semiconductor device is provided with a diaphragm part C formed by removing part of the P -type silicon substrate 1 of a substrate composed of the silicon substrate l and an N -type epitaxial layer 2 and gauge resistors 3 and N -type diffusion layers 6 for fixing potential which are formed in the surface-layer part of the epitaxial layer 2. The diffusion layers 6 are formed so that the diffusion layers 6 can surround the periphery of the diaphragm part C. Because of the diffusion layers 6, the potential gradient in the epitaxial layer 2 can be reduced and the potential differential at the P-N junctions between the resistors 3 and epitaxial layer 2 can be made smaller.

2. 发明专利

JP2010181243A Method of manufacturing capacitance-type dynamic quantity sensor 审中-公开
标题翻译：制造电容式动态数量传感器的方法
公开(公告)号：JP2010181243A
公开(公告)日：2010-08-19
申请号：JP2009024244
申请日：2009-02-04
申请人： Denso Corp , 株式会社デンソー
发明人： IKUTA TOSHIO
IPC分类号： G01P15/08 , G01P15/125 , H01L23/08 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a capacitance-type dynamic quantity sensor preventing inferior manufacture or reliability lowering caused by the occurrence of foreign matter caused by a case.
SOLUTION: The method of manufacturing a capacitance-type dynamic quantity sensor 90 includes: a multiple case preparation process S1 for preparing a multi-string case 50 formed by connecting a plurality of cases 51; a sensor chip mounting process S2 for mounting sensor chips 41 in the cases 51 constituting the multi-string case 50; a lid joining process S4 for joining a lid 71 to each of the cases 51 constituting the multi-string 50 to bring the interior of the cases 51 to a sealed state after the mounting process S2; and a multi-string case division process S5 for dividing the multi-string case 50 into the several cases 51 after the joining process S4.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种制造电容式动态量传感器的方法，其防止由壳体引起的异物的发生所引起的劣化制造或可靠性降低。电容式动态量传感器90的制造方法包括：多个箱体的制造过程S1，用于制备通过连接多个壳体51而形成的多绳壳体50; 用于将传感器芯片41安装在构成多线壳体50的壳体51中的传感器芯片安装工艺S2; 盖子连接处理S4，用于将盖71连接到构成多线50的每个壳体51，以使安装过程S2之后的壳体51的内部处于密封状态; 以及多字符串分割处理S5，用于在接合处理S4之后将多字符串字符串50划分成若干个情况51。版权所有（C）2010，JPO＆INPIT

3. 发明专利

JPH11136109A POWER-ON RESET CIRCUIT 失效
公开(公告)号：JPH11136109A
公开(公告)日：1999-05-21
申请号：JP30185997
申请日：1997-11-04
申请人： DENSO CORP
发明人： ENDO NOBORU , IKUTA TOSHIO
IPC分类号： G06F1/24 , H03K17/22
摘要： PROBLEM TO BE SOLVED: To provide a power-on reset circuit capable of surely resetting an electronic circuit at the time of the rise of a power supply voltage. SOLUTION: This power-on reset circuit is provided with; a reset signal generation circuit 29 for starting an operation accompanying the rise of a power supply voltage Vdd supplied to a processing circuit 1 as the electronic circuit and for outputting reset signals of a high level to one end TA of a reset signal line RL for supplying the reset signals to respective parts of the processing circuit 1; a delay circuit 33 for delaying and outputting the signal level of the final end part TB of the reset signal line RL; and a reset cancellation circuit 31 for inhibiting the output of the reset signals produced by the reset signal generation circuit 29 while the output of the delay circuit 33 remains at high level until the power supply voltage Vdd is stopped thereafter. Thus, regardless of signal propagation delay in the reset signal line RL and the rise characteristics of the power supply voltage Vdd, etc., the processing circuit 1 is surely reset.

4. 发明专利

JPH09113310A SENSOR DEVICE 失效
公开(公告)号：JPH09113310A
公开(公告)日：1997-05-02
申请号：JP26592895
申请日：1995-10-13
申请人： DENSO CORP
发明人： IKUTA TOSHIO , MAKINO YASUAKI , YAMADA TOSHITAKA
IPC分类号： G01L1/00 , G01D3/028 , G01L9/00 , G01L9/04 , G01L19/04
摘要： PROBLEM TO BE SOLVED: To provide a sensor device from which highly accurate sensor values can be obtained by correcting the characteristic fluctuation, instrumental error, etc., of each sensor by ideally avoiding the increase of the size and cost of the sensors themselves and the need of complicated processes, etc., to a processor. SOLUTION: An EPROM 170 in which the data used for correcting the characteristic fluctuation, instrumental error, etc., of a sensor 1 itself and a communication circuit 160 which transmits signals prepared by adding the correcting data to the collected data corresponding to physical information to a sensor signal processor 2 composed of a microcomputer, etc., as sensor signals SD are provided on the sensor 1 side. On the processor 2 side, the transmitted sensor signals SD are received by means of a communication circuit 210 and the physical information (pressure value) to be detected is calculated while the data corresponding to the physical information of the signals SD are corrected from the correcting data contained in the received sensor signals SD.

5. 发明专利

JP2012154803A Angular velocity sensor device 有权
标题翻译：角速度传感器装置
公开(公告)号：JP2012154803A
公开(公告)日：2012-08-16
申请号：JP2011014288
申请日：2011-01-26
申请人： Denso Corp , 株式会社デンソー
发明人： IKUTA TOSHIO
IPC分类号： G01C19/56
摘要： PROBLEM TO BE SOLVED: To provide an angular velocity sensor device capable of restraining detection accuracy from being reduced over time.SOLUTION: An angular velocity sensor device comprises: an angular velocity sensor element 100 having a movable section; a drive circuit 210 which outputs a drive signal to control drive vibration of the movable section to the angular velocity sensor element 100 and maintains a steady level of the drive vibration; a detection circuit 220 which outputs a detection signal by detecting a change in capacitance of the angular velocity sensor element 100; a package to store the angular velocity sensor element 100; a pressure sensor 300 which is housed in the package and detects pressure inside the package; and a correction arithmetic circuit 234 which calculates resonance magnification of detected vibration at the movable section from the pressure detected by the pressure detection sensor 300, generates an angular velocity signal indicating an applied angular velocity using the detection signal as well as the calculated resonance magnification and outputs the angular velocity signal.
摘要翻译：要解决的问题：提供能够抑制检测精度随着时间的推移而减小的角速度传感器装置。角速度传感器装置包括：具有可移动部分的角速度传感器元件100; 驱动电路210，其输出驱动信号以控制可动部分对角速度传感器元件100的驱动振动，并保持驱动振动的稳定水平; 检测电路220，其通过检测角速度传感器元件100的电容的变化来输出检测信号; 用于存储角速度传感器元件100的包装; 压力传感器300，其容纳在所述封装中并检测所述封装内的压力; 以及校正运算电路234，其根据由压力检测传感器300检测出的压力，计算出可动部分的检测振动的共振倍率，利用该检测信号产生表示施加的角速度的角速度信号以及计算出的共振倍率，输出角速度信号。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2000292434A CAPACITANCE-TYPE DYNAMIC-QUANTITY SENSOR DEVICE 失效
公开(公告)号：JP2000292434A
公开(公告)日：2000-10-20
申请号：JP10425499
申请日：1999-04-12
申请人： DENSO CORP
发明人： OKADA HIROSHI , IKUTA TOSHIO
IPC分类号： G01P15/125 , G01D3/028
摘要： PROBLEM TO BE SOLVED: To provide a capacitance-type dynamic-quantity sensor device which outputs a precise sensor signal irrespective of a disturbance to a capacitance- type dynamic sensor. SOLUTION: A capacitance-type dynamic sensor 10 is provided. An operational amplifier circuit 20 which outputs an oscillation signal having an amplitude and a frequency which correspond to the capacitance of the capacitance- type dynamic sensor 10 is provided, A frequency detection circuit 30 which detects the frequency of the oscillation signal is provided, An amplitude detection circuit 40 which detects the amplitude of the oscillation signal is provided. An output circuit 50 by which a sensor signal according to a dynamic quantity is output according to the frequency signal of the frequency detection circuit 30 and according to the amplitude signal of the amplitude detection circuit 40 is provided.

7. 发明专利

JP2000241202A SENSOR DEVICE 失效
公开(公告)号：JP2000241202A
公开(公告)日：2000-09-08
申请号：JP4656199
申请日：1999-02-24
申请人： DENSO CORP
发明人： IKUTA TOSHIO
IPC分类号： G01D3/00 , G01D3/02 , G01D18/00 , G01L19/04 , G01L27/00
摘要： PROBLEM TO BE SOLVED: To surely realize the elevated precision of a sensor output. SOLUTION: In a sensor circuit 1, a signal processing circuit 12 outputs an amplified detection signal Sd from a pressure detecting bridge circuit 3, and an adjuster circuit 13 adjusts, based on voltage signals Sk, Sx, Sz, St given to input terminals Vk, Vx, Vz, Vt, so that a data signal SD value becomes a predetermined set value. In a data generator 2, a first EPROM 14 is capable of storing characteristic adjusting quantized data Δk, Δx, Δz, Δt, of about 12 bits at max. for setting the values of the voltage signals Sk, Sx, Sz, St, and a second EPROM 15 is capable of storing finely adjusting quantized data Δk', Δx', Δz', Δt', of about 3 bits at max. to be added to/subtracted from the characteristic adjusting quantized data Δk, Δx, Δz, Δt.

8. 发明专利

JP2000146620A SENSOR DEVICE 失效
公开(公告)号：JP2000146620A
公开(公告)日：2000-05-26
申请号：JP31317098
申请日：1998-11-04
申请人： DENSO CORP
发明人： IKUTA TOSHIO , ENDO NOBORU
IPC分类号： G01L19/04 , G01D3/028
摘要： PROBLEM TO BE SOLVED: To reduce the error of a finally obtained physical quantity detection value, and to improve the reproducibility at the time of temperature compensating a physical quantity detection value based on the output of a sensor circuit. SOLUTION: A reference signal Sa from a reference voltage generating circuit 5, temperature signal St from a bridge circuit 4 for detecting temperature, and detection signal Sd from a bridge circuit 3 for detecting a pressure are time-division processed through an analog multiplexer 6, and those signals Sd, St, and Sa are collected through the same differential amplifier circuit 8 and A/D conversion circuit 9. A weighting arithmetic circuit 15 changes correction coefficients for compensating temperature in an EPROM 13 so that they can be set as successively different values according to the level of the temperature calculated based on the temperature signal St, and gives them to a correction arithmetic circuit 14. The correction arithmetic circuit 14 calculates a pressure quantity detection value corresponding to the detection signal Sd in the temperature compensated state by arithmetic processing based on digital data from an A/D conversion circuit 9 and the correction coefficients applied from the EPROM 13 through the weighting arithmetic 15.

9. 发明专利

JPH11230843A SENSOR DEVICE 失效
公开(公告)号：JPH11230843A
公开(公告)日：1999-08-27
申请号：JP3581398
申请日：1998-02-18
申请人： DENSO CORP
发明人： IKUTA TOSHIO , ENDO NOBORU
IPC分类号： G01L9/00 , H03M1/10
摘要： PROBLEM TO BE SOLVED: To improve the detecting accuracy of a sensor device, even when the device is provided with an A/D conversion circuit utilizing a ring gate delaying circuit. SOLUTION: Such operations are periodically performed that a reference signal Sa from a reference voltage generating circuit 5, a temperature signal St from a bridge circuit 4 for detecting temperature, and a detect signal Sd from a bridge circuit 3 for detecting pressure, are processed in time division through an analog multiplexer 6 and converted into digital data by means of an A/D conversion circuit after the signals Sd, St, and Sa are successively amplified by means of a differential amplifier circuit 8. When the operations are performed, a control block 7 makes the A/D conversion circuit 9 perform such idling operations that the circuit 9 continuously gives a pulse signal PA to a ring gate delaying circuit 10 in the circuit 9 for a prescribed period of time (for example, 0.5 second) in a state where the reference signal Sa is given to the circuit 10 as a power supply voltage before the circuit 9 makes converting operations on the signals Sd, St, and Sa.

10. 发明专利

JPH1164135A SENSOR 失效
公开(公告)号：JPH1164135A
公开(公告)日：1999-03-05
申请号：JP9591798
申请日：1998-04-08
申请人： DENSO CORP
发明人： IKUTA TOSHIO , ENDO NOBORU , WATANABE TAKAMOTO
IPC分类号： G01D3/028 , G01L9/00 , H03M1/06
摘要： PROBLEM TO BE SOLVED: To miniaturize the whole body and keep the precision of physical quantity detection value in good state for a long duration. SOLUTION: Time division processing is carried out for standard signal Sa from a standard voltage generating circuit 5, temperature signal St from a bridge circuit 4 for temperature detection, and detection signal Sd from a bridge circuit 3 for pressure detection by an analog multiplexor 6 and three kinds of digital data corresponding to these signals Sd, St, and Sa are obtained through a single differential amplifying circuit 8 and a single A/D converting circuit 9. A collection computing circuit 14 computes the detected value of pressure corresponding to the detection signal Sd by computation processing based on the digital data from the A/D converting circuit 9 while correcting the detected value by the temperature signal St and the standard signal Sa.

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