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1. 发明专利

JP2010143788A Oxynitride piezoelectric material and method for producing the same 审中-公开
标题翻译：氧化物压电材料及其制造方法
公开(公告)号：JP2010143788A
公开(公告)日：2010-07-01
申请号：JP2008322831
申请日：2008-12-18
申请人： Canon Inc , Kyoto Univ , National Institute Of Advanced Industrial Science & Technology , Tokyo Institute Of Technology , Tokyo Univ Of Science , Univ Of Yamanashi , キヤノン株式会社 , 国立大学法人京都大学 , 国立大学法人山梨大学 , 国立大学法人東京工業大学 , 学校法人東京理科大学 , 独立行政法人産業技術総合研究所
发明人： SAITO HIROSHI , MATSUDA KATAYOSHI , MIURA KAORU , TAKASHIMA KENJI , AZUMA MASAKI , IIJIMA TAKASHI , FUNAKUBO HIROSHI , OKAMURA SOICHIRO , KUMADA NOBUHIRO , WADA TOMOSHI
IPC分类号： C04B35/58 , C23C14/06 , H01L41/187 , H01L41/316 , H01L41/39 , H01L41/43 , H02N2/00
CPC分类号： H01L41/187 , C01B21/0821 , C01P2002/34 , C01P2002/77 , C04B35/58 , C04B35/58014 , C04B2235/3208 , C04B2235/3213 , C04B2235/3215 , C04B2235/3232 , C04B2235/3236 , C04B2235/3244 , C04B2235/3287 , C04B2235/3293 , C04B2235/3298 , C04B2235/3418 , C04B2235/3873 , C04B2235/3886 , C04B2235/3895 , C04B2235/465 , C04B2235/6025 , C04B2235/761 , C04B2235/765 , C04B2235/768 , C04B2235/787 , H01L41/43
摘要： PROBLEM TO BE SOLVED: To provide an oxynitride piezoelectric material which exhibits ferroelectricity and has good piezoelectric properties and to provide a method for producing the oxynitride piezoelectric material.
SOLUTION: The oxynitride piezoelectric material consists of the tetragonal perovskite-type oxynitride represented by general formula (1) (wherein: A is a bivalent element; B and B' are each a tetravalent element; x is 0.35-0.6; y is 0.35-0.6; z is 0.35-0.6; δ1 and δ2 are each a numerical value of -0.2 to 0.2; A is at least one selected from Ba, Sr and Ca; B and B' are each at least one selected from Ti, Zr, Hf, Si, Ge and Sn) and has the nitrogen atoms oriented in the c-axis direction.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：解决的问题：提供一种表现出铁电性并具有良好的压电性能的氧氮化物压电材料，并提供一种氧氮化物压电材料的制造方法。解决方案：氮氧化物压电材料由通式（1）表示的四方晶钙钛矿型氮氧化物组成：其中：A为二价元素; B和B'为四价元素; x为0.35-0.6; y 为0.35-0.6; z为0.35-0.6;δ1和δ2各自为-0.2至0.2的数值; A为选自Ba，Sr和Ca中的至少一种; B和B'分别为选自Ti ，Zr，Hf，Si，Ge和Sn），并且具有在c轴方向上取向的氮原子。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2010053024A Metal oxide and piezoelectric material 有权
标题翻译：金属氧化物和压电材料
公开(公告)号：JP2010053024A
公开(公告)日：2010-03-11
申请号：JP2009173542
申请日：2009-07-24
申请人： Canon Inc , Kyoto Univ , National Institute Of Advanced Industrial Science & Technology , Sophia School Corp , Tokyo Institute Of Technology , Tokyo Univ Of Science , Univ Of Yamanashi , キヤノン株式会社 , 国立大学法人京都大学 , 国立大学法人山梨大学 , 国立大学法人東京工業大学 , 学校法人上智学院 , 学校法人東京理科大学 , 独立行政法人産業技術総合研究所
发明人： KUBOTA JUN , MIURA KAORU , IFUKU TOSHIHIRO , HAYASHI JUNPEI , AZUMA MASAKI , SMIRNOVA OLGA ALEXANDROVNA , FUNAKUBO HIROSHI , UCHIDA HIROSHI , KUMADA NOBUHIRO , WADA TOMOSHI , IIJIMA TAKASHI , OKAMURA SOICHIRO
IPC分类号： C04B35/46 , C04B35/462 , H01L41/187 , H01L41/22 , H01L41/317 , H01L41/39
CPC分类号： H01L41/1878 , C04B35/2658 , C04B35/44 , C04B35/475 , C04B35/645 , C04B2235/3217 , C04B2235/3227 , C04B2235/3232 , C04B2235/3262 , C04B2235/3272 , C04B2235/3284 , C04B2235/3298 , C04B2235/441 , C04B2235/449 , C04B2235/76 , C04B2235/765 , C04B2235/768 , H01L41/318 , Y10T428/265
摘要： PROBLEM TO BE SOLVED: To provide a metal oxide having good piezoelectric properties, and to provide a Bi-based piezoelectric material having excellent performances as a piezoelectric body. SOLUTION: The metal oxide is composed of a perovskite-type oxide represented by the general formula (1). The piezoelectric material contains the metal oxide. In the general formula (1), A represents at least one kind of element containing at least Bi element and selected from trivalent metal elements at least including Bi element, M represents at least one kind of element selected from Fe, Al, Sc, Mn, Y, Ga, and Yb, x represents a numerical value satisfying 0.4≤x≤0.6, and y represents a numerical value satisfying 0.1≤y≤0.9. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供具有良好压电性能的金属氧化物，并提供作为压电体具有优异性能的Bi系压电材料。解决方案：金属氧化物由通式（1）表示的钙钛矿型氧化物构成。压电材料含有金属氧化物。在通式（1）中，A表示至少一种至少含有Bi元素的元素，并且选自至少包含Bi元素的三价金属元素，M表示选自Fe，Al，Sc，Mn中的至少一种元素，Y，Ga和Yb，x表示满足0.4≤x≤0.6的数值，y表示满足0.1≤y≤0.9的数值。版权所有（C）2010，JPO＆INPIT

3. 发明专利

JP2009256186A Piezoelectric material 有权
标题翻译：压电材料
公开(公告)号：JP2009256186A
公开(公告)日：2009-11-05
申请号：JP2009047136
申请日：2009-02-27
申请人： Canon Inc , Kyoto Univ , National Institute Of Advanced Industrial & Technology , Tokyo Institute Of Technology , Tokyo Univ Of Science , Univ Of Yamanashi , キヤノン株式会社 , 国立大学法人京都大学 , 国立大学法人山梨大学 , 国立大学法人東京工業大学 , 学校法人東京理科大学 , 独立行政法人産業技術総合研究所
发明人： HAYASHI JUNPEI , CHO SOI , IFUKU TOSHIHIRO , WADA TOMOSHI , YAMATO KEISUKE , KUMADA NOBUHIRO , AZUMA MASAKI , FUNAKUBO HIROSHI , IIJIMA TAKASHI , OKAMURA SOICHIRO
IPC分类号： C04B35/46 , C04B35/462 , H01L41/08 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/257 , H01L41/39
CPC分类号： H01L41/187 , C01G23/003 , C01G23/006 , C01G29/00 , C01P2002/34 , C01P2002/76 , C01P2004/20 , C01P2004/61 , C01P2004/62 , C01P2006/42 , C04B35/462 , C04B35/4682 , C04B35/475 , C04B35/499 , C04B35/547 , C04B2235/3206 , C04B2235/3215 , C04B2235/3224 , C04B2235/3227 , C04B2235/3255 , C04B2235/3284 , C04B2235/3298
摘要： PROBLEM TO BE SOLVED: To provide a lead-free piezoelectric material which is excellent in piezoelectric characteristics and temperature characteristics. SOLUTION: The piezoelectric material is composed of a perovskite-type composite oxide represented by general formula (1): in which A is a Bi element, A' is a rare earth element including La; B is at least one element selected from Ti, Zn, Sn and Zr; A'' is at least one element selected from Ba, Sr and Ca; B' is at least one element selected from divalent, trivalent, pentavalent, tetravalent, and hexavalent elements; and x is a value of 0.10 or more and 0.95 or less, y is a value of 10 or more and 0.5 or less, and z is a value of 0 or more and 0.7 or less, provided that x+y+z=1. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供压电特性和温度特性优异的无铅压电材料。解决方案：压电材料由通式（1）表示的钙钛矿型复合氧化物组成：其中A是Bi元素，A'是包括La的稀土元素; B是选自Ti，Zn，Sn和Zr中的至少一种元素; A“是选自Ba，Sr和Ca中的至少一种元素; B'是选自二价，三价，五价，四价和六价元素中的至少一种元素; x为0.10以上且0.95以下的值，y为10以上且0.5以下，z为0以上且0.7以下的值，但x + y + z = 1 。版权所有（C）2010，JPO＆INPIT

4. 发明专利

JP2010006688A Metal oxide, piezoelectric material and piezoelectric element 有权
标题翻译：金属氧化物，压电材料和压电元件
公开(公告)号：JP2010006688A
公开(公告)日：2010-01-14
申请号：JP2009122468
申请日：2009-05-20
申请人： Canon Inc , Kyoto Univ , National Institute Of Advanced Industrial & Technology , Tokyo Institute Of Technology , Tokyo Univ Of Science , Univ Of Yamanashi , キヤノン株式会社 , 国立大学法人京都大学 , 国立大学法人山梨大学 , 国立大学法人東京工業大学 , 学校法人東京理科大学 , 独立行政法人産業技術総合研究所
发明人： FURUTA TATSUO , MIURA KAORU , TAKEDA KENICHI , KUBOTA JUN , FUNAKUBO HIROSHI , AZUMA MASAKI , KUMADA NOBUHIRO , WADA TOMOSHI , IIJIMA TAKASHI , OKAMURA SOICHIRO
IPC分类号： C04B35/16 , C01B33/24 , C01G17/00 , C01G23/00 , H01L21/8246 , H01L27/105 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/316 , H01L41/319 , H01L41/39 , H03H9/17
CPC分类号： C04B35/645 , C01G23/002 , C01P2006/40 , C04B35/01 , C04B35/16 , C04B35/468 , C04B35/4682 , C04B2235/3201 , C04B2235/3215 , C04B2235/3232 , C04B2235/3287 , C04B2235/3418 , C04B2235/444 , C04B2235/761 , C04B2235/765 , C04B2235/768 , H01L41/1871
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric material using neither lead nor alkali metals, and having a crystal structure stable in a wide temperature range together with properties high in insulation and piezoelectricity, and to provide a piezoelectric element using the same. SOLUTION: The piezoelectric material includes an oxide having a tetragonal crystal structure, and expressed by the formula: Ba(Si x Ge y Ti z )O 3 (wherein 0≤x≤1, 0≤y≤1, 0≤z≤0.5 and x+y+z=1). In the piezoelectric element sandwiching the piezoelectric material between a pair of electrodes, at least one of the electrodes is SrRuO 3 or Ni. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种既不使用铅也不使用碱金属，并且具有在宽温度范围内稳定的晶体结构以及绝缘性和压电性优异的压电材料，并提供使用该压电材料的压电元件。解决方案：压电材料包括具有四方晶系结构的氧化物，由下式表示：Ba（Si）（其中0≤x≤1,0≤y≤1,0≤z≤0.5且x + y + z = 1）。在将压电材料夹在一对电极之间的压电元件中，至少一个电极是SrRuO 3 SB 3或Ni。版权所有（C）2010，JPO＆INPIT

5. 发明专利

JP2010053028A Metal oxide and piezoelectric material 有权
标题翻译：金属氧化物和压电材料
公开(公告)号：JP2010053028A
公开(公告)日：2010-03-11
申请号：JP2009175789
申请日：2009-07-28
申请人： Canon Inc , National Institute Of Advanced Industrial Science & Technology , Tokyo Institute Of Technology , Univ Of Yamanashi , キヤノン株式会社 , 国立大学法人山梨大学 , 国立大学法人東京工業大学 , 独立行政法人産業技術総合研究所
发明人： WATANABE TAKAYUKI , MATSUDA KATAYOSHI , SAITO HIROSHI , FUNAKUBO HIROSHI , KUMADA NOBUHIRO , IIJIMA TAKASHI , LEE BONG-YEON
IPC分类号： C04B35/00 , C23C14/08 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/316 , H01L41/39
CPC分类号： H01L41/187 , C04B35/495 , C04B2235/3208 , C04B2235/3213 , C04B2235/3215 , C04B2235/3289 , C04B2235/3298 , C04B2235/3852 , C04B2235/72 , C04B2235/76 , C04B2235/761 , C04B2235/77 , C04B2235/785
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric material which includes a compound free of lead and alkali metal and has a good piezoelectric property.
SOLUTION: In the piezoelectric material having a good piezoelectric property, tungsten bronze structure oxides being free of lead and alkali metal and represented by A
x B
10 O
30 and A'
x' B'
10 O
30 are combined to form a morphotropic phase boundary. The A
x B
10 O
30 is Ba
4 Bi
2/3 Nb
10 O
30 , and the A'
x' B'
10 O
30 is Sr
3 Ba
2 Nb
10 O
30 .
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：解决的问题：提供一种包含不含铅和碱金属的化合物并具有良好的压电性能的压电材料。解决方案：在具有良好压电性能的压电材料中，青铜结构氧化物不含铅和碱金属并由A SB SB 10 > 30 和A' x'B' 10 30 组合形成一个明确的相界。另一方面，A X 10 30 是Nb SB 30 SB 30 O SB SB 30 O SB SB 30 O SB SB 30 O SB SB 30 30 SB 30 O SB SB 30 是Sr <3>

6. 发明专利

JP2010183067A Piezoelectric material and piezoelectric element 有权
标题翻译：压电材料和压电元件
公开(公告)号：JP2010183067A
公开(公告)日：2010-08-19
申请号：JP2009293305
申请日：2009-12-24
申请人： Canon Inc , National Institute Of Advanced Industrial Science & Technology , Sophia School Corp , Tokyo Institute Of Technology , キヤノン株式会社 , 国立大学法人東京工業大学 , 学校法人上智学院 , 独立行政法人産業技術総合研究所
发明人： KUBOTA JUN , IFUKU TOSHIHIRO , FUNAKUBO HIROSHI , YAZAWA KEISUKE , UCHIDA HIROSHI , IIJIMA TAKASHI , LEE BONG-YEON
IPC分类号： H01L41/18 , C04B35/00 , C23C16/40 , C30B29/22 , H01L21/8246 , H01L27/105 , H01L41/08 , H01L41/09 , H01L41/187 , H01L41/22 , H01L41/316 , H01L41/39
CPC分类号： C04B35/111 , C04B35/01 , C04B2235/3217 , C04B2235/3225 , C04B2235/3232 , C04B2235/3262 , C04B2235/327 , C04B2235/3284 , C04B2235/3298 , H01L41/1878 , H01L41/316 , Y10S428/938 , Y10T428/265
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric material superior in piezoelectricity, having a monoclinic structure in which the rotation of a polarization axis becomes sensitive to an external electric field, in comparison with other crystal system. SOLUTION: The piezoelectric material includes a perovskite-type composite oxide represented by formula (1): A (Zn x Ti (1-x) ) y M (1-y) O 3 . The crystal system of the perovskite-type composite oxide includes at least the monoclinic structure. Preferably, the crystal system of the perovskite-type composite oxide is a mixture having the monoclinic structure and a rhombohedral structure, or a mixture having the monoclinic structure and a tetragonal structure. In the formula (1), A represents a Bi element, and M represents at least one element selected from Fe, Al, Sc, Mn, Y, Ga, and Yb. The x represents a numerical value of 0.4≤x≤0.6, and y represents a numerical value of 0.17≤y≤0.60. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：与其他晶体系相比，提供压电性优异的压电材料，其具有偏光轴的旋转对外部电场敏感的单斜晶体结构。＆lt; P＆gt;解决方案：压电材料包括由式（1）表示的钙钛矿型复合氧化物：A（Zn x Ti（SB）（1-x） ÿ中号（1-y）的 0 3 。钙钛矿型复合氧化物的晶体系至少包括单斜晶系。优选地，钙钛矿型复合氧化物的晶体体系是具有单斜晶系结构和菱面体结构的混合物，或具有单斜晶系结构和四方结构的混合物。在式（1）中，A表示Bi元素，M表示选自Fe，Al，Sc，Mn，Y，Ga和Yb中的至少一种元素。 x表示数值0.4≤x≤0.6，y表示数值为0.17≤y≤0.60。版权所有（C）2010，JPO＆INPIT

7. 发明专利

JP2011093788A Ferroelectric thin film 有权
标题翻译：电磁薄膜
公开(公告)号：JP2011093788A
公开(公告)日：2011-05-12
申请号：JP2010218892
申请日：2010-09-29
申请人： Canon Inc , Kyoto Univ , Tokyo Institute Of Technology , キヤノン株式会社 , 国立大学法人京都大学 , 国立大学法人東京工業大学
发明人： SHIMADA MIKIO , AEBA TOSHIAKI , IFUKU TOSHIHIRO , HAYASHI JUNPEI , KUBOTA JUN , FUNAKUBO HIROSHI , SHIMAKAWA YUICHI , AZUMA MASAKI , NAKAMURA YOSHITAKA
IPC分类号： C01G51/00 , B82Y30/00 , B82Y99/00 , C01G49/06 , H01B3/00 , H01B3/12 , H01L21/8246 , H01L27/105 , H01L41/18 , H01L41/187 , H01L41/39
CPC分类号： H01L41/1878 , H01L28/55 , H01L41/0805 , H01L41/316
摘要： PROBLEM TO BE SOLVED: To provide a ferroelectric thin film formed on a substrate and having an amount of remanent polarization increased in its entirety. SOLUTION: The ferroelectric thin film includes a perovskite-type metal oxide formed on a substrate. The ferroelectric thin film further includes a columnar structure group formed of multiple columns each formed of a spinel-type metal oxide. The columnar structure group is in a state of standing in a direction perpendicular to the surface of the substrate, or in a state of slanting at a slant angle in a range of -10 or more to +10° or less with respect to the perpendicular direction. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供形成在基板上并且具有全部剩余极化量的铁电薄膜。铁电薄膜包括在基板上形成的钙钛矿型金属氧化物。铁电薄膜还包括由尖晶石型金属氧化物形成的多个柱形成的柱状结构体。柱状结构体处于垂直于基板的表面的方向上的状态，或处于相对于垂直方向为-10°〜+ 10°以下的倾斜角度倾斜的状态方向。版权所有（C）2011，JPO＆INPIT

8. 发明专利

JP2012084828A Piezoelectric material, piezoelectric element, liquid discharge head and ultrasonic motor 有权
标题翻译：压电材料，压电元件，液体放电头和超声波电机
公开(公告)号：JP2012084828A
公开(公告)日：2012-04-26
申请号：JP2010292850
申请日：2010-12-28
申请人： Canon Inc , Sophia School Corp , Tokyo Institute Of Technology , キヤノン株式会社 , 国立大学法人東京工業大学 , 学校法人上智学院
发明人： KUBOTA JUN , MIURA KAORU , YABUTA HISATO , WATANABE TAKAYUKI , HAYASHI JUNPEI , FUNAKUBO HIROSHI , YAMADA TOMOAKI , YASUI SHINTARO , YAZAWA KEISUKE , OSADA JUNICHI , UCHIDA HIROSHI
IPC分类号： H01L41/187 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , C04B35/00 , C04B35/462 , C23C14/08 , C23C16/40 , H01L41/09 , H01L41/18 , H01L41/39 , H02N2/00
CPC分类号： H01L41/18 , C04B35/01 , C04B35/016 , C04B35/2625 , C04B35/44 , C04B35/453 , C04B35/475 , C04B35/6325 , C04B2235/3206 , C04B2235/3217 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/3232 , C04B2235/3267 , C04B2235/3272 , C04B2235/3284 , C04B2235/3286 , C04B2235/3298 , C04B2235/449 , C04B2235/76 , C04B2235/765 , C04B2235/768 , C04B2235/787 , H01L41/0805 , H01L41/0973 , H01L41/1878 , H01L41/316 , H01L41/318 , H02N2/106 , H02N2/163
摘要： PROBLEM TO BE SOLVED: To provide a Bi-based piezoelectric material with excellent piezoelectric characteristics.SOLUTION: A piezoelectric material comprises a perovskite-type metal oxide represented by the following general formula (1). (In the formula, A represents not less than one element including at least Bi element selected from Bi element and trivalent metal elements. M represents at least one element of Fe, Al, Sc, Mn, Y, Ga, and Yb, 0.9≤x≤1.25, 0.4≤j≤0.6, 0.4≤k≤0.6, 0.09≤l≤0.49, 0.19≤m≤0.64, 0.13≤n≤0.48, and l+m+n=1.)
摘要翻译：解决的问题：提供具有优异的压电特性的Bi系压电材料。解决方案：压电材料包括由以下通式（1）表示的钙钛矿型金属氧化物。（式中，A表示不低于选自Bi元素和三价金属元素中的至少Bi元素的1种元素，M表示Fe，Al，Sc，Mn，Y，Ga和Yb中的至少一种元素，0.9≤ x≤1.25,0.4≤j≤0.6,0.4≤k≤0.6,0.09≤l≤0.49,0.19≤m≤0.64,0.13≤n≤0.48，l + m + n = 1）。权利要求（（ C）2012，JPO＆INPIT

9. 发明专利

JP2008277783A Epitaxial film, piezoelectric element, ferroelectric element, manufacturing methods of them, and liquid discharge head 审中-公开
标题翻译：外延膜，压电元件，电磁元件，其制造方法和液体放电头
公开(公告)号：JP2008277783A
公开(公告)日：2008-11-13
申请号：JP2008077627
申请日：2008-03-25
申请人： Canon Inc , Tokyo Institute Of Technology , キヤノン株式会社 , 国立大学法人東京工業大学
发明人： HAYASHI JUNPEI , MATSUDA KATAYOSHI , FUKUI TETSURO , FUNAKUBO HIROSHI
IPC分类号： H01L21/316 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/16 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/316
CPC分类号： H01L41/0973 , H01L41/0815 , H01L41/319
摘要： PROBLEM TO BE SOLVED: To provide an epitaxial film having a uniform composition, superior crystal orientation and a large area, and its manufacturing method, to provide a piezoelectric element and a ferroelectric element having a single orientational crystal structure, superior characteristics and large areas by using the epitaxial film having superior lattice matching as a buffer layer to a Si substrate, and their manufacturing methods, and a large liquid discharge head having superior liquid discharging performance.
SOLUTION: The Si substrate having an SiO
2 layer with a film thickness of 1.0 nm or larger to 10 nm or smaller on a surface is heated by the use of a metal target represented by the following composition formula (1): yA(1-y)B (in which A is element including rare earth elements including Y and Sc, B is Zr, and y is a numeric value of 0.03 or larger to 0.20 or smaller). On the substrate, the epitaxial film represented by the following composition formula (2): xA
2 O
3 -(1-x)BO
2 (in which A and B are the same metal elements as A and B of the formula (1), and x is a numeric value of 0.010 or larger to 0.035 or smaller) is formed.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供具有均匀组成，优异的晶体取向和大面积的外延膜及其制造方法，提供具有单一取向晶体结构的压电元件和铁电元件，具有优异的特性和通过使用具有优良晶格匹配的外延膜作为Si衬底的缓冲层的大面积及其制造方法以及具有优异的液体排放性能的大型液体排出头。解决方案：通过使用由以下的金属靶加热具有表面上的膜厚度为1.0nm以上至10nm以下的SiO 2 SB层的Si衬底组成式（1）：yA（1-y）B（其中A是包括Y和Sc的稀土元素的元素，B是Zr，y是0.03以上且0.20以下的数值）。在基板上，由以下组成式（2）表示的外延膜：xA 2 - （1-x）BO 2 （其中A和B是与式（1）的A和B相同的金属元素，x是0.010或更大至0.035或更小的数值）。版权所有（C）2009，JPO＆INPIT

10. 发明专利

JP2008024532A Piezoelectric body, piezoelectric element, liquid discharge head using piezoelectric element and liquid discharge apparatus 有权
标题翻译：压电元件，压电元件，使用压电元件和液体放电装置的液体放电头
公开(公告)号：JP2008024532A
公开(公告)日：2008-02-07
申请号：JP2006196114
申请日：2006-07-18
申请人： Canon Inc , Tokyo Institute Of Technology , キヤノン株式会社 , 国立大学法人東京工業大学
发明人： IFUKU TOSHIHIRO , TAKEDA KENICHI , FUKUI TETSURO , FUNAKUBO HIROSHI
IPC分类号： C04B35/46 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/16 , C04B35/472 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/29 , H01L41/316
CPC分类号： B41J2/161 , B41J2/1646 , B41J2202/03 , H01L41/0805 , H01L41/0973 , H01L41/1875 , H01L41/316
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric body and a piezoelectric element having high piezoelectricity which is suitable as the piezoelectric body for a liquid discharge head. SOLUTION: The piezoelectric body comprises ABO 3 , wherein a main component of A is Pb, and a main component of B is a perovskite structured oxide containing 3 kinds of elements among of Ti and 2 kinds of elements Nb, Mg, Zn, Sc, Cd, Ni, Mn, Co, Yb, In and Fe and is formed from uniaxial orientation or single crystal at least having a-domain and c-domain of tetragonal system. COPYRIGHT: (C)2008,JPO&INPIT

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