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    • 9. 发明专利
    • Electron microscope and method for observing specimen
    • 电子显微镜和观察样品的方法
    • JP2013225395A
    • 2013-10-31
    • JP2012096464
    • 2012-04-20
    • Canon Incキヤノン株式会社
    • OSHIMA KANAKOSHIMADA MIKIOKOYAMA SHINYAIFUKU TOSHIHIROKUBOTA JUN
    • H01J37/28H01J37/20
    • PROBLEM TO BE SOLVED: To provide an electron microscope that eliminates an influence of thermal electrons and can obtain a clear specimen image even though a temperature of a specimen and a peripheral part thereof is 1,100°C or higher, and to provide a method for observing the specimen.SOLUTION: The electron microscope comprises: a specimen stage for mounting at least a specimen thereon; an electron detector for detecting detection electrons generated by irradiating the specimen with an electron beam; and an electron accelerating device that is provided between the specimen stage and the electron detector, and accelerates the detection electrons toward a direction of the electron detector. The electron microscope further comprises an electron shielding sheet that is provided between the specimen stage and the electron accelerating device, has a melting point of 1,100°C or higher and a specific heat of 0.1 cal/g K or less, and has a through hole for passing the detection electrons therethrough.
    • 要解决的问题:提供一种消除热电子影响的电子显微镜,即使试样及其周边部分的温度为1100℃以上,也可以获得清晰的标本图像,并提供观察方法 电子显微镜包括:用于在其上至少安装样品的样品台; 电子检测器,用于检测用电子束照射样本产生的检测电子; 以及电子加速装置,其设置在试样台和电子检测器之间,并且将检测电子朝向电子检测器的方向加速。 电子显微镜还包括设置在样品台和电子加速装置之间的电子屏蔽片,其熔点为1100℃以上,比热为0.1cal / gKK以下,具有通孔 用于使检测电子通过其中。