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1. 发明专利

JP2008263158A Piezoelectric element, and liquid discharge head 有权
标题翻译：压电元件和液体放电头
公开(公告)号：JP2008263158A
公开(公告)日：2008-10-30
申请号：JP2007240941
申请日：2007-09-18
申请人： Canon Inc , Tokyo Institute Of Technology , キヤノン株式会社 , 国立大学法人東京工業大学
发明人： AOKI KATSUMI , TAKEDA KENICHI , FUKUI TETSURO , FUNAKUBO HIROSHI , YASUI SHINTARO , NISHIDA KEN
IPC分类号： H01L41/09 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/16 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/316 , H01L41/39
CPC分类号： B41J2/14233 , B41J2202/03 , C01G29/00 , C01G37/033 , C01G49/009 , C01G51/006 , C01G51/40 , C01P2002/34 , C01P2002/76 , C01P2004/80 , C01P2006/40 , H01L41/0815 , H01L41/1878 , H01L41/316
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric element which uses a non-lead piezoelectric body excellent in a piezoelectric characteristic, and to provide a liquid discharge head having the piezoelectric element body.
SOLUTION: The piezoelectric element body 10 is located on a substrate 15 and has the piezoelectric body 7 and a pair of electrodes 6, 8 adjacent to the piezoelectric body. The piezoelectric body 7 is composed of an ABO
3 type perovskite oxide that an A site atom is composed of Bi and a B site atom is composed of at least two kinds of atoms, and in which at least two crystal systems among tetragonal, rhombohedral, pseudo-cubic, orthorohmbic, and monoclinic systems are included.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种使用压电特性优异的非铅压电体的压电元件，并提供具有压电元件体的液体排出头。解决方案：压电元件体10位于基板15上，并且具有压电体7和邻近压电体的一对电极6,8。压电体7由A位原子由Bi组成的ABO 3 SBO型钙钛矿氧化物构成，B位原子由至少两种原子构成，其中，至少2种包括四方晶，菱方，假立方，正交和单斜晶系的晶体体系。版权所有（C）2009，JPO＆INPIT

2. 发明专利

JP2007273976A Piezoelectric element, liquid discharge head using same, and optical element 有权
标题翻译：压电元件，使用它的液体放电头和光学元件
公开(公告)号：JP2007273976A
公开(公告)日：2007-10-18
申请号：JP2007062595
申请日：2007-03-12
申请人： Canon Inc , Tokyo Institute Of Technology , キヤノン株式会社 , 国立大学法人東京工業大学
发明人： FUKUI TETSURO , TAKEDA KENICHI , AOKI KATSUMI , IFUKU TOSHIHIRO , MATSUDA KATAYOSHI , FUNAKUBO HIROSHI , YOKOYAMA SHINTARO , KATODA TAKASHI , NISHIDA KEN
IPC分类号： H01L41/09 , H01L41/18
摘要： PROBLEM TO BE SOLVED: To provide an optical element having excellent transparency and characteristics as a light modulation element and a piezoelectric element with precision and excellent reproducibility as a fine element, such as a MEMS etc. SOLUTION: When forming an optical element provided with a ferroelectric film including different metals between a pair of electrodes, or a piezoelectric element provided with a piezoelectric film including different metals between a pair of electrodes, a ferroelectric film or a piezoelectric film is used, which has no layer interface, the crystal phase of which has at least two crystal phases among the tetragonal system, rhombohedral system, pseudocubic system, orthorhombic system, and monoclinic system, and which uses a part at which each ratio of the different crystal phases changes gradually in the direction of film thickness for the part at which the variations of the metal composition are within ±2%. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供作为光调制元件和压电元件具有优异的透明度和特性的光学元件，其具有作为诸如MEMS等的微细元素的精确和优异的再现性。解决方案：当形成设置有在一对电极之间具有不同金属的铁电体膜的光学元件，或者在一对电极之间设置具有不同金属的压电膜的压电元件，强电介质膜或压电膜，其不具有层界面其晶相在四方晶系，菱方体系，假立方体系，斜方晶系和单斜晶系中至少具有两个晶相，并且其中使用不同晶相的每个比例逐渐变化的部分金属组合物的变化量在±2％以内的部分的膜厚度。版权所有（C）2008，JPO＆INPIT

3. 发明专利

JP2007142385A Method for film deposition and oxide thin film element 审中-公开
标题翻译：薄膜沉积方法和氧化物薄膜元件
公开(公告)号：JP2007142385A
公开(公告)日：2007-06-07
申请号：JP2006286094
申请日：2006-10-20
申请人： Canon Inc , Tokyo Institute Of Technology , キヤノン株式会社 , 国立大学法人東京工業大学
发明人： FUKUI TETSURO , TAKEDA KENICHI , MATSUDA KATAYOSHI , FUNAKUBO HIROSHI , YOKOYAMA SHINTARO
IPC分类号： H01L21/316 , C23C16/40 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/316 , H01L41/317 , H01L41/318 , H01L41/39
CPC分类号： C23C18/1216 , C23C18/1254
摘要： PROBLEM TO BE SOLVED: To provide a method for film deposition capable of obtaining a high quality perovskite type oxide thin film, and to provide an oxide thin film element having a piezoelectric element formed of a thin film formed by this method. SOLUTION: A method for film deposition is provided, for depositing on a substrate a perovskite type oxide thin film in which at least one site of site A and site B is composed of a plurality of kinds of elements, and the plurality of kinds of elements of at least one site have an element of different valency in this site, wherein the elements belonging to the site A and site B are classified into a plurality of groups so that the element of different valency belongs to the same group, and a raw material containing the element belonging to this group is supplied onto the substrate for each group in a separate step, respectively. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够获得高质量钙钛矿型氧化物薄膜的成膜方法，并提供具有由通过该方法形成的薄膜形成的压电元件的氧化物薄膜元件。提供了一种薄膜沉积方法，用于在基板上沉积钙钛矿型氧化物薄膜，其中至少一个位点A和位点B由多种元素组成，并且多个至少一个位点的元素的种类在该位点具有不同价态的元素，其中属于位点A和位点B的元素被分类成多个组，使得不同价位的元素属于同一组，并且将分别含有属于该组的元素的原料分别供给到各组的基板上。版权所有（C）2007，JPO＆INPIT

4. 发明专利

JP2008277783A Epitaxial film, piezoelectric element, ferroelectric element, manufacturing methods of them, and liquid discharge head 审中-公开
标题翻译：外延膜，压电元件，电磁元件，其制造方法和液体放电头
公开(公告)号：JP2008277783A
公开(公告)日：2008-11-13
申请号：JP2008077627
申请日：2008-03-25
申请人： Canon Inc , Tokyo Institute Of Technology , キヤノン株式会社 , 国立大学法人東京工業大学
发明人： HAYASHI JUNPEI , MATSUDA KATAYOSHI , FUKUI TETSURO , FUNAKUBO HIROSHI
IPC分类号： H01L21/316 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/16 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/316
CPC分类号： H01L41/0973 , H01L41/0815 , H01L41/319
摘要： PROBLEM TO BE SOLVED: To provide an epitaxial film having a uniform composition, superior crystal orientation and a large area, and its manufacturing method, to provide a piezoelectric element and a ferroelectric element having a single orientational crystal structure, superior characteristics and large areas by using the epitaxial film having superior lattice matching as a buffer layer to a Si substrate, and their manufacturing methods, and a large liquid discharge head having superior liquid discharging performance.
SOLUTION: The Si substrate having an SiO
2 layer with a film thickness of 1.0 nm or larger to 10 nm or smaller on a surface is heated by the use of a metal target represented by the following composition formula (1): yA(1-y)B (in which A is element including rare earth elements including Y and Sc, B is Zr, and y is a numeric value of 0.03 or larger to 0.20 or smaller). On the substrate, the epitaxial film represented by the following composition formula (2): xA
2 O
3 -(1-x)BO
2 (in which A and B are the same metal elements as A and B of the formula (1), and x is a numeric value of 0.010 or larger to 0.035 or smaller) is formed.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供具有均匀组成，优异的晶体取向和大面积的外延膜及其制造方法，提供具有单一取向晶体结构的压电元件和铁电元件，具有优异的特性和通过使用具有优良晶格匹配的外延膜作为Si衬底的缓冲层的大面积及其制造方法以及具有优异的液体排放性能的大型液体排出头。解决方案：通过使用由以下的金属靶加热具有表面上的膜厚度为1.0nm以上至10nm以下的SiO 2 SB层的Si衬底组成式（1）：yA（1-y）B（其中A是包括Y和Sc的稀土元素的元素，B是Zr，y是0.03以上且0.20以下的数值）。在基板上，由以下组成式（2）表示的外延膜：xA 2 - （1-x）BO 2 （其中A和B是与式（1）的A和B相同的金属元素，x是0.010或更大至0.035或更小的数值）。版权所有（C）2009，JPO＆INPIT

5. 发明专利

JP2008024532A Piezoelectric body, piezoelectric element, liquid discharge head using piezoelectric element and liquid discharge apparatus 有权
标题翻译：压电元件，压电元件，使用压电元件和液体放电装置的液体放电头
公开(公告)号：JP2008024532A
公开(公告)日：2008-02-07
申请号：JP2006196114
申请日：2006-07-18
申请人： Canon Inc , Tokyo Institute Of Technology , キヤノン株式会社 , 国立大学法人東京工業大学
发明人： IFUKU TOSHIHIRO , TAKEDA KENICHI , FUKUI TETSURO , FUNAKUBO HIROSHI
IPC分类号： C04B35/46 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/16 , C04B35/472 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/29 , H01L41/316
CPC分类号： B41J2/161 , B41J2/1646 , B41J2202/03 , H01L41/0805 , H01L41/0973 , H01L41/1875 , H01L41/316
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric body and a piezoelectric element having high piezoelectricity which is suitable as the piezoelectric body for a liquid discharge head. SOLUTION: The piezoelectric body comprises ABO 3 , wherein a main component of A is Pb, and a main component of B is a perovskite structured oxide containing 3 kinds of elements among of Ti and 2 kinds of elements Nb, Mg, Zn, Sc, Cd, Ni, Mn, Co, Yb, In and Fe and is formed from uniaxial orientation or single crystal at least having a-domain and c-domain of tetragonal system. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：解决的问题：提供一种压电体和具有高压电性的压电元件，其适用于液体排出头的压电体。解决方案：压电体包括ABO 3 ，其中A的主要成分为Pb，B的主要成分为Ti和2种中含有3种元素的钙钛矿结构氧化物元素Nb，Mg，Zn，Sc，Cd，Ni，Mn，Co，Yb，In和Fe，并且由单轴取向或至少具有四方晶系的畴结构和c域的单晶形成。版权所有（C）2008，JPO＆INPIT

6. 发明专利

JP2007138292A Method for forming perovskite type oxide film, piezoelectric element, liquid discharge head and liquid discharge device 审中-公开
标题翻译：成型氧化铝膜，压电元件，液体排放头和液体排出装置的方法
公开(公告)号：JP2007138292A
公开(公告)日：2007-06-07
申请号：JP2006286106
申请日：2006-10-20
申请人： Canon Inc , Tokyo Institute Of Technology , キヤノン株式会社 , 国立大学法人東京工業大学
发明人： FUKUI TETSURO , TAKEDA KENICHI , MATSUDA KATAYOSHI , FUNAKUBO HIROSHI , YOKOYAMA SHINTARO
IPC分类号： C23C16/40 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , B41J2/16 , C04B35/46 , C04B35/472 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/316 , H01L41/317 , H01L41/318 , H01L41/39
摘要： PROBLEM TO BE SOLVED: To provide a film-forming method for obtaining a perovskite type oxide film of high quality; a piezoelectric element having a piezoelectric member provided with a thin film formed with the method; a liquid discharge head having the piezoelectric element; and a liquid discharge device having the liquid discharge head. SOLUTION: The perovskite type oxide film has a composition expressed by (A1 x , A2 y , A3 z )(B1 j , B2 k , B3 l , B4 m , B5 n )O 3 on a substrate. The above elements of A1 to A3 and B1 to B5 are divided into a plurality of groups. The film-forming method comprises a plurality of steps of individually supplying the respective raw materials containing the elements, which belong to the divided groups, onto the substrate. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于获得高质量的钙钛矿型氧化膜的成膜方法; 压电元件，其具有设置有利用该方法形成的薄膜的压电元件; 具有压电元件的液体排出头; 以及具有液体排出头的液体排出装置。解决方案：钙钛矿型氧化物膜具有由（A1 x ，A2 y ，A3 z ）表示的组成（B1 3 。 A1〜A3和B1〜B5的上述要素分为多组。成膜方法包括将包含属于分割组的元素的各原料分别供给到基板上的多个步骤。版权所有（C）2007，JPO＆INPIT

7. 发明专利

JP2008098627A Piezoelectric element, and liquid jet head and ultrasonic motor using the piezoelectric element 有权
标题翻译：压电元件和液体喷射头和超声波电机使用压电元件
公开(公告)号：JP2008098627A
公开(公告)日：2008-04-24
申请号：JP2007240815
申请日：2007-09-18
申请人： Canon Inc , Tokyo Institute Of Technology , キヤノン株式会社 , 国立大学法人東京工業大学
发明人： AOKI KATSUMI , TAKEDA KENICHI , FUKUI TETSURO , FUNAKUBO HIROSHI
IPC分类号： H01L41/09 , B41J2/045 , B41J2/055 , H01L41/187 , H02N2/00
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric element that uses a nonlead-based piezoelectric body having superior piezoelectric characteristics, and to provide a liquid jet head and an ultrasonic motor that use the piezoelectric element. SOLUTION: The piezoelectric element has, on the substrate, a piezoelectric body and a pair of electrodes which come into contact with the piezoelectric body, wherein the piezoelectric body comprises a perovskite-type oxide represented by Formula (1): (Bi, Ba)(M, Ti)O 3 , where M represents an atom of one element, or two atoms or more of a combination of the atoms selected from among a group of Mn, Cr, Cu, Sc, In, Ga, Yb, Al, Mg, Zn, Co, Zr, Sn, Nb, Ta, and W. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种使用具有优良压电特性的非铅基压电体的压电元件，并提供使用压电元件的液体喷射头和超声波马达。解决方案：压电元件在基板上具有与压电体接触的压电体和一对电极，其中压电体包括由式（1）表示的钙钛矿型氧化物：（Bi ，Ba）（M，Ti）O 3，其中M表示一个元素的原子，或两个或更多个选自Mn，Cr，Cu， Sc，In，Ga，Yb，Al，Mg，Zn，Co，Zr，Sn，Nb，Ta和W.版权所有（C）2008，JPO＆INPIT

8. 发明专利

JP2007096248A Piezoelectric device, liquid delivery head and liquid delivery device 有权
标题翻译：压电装置，液体输送头和液体输送装置
公开(公告)号：JP2007096248A
公开(公告)日：2007-04-12
申请号：JP2006007529
申请日：2006-01-16
申请人： Canon Inc , Tokyo Institute Of Technology , キヤノン株式会社 , 国立大学法人東京工業大学
发明人： IFUKU TOSHIHIRO , TAKEDA KENICHI , FUKUI TETSURO , FUNAKUBO HIROSHI , YOKOYAMA SHINTARO , KIN YASUHIRO , NAKAGI HIROSHI , UENO RISAKO , OKAMOTO SHOJI
IPC分类号： H01L41/09 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , B41J2/15 , B41J2/16 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/39 , H02N2/00
CPC分类号： B41J2/161 , B41J2/1642 , B41J2/1646 , H01L41/0478 , H01L41/0815 , H01L41/0973 , H01L41/1876 , H01L41/313 , H01L41/316 , H01L41/319
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric device, a liquid delivery head, and a liquid delivery device that are of high piezoelectric characteristics and are excellent in durability.
SOLUTION: A piezoelectric device is employed comprising a main component of Pb(Zr, Ti)O
3 with an a-domain and a c-domain of tetragon, and a pair of electrodes connected to the piezoelectric film. However, if the piezoelectric film is formed on a substrate and Zr/(Zr+Ti) is over 0.4 and than 0.7, a kind of piezoelectric films is used where the volume percentage of the c-domain to the sum of the a-domain and the c-domain is 20 to 60%, or at least part of the a-domain and at least part of the c-domain are in a mirrored image of twin crystal where (N0N) surfaces (N is an integer except 0) are of twin planes. Or, a film is employed where ratio of the axial length 001/the axial length 100 of the axial length 001 and the axial length 100 each configuring the a-domain and the c-domain is 1.004 or more and 1.040 or less.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供压电特性高且耐久性优异的压电装置，液体输送头和液体输送装置。解决方案：采用压电器件，其包括具有四边形的a域和c域的Pb（Zr，Ti）O 3 SB的主要成分，以及一对电极连接到压电薄膜。然而，如果在基板上形成压电膜，并且Zr /（Zr + Ti）超过0.4并且超过0.7，则使用一种压电膜，其中c域的体积百分比与a域的和并且c域为20〜60％，或至少部分a域和c结构域的至少一部分为双晶晶体的镜像，其中（N0N）面（N为0以外的整数）是双飞机。或者，使用轴向长度001的轴向长度100 /轴向长度100与构成a域和c域的轴向长度100的比为1.004以上且1.040以下的膜。版权所有（C）2007，JPO＆INPIT

9. 发明专利

JP2007084424A Perovskite type oxide, piezoelectric element, liquid discharge head and liquid discharge apparatus using the same, and method of producing perovskite type oxide 有权
标题翻译： PEROVSKITE型氧化物，压电元件，使用其的液体排出头和液体排出装置以及生产PEROVSKITE型氧化物的方法
公开(公告)号：JP2007084424A
公开(公告)日：2007-04-05
申请号：JP2006227005
申请日：2006-08-23
申请人： Canon Inc , Tokyo Institute Of Technology , キヤノン株式会社 , 国立大学法人東京工業大学
发明人： MATSUDA KATAYOSHI , TAKEDA KENICHI , FUKUI TETSURO , IFUKU TOSHIHIRO , AOKI KATSUMI , FUNAKUBO HIROSHI , YOKOYAMA SHINTARO
IPC分类号： C30B29/32 , C23C14/08 , C23C14/34 , C30B23/06 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/316 , H01L41/39
摘要： PROBLEM TO BE SOLVED: To obtain a perovskite type oxide having high uniformity, excellent piezoelectric characteristics, high adhesiveness, excellent durability and having high strength even in a thin film, and also to form the perovskite type oxide having a large area with ease and simplicity. SOLUTION: There is provided a perovskite type oxide of a single crystal structure or a uniaxially-oriented crystal structure represented by ABO 3 where a site A includes Pb as a main component and a site B includes a plurality of elements. The perovskite type oxide includes a plurality of crystal phases selected from the group consisting of tetragonal, rhombohedral, orthorhombic, cubic, pseudo-cubic and monoclinic, and the plurality of crystal phases are oriented in the direction of . COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题为了获得均匀性高，压电特性优异，粘合性高，耐久性优异，即使在薄膜中也具有高强度的钙钛矿型氧化物，并且还形成具有大面积的钙钛矿型氧化物轻松简单。解决方案：提供由ABO 3 表示的单晶结构的钙钛矿型氧化物或单轴取向晶体结构，其中A区包括Pb作为主要成分，B位包括多个元素。钙钛矿型氧化物包括选自正方晶，菱方，正交，立方，假立方和单斜晶的多个结晶相，多个结晶相沿<100°的方向取向。版权所有（C）2007，JPO＆INPIT

10. 发明专利

JP2007276151A Inkjet printer head 审中-公开
标题翻译： INKJET打印机头
公开(公告)号：JP2007276151A
公开(公告)日：2007-10-25
申请号：JP2006101995
申请日：2006-04-03
申请人： Canon Inc , キヤノン株式会社
发明人： AOTO HIROSHI , IFUKU TOSHIHIRO , MATSUDA KATAYOSHI , TAKEDA KENICHI , FUKUI TETSURO
IPC分类号： B41J2/045 , B41J2/055
摘要： PROBLEM TO BE SOLVED: To provide an inkjet printer head of high density nozzle arrangement in which the problems of decreasing in delivering efficiency, crosstalk and the like are improved, and to provide an inkjet head having no problem of durability such as occurrence of crack even when delivering is repeated.
SOLUTION: In the inkjet head having a plurality of compression chambers 3, nozzles 10 and a piezoelectric/electrostrictive actuator 7, a wall forming a vibration region 8 out of the walls of the compression chamber 3 is located on a first surface 9 side of a substrate forming the compression chamber, a groove 12 is formed in parallel with the longitudinal direction of the compression chamber 3 in the boundary region of the vibration region 8 of adjoining piezoelectric/electrostrictive actuators 7, and the angle made by a surface formed by the sidewall 13 of the groove 12 in the longitudinal direction and the first surface 9 side of a substrate forming the compression chamber is set in the range of 100-145°.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种高密度喷嘴布置的喷墨打印机头，其中改善了输送效率降低，串扰等问题，并且提供了一种没有出现耐久性等问题的喷墨头即使交货重复也是如此。解决方案：在具有多个压缩室3，喷嘴10和压电/电致伸缩致动器7的喷墨头中，在压缩室3的壁之外形成振动区域8的壁位于第一表面9 形成压缩室的基板的一侧，在相邻的压电/电致伸缩致动器7的振动区域8的边界区域中形成有与压缩室3的长度方向平行的槽12，并且由形成的表面形成的角度通过槽12的侧壁13沿长度方向和形成压缩室的基板的第一表面9侧设定在100-145°的范围内。版权所有（C）2008，JPO＆INPIT

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