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    • 1. 发明专利
    • INPUT CIRCUIT MONITORING TRANSDUCER
    • JP2003114266A
    • 2003-04-18
    • JP2001306231
    • 2001-10-02
    • OKURA DENKI CO LTD
    • KIKUCHI JINICHIMATSUI TAKAHIKOISHIKAWA HIROSHI
    • G08C25/00G01R31/00G01R31/316G01R35/00H02H3/05H03M1/10
    • PROBLEM TO BE SOLVED: To provide a transducer capable of monitoring an input circuit with high accuracy. SOLUTION: In the transducer with a CPU clock 10 having the input circuit 2 using an A/D converter 5 for converting an analog signal of a preset frequency into a digital signal, a test signal generation part 11 generates a digital test signal of a test frequency different from the preset frequency by dividing the frequency of a signal from the CPU clock 10, a waveform trimming circuit 12 converts it into an analog test signal and a superimposing part 3 superimposes it on an analog input signal. A generation part 13 generates a sampling signal for the A/D converter 5, of a frequency twice or more of the test frequency, by dividing the frequency of the signal from the CPU clock 10. An effective value for the test signal in the superimposed signal (the digital superimposed signal) after converted in the input circuit 2 is found by a first effective value computation part 14 and an effective value for the analog test signal after converted by the A/D converter 5 is found by a second effective value computation part 17, and the abnormality of the input circuit 2 is determined through the comparison of the outputs of both computation parts 14, 17 with each other by a determination part 18.
    • 2. 发明专利
    • INTEGRATING SPHERE TYPE OPTICAL FIBER THERMOMETER
    • JP2002340698A
    • 2002-11-27
    • JP2001142384
    • 2001-05-11
    • OKURA DENKI CO LTDKATSUMATA TORU
    • KATSUMATA TORUOISHI NAOYAAIZAWA HIROAKI
    • G01K11/20G01J5/02G01J5/08
    • PROBLEM TO BE SOLVED: To provide an optical fiber thermometer enhanced in the intensity of fluorescence. SOLUTION: One end of an optical fiber 2 is connected to the incoming and outgoing window 11 of an emitter 1 having an integrating spherical shape with the incoming and outgoing window 11 and emitting light in a characteristic according to temperature in the incoming and outgoing of an exciting light. A light source 5 and an optical detector 6 are connected to the other end of the optical fiber 2 through a two-branched optical fiber. The exciting light of the light source 5 entering through the incoming and outgoing window 11 is enhanced by the integrating sphere internal repeated reflection, and applied to the emitter 1. The fluorescence from the excited emitter 1 is increased in intensity without being leaked to the outside by the integrating sphere internal repeated reflection and outputted to the optical detector 6 via the optical fiber 2. The measurement accuracy of the optical fiber thermometer is improved by enhancing the intensity of the exciting light and the intensity of the fluorescence. The material of the emitter 1 preferably consists of monocrystal of ruby (Al2 O3 with Cr added thereto), monocrystal of spinel (MgAl2 O4 with Cr added thereto), or quartz with rare earth element such as Er (erbium), Nd (neodymium), Tm (thulium) or the like added thereto.
    • 3. 发明专利
    • GAS-COOLED VERTICAL WAFER PROCESSING DEVICE
    • JP2001196321A
    • 2001-07-19
    • JP2000001698
    • 2000-01-07
    • OKURA DENKI CO LTD
    • NAKANE HITOSHISUZUKI YOSHIHIROOKA SATOSHI
    • H01L21/22H01L21/31H01L21/324
    • PROBLEM TO BE SOLVED: To provide a gas-cooled vertical wafer processing device which is capable of quickly cooling down a processing tube and wafers by circulating gas inside the processing device. SOLUTION: An oven 1 is provided with a vertical quartz tube 5 which is located at its center and into which wafers 9 are loaded, and a manifold 21 is provided outside the oven 1. Cooling nozzles 11 are extended from the manifold 21 penetrating through the peripheral wall of the oven 1 so as to confront the overall length of the peripheral wall of the quartz tube 5. An exhaust vent 13 is bored in the top wall of the oven 1. The one end of a duct 29 is connected to the exhaust vent 13, and the other end of the duct 29 is connected to the manifold 21 through the intermediary of a heat exchanger 17 and a fan 19 which are both located outside the oven 1 to form a circuit. Gas is circulated between the heat exchanger 17 and the oven 1 by the fan 19, low-temperature gas is made to blow against the overall peripheral wall of the quartz tube 5 from the cooing nozzles 11 to cool down the tube 5 and the wafers 9, and heat is collected from high-temperature gas that returns from the oven 1 by the heat exchanger 17 to turn the returning high-temperature gas to low-temperature cooling gas.
    • 5. 发明专利
    • THERMAL RECORDER FOR THERMAL PLATE
    • JPH10297007A
    • 1998-11-10
    • JP12163097
    • 1997-04-23
    • OKURA DENKI CO LTD
    • NAITO SEIJI
    • B41J25/304B41J2/32
    • PROBLEM TO BE SOLVED: To protect the surface of a thermal plate and a thermal head against damage by preventing a high stress from being generated at the press contact part thereof. SOLUTION: A rotary arm 10 is pivoted to a basic body 5 and a mover 18 is provided movably along the rotary arm 10 from one end toward the other end thereof. When the mover 18 moves from one end toward the other end of the rotary arm 10, a guide means 30 guides the mover 18 to be held at a specified height in the first and last stags A, B of the motion and temporarily release the mover 18 in the intermediate stage C so that the mover 18 can tun downward along with the rotary arm 10. A thermal plate 1 is supported by any one of the basic body 5 or the mover 18 and a thermal head 40 is supported by the other. In the intermediate stage C of motion of the mover 18, the surface 3 of the thermal plate 1 and the thermal head 40 are slid each other while being pressed.
    • 8. 发明专利
    • REMOTE DATA GATHERING DEVICE
    • JPH07321939A
    • 1995-12-08
    • JP11487794
    • 1994-05-27
    • OKURA DENKI CO LTDSHIMODAIRA HIROSHI
    • MORI TAKEOSHIMODAIRA HIROSHI
    • G08C15/00H04M11/00H04Q9/00
    • PURPOSE:To provide a remote data gathering for obtaining state data of an unmanned equipment at remote. CONSTITUTION:A monitoring part 12 regularly scans equipment state data and stores a newest value at the corresponding address of an incorporated memory 14b. A line mutiplex circuit 10 provided at an incoming call terminal on a telephone line 6 from a terminal equipment 2 selectively connects the telephone line 6 to a voice responsing line 7, a facsimile responsing line 8 or a data responsing line 9. The device is provided with a voice transmission part 24 which converts state data within the prescribed address of the monitoring memory when the telephone line 6 is connected to the voice responsing line 7 and after then sends it to the telephone line 6. The device is also provided with a facsimile transmission part 25 which calls the terminal equipment 2 in accordance with the reception of the telephone number of the calling terminal 2 and converts state data to a facsimile mode signal when the telephone line 6 is connected to the facsimile responsing line 8, and after then sends the signal to the telephone line 6. Furthermore, the device is provided with a data transmission part 26 which converts state data to an analog data signal when the telephone line 6 is connected to the data responsing line 9 and after then sends the signal to the telephone line 6.
    • 9. 发明专利
    • INTERNAL TEMPERATURE CONTROLLER FOR DIFFUSION FURNACE
    • JPH07219646A
    • 1995-08-18
    • JP1019394
    • 1994-02-01
    • OKURA DENKI CO LTD
    • ABE AKIRA
    • H01L21/22G05B11/32G05B11/36G05D23/19H01L21/324
    • PURPOSE:To provide the internal temperature controller for the diffusion furnace which is fast in response speed and converged in a short time. CONSTITUTION:A master controller 10 generates a master controller output PN1 on the basis of the difference between a measured value of the internal temperature of the diffusion furnace 1 heated by a heater 2 and an in-furnace temperature set value. A slave controller 11 generates a slave controller output PN2 for heater operation on the basis of the difference between a measured value of the temperature of the heater 2 and the master controller output PN1. An attenuator 13 is connected between the master controller output PN1 and the input terminal of the slave controller 11, and the master controller output PN1 is attenuated uniformly by the attenuator 13 and then applied to the slave controller 11. An event information detector 16 is preferably connected to the master controller 10 through a PID switch 17 to selectively switch PID constants of the controllers when an event such as expectable disturbance is detected. When the slave controller output PN2 is >=100% or