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1. 发明专利

JP2500267B2 失效
公开(公告)号：JP2500267B2
公开(公告)日：1996-05-29
申请号：JP5886391
申请日：1991-03-22
申请人： OKURA DENKI CO LTD
发明人： ASAHI IWAO , ABE AKIRA
IPC分类号： F27D19/00 , G05D23/00 , G05D23/19

2. 发明专利

JPS63261401A DIFFERENTIAL ELEMENT FOR DIGITAL CONTROLLER 失效
公开(公告)号：JPS63261401A
公开(公告)日：1988-10-28
申请号：JP9430887
申请日：1987-04-18
申请人： OKURA DENKI CO LTD
发明人： AKAHA NOBUHISA , ABE AKIRA
IPC分类号： G05B11/36 , G05B11/42
摘要： PURPOSE:To prevent the generation of a trouble due to a differential retracing phenomenon by finding out a differential term by a differential calculation means and calculating a differential value integrating value by a differential value integrating value calculating means. CONSTITUTION:Restriction on the operation of a differential term D of its own is removed by separating restriction on a differential term D from that on a proportional term P and an integrating term I. Namely, a proportional- integrating term PI is found out by adding the proportional term P obtained by the proportional term calculating means 3 to the integrating term I obtained by an integrating term calculating means 4 through a preadding means 7a. On the other hand, the differential term D is found out by the differential value calculating means 10 and a differential value integrating value DM is calculated by a differential value integrating value calculating means 11. The integrated value DM is added to a proportion-integration manipulated variable SN by an adding means 7 without restricting the upper and lower limits of the integrated value DM to calculate a manipulated variable (m). Prescribed restriction is applied to the found manipulated variable (m) by a restricting means 8 to form an output signal to a digital controller 2.

3. 发明专利

JPH07219646A INTERNAL TEMPERATURE CONTROLLER FOR DIFFUSION FURNACE 失效
公开(公告)号：JPH07219646A
公开(公告)日：1995-08-18
申请号：JP1019394
申请日：1994-02-01
申请人： OKURA DENKI CO LTD
发明人： ABE AKIRA
IPC分类号： H01L21/22 , G05B11/32 , G05B11/36 , G05D23/19 , H01L21/324
摘要： PURPOSE:To provide the internal temperature controller for the diffusion furnace which is fast in response speed and converged in a short time. CONSTITUTION:A master controller 10 generates a master controller output PN1 on the basis of the difference between a measured value of the internal temperature of the diffusion furnace 1 heated by a heater 2 and an in-furnace temperature set value. A slave controller 11 generates a slave controller output PN2 for heater operation on the basis of the difference between a measured value of the temperature of the heater 2 and the master controller output PN1. An attenuator 13 is connected between the master controller output PN1 and the input terminal of the slave controller 11, and the master controller output PN1 is attenuated uniformly by the attenuator 13 and then applied to the slave controller 11. An event information detector 16 is preferably connected to the master controller 10 through a PID switch 17 to selectively switch PID constants of the controllers when an event such as expectable disturbance is detected. When the slave controller output PN2 is >=100% or

4. 发明专利

JPH04158416A INITIAL CONDITION RETRIEVING TYPE FURNACE TEMPERATURE CONTROLLER 失效
公开(公告)号：JPH04158416A
公开(公告)日：1992-06-01
申请号：JP28350390
申请日：1990-10-23
申请人： OKURA DENKI CO LTD
发明人： ASAHI IWAO , ABE AKIRA , MANABE HIROTSUNE
IPC分类号： F27D19/00 , G05D23/00 , G05D23/19
摘要： PURPOSE:To quickly attain a prescribed operation pattern by retrieving the initial value of the adjustment input from the precedent result and not setting the initial value at zero. CONSTITUTION:The initial value of the adjustment input (r') is not set at zero but uses the final value obtained in the precedent operation having an approximate operating environment. A retrieving device 15 retrieves an operation pattern R, for example, and the temperature is raised up to 80 deg.C from 0 deg.C between the 80th and 120th samples. Then the 10th repetitive furnace temperature and the final adjustment input value are retrieved to the prescribed pattern R. The retrieved final adjustment input value is used as the initial value in order to control the pattern R. As a result, the satisfactory follow-up performance shown by a solid line is obtained just with the repetition, i.e., the learning of only twice.

5. 发明专利

JPS63103301A REAL TIME COMPENSATING DEVICE WITH CONDITIONAL MONITOR 失效
公开(公告)号：JPS63103301A
公开(公告)日：1988-05-09
申请号：JP24839486
申请日：1986-10-21
申请人： OKURA DENKI CO LTD
发明人： AKAHA NOBUHISA , ABE AKIRA
IPC分类号： G05B7/02 , G05B19/02
摘要： PURPOSE:To prevent the processing variance with a real time compensating device by utilizing the waiting time serving as the limit of the processing level reaching time and the deciding time for stability of control value. CONSTITUTION:A controller 3 which controls the temperature of a heat treatment furnace applies an arithmetic process to the difference between the actual value (pv) of controlled variable received from a detector 4 and the set temperature value SV received from a setting means 2 to produce a control signal. This signal is applied to a control means 5 like a heater, etc., for control of the controlled variable 1. At the same time, the waiting time W1 to be counted from the start point t0 of the processing time S is also set to the means 2 together with the deciding time W2 for decision of stability of the controlled variable. Thus it is decided that the actual value (pv) is not stabilized yet as long as the actual value (pv) gets out of a fixed processing level range (T/+ or - T) within a time shorter than the time W2 counted from a time point when the actual value (pv) reaches said range even though the value (pv) reaches a 1st arriving time point after the time W2 is set. Thus the counting job of the time S is not started and then the same processing is carried out when the value (pv) reaches again said fixed processing level range.

6. 发明专利

JPS6063924A AUTOMATIC SETTING SYSTEM OF PROFILE 失效
公开(公告)号：JPS6063924A
公开(公告)日：1985-04-12
申请号：JP17175683
申请日：1983-09-16
申请人： OKURA DENKI CO LTD
发明人： AKAHA NOBUHISA , ABE AKIRA
IPC分类号： H01L21/22 , H01L21/00
摘要： PURPOSE:To automatically and rapidly obtain a strictly heat equalized zone in a diffusion oven by a method in which an input and output relationship in a system where temperatures of three inputs and of three outputs mutually interfere is set, the observed values being given to the three inputs for obtaining parameters from the relationship, and the three inputs being determined by means of the parameters for setting the three outputs in predetermined values. CONSTITUTION:Heaters 21, 22, 23 and thermocouples 24, 25, 26 are connected to a controller 27. In an oven, profiling thermocouples 28, 29, 30 are provided near the left side, center and right side of a heat equalized zone A, respectively. A calibrating thermocouple 31 as the reference thermocouple is further provided such that it is movable in the central portion of the oven. Each of these thermocouples is connected to the controller. The controller 27 has functions of controlling the heater temperatures, for calculating the parameters in the electromotive force-temperature properties of the calibrating thermocouple, for calibrating the profiling thermocouples according to the calibrating thermocouples, for calculating parameters of the transmission function between the outside and inside temperature of the oven, and for feeding back, using the function of transmission, the difference between the observed values of the temperature in the oven and the calibrated temperature of the profiling thermocouple to the outside temperature of the oven.

7. 发明专利

JPH06266449A FURNACE TEMPERATURE CASCADE CONTROLLER UTILIZING ADJUSTMENT INPUT 失效
公开(公告)号：JPH06266449A
公开(公告)日：1994-09-22
申请号：JP5103293
申请日：1993-03-11
申请人： FURUTA KATSUHISA , OKURA DENKI CO LTD
发明人： FURUTA KATSUHISA , ABE AKIRA , ITO AKINORI , MANABE HIROTSUNE
IPC分类号： F27D19/00 , G05B11/32 , G05B13/04 , G05B17/02 , G05D23/19
摘要： PURPOSE:To execute temperature control utilizing an adjustment input at a high speed with respect to a furnace operated repeatedly in the same pattern. CONSTITUTION:A temperature of a heater of a furnace 1 is controlled by a secondary controller 35, and an input tau of a secondary controller is set by an output of a primary controller 12 for controlling a furnace temperature (y). An adjustment input (r) applied to an enlargement system 40 consisting of the furnace, the secondary controller and the primary controller by synchronizing with a temperature set value (r) is stored in an adjustment input memory 11. The adjustment input is selected to reduce a difference (e) between the temperature set value and the furnace temperature, whenever a repeated operation is executed. A degree of a state variable in the enlargement system is made equal to a degree of the furnace temperature. A dual system 9 corresponding to the enlargement system in the case where the temperature set value is not inputted is provided, and based on an output (v) of the dual system corresponding to applying the difference between the temperature set value and the furnace temperature and the adjustment input at the time of previous operation, an updating value of the adjustment input is calculated.

8. 发明专利

JP2576036B2 失效
公开(公告)号：JP2576036B2
公开(公告)日：1997-01-29
申请号：JP1019394
申请日：1994-02-01
申请人： OKURA DENKI CO LTD
发明人： ABE AKIRA
IPC分类号： H01L21/22 , G05B11/32 , G05B11/36 , G05D23/19 , H01L21/324

9. 发明专利

JPH04295596A RESTRICTED LEARNING AND CONTROLLING DEVICE FOR FURNACE TEMPERATURE 失效
公开(公告)号：JPH04295596A
公开(公告)日：1992-10-20
申请号：JP5886391
申请日：1991-03-22
申请人： OKURA DENKI CO LTD
发明人： ASAHI IWAO , ABE AKIRA
IPC分类号： F27D19/00 , G05D23/00 , G05D23/19
摘要： PURPOSE:To obtain a learning and controlling device without receiving any affection of the saturation of control factors by a method wherein a difference with respect to a given division in an operating pattern is nullified upon learning a regulating input by inputting a difference between the set value of temperature and the measured value of temperature in a furnace and employing a relative system output in accordance with said difference. CONSTITUTION:A memory 11 for a regulating input stores the row of regulating inputs (r') impressed sequentially on an expanding system, consisting of a furnace 1 and a controller 12, in synchronized with the set value (r) of the temperature at every one cycle of an operating pattern. A regulating input generator 10 operates the renewal value of the regulating input (r') from the output (v) of a relative system 9 and the regulating input (r') when a difference (e) between the set value (r) of temperature and the temperature (y) in a furnace is impressed. Then, an output converter 20 nullify the difference (e) with respect to a given division in the operating pattern. The output converter 20 is provided with a function of replacing a part, corresponding to the given division, in which the difference (e) is to be nullified in the furnace temperature (y) in a memory 6 for output, with the set value (r) of temperature in the given division.

10. 发明专利

JPH04158415A INDIRECT CONTROL METHOD FOR TEMPERATURE OF MULTI-SECTION FURNACE 失效
公开(公告)号：JPH04158415A
公开(公告)日：1992-06-01
申请号：JP28350290
申请日：1990-10-23
申请人： OKURA DENKI CO LTD
发明人： ASAHI IWAO , ABE AKIRA , MANABE HIROTSUNE
IPC分类号： F27D19/00 , G05D23/00 , G05D23/19 , G05D23/24
摘要： PURPOSE:To change the furnace temperature in accordance with a prescribed operation pattern without using a furnace temperature sensor by collecting the furnace temperature with control of the heater temperature, furthermore performing the learning control for repetition of the operation pattern CONSTITUTION:When the direct control is applied to the furnace temperature (y), this temperature (y) is written in a state memory 20 together with a stale variable (x). At the same time, a switch SW1 of a furnace temperature sensor 3 is closed. Then the temperature (y) is controlled with the output of a direct controller that is obtained when the variable (x), the temperature set value (r) stored in a set value memory, and the adjustment input (r') stored in an adjustment input memory 11 in response to the value (r) are inputted to the direction controller. If a direct control mode is selected for the furnace temperature, the heater temperature measured in a switching state and stored in the memory 20 is set to a heater temperature set memory 21. Then the heater temperature is controlled with the output obtained when the latest state variable (x) and the set value (x) of the memory 21 are inputted to an indirect controller 12a. Thus the effective control is attained for the temperature of a multi-section furnace.

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