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51. 发明专利

JP3602646B2 Dimension measuring device of the sample 失效
公开(公告)号：JP3602646B2
公开(公告)日：2004-12-15
申请号：JP12559296
申请日：1996-05-21
申请人：株式会社日立製作所
发明人：文夫水野
IPC分类号： G01B11/02 , G01B15/00 , G01N37/00 , G01Q10/02 , G01Q30/04 , G01Q60/24 , G01R31/265 , G06T1/00 , H01L21/66
CPC分类号： G01B15/00 , G01R31/265 , H01J2237/2814 , H01L22/12

52. 发明专利

JP2004279195A Scanning probe microscope 审中-公开
公开(公告)号：JP2004279195A
公开(公告)日：2004-10-07
申请号：JP2003070612
申请日：2003-03-14
申请人： Olympus Corp , オリンパス株式会社
发明人： KOBAYASHI SHIGERU
IPC分类号： G01B11/00 , G01B21/30 , G01Q30/04 , G01Q30/06 , G01Q60/24 , G01Q90/00 , G01N13/16 , G01N13/10
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope for actualizing the downsizing of a device by dispensing with alignment adjustment on a detection system.
SOLUTION: This scanning probe microscope is equipped with a a cantilever 207 having a probe 209 for measuring the shape of a specimen 211, Z and XY scan drive control parts 263 and 264 for controlling X, Y, Z scan on the specimen 211, a CCD 234 for detecting a light beam acquired in relation to the irradiation of the cantilever 207 to output a detection signal, a CPU 275 for performing prescribed arithmetic processing with respect to the detection signal outputted from the CCD 234, a storage part 271 stored with data processed by the CPU 275 as luminance data obtained on a light receiving surface of the CCD 234, and a display part 255 for displaying the data processed by the CPU 275.
COPYRIGHT: (C)2005,JPO&NCIPI

53. 发明专利

JP2004165146A Electron microscope system 有权
公开(公告)号：JP2004165146A
公开(公告)日：2004-06-10
申请号：JP2003285165
申请日：2003-08-01
申请人： Leo Elektronenmikroskopie Gmbh , エルエーオーエレクトローネンミクロスコピーゲーエムベーハー
发明人： KIENZLE OLIVER , KNIPPELMEYER RAINER , MUELLER HEIKO
IPC分类号： G01Q30/04 , H01J37/05 , H01J37/147 , H01J37/244 , H01J37/28
CPC分类号： H01J37/28 , H01J37/05 , H01J37/1472 , H01J2237/2817
摘要： PROBLEM TO BE SOLVED: To provide an electronic microscope system in which functionality of a beam splitter is offered.
SOLUTION: The primary electron beams 11 from an electron source 51 are guided to a beam splitter 21 and guided to the object plane 7. The secondary electron beams 13 are guided toward the beam splitter 21, and only the charged particles of which kinetic energy is in a prescribed energy range are transmitted through magnetic pole components 29, 30, 31, 32 constituting an energy selection device 27. The beam splitter 21 includes at least one pair of magnetic poles of the energy selection device 27. The angle between the direction of the primary electron beams 11 after radiated from the electron source 51 and the direction of the primary electron beams 11 outgoing from the beam splitter 21 is made less than 80 degrees, in particular, less than 60 degrees.
COPYRIGHT: (C)2004,JPO

54. 发明专利

JP2004158364A Electron microscope, operating method of electron microscope, operating program of electron microscope and computer readable record medium 有权
标题翻译：电子显微镜，电子显微镜的操作方法，电子显微镜的操作程序和计算机可读记录介质
公开(公告)号：JP2004158364A
公开(公告)日：2004-06-03
申请号：JP2002324897
申请日：2002-11-08
申请人： Keyence Corp , 株式会社キーエンス
发明人： FURUKAWA YUTAKA , HIRATA TOMOHIKO
IPC分类号： H01J37/22 , G01N23/225 , G01Q30/02 , G01Q30/04 , G01Q30/16 , G01Q40/00 , G21K7/00 , H01J37/18 , H01J37/24 , H01J37/26 , H01J37/28
CPC分类号： G01N23/2251 , H01J37/265 , H01J37/28 , H01J2237/2605
摘要： PROBLEM TO BE SOLVED: To provide an electron microscope or the like capable of easily setting image observation conditions for a rough-vacuum observation. SOLUTION: The electron microscope is provided with a sample specifying means specifying characteristics of samples, a simple image observation condition setting means capable of setting one kind of image observation conditions from a plurality of preset kinds of simple image observation conditions including a setting of a degree of vacuum based on the characteristics of the samples, a preview-setting means setting a preview function of simply forming and displaying a plurality of simple observation images based on a plurality of different simple image observation conditions, and an individual condition setting means capable of arbitrarily setting at least either of a spot size of electron beams on the sample, accelerating voltage, kinds of detecting units, and the degree of vacuum as image observation conditions. A plurality of observation images are simply formed based on a plurality of image observation conditions including the degree of vacuum as one of the parameters, and the preview function for displaying in a second display area is executed. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供能够容易地设置用于粗略真空观察的图像观察条件的电子显微镜等。解决方案：电子显微镜设置有指定样本特征的样本指定装置，简单的图像观察条件设置装置，其能够从包括设置的多种预设种类的简单图像观察条件中设置一种图像观察条件基于样本的特性的真空度的预览设定单元，基于多个不同的简单图像观察条件设定简单地形成和显示多个简单观察图像的预览功能的预览设定单元，以及单独条件设定单元能够任意设定样品上的电子束的光点尺寸，加速电压，检测单元的种类和作为图像观察条件的真空度中的任一个。基于包括作为参数之一的真空度的多个图像观察条件简单地形成多个观察图像，并且执行用于在第二显示区域中显示的预览功能。版权所有（C）2004，JPO

55. 发明专利

JP2003344034A Measuring apparatus and sensor for surface properties 审中-公开
标题翻译：测量装置和表面特性传感器
公开(公告)号：JP2003344034A
公开(公告)日：2003-12-03
申请号：JP2002149371
申请日：2002-05-23
申请人： Mitsutoyo Corp , 株式会社ミツトヨ
发明人： HIDAKA KAZUHIKO , NISHIMURA KUNITOSHI
IPC分类号： G01B11/30 , G01Q30/04 , G01Q60/18 , G01N13/14
摘要： PROBLEM TO BE SOLVED: To provide a surface property measuring apparatus for eliminating the directional dependence of a stylus for improving measuring accuracy.
SOLUTION: The surface property measuring apparatus comprises a tapping proximity field sensor 2 that vibrates the stylus 10 by a vibration means, and detects the vibration state by a detection means while a minute opening 10A whose diameter is equal to or less than the wavelength of laser beams is formed at the tip of the stylus, an actuator 3 for displacing the tapping proximity field sensor 2 in the axial direction of the stylus 10, a controller 4 for constantly maintaining the interval between the tip of the stylus 10 and the surface of an object 0 to be measured by feeding back the output signal of the detection signal to the actuator 3, a scanning mechanism 5 for relatively scanning the tip of the stylus 10 along the surface of the object 0 to be measured, and a light detection means 22 for detecting the quantity of light where propagation light at the minute opening 10A formed at the tip of the stylus 10 is diffused for converting to an electric signal.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种用于消除用于提高测量精度的触针的方向依赖性的表面性质测量装置。表面性质测量装置包括：敲击接近场传感器2，其通过振动装置振动触针10，并且通过检测装置检测振动状态，同时其直径等于或小于激光束的波长形成在触笔的尖端处，用于使敲击接近场传感器2在触针10的轴向方向移位的致动器3，用于不断地保持触针10的尖端和通过将检测信号的输出信号反馈到致动器3来测量的物体0的表面;扫描机构5，用于沿着待测量物体0的表面相对地扫描触针10的尖端;以及光检测装置22，用于检测形成在触针10的尖端处的微小开口10A处的传播光被扩散以转换成电信号的光量。版权所有（C）2004，JPO

56. 发明专利

JP2003331774A Electron beam equipment and device manufacturing method using the equipment 审中-公开
标题翻译：电子束设备和使用设备的设备制造方法
公开(公告)号：JP2003331774A
公开(公告)日：2003-11-21
申请号：JP2002141714
申请日：2002-05-16
申请人： Ebara Corp , Toshiba Corp , 株式会社東芝 , 株式会社荏原製作所
发明人： NAGAHAMA ICHIROTA , YAMAZAKI YUICHIRO , WATANABE KENJI , HATAKEYAMA MASAKI , SATAKE TORU , NOMICHI SHINJI
IPC分类号： G01N23/225 , G01K1/08 , G01N23/00 , G01Q30/04 , G21K7/00 , H01J37/05 , H01J37/22 , H01J37/244 , H01J37/28 , H01J37/285 , H01J37/29 , H01L21/66
CPC分类号： H01J37/28 , H01J2237/0044 , H01J2237/2817
摘要： PROBLEM TO BE SOLVED: To provide an electron beam equipment capable of obtaining an image for inspection with little distortion and enabling a surface observation and a defect detection as well as a device manufacturing method for inspecting a device on the way of a process with a good throughput with the use of the electron beam equipment. SOLUTION: A defect inspection device is provided with a first irradiating means S for irradiating a sample 9 by emitting primary electron beams, mapping optical mechanisms 11 to 13 or imaging secondary electrons emitted from the surface of the sample 9 irradiated with the secondary electron beams, a detector D for detecting the secondary electrons, and an image treatment mechanism 18 for treating signals from the detector D. Further, a second irradiating means may be provided for irradiating the sample 9 by emitting electron beams, with which, the sample 9 is irradiated and then is irradiated with the first irradiating means S to observe the sample 9. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种电子束设备，其能够获得几乎没有变形的检查图像，并且能够进行表面观察和缺陷检测，以及用于在处理过程中检查设备的设备制造方法具有使用电子束设备的良好吞吐量。解决方案：缺陷检查装置设置有第一照射装置S，用于通过发射一次电子束照射样品9，映射光学机构11至13或成像从被照射次级的样品9的表面发射的二次电子电子束，用于检测二次电子的检测器D.以及用于处理来自检测器D的信号的图像处理机构18.此外，可以提供第二照射装置，用于通过发射电子束照射样品9，使用该电子束 9照射，然后用第一照射装置S照射以观察样品9.版权所有（C）2004，JPO

57. 发明专利

JP2003303567A Electron microscope, operating method of electron microscope, electron microscope operation program, and computer-readable recording medium 有权
标题翻译：电子显微镜，电子显微镜的操作方法，电子显微镜操作程序和计算机可读记录介质
公开(公告)号：JP2003303567A
公开(公告)日：2003-10-24
申请号：JP2002108932
申请日：2002-04-11
申请人： Keyence Corp , 株式会社キーエンス
发明人： TAKAGI SHIGENOBU
IPC分类号： H01J37/22 , G01Q30/04 , H01J37/28
CPC分类号： H01J37/28 , H01J2237/22
摘要： PROBLEM TO BE SOLVED: To easily search the optimum image observing condition in the operation of an electron microscope. SOLUTION: This electron microscope has the steps of picking up an observed image by determining at least a spot side of an electron beam on a sample, an acceleration voltage, the kind of a detector, a position of the sample, and an observing magnification as image observing conditions, automatically determining a plurality of different image observing conditions, picking up a plurality of observed images on the basis of the determined image observing conditions, simultaneously displaying the plurality of observed images picked up by an observed image acquiring means on a second display part, selecting the desired observing image from the plurality of displayed observed images on the second display part, and enlarging the selected observed image and displaying the image on a first display part. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：为了在电子显微镜的操作中容易地搜索最佳图像观察条件。解决方案：该电子显微镜具有以下步骤：通过确定样品上的电子束的至少点，加速电压，检测器的种类，样品的位置和观察放大倍率作为图像观察条件，自动确定多个不同的图像观察条件，基于确定的图像观察条件拾取多个观察图像，同时将由观察图像获取装置拾取的多个观察图像显示在第二显示部分，从第二显示部分上的多个显示的观察图像中选择期望的观察图像，并且放大所选择的观察图像并在第一显示部分上显示图像。版权所有（C）2004，JPO

58. 发明专利

JP2003303566A Electron microscope, operating method of electron microscope, electron microscope operation program, and computer-readable recording medium 有权
标题翻译：电子显微镜，电子显微镜的操作方法，电子显微镜操作程序和计算机可读记录介质
公开(公告)号：JP2003303566A
公开(公告)日：2003-10-24
申请号：JP2002108931
申请日：2002-04-11
申请人： Keyence Corp , 株式会社キーエンス
发明人： TAKAGI SHIGENOBU
IPC分类号： G01N23/225 , G01Q10/00 , G01Q30/02 , G01Q30/04 , G21K7/00 , H01J37/22 , H01J37/28
CPC分类号： H01J37/222 , G01N23/2251
摘要： PROBLEM TO BE SOLVED: To provide a guide function for operating procedure to allow even a person unaccustomed to the operation of an electron microscope, to operate the microscope. SOLUTION: In this electron microscope, the electrons are applied to a sample on the basis of the predetermined image observing condition, and a desired position of the sample can be observed with a desired observing magnification by detecting the secondary electrons or reflected electrons. This electron microscope has a first image observation mode image plane as an image plane for setting the image observing condition, comprising a first display part for displaying the observed image of the sample, a second display part for displaying a group of observed images of the sample as one or more secondary images or one or more reflected electron images, on the basis of the condition set by the first image observation mode setting means, and a selecting means for selecting the desired observed image from the group of the observed images displayed on the second display part. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：为了提供操作程序的引导功能，以便甚至不能习惯于电子显微镜的操作的人操作显微镜。解决方案：在该电子显微镜中，基于预定的图像观察条件将电子施加到样品，并且可以通过检测二次电子或反射电子以期望的观察倍率观察样品的期望位置。该电子显微镜具有第一图像观察模式图像平面作为用于设定图像观察条件的图像平面，包括用于显示样本的观察图像的第一显示部分，用于显示样本的观察图像组的第二显示部分作为一个或多个二次图像或一个或多个反射电子图像，基于由第一图像观察模式设置装置设置的条件，以及选择装置，用于从显示在第二图像上的观察图像组中选择所需的观察图像第二显示部分。版权所有（C）2004，JPO

59. 发明专利

JP2003227789A SCANNING PROBE MICROSCOPE 审中-公开
公开(公告)号：JP2003227789A
公开(公告)日：2003-08-15
申请号：JP2002025633
申请日：2002-02-01
申请人： SEIKO INSTR INC
发明人： ANDO KAZUNORI , SAITO AMIKO , OKUBO NOBUAKI , SHIKAKURA YOSHIAKI
IPC分类号： G01B21/30 , G01N19/00 , G01N19/02 , G01N19/04 , G01Q30/04 , G01Q30/08 , G01Q30/10 , G01Q30/20 , G01Q60/26 , G01Q60/28 , G01Q60/34 , G01N13/16 , G01N13/10
摘要： PROBLEM TO BE SOLVED: To save time in measurement by changing temperature in a scanning probe microscope. SOLUTION: The scanning probe microscope comprises a cantilever having a minute probe at the tip, a means for detecting the displacement in the cantilever, a means for vibrating the cantilever or a sample, a means for heating or cooling the sample, and a means for moving the sample. In the scanning probe microscope, the temperature of the sample is increased and decreased in steps, the probe is separated from the sample during a temperature change, the probe is brought into contact with the sample when the temperature becomes constant for measuring the surface physical properties of the sample, the probe is moved to another position of the sample and the sample surface physical properties are measured similarly, repetition is made for a plurality of times as the average value of the physical property value at the temperature concerned, and the physical property characteristic graph of temperature dependency is simultaneously displayed. COPYRIGHT: (C)2003,JPO

60. 发明专利

JP2003114880A METHOD AND DEVICE FOR ANALYZING PHYSICAL PROPERTIES OF MOLECULES ADSORBED TO METAL SURFACE 审中-公开
公开(公告)号：JP2003114880A
公开(公告)日：2003-04-18
申请号：JP2001310381
申请日：2001-10-05
申请人： COMM RES LAB
发明人： OKUNO YOSHINARI , MASUKO NOBURO
IPC分类号： G01Q30/04 , G06F17/10 , G06F19/00 , G01N13/10
摘要： PROBLEM TO BE SOLVED: To calculate the physical properties and stable structure of molecules and molecular aggregate adsorbed to a metal surface by a computer simulation. SOLUTION: Mirror image point charges in a metal produced by adsorption are determined by an atomic charge determination means for adsorbate such as molecules and molecular aggregate and a mirror image charge arranging means on metal surface. The physical property values for the given structure of the adsorbate are obtained by a composite calculation means performing a quantum chemistry calculation under the presence of mirror image point charges and an experimental analysis potential calculation in combination with each other. By a convergence judgment means and a new structure calculation means in addition to these methods, the stable structure is obtained.

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