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1. 发明专利

JP2016156678A 粉体の付着力測定方法及び恒温恒湿空間形成冶具审中-公开
标题翻译：粉末粘合剂测量方法和热成像室成型
公开(公告)号：JP2016156678A
公开(公告)日：2016-09-01
申请号：JP2015033908
申请日：2015-02-24
申请人：日本ゼオン株式会社
发明人：渡辺香 , 挾間尚宏 , 細野優人 , 酒井幹夫
IPC分类号： G01Q30/10 , G01Q30/12 , G01Q60/28
摘要：【課題】粉体の付着力を精度良く測定することができる粉体の付着力測定方法を提供する。【解決手段】原子間力顕微鏡2を用いて粉体7,13の付着力を測定する粉体の付着力測定方法において、カンチレバー6の探針6aに前記粉体を取り付ける工程と、前記原子間力顕微鏡の測定領域18内に恒温恒湿空間20を形成するための恒温恒湿空間形成冶具12を前記原子間力顕微鏡に取り付ける工程と、前記粉体が固定された基材11を前記恒温恒湿空間内に配置する工程と、少なくとも前記カンチレバー及び前記基材を前記恒温恒湿空間内に収容し、前記恒温恒湿空間を密閉する工程と、前記恒温恒湿空間内の温度と湿度を制御する工程と、前記恒温恒湿空間内において、前記探針に取り付けられた前記粉体を前記基材上に固定された前記粉体に付着させた後に引き離すときの前記探針のたわみ量を検出する工程と、該検出結果に基づいて前記粉体の付着力を求める工程とを含む。【選択図】図1
摘要翻译：要解决的问题：提供一种用于精确测量粉末粘合性的粉末粘合性测量方法。溶解性：用原子力显微镜2测量粉末7和13的粘合性的粉末粘附性测量方法包括：将粉末设置在探针6a上悬臂6; 设置用于在原子力显微镜的测量区域18中的原子力显微镜上形成恒温恒湿室20的恒温恒湿室形成夹具12; 将其上固定有粉末的基材11设置在恒温恒湿室内; 至少在恒温恒湿室内容纳悬臂和基材，并密封恒温恒湿室; 控制恒温恒湿室的温度和湿度; 在将探针上的粉末与固定在基材上的粉末接触之后，检测在探针上的粉末和基材上的粉末在热恒湿室中分离时探针的挠曲 ; 并根据检测结果确定粉末的粘合性。图1：

2. 发明专利

JP2013044743A Sample holder for medium and low atomic force microscope 审中-公开
标题翻译：中等和低原子力显微镜样品座
公开(公告)号：JP2013044743A
公开(公告)日：2013-03-04
申请号：JP2011199979
申请日：2011-08-26
申请人： Kenjiro Kimura , 建次郎木村
发明人： SAKA TATSUNORI , KIMURA KENJIRO
IPC分类号： G01N1/28 , G01Q30/10
摘要： PROBLEM TO BE SOLVED: To provide a sample holder capable of cooling a sample to a medium and low region after attaining the noise level of standard enabling high resolution observation in an atomic force microscope (AFM).SOLUTION: A sample holder includes a heat sink 14 which adheres a measuring object 2 to the cooling side of Peltier elements 1 and is made of a metal material including copper on the heat radiation side. The sample holder includes a DC power supply 8 which controls the temperature of the Peltier elements 1 and the measuring object 2, and a temperature measurement part 10. The temperature measured by the temperature measurement part 10 is controlled so as to become constant.
摘要翻译：要解决的问题：提供一种能够在获得原子力显微镜（AFM）中的能够进行高分辨率观察的标准的噪声水平之后，将样品冷却到中等和低压区域的样品保持器。解决方案：样品架包括将测量对象2粘附到珀耳帖元件1的冷却侧的散热器14，并且由热辐射侧的包含铜的金属材料制成。样品保持器包括控制珀耳帖元件1和测量对象2的温度的直流电源8和温度测量部件10.由温度测量部件10测量的温度被控制为恒定。版权所有（C）2013，JPO＆INPIT

3. 发明专利

JP2011180375A Inspection device for microscope, and inspection method by microscope 有权
标题翻译： MICROSCOPE检测装置和微观检查方法
公开(公告)号：JP2011180375A
公开(公告)日：2011-09-15
申请号：JP2010044441
申请日：2010-03-01
申请人： Sumitomo Bakelite Co Ltd , 住友ベークライト株式会社
发明人： UMEDA HIDEO , NAITO MANABU
IPC分类号： G02B21/28 , G01Q30/10 , G02B21/30
摘要： PROBLEM TO BE SOLVED: To provide an inspection device for a microscope capable of preventing incorrect inspection; and to provide an inspection method by the microscope. SOLUTION: In this inspection device 100 for the microscope, a sample P is held by a sample stage 232a, a cooling atmosphere is formed around the sample stage 232a by air flow F225a, and normal temperature-drying air flow is formed around the cooling atmosphere by the air flow F21 and air flow F245. The optical system of the microscope is penetrated through holes 211, 221 and 251. Thus, even under an open-system environment, the sample P can be inspected accurately. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够防止不正确检查的显微镜检查装置; 并通过显微镜提供检查方法。
解决方案：在该显微镜检查装置100中，样品P被样品台232a保持，通过空气流F225a在样品台232a周围形成冷却气氛，并在其周围形成常温干燥气流空气流F21的冷却气氛和空气流F245。显微镜的光学系统穿透孔211,221和251.因此，即使在开放系统环境下，也可以准确地检查样品P. 版权所有（C）2011，JPO＆INPIT

4. 发明专利

JP4145985B2 Information recording device 失效
公开(公告)号：JP4145985B2
公开(公告)日：2008-09-03
申请号：JP7278798
申请日：1998-03-20
申请人：セイコーインスツル株式会社
发明人：邦雄中島 , 靖幸光岡 , 徳男千葉 , 隆新輪 , 宣行笠間
IPC分类号： G11B7/0045 , G11B11/00 , G01N37/00 , G01Q30/10 , G01Q60/18 , G01Q70/06 , G01Q80/00 , G11B5/02 , G11B7/00 , G11B7/004 , G11B7/125 , G11B7/135 , G11B9/00 , G11B9/14 , G11B11/105
CPC分类号： G11B7/0045 , B82Y10/00 , G11B7/128 , G11B7/1387 , G11B9/14 , G11B9/1409 , G11B9/1463 , G11B2005/0021 , Y10S977/947
摘要： In an information recording apparatus for recording information onto a recording medium by utilizing a technology in a near-field microscope, the information recording apparatus carries out recording with reliability and density. An optical probe (1) or micro-cantilever (12) utilized in a near-field microscope is used as a recording probe (26). The recording probe (26) at its tip is heated by laser light (28) illumination or heating by an electric heating element to radiate microscopic-region thermal energy through the tip to a recording medium (3). This makes it possible to record microscopically information onto the recording medium (3) that varies in physical properties due to heating. Furthermore, thermal energy is provided to a recording position through an auxiliary heat radiating means thereby enabling recording more positively.

5. 发明专利

JP2008122326A Scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜
公开(公告)号：JP2008122326A
公开(公告)日：2008-05-29
申请号：JP2006309243
申请日：2006-11-15
申请人： Jeol Ltd , 日本電子株式会社
发明人： AOKI SUSUMU
IPC分类号： G01Q30/08 , G01Q30/10 , G01Q30/20 , G01Q60/24
摘要： PROBLEM TO BE SOLVED: To prevent deterioration in resolution of an unevenness image of a sample surface caused from temperature changes in a room.
SOLUTION: A sample scanner 5 with a tube scanner 6 mounts a sample holder 7. The sample scanner 5 is mounted in a sample driving mechanism 3 via a sample stage 4. The stage driving mechanism 3 is supported by a base unit 1. A cantilever 12 mounted to an SPM head 10 right over a sample 8 attached to the sample holder 7 is arranged; a probe 14 attached to the distal end of the cantilever 12 is opposed to the probe 14; physical quantities acting between the probe 14 and the sample 8 is detected by relatively scanning the probe 14 and the sample 8; then, an unevenness image of the sample is obtained based on the physical quantities. The base unit 1 is supported by a chamber 21 made of a thermally insulating material so as to surround a bottom and sides thereof.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了防止由室内温度变化引起的样品表面的不均匀图像的分辨率的劣化。解决方案：具有管扫描器6的样品扫描器5安装样品架7.样品扫描器5经由样品台4安装在样品驱动机构3中。载物台驱动机构3由基体单元1 安装在安装在样品架7上的样品8上的SPM头10上的悬臂12; 附接到悬臂12的远端的探针14与探针14相对; 通过相对扫描探针14和样品8来检测作用在探针14和样品8之间的物理量; 然后，基于物理量获得样品的不均匀图像。基座单元1由围绕其底部和侧面的由隔热材料制成的室21支撑。版权所有（C）2008，JPO＆INPIT

6. 发明专利

JP4015021B2 How to manipulate a small amount of liquid and equipment 有权
公开(公告)号：JP4015021B2
公开(公告)日：2007-11-28
申请号：JP2002557516
申请日：2001-12-12
申请人：アドヴァリティクスアーゲー
发明人：アヒムヴィクスフォート , クリストフガウアー , ヤーゲンスクリーバ
IPC分类号： G01N35/00 , G01N35/10 , B01J19/00 , B01L3/00 , B81B1/00 , G01N35/02 , G01Q30/10 , G01Q80/00
CPC分类号： B01L3/50273 , B01L2300/0816 , B01L2300/0819 , B01L2300/089 , B01L2400/0415 , B01L2400/0427 , B01L2400/0433 , B01L2400/0439 , B01L2400/0442 , B01L2400/0496 , Y10T436/2575
摘要： The invention relates to a device for manipulating small quantities of liquid on a solid body surface with at least one defined holding area with wetting properties other than the surroundings, whose material is such that the liquid to be manipulated preferably stays in the holding area, whereby the holding area has at least one constriction zone which cannot be overcome by the liquid due to its surface tension in the normal state, and whereby at least one device for generating an external force is provided substantially in the direction of the at least one constriction zone. The invention also relates to a corresponding method for manipulating small quantities of liquid on solid body surfaces and a method for generating a defined quantity of liquid using the method according to the present invention.

7. 发明专利

JP2006284598A Scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜
公开(公告)号：JP2006284598A
公开(公告)日：2006-10-19
申请号：JP2006148810
申请日：2006-05-29
申请人： Sii Nanotechnology Inc , エスアイアイ・ナノテクノロジー株式会社
发明人： ANDO KAZUNORI
IPC分类号： G01Q20/02 , G01Q30/08 , G01Q30/10 , G01Q30/16 , G01Q30/20 , G01Q60/24
摘要： PROBLEM TO BE SOLVED: To adjust a reachable distance of a laser reflection light to an optical position detector, and facilitate measurement, by changing a laser irradiation position and a laser irradiation angle in a vacuum, in a heating or in a cooling state, as is even if a cantilever is bent by a thermal influence, wherein a laser generator and the optical position detector are installed outside a vacuum vessel.
SOLUTION: The laser generator 61 and the optical position detector 8 are installed outside the vacuum vessel 63, and a sample stage 65 is placed inside the vacuum vessel 63, and mounts, heats or cools a sample 9 so that the irradiation position and irradiation angle to a laser reflection face are changed, on the spot, by the laser generator 61 and the optical position detector 8, which are installed outside the vacuum vessel 63 during a evacuating, heating or cooling state.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：通过在加热或冷却中改变激光照射位置和激光照射角度来调整激光反射光到光学位置检测器的可达距离，并且便于测量状态，即使悬臂被热影响弯曲，其中激光发生器和光学位置检测器安装在真空容器的外部。解决方案：激光发生器61和光学位置检测器8安装在真空容器63的外部，样品台65放置在真空容器63的内部，并安装，加热或冷却样品9，使得照射位置并且通过在抽真空，加热或冷却状态下安装在真空容器63外部的激光发生器61和光学位置检测器8在现场改变与激光反射面的照射角度。版权所有（C）2007，JPO＆INPIT

8. 发明专利

JP3764779B2 Analysis method using a convex area 失效
公开(公告)号：JP3764779B2
公开(公告)日：2006-04-12
申请号：JP10394896
申请日：1996-03-30
申请人：株式会社東北テクノアーチ
发明人：勇内田 , 智一末永 , 仁珠玖
IPC分类号： G01N33/543 , C12Q1/00 , G01N27/00 , G01N27/30 , G01N27/327 , G01N27/416 , G01N37/00 , G01Q30/02 , G01Q30/10 , G01Q60/60 , G01Q80/00 , G01Q90/00
CPC分类号： C12Q1/001 , C12Q1/004 , G01N33/54373 , G01N33/5438

9. 发明专利

JP3746153B2 Heat treatment method of a silicon wafer 失效
公开(公告)号：JP3746153B2
公开(公告)日：2006-02-15
申请号：JP17669398
申请日：1998-06-09
申请人：信越半導体株式会社
发明人：寿彦宮野 , 徳弘小林 , 昌次秋山
IPC分类号： H01L21/324 , G01Q30/10 , G01Q60/00 , H01L21/322
CPC分类号： H01L21/3225

10. 发明专利

JP2005241524A Scanning probe microscope and measuring method using it 审中-公开
标题翻译：扫描探针显微镜和使用它的测量方法
公开(公告)号：JP2005241524A
公开(公告)日：2005-09-08
申请号：JP2004053725
申请日：2004-02-27
申请人： Sii Nanotechnology Inc , エスアイアイ・ナノテクノロジー株式会社
发明人： ANDO KAZUNORI , NIHEI AMIKO
IPC分类号： G01Q30/08 , G01Q30/10 , G01Q30/20 , G01Q60/24 , G21K7/00 , G01N13/10
CPC分类号： G01Q30/18 , G01Q30/20
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of measuring the surface shape of a sample and the physical propertes of the sample with high resolving power to keep them even if the evaporative component of an object to be heated is evaporated and capable of measuring a change in physical properties at every heating temperature without causing the heat history of the sample. SOLUTION: The scanning probe microscope is equipped with a cantilever having a probe provided to its leading end, a heating means for heating the sample, a sample moving means for moving the sample and a shield means for shielding the cantilever and the sample. The shield means is interposed between the cantilever and the sample in heating the sample and not interposed between the cantilever and the sample at the time of measurement of the sample. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够以高分辨能力测量样品的表面形状和样品的物理特性的扫描探针显微镜，以便即使被加热物体的蒸发组分蒸发也能保持它们并且能够在每个加热温度下测量物理性能的变化，而不会引起样品的热历史。解决方案：扫描探针显微镜配备有悬臂，其具有设置在其前端的探针，用于加热样品的加热装置，用于移动样品的样品移动装置和用于屏蔽悬臂和样品的屏蔽装置。在测量样品时，屏蔽装置在加热样品之间插入在悬臂和样品之间，并且不夹在悬臂和样品之间。版权所有（C）2005，JPO＆NCIPI

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