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51. 发明专利

JPH10123154A PROBE FOR SCANNING TYPE PROBE MICROSCOPE AND ITS MANUFACTURING METHOD 失效
公开(公告)号：JPH10123154A
公开(公告)日：1998-05-15
申请号：JP27628196
申请日：1996-10-18
申请人： KAGAKU GIJUTSU SHINKO JIGYODAN , NIKON CORP
发明人： SUGIMURA HIROYUKI , NAKAGIRI NOBUYUKI
IPC分类号： G01N37/00 , G01Q60/38 , G01Q70/16
摘要： PROBLEM TO BE SOLVED: To mount a probe to a predetermined position at the tip of a cantilever with improved accuracy and reproducibility by forming a positioning mark for mounting the probe. SOLUTION: A recessed part 13 where an opening is circular and the inside is in curved surface is provided, as a positioning mark, at a predetermined position of the tip of a cantilever 72 that is supported by a support 12 in cantilever type. The recessed part 13 is provided at a position being away from a tip on the center line of the cantilever 72 by a predetermined distance L. The distance L is predetermined so that the tip of the cantilever 72 does not contact the surface of a sample by considering an angle formed by the cantilever 72 and the sample surface. While the recessed part 13 is being observed by a microscope, an adhesive is applied to the inside of the recessed part 13, for example, by a manipulator, and a fine particle is adhered, for example, by the manipulator as a probe. Since the recessed part 13 is formed, the probe can be mounted with improved accuracy and reproducibility.

52. 发明专利

JPH09251947A FINELY MACHINING APPARATUS 失效
公开(公告)号：JPH09251947A
公开(公告)日：1997-09-22
申请号：JP6068396
申请日：1996-03-18
申请人： NIKON CORP
发明人： SUGIMURA HIROYUKI , NAKANO KATSUSHI , NAKAGIRI NOBUYUKI
IPC分类号： C23C14/04 , G01Q60/24 , G01Q70/10 , G01Q80/00 , H01L21/027 , H01L21/316
摘要： PROBLEM TO BE SOLVED: To efficiently form a circuit pattern contg. different-width lines on the surface of a substrate, without damaging the surface thereof. SOLUTION: The main body of this finely machining apparatus which is an optical lever type AFM has a micro lever 10 having two different-diameter probes 11a, 11b covered with a conductor connected to leads 12a, 12b of electrodes. After positioning one probe to a region of a resist film C to be oxidized on the surface of a substrate, a voltage is applied between its top end and film C to oxidize adequate area of the region of the film C near the top end of the probe by the energy of a current flowing between both. With keeping this probe apart from the film C, it is moved, relative to the film, to oxidize a region of adequate width along a route determined according to a designed pattern.

53. 发明专利

JPH0972926A CANTILEVER, PRODUCTION THEREOF AND SCANNING TYPE PROBE MICROSCOPE USING CANTILEVER 失效
公开(公告)号：JPH0972926A
公开(公告)日：1997-03-18
申请号：JP22825395
申请日：1995-09-05
申请人： NIKON CORP
发明人： YAMAMOTO TAKUMA , NAKAGIRI NOBUYUKI , SUGIMURA HIROYUKI , SUZUKI YOSHIHIKO
IPC分类号： G01B21/30 , G01N37/00 , G01Q60/00 , G01Q60/10 , G01Q60/16 , G01Q60/24 , G01Q60/40 , G01Q60/60 , G01Q70/08 , G01Q70/16 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To independently obtain the data of the chemical properties and shape of the surface of an article to be inspected with high resolution. SOLUTION: A membrane like beam part 1, a support 2 and a probe 3 are provided and the membrane like beam part 1 is constituted of an inorg. material membrane 6 having insulating properties such as a silicon nitride membrane or a silicon oxide membrane and the support 2 is constituted of the inorg. material membrane 6, a silicon substrate 7 and an inorg. material membrane 8 having insulating properties such as a silicon nitride membrane or a silicon oxide membrane. The probe 3 is constituted of a projection 4 having conductivity and the silicon oxide membrane 5 covering the periphery of the projection 4 excepting the leading end part thereof. Further, the upper surfaces of the membrane like beam part 1 and the support 2 are wholly covered with an inorg. material membrane 11 excepting the electrode patterns electrically connected to the projection 4 through wiring patterns 9 and the lower surfaces of them are sholly covered with the insulating inorg. material membranes 6, 8 and the silicon oxide membrane 5.

54. 发明专利

JPH0972925A SCANNING TYPE MICROSCOPE 失效
公开(公告)号：JPH0972925A
公开(公告)日：1997-03-18
申请号：JP22825295
申请日：1995-09-05
申请人： NIKON CORP
发明人： YAMAMOTO TAKUMA , SUGIMURA HIROYUKI , NAKAGIRI NOBUYUKI
IPC分类号： G01B21/30 , G01N37/00 , G01Q30/04 , G01Q60/28 , G01Q90/00 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To simultaneously measure the adsorbing force, shape and hardness of the surface of a sample to display the two-dimensional distribution thereof. SOLUTION: A scanning type microscope has a cantilever 1 having a probe 1a provided to the leading end thereof, a lever holder 2, a sample holder 4 placing a sample 3, a piezoelectric element 5 moving the sample 3 up and down to bring the probe 1a and the sample 3 into a contact state and a separated state, an XY scanning mechanism 6, a piezoelectric element drive control device 7, an XY scanning mechanism control device 8, a semiconductor laser 9, an optical displacement detection means 10, a computer 11 and a display device 12. The computer 11 calculates the shape, adsorbing force and hardness of the surface of the sample obtained at respective measuring points set on the surface of the sample 3 to calculate the two-dimensional distribution thereof on the basis of these data.

55. 发明专利

JPH0954992A MEMORY READING OUT METHOD AND DEVICE BY ELECTROSTATIC CAPACITANCE 失效
公开(公告)号：JPH0954992A
公开(公告)日：1997-02-25
申请号：JP20256995
申请日：1995-08-08
申请人： NIKON CORP
发明人： NAKAGIRI NOBUYUKI , SUGIMURA HIROYUKI , YAMAMOTO TAKUMA
IPC分类号： G01R27/26 , G01Q80/00 , G11B9/06 , G11B9/14
摘要： PROBLEM TO BE SOLVED: To improve the surface density of data by actively controlling the contact pressure of a disk surface and a contact stylus. SOLUTION: The contact stylus 1 having a sharp tip is brought into contact with the surface of the disk 3 on which the data is previously recorded in a manner as to locally change an electrostatic capacitance and the displacement of this contact stylus 1 is measure. The contact pressure between the contact stylus 1 and the disk 3 surface is controlled from the displacement. The voltage is impressed between the contact stylus 1 and the disk 3, the position between the contact stylus 1 and the disk 3 is relatively changed and the electrostatic capacitance between the contact stylus 1 and the disk 3 is measured, by which the data recorded on the disk 3 is read.

56. 发明专利

JPH0954098A SCANNING PROBE MICROSCOPE 失效
公开(公告)号：JPH0954098A
公开(公告)日：1997-02-25
申请号：JP22854195
申请日：1995-08-14
申请人： NIKON CORP
发明人： OKIGUCHI KEIKO , ISHIKAWA MIYUKI , SUGIMURA HIROYUKI , NAKAGIRI NOBUYUKI
IPC分类号： G01N37/00 , G01Q30/10 , G01Q30/14 , G01Q60/24 , G01Q90/00 , G02B21/00
摘要： PROBLEM TO BE SOLVED: To enable a sample to be observed in liquid using a submerged cell that is open on its upper side and to prevent the accuracy of detecting deflection of a cantilever equipped with a probe from decreasing even if a deflection detecting optical system is used in detecting it. SOLUTION: A submerged cell 32 is made from a transparent material. A sample holder 34 is placed so that a sample 33 is immersed in a liquid 31 while the surface to be observed of the sample 33 faces down. A cantilever 35 has a probe 35a and is placed so that the probe 35a faces upward to be opposed to the surface to be observed of the sample 33. A light source 38 and a photodetector 39 are placed on the side of the submerged cell 32 to constitute a deflection detecting optical system for detecting deflection of the cantilever 35. Illuminating light applied to the cantilever 35 from the light source 38 and the light reflected from the cantilever 35 are not allowed to pass through the surface 31a of the liquid.

57. 发明专利

JPH0921829A PROBE FOR MEASURING CAPACITY, CAPACITY MEASURING DEVICE USING THE SAME AND SCANNING CAPACITY MICROSCOPE 失效
公开(公告)号：JPH0921829A
公开(公告)日：1997-01-21
申请号：JP19421395
申请日：1995-07-06
申请人： NIKON CORP
发明人： NAKAGIRI NOBUYUKI , SUGIMURA HIROYUKI , YAMAMOTO TAKUMA
IPC分类号： G01R1/06 , G01N37/00 , G01Q60/00 , G01Q60/48 , G01R27/26
摘要： PROBLEM TO BE SOLVED: To evaluate an insulating film by making it feasible to measure capacity through an insulating film on metal. SOLUTION: In a scanning 4 capacity microscope, an article in which a dielectric layer 41 is coated on a conductive needle-like member 39 is used for a probe 7. The probe is brought into contact with an insulating film 43 formed on a conductor base material 1 by a predetermined contact pressure, and at least an a.c. bias voltage is applied between the conductive needle-like member of the probe and an insulating base material. A dielectric constant of a ferrodielectric substance layer 41 is changed in proportion to the bias voltage and accordingly, a capacity between the conductive needle-like member of the probe 7 and the conductor base material is modulated in the state of sandwiching the ferrodielectric substance layer 41 and the insulating film 43 of a sample. Therefore, a capacity associated with the insulating film 43 can be measured.

58. 发明专利

JPH08328264A RESIST FOR FINE PROCESSING, FINE PROCESSING METHOD AND FINE PROCESSING DEVICE 失效
公开(公告)号：JPH08328264A
公开(公告)日：1996-12-13
申请号：JP13366095
申请日：1995-05-31
申请人： NIKON CORP
发明人： SUGIMURA HIROYUKI , YAMAMOTO TAKUMA , NAKAGIRI NOBUYUKI
IPC分类号： G03F7/075 , G03F7/26 , G03F7/36 , H01L21/027
摘要： PURPOSE: To obtain a new resist for fine processing with which the free transfer of arbitrary fine patterns is possible by providing the resist with an org. silicon compd. layer and an oxide layer formed on the more inside than this layer. CONSTITUTION: The org. silicon compd. layer 1a formed on the oxide layer 1b is arranging as the outermost layer of multilayered resist layers 1 consisting of >=2 layers on the conductive substrate 3 to be processed. A microelectrode 4 having a sharp pointed tip is then brought near to the surface of the outermost layer in an environment where steam or oxygen-contg. molecules, such as oxygen molecules exits. A voltage is impressed between this microelectrode 4 and the substrate 3 and current flows between both, thereby, oxide reaction is induced on the surface of the multilayered resists 2 and the org. silicon compd. layer 1 is chemically decomposed. At this time, the microelectrode 4 is moved so as to trace the surface of the resist film 2 while the distance between the microelectrode 4 and the substrate 3 is controlled by a piezeoelectiric element 5 in order to stabilize processing resolution to form the patterns on the multilayered resists 2.

59. 发明专利

JPH0823476A IMAGE PICKUP DEVICE 失效
公开(公告)号：JPH0823476A
公开(公告)日：1996-01-23
申请号：JP15847294
申请日：1994-07-11
申请人： NIKON CORP
发明人： NAKAGIRI NOBUYUKI , YAMAMOTO TAKUMA , SUGIMURA HIROYUKI
IPC分类号： H04N5/32
摘要： PURPOSE:To provide a small image pickup device with high resolution by detecting the change of an electric characteristic in a photo-conductor film, which occurs by the irradiation of an electromagnetic wave, based on AC current by AC voltage impressed on a space between a probe which touches an image pickup plate consisting of the photoconductor film and the electrode of a high transmission factor, and the electrode. CONSTITUTION:A sample 104 is irradiated with X-rays radiated from an X-ray source 101 through a zone plate 102 and a pin hole 103. The X-rays transmitted through the sample 104 are image-picked on the image pickup plate 106 consisting of the photocondcutor film and the electrode of the high transmission factor through a zone plate 105. The probe is brought into contact with the image pickup plate 106 by the energizing force of a laser beam from a laser light source 112, which is made incident on a cantilever 108. AC voltage from a voltage impressing device 131 is impressed on the space between the electrode of the image pickup plate 106 and the probe 107 through the cantilever 108, and flowing AC current is measured in a current measuring device 132. The intensity of the X-rays which are made incident on the image pickup plate 106 is obtained.

60. 发明专利

JPH07181300A IMAGE PICKUP DEVICE 失效
公开(公告)号：JPH07181300A
公开(公告)日：1995-07-21
申请号：JP34537393
申请日：1993-12-21
申请人： NIKON CORP
发明人： YAMAMOTO TAKUMA , NAKAGIRI NOBUYUKI , SUZUKI YOSHIHIKO
IPC分类号： G21K7/00
摘要： PURPOSE:To provide an image pickup device which can obtain image informa tion of high resolution which can be realized by X rays in the real time. CONSTITUTION:This device comprises an image pickup board 1 where photodetectors, each of which includes a photoconductor layer 1b and an electrode layer 1c, are separately arranged on a conductor film 1a; a probe 3 which can be arranged oppose to the photodetectors on the image pickup board 1 and which is used to detect electric information on it; a scanning means 8 to move the probe 3 and the image pickup board 1 relatively and an output means 11 to output the electric information detected by the probe 3 according to the scanning by the scanning means 8.

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